Defocusing image to pattern contact holes using attenuated phase shift masks

The patterning of contact holes by selecting out-of-focus image plane (defocus) using attenuated phase shift masks (APSM) has been studied. Defocus is found to enhance the image modulation at low partial coherence for contact holes with negative local average of mask function. Semi-dense holes up to 130 nm in 8% APSM have been printed by 0.5 μm defocus at a partial coherence of 0.31 using KrF scanner with highest numerical aperture of 0.68. However, these holes were closed with in-focus imaging. Defocus is also found to be beneficial for patterning the pitches that have extensive side lobes with in-focus imaging.     

Metal-insulator-semiconductor solar cell under gamma irradiation

The performance of a home made MIS–p-Si solar cell was experimentally studied under various gamma irradiation doses (up to 500 Mrad). The effect of radiation dose on the I−V and C−V characteristics was investigated in this work. The obtained results showed that all the output parameters of the cells under investigation were degraded with gamma radiation exposure. In addition, the effects of fabrication conditions (metal thickness and adding of antireflection coating) on the cell output parameters were also investigated.     

PHYSICS-BASED SIMULATION OF HIGH SPEED MACHINING

Computer simulation of high speed machining processes can provide a unique insight and reduce the number of design iterations required to advance and optimize the process. Predictive modeling of high speed machining of exotic materials has been hindered by the nonlinear behavior of this type of materials at extremely high strain, strain rate, and temperatures. This paper presents a physics-based modeling technology that includes the change in the material constitutive equation and the friction characterization at cutting speeds up to 400 m min^-1. The dependence of the accuracy of the predicted parameters, such as the chip formation on cutting forces, chip/tool/workpiece interface temperature, stress and strain distributions are also discussed. The fundamentals of metal cutting were utilized to understand the effect of parameter changes in regimes that are outside current empirical knowledge databases.     

Kinetic of CO2 absorption and carbamate formation in aqueous solutions of diethanolamine

The absorption rates of CO₂ into aqueous solutions of Diethanolamine (DEA) with varying concentrations from 0.2 to 4M and temperature range from 293 to 323 K were measured by using a laboratory stirred reactor. The CO₂ partial pressure was varied in a range that the reaction would occur in pseudo first order regime. Experimental data were analyzed and the kinetic parameters associated with the reaction were determined. The activation energy for the deprotonation of the intermediate zwitterion was estimated at about 11.4 kcal/mol. The contribution of carbamate formation to the overall absorbed CO₂ was experimentally evaluated and found to be of the order of 100%.     

Frequency domain identification of Wiener models

This paper proposes a frequency domain algorithm for Wiener model identifications based on exploring the fundamental frequency and harmonics generated by the unknown nonlinearity. The convergence of the algorithm is established in the presence of white noise. No a priori knowledge of the structure of the nonlinearity is required and the linear part can be nonparametric.