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排序方式: 共有2393条查询结果,搜索用时 15 毫秒
1.
分别利用Ga2O3粉末和Ga2O3凝胶作为Ga源,采用NH3为N源,在950℃下,分别将两种反应物与流动的NH3反应20 min合成了GaN微晶。用X射线衍射(XRD)、扫描电子显微镜(SEM)、选择区电子衍射(SAED)对微晶进行结构、形貌的分析,特别是对两种不同途径合成GaN微晶的XRD进行了分析比较。结果表明,当Ga源温度为950℃时两种不同的合成途径均可得到六方纤锌矿结构的GaN单晶颗粒,在氮化温度为850℃和900℃时,利用Ga2O3粉末作为Ga源,仅有少量的Ga2O3转变为GaN;而采用Ga2O3凝胶作为Ga源,在相同的温度下,大部分凝胶经过高温氨化反应均可转化为GaN。 相似文献
2.
A thermodynamic modeling of GaN was carried out to describe the thermodynamic behavior of native defects, dopants, and carriers
(free electrons and holes) in GaN semiconductors. The compound energy model (CEM) was used. An unintentionally doped GaN was
taken as an example. Oxygen was introduced into the model as the unintentionally doped impurity, according to the practical
experimental phenomena. The energies of component compounds in the model were defined based on the results of the ab initio
calculations and adjusted to fit experimental data. The thermodynamic properties of the defects and the oxygen doped were
calculated to show the facility of the model. 相似文献
3.
Takuma Suzuki Hang-Ju Ko Agus Setiawan Jung-Jin Kim Koh Saitoh Masami Terauchi Takafumi Yao 《Materials Science in Semiconductor Processing》2003,6(5-6):519-521
We report the successful growth of Ga-polar GaN epilayers on O-polar ZnO templates pre-deposited on c-sapphire. Prior to GaN growth, NH3 is exposed onto the ZnO template. The polarity of the GaN layers is confirmed by etching of the surface and by conversion beam electron diffraction (CBED), while the O-polar ZnO is confirmed by CBED. It is suggested that the NH3 pre-exposure helps form a Zn3N2 layer, which possesses inversion symmetry and inverts the crystal from anion polar to cation polar. 相似文献
4.
立方相GaN的持续光电导 总被引:1,自引:1,他引:0
研究了金属有机物化学气相外延 (MOVPE)方法生长的非故意掺杂的立方相 Ga N的持续光电导效应 .在六方相 Ga N中普遍认为持续光电导效应与黄光发射有关 ,而实验则显示在立方 Ga N中 ,持续光电导效应与其中的六方相 Ga N夹杂有关系 ,而与黄光发射没有关系 .文中提出 ,立方相 Ga N与其中的六方相 Ga N夹杂之间的势垒引起的空间载流子分离是导致持续光电导现象的物理原因 .通过建立势垒限制复合模型 ,解释了立方相 Ga N的持续光电导现象的物理过程 ,并对光电导衰减过程的动力学作了分析 .对实验数据拟合的结果证明以上的模型和推导是与实验相符的 . 相似文献
5.
GaN材料系列的研究进展 总被引:3,自引:0,他引:3
GaN及其合金作为第三代半导体材料具有一系列优异的物理和化学性质,在光电子器件,高温大功率电子器件及高频微波器件应用方面具有广阔的前景,已成为当前高科技领域的研究重点,论述了这种材料的研究历史与发展现状,物理与化学性质,薄膜的生长方法及在光学电子和微电子器件应用于方面的研究进展。 相似文献
6.
GaN的MOVPE生长和m-i-n型蓝光LED的试制 总被引:1,自引:0,他引:1
利用自行研制的常压MOVPE设备和全部国产MO源,采用低温生长缓冲层技术,在蓝宝石(α-Al2O3)衬底上获得了高质量的GaN外延层。未掺杂的GaN外延层的室温电子迁移率已达114cm2/V.s,载流于浓度为2×1018。77K光致发光谱近带边发射峰波长为365nm,其线宽为4DmeV。X射线双晶衍射回摆曲线的线宽为360arcsec。用Zn掺杂生长了绝缘的i-GaN层。在此基础上研制了m-i-n型GaN的LED,并在室温正向偏压下发出波长为455nm的蓝光。 相似文献
7.
