Influence of ion species ratio on grid-enhanced plasma source ion implantation

Grid-enhanced plasma source ion implantation (GEPSII) is a newly proposed technique to modify the inner-surface properties of a cylindrical bore. In this paper, a two-ion fluid model describing nitrogen molecular ions N_2^+ and atomic ions N^+ is used to investigate the ion sheath dynamics between the grid electrode and the inner surface of a cylindrical bore during the GEPSII process, which is an extension of our previous calculations in which only N_2^+ was considered. Calculations are concentrated on the results of ion dose and impact energy on the target for different ion species ratios in the core plasma. The calculated results show that more atomic ions N^+ in the core plasma can raise the ion impact energy and reduce the ion dose on the target.     

尘埃颗粒在射频等离子体鞘层中的非线性共振现象的理论研究

一种自洽的理论模型用于研究尘埃颗粒在射频鞘层中垂直方向的非线性共振现象.利用射频鞘层动力学模型，研究了鞘层电场和尘埃颗粒的充电过程.考虑作用在尘埃颗粒上的各种作用力(如重力、电场力、离子拖拽力、中性气体摩擦力及探针的扰动力)，并通过数值求解颗粒运动方程，模拟了该尘埃颗粒在探针扰动下的非线性振荡过程.所得结果不仅很好地再现了最近的实验观察，同时还发现这种非线性振动过程与等离子体参数、施加的射频偏压的功率、探针的扰动电位和位置等有着密切的联系. 关键词： 射频鞘层 尘埃颗粒 尘埃充电 非线性共振 迟滞     

Characteristics of Microwave Discharge in a Modified Surfaguide with a Large Diameter

The characteristics of the microwave discharge are studied in a modified surfaguide with a large diameter. Ex-perimental results show that there exist three discharging modes, one is the plasma mode, and the others are the waveguide modes. The discharge can jump between one of the wavegudde modes and the plasma mode, and the corresponding hysteresis loop is influenced by the discharging pressure. In the higher pressure region, the hysteresis loop is wide enough so that the discharge in each mode is stable. In the middle pressure region, the discharge becomes unstable as a result of the hysteresis loop being sufficiently narrow. When the gas pressure is further decreased, the plasma mode disappears, while the mode jumps between the two wavegulde modes always appear and are stable in the discharge region we have explored.     

Influence of Incident Velocity on the Penetration for C20 Clusters Moving through Oxides

A theoretical model is established to simulate the penetration process of C20 clusters in oxides （Al2O3, SiO2） at different incident velocities. The induced spatial potential by the incident clusters is described by the dielectric response formalism, in which the Mermin-type dielectric function is adopted to provide a realistic evaluation of the electronic properties of the oxides. The charge distribution of individual ions is derived by using the Brandt-Kitagawa effective charge model, also under the consideration of the asymmetric influence from the wake potential. The stopping power of the clusters and the Coulomb explosion processes are derived by solving the motion equation of the individual ions, when taking into account the multiple scattering effect simulated by using the Monte Carlo method. It is found that the dynamical interaction potential between ions leads to a spatial asymmetry to the cluster structure and the charge distribution for high velocity clusters, and will not be in effect as the incident velocities decrease.     

Electronic dynamic behavior in inductively coupled plasmas with radio-frequency bias

The inflexion point of electron density and effective electron temperature curves versus radio-frequency （RF） bias voltage is observed in the H mode of inductively coupled plasmas （ICPs）. The electron energy probability function （EEPF） evolves first from a Maxwellian to a Druyvesteyn-like distribution, and then to a Maxwellian distribution again as the RF bias voltage increases. This can be explained by the interaction of two distinct bias-induced mechanisms, that is： bias- induced electron heating and bias-induced ion acceleration loss and the decrease of the effective discharge volume due to the sheath expansion. Furthermore, the trend of electron density is verified by a fluid model combined with a sheath module.     

