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CMP系统技术与市场 总被引:3,自引:1,他引:2
葛劢冲 《电子工业专用设备》2003,32(1):17-24
概述了CMP系统技术的发展历史、发展趋势以及在IC生产中的重要性,介绍了国外CMP设备主要制造厂家的设备型号和性能及CMP设备市场分布和需求,阐述了CMP系统技术的基础研究、关键技术和国内研究概况。 相似文献
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Out-of-plane microlenses and microoptical fiber holder are two of the most important components for building an integrated
microoptic system with a precise alignment accuracy. In this paper, a simple and convenient method to fabricate these components
from SU-8 by using inclined UV lithography in water is proposed. It consists of two perpendicular exposures in SU-8 at ±45°.
DI water possesses a low absorption coefficient and a moderate and stable value of refractive index in near UV. Using water,
the exposure angle in SU-8 can be increased to 50° from 35° in air necessary to pattern the desired 45° slope of the sidewalls.
The principle of the proposed technique and the detailed fabrication process of the microoptic components will be presented.
The integratability of the fabricated components was demonstrated by the fabrication of the microoptical fiber holder with
a pre-aligned out-of-plane microlens. 相似文献
5.
The formation of aluminum matrix composites fabricated by exothermic dispersion reaction in A1-TiO2-B2O3 system was investigated. The thermal analysis results show that the reactions are spontaneous and exothermic. The Gibbs free energy of α-Al2O3 is the lowest among all the combustion products, followed by TiB2 and Al3Ti. It is noted that when the B2O3/TiO2 mole ratio is below 1, the reaction products are composed of particle-like α-Al2O3, TiB2 and rod-like Al3Ti. The α-Al2O3 crystallites, resulting from the reaction between A1 and TiO2 or B2O3, are segregated at the grain boundaries due to a lower wettability with the matrix. SEM micrographs show that rod-like Al3Ti phase distributes uniformly in the matrix. When the BEO3/TiO2 mole ratio is around 1, the Al3Ti phase almost disappears in the composites, and the distribution of α-Al2O3 particulates is improved evidently. 相似文献
6.
Local residence time,residence revolution,and residence volume distributions in twin‐screw extruders
Xian‐Ming Zhang Lian‐Fang Feng Sandrine Hoppe Guo‐Hua Hu 《Polymer Engineering and Science》2008,48(1):19-28
This work was aimed at studying the overall, partial, and local residence time distributions (RTD); overall, partial and local residence revolution distributions (RRD) and overall, partial and local residence volume distributions (RVD) in a co‐rotating twin screw extruder, on the one hand; and establishing the relationships among them, on the other hand. Emphasis was placed on the effects of the type and geometry of mixing elements (a gear block and various types of kneading elements differing in staggering angle) and process parameters on the RTD, RRD and RVD. The overall and partial RTD were directly measured in‐line during the extrusion process and the local ones were calculated by deconvolution based on a statistical theory. The local RTD allowed comparing the mixing performance of mixing elements. Also it was confirmed both experimentally and theoretically that specific throughput, defined as a ratio of throughput (Q) over screw speed (N), controlled all the above three types of residence distributions, be they local, partial or overall. The RRD and RVD do not provide more information on an extrusion process than the corresponding RTD. Rather they are different ways of representing the same phenomena. POLYM. ENG. SCI., 48:19–28, 2008. © 2007 Society of Plastics Engineers 相似文献
7.
Calculations and detailed first principle and thermodynamic analyses have been performed to understand the formation mechanism of K2Ti6O13 nanowires (NWs) by a hydrothermal reaction between bulk Na2Ti3O7 crystals and a KOH solution. It is found that direct ion exchange between K+ and Na+ plus H+ interactions with [TiO6] octahedra in Na2Ti3O7 promote the formation of an intermediate H2K2Ti6O14 phase. The large lattice mismatch between this intermediate phase and the bulk Na2Ti3O7 structure, and the large energy reduction associated with the formation of this intermediate phase, drive the splitting of the bulk crystal into H2K2Ti6O14 NWs. However, these NWs are not stable because of large [TiO6] octahedra distortion and are subject to a dehydration process, which results in uniform K2Ti6O13 NWs with narrowly distributed diameters of around 10 nm. 相似文献
8.
4月广州,春暖花开。先后召开的广州国际玩具及礼品展和广州春交会,让花城沸腾了。在这盛会上,一位年仅29岁的浙江商人和他的300多款精美的木制玩具格外引人注目,订单接踵而至。 相似文献
9.
Armlets and balanced multiwavelets: flipping filter construction 总被引:3,自引:0,他引:3
Jian-ao Lian 《Signal Processing, IEEE Transactions on》2005,53(5):1754-1767
In the scalar-valued setting, it is well-known that the two-scale sequences {q/sub k/} of Daubechies orthogonal wavelets can be given explicitly by the two-scale sequences {p/sub k/} of their corresponding orthogonal scaling functions, such as q/sub k/=(-1)/sup k/p/sub 1-k/. However, due to the noncommutativity of matrix multiplication, there is little such development in the multiwavelet literature to express the two-scale matrix sequence {Q/sub k/} of an orthogonal multiwavelet in terms of the two-scale matrix sequence {P/sub k/} of its corresponding scaling function vector. This paper, in part, is devoted to this study for the setting of orthogonal multiwavelets of dimension r=2. In particular, the two lowpass filters are flipping filters, whereas the two highpass filters are linear phase. These results will be applied to constructing both a family of the most recently introduced notion of armlet of order n and a family of n-balanced orthogonal multiwavelets. 相似文献
10.
本文对八种新型功能晶体Li2B4O7、Bi12TiO20、Bi12GeO20、Bi12GeO20、Bi4Ge3O12、Sr1-xBaxNb2O6(x=0.33,0.48)、LiTaO3等在130~973K范围内的比热行为及其与相变、组分之间的关系进行了实验研究,给出了比热的多项式拟合方程,并与用纽曼-卡普定律及用Wikelmann经验方程的比热计算值作了对比,为晶体比热的估算提供了依据和方法。 相似文献