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Navab SinghAuthor Vitae Moitreyee Mukherjee-RoyAuthor VitaeSohan Singh MehtaAuthor Vitae 《Microelectronics Journal》2003,34(4):237-245
The patterning of contact holes by selecting out-of-focus image plane (defocus) using attenuated phase shift masks (APSM) has been studied. Defocus is found to enhance the image modulation at low partial coherence for contact holes with negative local average of mask function. Semi-dense holes up to 130 nm in 8% APSM have been printed by 0.5 μm defocus at a partial coherence of 0.31 using KrF scanner with highest numerical aperture of 0.68. However, these holes were closed with in-focus imaging. Defocus is also found to be beneficial for patterning the pitches that have extensive side lobes with in-focus imaging. 相似文献
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A new process for solid phase crystallization (SPC) of amorphous silicon (a-Si) using thin film heater is reported. With this localized Ti silicide thin film heater, we successfully crystallized 500 Å-thick a-Si in a few minutes without any thermal deformation of glass substrate. The size of crystallized silicon grain was abnormally big (30-40 μm). Polycrystalline thin film transistors (TFT) fabricated using this unique thin film heater showed better mobility than those of conventional ones by furnace annealing. 相似文献
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The transmission mode of holographic polymer‐dispersed liquid crystals (HPDLCs) was developed an under electric field. It is reported that orientation of LC molecules under an electric field induces orientation of oligomer molecules giving rise to low off‐state diffraction and small grating shrinkage. Copyright © 2005 Society of Chemical Industry 相似文献
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Design and practical implementation of multifrequency RF front ends using direct RF sampling 总被引:1,自引:0,他引:1
Psiaki M.L. Powell S.P. Hee Jung Kintner P.M. 《Microwave Theory and Techniques》2005,53(10):3082-3089
The use of direct RF sampling has been explored as a means of designing multifrequency RF front ends. Such front ends will be useful to multifrequency RF applications such as global navigation satellite system receivers that use global positioning system (GPS) L1, L2, and L5 signals and Galileo signals. The design of a practical multifrequency direct RF sampling front end is dependent on having an analog-to-digital converter whose input bandwidth accommodates the highest carrier frequency and whose maximum sampling frequency is more than twice the cumulative bandwidth about the multiple carrier signals. The principle of direct RF sampling is used to alias all frequency bands of interest onto portions of the Nyquist bandwidth that do not overlap. This paper presents a new algorithm that finds the minimum sampling frequency that avoids overlap. This design approach requires a multifrequency bandpass filter for the frequency bands of interest. A prototype front end has been designed, built, and tested. It receives a GPS coarse/acquisition code at the L1 frequency and GPS antispoofing precision code at both L1 and L2. Dual-frequency signals with received carrier-to-noise ratios in excess of 52 dB-Hz have been acquired and tracked using this system. 相似文献
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Injun Lee Taeseong Jung Junggi Kim Suho Ro Chulsu Kim Yeji Lee Youngmi Kim Juhyun Lee Misook Kang 《Journal of Industrial and Engineering Chemistry》2008,14(6):869-873
This study focuses on the relationship between photo-catalytic performance and optical property over Si-incorporated TiO2. The Si-incorporated TiO2 particles exhibited a pure structure of anatase having a particle size of less than 20 nm and surface area of more than 190 m2/g. The absorbance did not shift to a higher wavelength in spite of the incorporation of the Si ions, but the intensity of the photoluminescence (PL) curve was the smallest in the case of the 2.0 mol% Si-TiO2, which was related to the recombination between the excited electrons and holes. Based on these results, the photodecomposition of methyl orange in the liquid reaction was enhanced over the 2.0 mol% Si-incorporated TiO2 compared with that over pure TiO2: Methyl orange at 10.0 ppm was completely decomposed after 100 min when 1.0 g of the 2.0 mol% Si-incorporated TiO2 was used. 相似文献
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Youngjean Jung Panayiotis Papadopoulos R. O. Ritchie 《International journal for numerical methods in engineering》2004,60(2):429-460
This work concerns the micromechanical constitutive modelling, algorithmic implementation and numerical simulation of polycrystalline superelastic alloys under multiaxial loading. The model is formulated in finite deformations and incorporates the effect of texture. The numerical implementation is based on the constrained minimization of the Helmholtz free energy with dissipation. Simulations are conducted for thin tubes of Nitinol under tension–torsion, as well as for a simplified model of a biomedical stent. Copyright © 2004 John Wiley & Sons, Ltd. 相似文献