负偏压射频放电过程的流体力学模拟

采用流体力学方法研究了负偏压射频放电的物理过程,计算了带电粒子密度及电场的时空分布,分析了在不同的近似条件下,离子动量平衡方程中各项的贡献。     

双频容性耦合CF4等离子体放电的二维混合模拟

研究了等离子体反应装置内的等离子体密度、粒子能量与角度分布等参量在装置径向与轴向上的分布特性。在研究过程中应用二维混合模型对CF4气体放电进行模拟。计算结果显示:在电极表面与侧壁附近的鞘层区特性有明显的区别。由于装置侧壁处受电源产生的射频电场的影响较小,侧壁处的鞘层主要由双极扩散机制形成,其产生的径向电场强度较弱,鞘层厚度也较薄。而在电极附近,由于受到射频电场的影响,鞘层的厚度显著增加,指向电极方向的轴向电场强度也远大于指向侧壁方向的径向电场强度。在电极区域内,离子通量分布均匀;在电极边缘与侧壁的间隙内,因电场强度减小,离子通量则发生迅速衰减。在射频电极覆盖的范围内离子能量分布大体上保持不变,电极与侧壁的交界处,由于受到侧壁处径向电场的影响,离子能量分布略有不同。在放电装置的中心区域,入射到电极上的离子角度分布基本保持一致,而在电极边界与装置侧壁的交界处,由于径向电场的影响,离子的垂直入射角增加,以大角度轰击电极的离子数量也显著增加。     

One-Dimensional Fluid Model for Dust Particles in Dual-Frequency Capacitively Coupled Silane Discharges

A self-consistent fluid model, which incorporates density and flux balances of electrons, ions, neutrals and nanoparticles, electron energy balance, and Poisson＇s equation, is employed to investigate the capacitively coupled silane discharge modulated by dual-frequency electric sources. In this discharge process, nanoparticles are formed by a successive chemical reactions of anion with silane. The density distributions of the precursors in the dust particle formation are put forward, and the charging, transport and growth of nanoparticles are simulated. In this work, we focus our main attention on the influences of the high-frequency and low-frequency voltage on nanoparticle densities, nanoparticle charge distributions in both the bulk plasma and sheath region.     

带有射频偏压源的感性耦合Ar/O2/Cl2等离子体放电的混合模拟研究

在刻蚀工艺中,通常会在感性耦合等离子体源的下极板上施加偏压源,以实现对离子能量和离子通量的独立调控.本文采用整体模型双向耦合一维流体鞘层模型,在Ar/O₂/Cl₂放电中,研究了偏压幅值和频率对等离子体特性及离子能量角度分布的影响.研究结果表明:当偏压频率为2.26 MHz时,随着偏压的增加,除了Cl^-离子和ClO⁺离子的密度先增加后降低最后再增加外,其余带电粒子、O原子和Cl原子的密度都是先增加后基本保持不变最后再增加.当偏压频率为13.56和27.12 MHz时,除了Cl^-离子和Cl₂⁺离子外,其余粒子密度随偏压的演化趋势与低频结果相似.随着偏压频率的提高,在低偏压范围内(<200 V),由于偏压源对等离子体加热显著增加,导致了带电粒子、O原子和Cl原子的密度增加;而在高偏压范围内(>300 V),由于偏压源对等离子体加热先减弱后增强,导致除了Cl₂⁺离子和Cl^-     

快速C60离子团在固体中的库仑爆炸过程Ⅱ——分子动力学模拟

研究了快速Ｃ₆₀离子团与固体材料的相互作用过程.借助于线性介电响应理论及等离子-极点近似介电函数,推导出作用在团簇中单个离子上的动力学相互作用力,并建立了一套描述离子团中单个离子运动的方程组.通过数值求解运动方程组,可以发现,对于高速Ｃ₆₀离子团在固体中穿行时,由于动力学相互作用力的影响,使得库仑爆炸图形呈现出很强的非球对称性,即离子团中的导航离子群爆炸得较快,而尾随离子群则保持相对地稳定. 关键词： 离子团 库仑爆炸 动力学相互作用