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81.
82.
本文研究了采用锁定放大相干检测技术的等离子体光发射谱检测系统。用该系统检测了仅用CF4作为刻蚀气体刻蚀非晶硅基薄膜的等离子体光发射谱。分析了检测结果和刻蚀机理。 相似文献
83.
84.
薄膜磁头磁轭制备工艺研究 总被引:1,自引:1,他引:0
本文重点讨论了用不同的工艺方法来制备薄膜磁头中的关键元件-磁轭。采用多次光刻的方法克服湿法工艺中磁性膜NiFe层的侧向钻蚀问题,从而实现对磁轭几何尺寸的精确控制,并对几种工艺方法的优缺点作了比较详细的分析。 相似文献
85.
厚膜导体Pd-Ag/Au、Pt-Pd-Au/Au平面复合结构,Pd-Ag/Au立体复合结构可使多种组装技术相互兼容。立体复合结构还可有效地降低导体线电阻,减少线损耗。而且,其超声键合性尤佳 相似文献
86.
Fusae Nakanishi 《Polymer International》1992,27(3):237-241
Preparation of photoreactive Langmuir-Blodgett (LB) films was carried out using polymers/oligomers prepared from long-chain dialkyl esters of di-and tetra-olefins and having cyclobutane rings in the main chain. These polymers/oligomers formed stable monolayers on a water surface when mixed with arachidic acid. These monolayers could be deposited onto a substrate successfully forming Y-type films. The oligomer LB films were polymerized on irradiation. The polymer LB films showed a photo-reversible process between polymers and oligomers, depending on wavelength of the irradiating light. On the basis of spectral data and molecular weight change, this behaviour was found to be caused by cleavage and formation of cyclobutane rings. 相似文献
87.
Poly(N-vinyl-carbazole) (PVK) thin films doped with bromine has been studied by scanning electron microscopy, X-ray diffraction, infrared absorption, X-ray photoelectron spectroscopy (XPS), electron spin resonance (ESR), optical transmission (visible, near ultra violet) and conductivity measurements. The polymer has been doped at room temperature and at 373 K. It is shown by ESR, XPS and optical measurements that a charge transfer complex (CT-complex) is formed between PVK and Br. However, if some bromine acts as dopant of the polymer there is another bromine contribution, which corresponds to bromine covalently bonded to PVK and some only adsorbed. It is also shown by ESR that there is not only polymer doping by bromine but also some partial polymer degradation. Therefore, it can be said that the optimum doping condition of PVK thin films with bromine has been shown to be room temperature post-doping. 相似文献
88.
89.
Waste combustion is an interesting alternative for waste management and energy recovery. Knowledge of the waste higher heating value (HHV) is important for judging it’s worth as fuel. This work introduces a new equation, based on thermochemical concepts, to calculate HHV from elemental composition. This equation is expressed in terms of mass percentages on a dry basis of carbon (%C), hydrogen (%H), oxygen (%O), nitrogen (%N), and sulfur (%S); the HHV is computed in MJ/kg. The equation is as follows: HHV=(1−(%H2O/100))(−0.3708(%C)−1.1124(%H)+0.1391(%O)−0.3178(%N)−0.1391(%S)). The thermochemical concept on which this expression is based involves a wide applicability. This equation neglects the inorganic carbon, hence it is not very adequate when there is a significant concentration of it. The predictions from this approach were contrasted against those proceeding from equations currently used in combustion technology, and also against bomb calorimeter data. The new equation is clearly competitive with respect to other formulations, and it can be very helpful for presenting a waste HHV value based on different derivation suppositions. 相似文献
90.
The synthesis of rare-earth perovskite-type composition thin films of LaNiO3 by means of the inorganic-sol-gel (ISG) method was studied. The structural stability under high temperature in reducing atmospheres and the oxygen-sensitivity mechanism of the LaNiO3 thin films were examined. It is shown that under the experimental conditions, LaNiO3 decomposes and the valance states of nickel are +2 and +3. 相似文献