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Dong-Soo Yoon Jae Sung Roh Sung-Man Lee Hong Koo Baik 《Journal of Electronic Materials》2003,32(8):890-898
The effect of a thin RuOx layer formed on the Ru/TiN/doped poly-Si/Si stack structure was compared with that on the RuOx/TiN/doped poly-Si/Si stack structure over the post-deposition annealing temperature ranges of 450–600°C. The Ru/TiN/poly-Si/Si
contact system exhibited linear behavior at forward bias with a small increase in the total resistance up to 600°C. The RuOx/TiN/poly-Si/Si contact system exhibited nonlinear characteristics under forward bias at 450°C, which is attributed to no
formation of a thin RuOx layer at the RuOx surface and porous-amorphous microstructure. In the former case, the addition of oxygen at the surface layer of the Ru film
by pre-annealing leads to the formation of a thin RuOx layer and chemically strong Ru-O bonds. This results from the retardation of oxygen diffusion caused by the discontinuity
of diffusion paths. In particular, the RuOx layer in a nonstoichiometric state is changed to the RuO2-crystalline phase in a stoichiometric state after post-deposition annealing; this phase can act as an oxygen-capture layer.
Therefore, it appears that the electrical properties of the Ru/TiN/poly-Si/Si contact system are better than those of the
RuOx/TiN/poly-Si/Si contact system. 相似文献
94.
介绍了采用同心旋转调制盘和相应的逻辑门积分计数的积累检测技术的基本原理,并给出采用同心旋转调制盘的红外检测系统的基本结构,介绍了同心旋转调制盘系统的设计方法,通过对实验结果进行分析,表明同心旋转调制盘技术在红外检测系统应用中可以大大地改善系统的性能,提高了探测概率,降低了虚警概率。同时分析了该系统存在的问题,为红外检测技术的进一步发展提供一些经验。 相似文献
95.
硅微机械梳齿静电谐振器的建模与分析 总被引:5,自引:2,他引:3
基于参数化的计算机辅助设计(CAD)软件,对硅微机械梳齿静电谐振器进行了实体建模,以有限元分析软件为工具,进行了谐振器的模态分析,静态分析和谐响应分析,初步揭示了谐振器的静、动态特性,有助于改善设计效率和质量,展示了计算机辅助工程(CAE)技术在微机电系统(MEMS)研究中的重要作用。 相似文献
96.
1 INTRODUCTIONParticlesreinforcedtitaniumalloymatrixcomposites(TMCp)havewideapplicationfieldsfortheirattractivehighspecificstreng 相似文献
97.
Taesung Kim Sung Ho Wang Beomsup Kim 《Electronics letters》2002,38(17):950-951
A delay-locked loop (DLL) architecture capable of incorporating fast locking and low jitter features simultaneously is reported. A test chip was fabricated in a 0.6 μm CMOS process to prove its functionality. The proposed DLL can align the internal clock to the external reference clock within two cycles and maintain its locking state with the aid of feedback operation 相似文献
98.
The use of capillary electrophoresis (CE) for clinically relevant assays is attractive since it often presents many advantages over contemporary methods. The small-diameter tubing that holds the separation medium has led to the development of multicapillary instruments, and simultaneous sample analysis. Furthermore, CE is compatible with a wide range of detectors, including UV-Vis, fluorescence, laser-induced fluorescence, electrochemistry, mass spectrometry, radiometric, and more recently nuclear magnetic resonance, and laser-induced circular dichroism systems. Selection of an appropriate detector can yield highly specific analyte detection with good mass sensitivity. Another attractive feature of CE is the low consumption of sample and reagents. However, it is paradoxical that this advantage also leads to severe limitation, namely poor concentration sensitivity. Often high analyte concentrations are required in order to have injection of sufficient material for detection. In this regard, a series of devices that are broadly termed 'analyte concentrators' have been developed for analyte preconcentration on-line with the CE capillary. These devices have been used primarily for non-specific analyte preconcentration using packing material of the C18 type. Alternatively, the use of very specific antibody-containing cartridges and enzyme-immobilized microreactors have been demonstrated. In the current report, we review the likely impact of the technology of capillary electrophoresis and the role of the CE analyte concentrator-microreactor on the analysis of biomolecules, present on complex matrices, in a clinical laboratory. Specific examples of the direct analysis of physiologically-derived fluids and microdialysates are presented, and a personal view of the future of CE in the clinical environment is given. 相似文献
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制作压力传感器时,在二氧化硅层上淀积多晶硅膜,既可利用优良的机械特性,又可保证压敏电阻与衬底间具有良好的绝缘性,由此可大大提高器件的温度特性。介绍了一种多晶硅压力传感器的原理和设计。实验结果表明,这类传感器具有灵敏度好,精度高等特点,电路工作范围为0-250℃,且具有良好的温度稳定性。 相似文献