Defocusing image to pattern contact holes using attenuated phase shift masks

The patterning of contact holes by selecting out-of-focus image plane (defocus) using attenuated phase shift masks (APSM) has been studied. Defocus is found to enhance the image modulation at low partial coherence for contact holes with negative local average of mask function. Semi-dense holes up to 130 nm in 8% APSM have been printed by 0.5 μm defocus at a partial coherence of 0.31 using KrF scanner with highest numerical aperture of 0.68. However, these holes were closed with in-focus imaging. Defocus is also found to be beneficial for patterning the pitches that have extensive side lobes with in-focus imaging.     

提高自蔓延陶瓷内衬钢管耐蚀性研究的进展

广泛应用于石油，化工，能源等领域的钢管，除了要有高强度外，还要有良好的耐蚀性。自蔓延高温合成技术是制备耐蚀钢管的新技术，具有工艺简单，成本低和产品耐蚀性能好等特点。介绍了自蔓延高温合成陶瓷内衬钢管的原理和提高陶瓷内衬钢管耐蚀性的措施，展望了耐蚀陶瓷内衬钢管在工业生产上的应用前景。     

Frequency domain identification of Wiener models

This paper proposes a frequency domain algorithm for Wiener model identifications based on exploring the fundamental frequency and harmonics generated by the unknown nonlinearity. The convergence of the algorithm is established in the presence of white noise. No a priori knowledge of the structure of the nonlinearity is required and the linear part can be nonparametric.     

片状陶瓷材料高低温电性能参数的自动检测

由进口电性能仪配上自制的高温系统，计算机自动采集数据，配置成一套高低温电性参数测定装置，该装置的特点是，升温快，炉体小巧，炉芯可更换盛液氮装置，屏蔽良好，等温区长，温工及参数测量精确可靠。     

Complete mobile email management

Years have lapsed since the inauguration of the first Wireless Application Protocol (WAP) application. One of the main reasons for the lukewarm response so far may be attributed to the lack of a “Killer” application. Many companies and developers have attempted to replicate email services (an Internet Killer appplication) within the WAP realm, but till now, no significant success has been reported. This paper will first discuss on the key functions which are lacking in the present WAP-email service, and which are arguably necessary if a much larger user base is to be attracted to these services. A new system will be proposed which can enable the user to send files residing in a remote personal computer (PC) as attachments to his emails using WAP-enabled mobile devices. The implementation of the system will be presented in details. Issue relating to the connection to various types of email servers and the security of the system will also be addressed in the paper.     

Interaction bounds in multivariable control systems

Time-domain limitations due to right half-plane zeros and poles in linear multivariable control systems are studied. Lower bounds on the interaction are derived. They show not only how the location of zeros and poles are critical in multivariable systems, but also how the zero and pole directions influence the performance. The results are illustrated on the quadruple-tank process, which is a new multivariable laboratory process.