Reduction of loading effect by tungsten etchback in a magneticallyenhanced reactive ion etcher

The plug loading effect occurring during the etchback of tungsten was investigated in a magnetically enhanced reactive ion etcher using SF ₆/Ar mixtures. It was found that while the plug loading effect is independent of varying SF₆/Ar flow rate ratio and magnetic field intensity, it is reduced under the condition of high selectivity of tungsten relative to TiN which was achieved at high chamber pressure and low RF power. It is proposed that when TiN is used as a glue layer, the W etch rate enhancement in the plug is mainly controlled by a local loading effect. Under the optimized etchback conditions the plug loss was successfully controlled without the tungsten residue left on severe topology     

The effects of plasma etching induced gate oxide degradation onMOSFET's 1/f noise

The effects of the plasma etching process induced gate oxide damages on device's low frequency noise behavior are investigated on MOSFET's fabricated with different field plate perimeter to gate area ratio antennas. Abnormal 1/f noise spectrum with a shoulder centered in the frequency range of 100 and to 1 kHz was frequently observed in small geometry devices, and it is attributable to a nonuniform distribution of oxide traps induced by plasma etching process     

铯原子激光共振电离

用Ｎｄ：ＹＡＧ及其泵浦的染料激光进行铯原子三步共振电离。求解了非饱和共振过程速率方程，计算出基态和激发态共振吸收截面，给出电离效率分别与激发电离速率以及作用时间的变化关系，得到饱和激发电离的流量条件和通量条件。     

Analysis of culture fluorescence by a fiber-optic sensor inNicotiana tabacum plant cell culture

The on-line sensing of viable cell weight in plant cell culture process is applied to analysis and control of process. The fiber-optic fluorescence sensor was constructed to measure the NADH-dependent fluorescence inNicotiana tabacum plant cell culture and the analysis of fluorescence signal was done to be correlated with the viable cell weight. The structured kinetic model for cell growth was proposed to estimate the theoretical viable cell weight. The dimensional analysis was proposed for the interpretation of fluorescence signal, in which the path length, the inner filter effect and the hydrodynamic conditions were considered as the key factors on fluorescence signal. The dimensional analysis and empirical correlation of fluorescence signal to viable cell weight was applied to the interpretation of the detected fluorescence signal during cultivation. The proposed interpretation of fluorescence signal using dimensional analysis was well correlated with the viable cell weight estimated by the structured kinetic model as well as by empirical correlation.     

Multiresolution segmentation of respiratory electromyographicsignals

Analysis of respiratory electromyographic (EMG) signals in the study of respiratory control requires the detection of burst activity from background (signal segmentation), and focuses upon the determination of onset and cessation points of the burst activity (boundary estimation). The authors describe a new automated multiresolution technique for signal segmentation and boundary estimation. During signal segmentation, a new transitional segment is defined which contains the boundary between background a burst activity. Boundary estimation is then performed within this transitional segment. Boundary candidates are selected and a probability is attributed to each candidate, using an artificial neural network. The final boundary for a given transitional segment is the boundary estimate with the maximum a posteriori probability. This new method has proved accurate when compared to boundaries chosen by two investigators     

Strength,toughness and R-curve behaviour of SiC whisker-reinforced composite Si3N4 with reference to monolithic Si3N4

The flexural strength and fracture toughness of 30 vol% SiC whisker-reinforced Si₃N₄ material were determined as a function of temperature from 25 to 1400°C in an air environment. It was found that both strength and toughness of the composite material were almost the same as those of the monolithic counterpart. The room-temperature strength was retained up to 1100°C; however, appreciable strength degradation started at 1200°C and reached a maximum at 1400°C due to stable crack growth. In contrast, the fracture toughness of the two materials was independent of temperature with an average value of 5.66 MPam^1/2. It was also observed that the composite material exhibited no rising R-curve behaviour at room temperature, as was the case for the monolithic material. These results indicate that SiC whisker addition to the Si₃N₄ matrix did not provide any favourable effects on strength, toughness and R-curve behaviour.     

Non-linear properties of polymer cellular materials with a negative Poisson's ratio

Negative Poisson's ratio polymeric cellular solids (re-entrant foams) were studied to ascertain the optimal processing procedures which give rise to the smallest value of Poisson's ratio. The non-linear stress-strain relationship was determined for both conventional and re-entrant foams; it depended upon the permanent volumetric compression achieved during the processing procedure. Poisson's ratio of re-entrant foam measured as a function of strain was found to have a relative minimum at small strains. The toughness of re-entrant foam increased with permanent volumetric compression, and hence with density.     

乙烯基三甲基硅烷等离子体聚合反应历程

应用色谱—质谱(GC-MS)及裂解色谱-质谱(PGC-MS)测定了乙烯基三甲基硅烷等离子体聚合反应中的气体冷凝物及聚合物,研究推导了等离子体聚合反应历程。单体在气相中被电子撞击,然后扩散到基底,在基底发生链增长和链终止反应。     

FEATURE SOLID MODELING TOOL SYSTEM:FSMTS

In conformity with the principle of Design for Manufacture,feature-based design strate-(?)es have been developed.As the“feature”is relevant to the“macro process plan”and“macro NCprograms”,obviously,“feature”is beyond the power of conventional solid modellers.Neverthe-less,substantial breakthrough has not been made in the solid modeling field,except“feature at-taching”or“feature recognizing”methods have been taken on.In this paper,the theory,concepts,system architecture,and algorithm principles of solid modeling tool system have beenrepresented.The practice of Feature Solid Modeling Tool System (FSMTS) developed atHuazhong University has proved that the tool may be a new foundation of Feature-Based Design.     

Control of circulating current in two parallel three-phase boost rectifiers

One unique feature in parallel three-phase converters is a potential zero-sequence circulating current. To avoid the circulating current, most present technology uses an isolation approach, such as transformers or separate power supplies. This paper proposes a parallel system where individual converters connect both AC and DC sides directly without additional passive components to reduce size and cost of the overall parallel system. In this case, the control of the circulating current becomes an important objective in the converter design. This paper: (1) develops an averaged model of the parallel converters based on a phase-leg averaging technique; (2) a zero-sequence model is then developed to predict the dynamics of the zero-sequence current; (3) based on the zero-sequence model, this paper introduces a new control variable, which is associated with space-vector modulation; (4) a strong zero-sequence current control loop is designed to suppress the circulating current; and (5) simulation and experimental results validate the developed model and the proposed control scheme.