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As die size and complexity increase, accurate and efficient extraction of the critical area is essential for yield prediction. Aiming at eliminating the potential integration errors of the traditional shape shifting method, an improved shape shifting method is proposed for Manhattan layouts. By mathematical analyses of the relevance of critical areas to defect sizes, the critical area for all defect sizes is modeled as a piecewise quadratic polynomial function of defect size, which can be obtained by extracting critical area for some certain defect sizes. Because the improved method calculates critical areas for all defect sizes instead of several discrete values with traditional shape shifting method, it eliminates the integration error of the average critical area. Experiments on industrial layouts show that the improved shape shifting method can improve the accuracy of the average critical area calculation by 24.3% or reduce about 59.7% computational expense compared with the traditional method. 相似文献
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广蓄电站水工高压隧洞设计施工的若干问题 总被引:13,自引:1,他引:12
本文根据广州抽水蓄能电站建成的高水头、大直径水工隧洞的工程实践,回顾总结设计施工的几个问题,如设计准则、衬砌〈限裂〉设计、外水压力、钢筋混凝土衬砌岔管、斜井衬砌滑模施工、衬砌分缝和止水、引水系统充水和放空操作等。 相似文献
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针对纳米级半导体制造工艺中传统测试芯片掩模面积利用率低的问题,提出一种基于模块化单元的可扩展成品率测试结构阵列设计方法.基于45nm CMOS制造工艺分别实现32×32和64×64 2个大规模的测试结构阵列,模块化单元的有效面积利用率达79.31%和70.8%;流片后通过测试数据的分析能够发现通孔缺失、通孔尺寸变大以及大尺寸缺陷导致金属缺失等工艺缺陷问题.试验结果同时表明,该方法将传输门器件和测试结构组合成模块化单元;不仅能够实现对测试结构的四端测量,保证测试结果的正确性,并且能够减小成品率测试芯片的掩模面积. 相似文献
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文章将以某城市造纸厂作为研究对象,进行造纸废水好氧除钙技术的数学模拟,利用活性污泥法完成高钙废水的脱钙处理,并进一步分析曝气时间、沉淀时间、酸碱值、氢氧化钠对试验结果产生的影响。试验结果发现,当沉淀时间为1 h,曝气时间为3 h,pH值为9、氢氧化钠添加量为400 mg/L时,可以达到最佳的除钙效果。 相似文献
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