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91.
This paper discusses approaches for the isolation of deep high aspect ratio through silicon vias (TSV) with respect to a Via Last approach for micro-electro-mechanical systems (MEMS). Selected TSV samples have depths in the range of 170…270 µm and a diameter of 50 µm. The investigations comprise the deposition of different layer stacks by means of subatmospheric and plasma enhanced chemical vapour deposition (PECVD) of tetraethyl orthosilicate; Si(OC2H5)4 (TEOS). Moreover, an etch-back approach and the selective deposition on SiN were also included in the investigations. With respect to the Via Last approach, the contact opening at the TSV bottom by means of a specific spacer-etching method have been addressed within this paper. Step coverage values of up to 74 % were achieved for the best of those approaches. As an alternative to the SiO2-isolation liners a polymer coating based on the CVD of Parylene F was investigated, which yields even higher step coverage in the range of 80 % at the lower TSV sidewall for a surface film thickness of about 1000 nm. Leakage current measurements were performed and values below 0.1 nA/cm2 at 10 kV/cm were determined for the Parylene F films which represents a promising result for the aspired application to Via Last MEMS-TSV.  相似文献   
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Reliability-based design optimization (RBDO) incorporates probabilistic analysis into optimization process so that an optimum design has a great chance of staying in the feasible design space when the inevitable variability in design variables/parameters is considered. One of the biggest drawbacks of applying RBDO to practical problem is its high computational cost that is often impractical to industries. In search of the most suitable RBDO method for industrial applications, we first evaluated several existing RBDO approaches in details such as the double-loop RBDO, the sequential optimization and reliability assessment, and the response surface method. Then, based on industry needs, a platform incorporating/integrating the existing algorithm of optimization and reliability analysis is built for a practical RBDO problem. Effectiveness of the proposed RBDO approach is demonstrated using a simple cantilever beam problem and a more complicated industry problem.  相似文献   
94.
In this paper, we introduce geometry-dependent lighting that allows lighting parameters to be defined independently and possibly discrepantly over an object or scene based on the local geometry. We present and discuss light collages, a lighting design system with geometry-dependent lights for effective feature-enhanced visualization. Our algorithm segments the objects into local surface patches and places lights that are locally consistent but globally discrepant to enhance the perception of shape. We use spherical harmonics for efficiently storing and computing light placement and assignment. We also outline a method to find the minimal number of light sources sufficient to illuminate an object well with our globally discrepant lighting approach.  相似文献   
95.
Recovery of 1-butyl-3-methylimidazolium tetrachloroferrate ([bmim]FeCl4) from its mixture with water was investigated. The [bmim]FeCl4 rich phase in the mixture forming two-phase was successfully separated, while homogeneous mixtures could not be separated. However, the concentration of the homogeneous mixture varied as a function of the magnetic field strength. Therefore, a combination of magnetic field and conventional methods to recover magnetic ILs from reaction mixtures will be very useful and have great potential.  相似文献   
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The direct current-direct current (DC-DC) converter is designed for 1 T static random access memory (SRAM) used in display driver integrated circuits (ICs), which consists of positive word-line voltage (V PWL), negative word-line voltage (V NWL) and half-V DD voltage (V HDD) generator. To generate a process voltage temperature (PVT)-insensitive V PWL and V NWL, a set of circuits were proposed to generate reference voltages using bandgap reference current generators for respective voltage level detectors. Also, a V PWL regulator and a V NWL charge pump were proposed for a small-area and low-power design. The proposed V PWL regulator can provide a large driving current with a small area since it regulates an input voltage (VCI) from 2.5 to 3.3 V. The V NWL charge pump can be implemented as a high-efficiency circuit with a small area and low power since it can transfer pumped charges to V NWL node entirely. The DC-DC converter for 1 T SRAM were designed with 0.11 μm mixed signal process and operated well with satisfactory measurement results.  相似文献   
99.
We provide a Mathematica code for decomposing strongly correlated quantum states described by a first-quantized, analytical wave function into many-body Fock states. Within them, the single-particle occupations refer to the subset of Fock–Darwin functions with no nodes. Such states, commonly appearing in two-dimensional systems subjected to gauge fields, were first discussed in the context of quantum Hall physics and are nowadays very relevant in the field of ultracold quantum gases. As important examples, we explicitly apply our decomposition scheme to the prominent Laughlin and Pfaffian states. This allows for easily calculating the overlap between arbitrary states with these highly correlated test states, and thus provides a useful tool to classify correlated quantum systems. Furthermore, we can directly read off the angular momentum distribution of a state from its decomposition. Finally we make use of our code to calculate the normalization factors for Laughlin?s famous quasi-particle/quasi-hole excitations, from which we gain insight into the intriguing fractional behavior of these excitations.Program summaryProgram title: StrongdecoCatalogue identifier: AELA_v1_0Program summary URL: http://cpc.cs.qub.ac.uk/summaries/AELA_v1_0.htmlProgram obtainable from: CPC Program Library, Queen?s University, Belfast, N. IrelandLicensing provisions: Standard CPC licence, http://cpc.cs.qub.ac.uk/licence/licence.htmlNo. of lines in distributed program, including test data, etc.: 5475No. of bytes in distributed program, including test data, etc.: 31 071Distribution format: tar.gzProgramming language: MathematicaComputer: Any computer on which Mathematica can be installedOperating system: Linux, Windows, MacClassification: 2.9Nature of problem: Analysis of strongly correlated quantum states.Solution method: The program makes use of the tools developed in Mathematica to deal with multivariate polynomials to decompose analytical strongly correlated states of bosons and fermions into a standard many-body basis. Operations with polynomials, determinants and permanents are the basic tools.Running time: The distributed notebook takes a couple of minutes to run.  相似文献   
100.
文章介绍了国内小电流接地系统故障选线方法的的发展简况,在分析小电流接地故障暂态特征的基础上对近几年提出的几种较新的基于暂态特征信息的选线方法进行了简单的评述,同时筒略说明了不足之处.文章最后提出了一种基于暂态能量函数的小电流接地选线方法,并有待于进一步研究.  相似文献   
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