InAlAs/InGaAs/InAlAs量子阱高迁移率二维电子气系统中的反弱局域效应研究

研究了Si 重δ 掺杂In_0.52Al_0.48As/In_0.53Ga_0.47As/In_0.52Al_0.48As单量子阱内高迁移率二维电子气系统中的反弱局域效应. 研究表明，强的Rashba自旋轨道相互作用来源于量子阱高的结构反演不对称. 高迁移率系统中，粒子的运动基于弹道输运而非扩散输运. 因此，旧的理论模型不能用于拟合实验结果. 由于最新的模型在实际拟合中过于复杂，一种简单可行的近似用于处理实验结果，并获得了自旋分裂能Δ₀和自旋轨道耦合常数α两个重要的物理参数. 该结果与对纵向电阻的Shubnikov-de Haas—SdH振荡分析获得的结果一致. 高迁移率系统中的反弱局域效应研究表明，发展有效的反弱局域理论模型，对于利用Rashba自旋轨道相互作用来设计自旋器件尤为重要.     

Si(100)和蓝宝石(0001)衬底上3C-SiC的Raman研究

单晶Si和蓝宝石(0001)是两种重要的3C-SiC异质外延衬底材料，然而，由于Si及蓝宝石和3C-SiC之间大的晶格失配度和热膨胀系数失配度，在3C-SiC中会产生很大的内应力，直接影响3C-SiC的电学特性。Raman散射测试是一个功能很强的测试方法，其强度、宽度、Raman位移等有关Raman参数可以给出有关SiC晶体质量的信息，其中包括内应力。利用背散射几何构置的Raman方法研究了Si(100)和蓝宝石(0001)村底上LPCVD方法生长的SiC外延薄膜，在生长的所有样品中均观察到了典型的3C-SiC的TO和LO声子峰，在3C-SiC／Si材料中，这两个声子峰分别位于970．3cm-l和796．0cm-1，在3C-SiC／蓝宝石材料中，分别位于965．1cm^-1和801．2cm-1，这一结果表明这两种外延材料均为3C-SiC晶型。利用一个3C-SiC自由膜作为无应力标准样品,并根据3C-SiC／Si和3C-SiC／蓝宝石的TO和LO声子峰Raman位移相对于自由膜的移动量，得到3C-SiC中的内应力约分别为1GPa和4GPa。实验发现在这两种材料的TO声子峰的Raman位移移动方向相反，通过比较3C-SiC、Si和蓝宝石的热膨胀系数，预期Si衬底上的3C-SiC外延膜受到的应力为张应力，而蓝宝石衬底上3C-SiC受到的应力则为压应力。     

Influences of annealing on structural and compositional properties of Al_2O_3 thin films grown on 4H–SiC by atomic layer deposition

Annealing effects on structural and compositional performances of Al_2O_3 thin films on 4H–Si C substrates are studied comprehensively. The Al_2O_3 films are grown by atomic layer deposition through using trimethylaluminum and H_2 O as precursors at 300?C, and annealed at various temperatures in ambient N_2 for 1 min. The Al_2O_3 film transits from amorphous phase to crystalline phase as annealing temperature increases from 750?C to 768?C. The refractive index increases with annealing temperature rising, which indicates that densification occurs during annealing. The densification and grain formation of the film upon annealing are due to crystallization which is relative with second-nearest-neighbor coordination variation according to the x-ray photoelectron spectroscopy(XPS). Although the binding energies of Al 2p and O 1s increase together during crystallization, separations between Al 2p and O 1s are identical between as-deposited and annealed sample, which suggests that the nearest-neighbour coordination is similar.     

Surface saturation control on the formation of wurtzite polytypes in zinc blende SiC nanofilms grown on Si-（100） substrates

We investigate the formations of wurtzite （WZ） SiC nano polytypes in zinc blende （ZB） SiC nanofilms hetero-grown on Si-（100） substrates via low pressure chemical vapor deposition （LPCVD） by adjusting the Si/C ratio of the introduced precursors. Through SEM, TEM, and Raman characterizations, we find that the nanofilms consist of discrete WZ SiC nano polytypes and ZB SiC polytypes composed of WZ polytypes （WZ ＋ ZB） and disordered ZB SiC polytypes, respectively, according to Si/C ratios of 0.5, 1.5, and 3. We attribute the WZ polytype formation to being due to a kinetic mechanism based on the Si/C surface saturation control.     

MEMS用Si台面及SiO2/Si衬底上3C-SiC的LPCVD生长

本文报道用在Si台面及热氧化SiO2衬底上3C-SiC薄膜的LPCVD生长,反应生长使用的气体为SiH4和C2H4,载气为H2,采用光学显微镜、X射线衍射（XRD）、X射线光电子能谱（XPS）、扫描电镜（SEM）、以及室温Hall测试对所生长的3C—SiC材料进行了测试与分析,结果表明在3C-SiC和SiO2之间没有明显的坑洞形成。     

Raman Scattering Detection of Stacking Faults in Free-Standing Cubic-SiC Epilayer

We report on stacking fault （SF） detection in free-standing cubic-SiC epilayer by the Raman measurements. The epilayer with enhanced SFs is heteroepitaxially grown by low pressure chemical vapour deposition on a Si（100） substrate and is released in KOH solution by micromechanical manufacture, on which the Raman measurements are performed in a back scattering geometry. The TO line of the Raman spectra is considerably broadened and distorted. We discuss the influence of SFs on the intensity profiles of TO mode by comparing our experimental data with the simulated results based on the Raman bond polarizability （BP） model in the framework of linearchain concept. Cood agreement with respect to the linewidth and disorder-induced peak shift is found by assuming the mean distance of the SFs to be 11 A in the BP model.     

晶格匹配型GaAs/AlxGa1-xAs量子阱电极光电转换性能的研究

研究了晶格匹配型GaAs/Al_xGa_1-xAs超晶格量子阱电极在非水溶液中的光电转换性能,以及电极结构参数(如阱宽、外垒厚度,量子阱周期)对其光电转换性能的影响,并设计生长了量子产率可比GaAs电极高3倍的变阱宽多周期新型结构的量子阱电极。     

利用变温瞬态电致发光研究OLED载流子的输运机理

研究了不同温度下几种结构的有机电致发光器件(OLED)的瞬态电致发光响应特性以及电流密度-电压-亮度特性。研究发现,启亮电压随温度升高而减小的加速度在200 K时出现拐点,且这一数值主要由电子传输层Alq3的迁移率决定。当温度为200 K时,延迟时间td最重要的影响因素是Mo O3空穴注入势垒,随着温度的升高,Δtd逐渐减小,到300 K时基本消失。Vf代表光衰减时间随温度增长的平均速率。Mo O3注入层和电致发光材料Ir(ppy)3都会对载流子的堆积起促进作用。由Mo O3注入层不同引起的ΔVf是0.52μs/K,由电致发光材料Ir(ppy)3不同引起的ΔVf是0.73μs/K。     

Improved Light Extraction of GaN-based LEDs with Nano-roughened p-GaN Surfaces

p-GaN surfaces axe nano-roughened by plasma etching to improve the optical performance of GaN-based light emitting diodes （LEDs）. The nano-roughened GaN present a relaxation of stress. The light extraction of the LEDs with nano-roughened surfaces is greatly improved when compared with that of the conventional LEDs without nano-roughening. PL-mapping intensities of the nano-roughened LED epi-wafers for different roughening times present two to ten orders of enhancement. The light output powers are also higher for the nano-roughened LED devices, This improvement is attributed to that nano-roughened surfaces can provide photons multiple chances to escape from the LED surfaces,