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ECR微波等离子体特性的实验研究 总被引:2,自引:0,他引:2
着重介绍采用一段真空波导耦合的ECR微波等离子体装置,以及在CH4-H2沸合气体放电情况下,诊断了内部等离子体参数,给出了等离子体密度,电子温度,基板鞘附近的空间电位以及在类金刚石膜合成条件下等离子体中的基团情况,同时研究了它们与工艺参数之间的关系。 相似文献
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着重介绍采用一段真空波导耦合的ECR微波等离子体装置,以及在CH4-H2混合气体放电情况下,诊断了内部等离子体参数,给出了等离子体密度、电子温度、基板鞘附近的空间电位以及在类金刚石膜合成条件下等离子体中的基团情况,同时研究了它们与工艺参数之间的关系。 相似文献
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Particle-in-cell(PIC)simulation method has been proved to be a good candidate to study the interactions between plasmas and radio-frequency waves.However,for waves in the lower hybrid range of frequencies,a full PIC simulation is not efficient due to its high computational cost.In this work,a gyro-kinetic electron and fully-kinetic ion(GeFi)particle simulation model is applied to study the propagations and mode conversion processes of lower hybrid waves(LHWs)in plasmas.With this method,the computational efficiency of LHW simulations is greatly increased by using a larger grid size and time step.The simulation results in the linear regime are validated by comparison with the linear theory. 相似文献
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