Nucleation kinetics during the growth of InxGa1−xN on a GaN substrate have been studied. The behavior of nonequilibrium between the InxGa1−xN and the GaN substrate has been analyzed, and hence, the expression derived for the stress-induced supercooling/superheating
has been numerically evaluated. The maximum amount of stress-induced supercooling is found to be 1.017 K at x=0.12. These
values are incorporated in the classical heterogeneous nucleation theory. Using the regular solution model, the interfacial
tension between the nucleus and substrate and, hence, the interfacial tension between nucleus and mother phase and thermodynamical
potential of the compounds have been calculated. The amount of driving force available for the nucleation has been determined
for different compositions and degrees of supercooling. It has been shown that the value of the interaction parameter of InN-GaN
plays a dominant role in nucleation and growth kinetics of InxGa1−xN on a GaN substrate. These values have been used to evaluate the nucleation parameters. It is shown that the nucleation barrier
for the formation of a InxGa1−xN nucleus on a GaN substrate is minimum in the range of x=0.12 to x=0.17, and it has been qualitatively proved that good quality
InxGa1−xN on GaN can be grown only in the range 0<x≤0.2. 相似文献
8.
Yu-Zung Chiou Yan-Kuin Su Shoou-Jinn Chang Yi-Chao Lin Chia-Sheng Chang Chin-Hsiang Chen 《Solid-state electronics》2002,46(12):2227-2229
InGaN/GaN multiquantum well (MQW) p–n junction photodetectors with semi-transparent Ni/Au electrodes were fabricated and characterized. It was found that the fabricated InGaN/GaN MQW p–n junction photodetectors exhibit a 20 V breakdown voltage and a 3.5 V forward 20 mA turn on voltage. It was also found that the photocurrent to dark current contrast ratio is higher than 105 when a 0.4 V reverse bias was applied to the InGaN/GaN MQW p–n junction photodetectors. Furthermore, it was found that the maximum responsivity was 1.28 and 1.76 A/W with a 0.1 and 3 V applied reverse bias, respectively. 相似文献
9.
R. Niebuhr K. H. Bachem U. Kaufmann M. Maier C. Merz B. Santic P. Schlotter H. Jürgensen 《Journal of Electronic Materials》1997,26(10):1127-1130
Oxygen doped GaN has been grown by metalorganic chemical vapor deposition using N2O as oxygen dopant source. The layers were deposited on 2″ sapphire substrates from trimethylgallium and especially dried
ammonia using nitrogen (N2) as carrier gas. Prior to the growth of the films, an AIN nucleation layer with a thickness of about 300? was grown using
trimethylaluminum. The films were deposited at 1085°C at a growth rate of 1.0 μm/h and showed a specular, mirrorlike surface.
Not intentionally doped layers have high resistivity (>20 kW/square). The gas phase concentration of the N2O was varied between 25 and 400 ppm with respect to the total gas volume. The doped layers were n-type with carrier concentrations
in the range of 4×1016 cm−3 to 4×1018 cm−3 as measured by Hall effect. The observed carrier concentration increased with increasing N2O concentration. Low temperature photoluminescence experiments performed on the doped layers revealed besides free A and B
exciton emission an exciton bound to a shallow donor. With increasing N2O concentration in the gas phase, the intensity of the donor bound exciton increased relative to that of the free excitons.
These observations indicate that oxygen behaves as a shallow donor in GaN. This interpretation is supported by covalent radius
and electronegativity arguments. 相似文献
10.
K. Doverspike L. B. Rowland D. K. Gaskill J. A. Freitas 《Journal of Electronic Materials》1995,24(4):269-273
This paper presents a comparative study of the properties of GaN grown by organometallic vapor phase epitaxy, using both a
GaN and A1N buffer layer, as a function of sapphire orientation (c-plane vs a-plane). Results are presented for varying the
thickness of the buffer layer, varying the growth temperature of the GaN film, and also varying the ammonia/trimethylgallium
mass flow ratio. The electron Hall mobilities of GaN films grown on an A1N buffer layer were, in general, higher compared
to films grown using a GaN buffer layer. In addition, growth on a-plane sapphire resulted in higher quality films (over a
wider range of buffer thicknesses) than growth on c-plane sapphire. The room temperature electron mobilities were also found
to be dependent on, not only the growth temperature, but also the ammonia/trimethylgallium mass flow ratio. 相似文献