High-performing silicon-based germanium Schottky photodetector with ITO transparent electrode

A near-infrared germanium(Ge)Schottky photodetector(PD)with an ultrathin silicon(Si)barrier enhancement layer between the indium-doped tin oxide(ITO)electrode and Ge epilayer on Si or silicon-on-insulator(SOI)is proposed and fabricated.The well-behaved ITO/Si cap/Ge Schottky junctions without intentional doping process for the Ge epilayer are formed on the Si and SOI substrates.The Si-and SOI-based ITO/Si cap/Ge Schottky PDs exhibit low dark current densities of 33 mA/cm2 and 44 mA/cm2,respectively.Benefited from the high transmissivity of ITO electrode and the reflectivity of SOI substrate,an optical responsivity of 0.19 A/W at 1550 nm wavelength is obtained for the SOI-based ITO/Si cap/Ge Schottky PD.These complementary metal–oxide–semiconductor(CMOS)compatible Si(or SOI)-based ITO/Si cap/Ge Schottky PDs are quite useful for detecting near-infrared wavelengths with high efficiency.     

Low-temperature plasma enhanced atomic layer deposition of large area HfS_2 nanocrystal thin films

Hafnium disulfide(HfS2) is a promising two-dimensional material for scaling electronic devices due to its higher carrier mobility, in which the combination of two-dimensional materials with traditional semiconductors in the framework of CMOS-compatible technology is necessary. We reported on the deposition of HfS2 nanocrystals by remote plasma enhanced atomic layer deposition at low temperature using Hf(N(CH3)(C2H5))4 and H2S as the reaction precursors. Selflimiting reaction behavior was observed at the deposition temperatures ranging from 150℃ to 350℃, and the film thickness increased linearly with the growth cycles. The uniform HfS2 nanocrystal thin films were obtained with the size of nanocrystal grain up to 27 nm. It was demonstrated that higher deposition temperature could enlarge the grain size and improve the HfS2 crystallinity, while causing crystallization of the mixed HfO2 above 450℃. These results suggested that atomic layer deposition is a low-temperature route to synthesize high quality HfS2 nanocrystals for electronic device or electrochemical applications.     

硅基硒纳米颗粒的发光特性研究

由于尺寸缩小引起的量子效应, 硒(Se) 材料的低维纳米结构具有更高的光响应和低的阈值激射等特性, 因此成为纳米电子与纳米光电子器件领域一个重要的研究方向. 本文通过对非晶硒薄膜的快速热退火来制备硒纳米颗粒, 退火温度在100–180℃之间时, 结晶后的硒纳米颗粒均为三角晶体结构, 其颗粒尺寸随退火温度的增加而线性增大. 光致发光谱测试发现三个发光峰, 分别位于1.4eV, 1.7eV和1.83eV. 研究发现位于1.4eV处的发光峰来源于非晶硒缺陷发光, 位于1.83eV处的发光峰来源于晶体硒的带带跃迁发光; 而位于1.7eV处的发光峰强度随激发功率增强而指数增大, 且向短波长移动, 该发光峰应该来源于非晶硒与硒纳米颗粒界面处的施主-受主对复合发光. 关键词： 硅基 硒纳米颗粒 光致发光 施主-受主对     

Temperature of the Remaining Cold Atoms after Two-Step Photoionization in an ^87Rb Vapor Cell Magneto-Optical Trap

The temperature of the remaining cold ^87Rb atoms confined in a vapor cell magneto-optical trap after two-step photoionization has been measured. In the two-step photoionization process, the first excitation laser is served by the cooling laser and the second excitation laser is served by a continuous semiconductor laser with a wavelength of 450hm. The results show that the temperature of the remaining cold atoms decreases as the intensity of the second excitation laser increases. Moreover, the relationship between the temperature T and number N of the remaining cold atoms generally foliows a power law, while it deviates from the well-known T ∝ N^1/3 and the power factor is smaller than 1/3. We propose that ion-atom collisions occurring during a photoionization process strongly influence the temperature sealing law in an optiealiy dense magneto-optical trap in the presence of an ionization laser. In addition, the forced evaporative cooling due to the combined effect of the detuning of the first excitation laser and the two-step photoionization plays a role in cooling the remaining cold atoms and results in the dependence of the power factor on the detuning of the first excitation laser.     

Wet thermal annealing effect on TaN/HfO2/Ge metal-oxide-semiconductor capacitors with and without a GeO2 passivation layer

Wet thermal annealing effects on the properties of TaN/HfO2/Ge metal-oxide-semiconductor(MOS) structures with and without a GeO2 passivation layer are investigated.The physical and the electrical properties are characterized by X-ray photoemission spectroscopy,high-resolution transmission electron microscopy,capacitance-voltage(C-V) and current-voltage characteristics.It is demonstrated that wet thermal annealing at relatively higher temperature such as 550℃ can lead to Ge incorporation in HfO2 and the partial crystallization of HfO2,which should be responsible for the serious degradation of the electrical characteristics of the TaN/HfO2/Ge MOS capacitors.However,wet thermal annealing at 400℃ can decrease the GeO x interlayer thickness at the HfO2/Ge interface,resulting in a significant reduction of the interface states and a smaller effective oxide thickness,along with the introduction of a positive charge in the dielectrics due to the hydrolyzable property of GeO x in the wet ambient.The pre-growth of a thin GeO2 passivation layer can effectively suppress the interface states and improve the C-V characteristics for the as-prepared HfO2 gated Ge MOS capacitors,but it also dissembles the benefits of wet thermal annealing to a certain extent.     

α-萘甲醇衍生物的选择性氧化及手性联萘二酸的合成

α-萘甲醇衍生物与负载型氧化剂A(KMnO4/CuSO4.5H2O)反应,得到相应的醛(酮),产率68%~98%。光学纯的(S)-联萘二醇经A氧化制得光学纯的(S)-联萘二醛;醛经MnO2再次氧化合成了(S)-联萘二酸二甲酯;酯水解得到光学纯的(S)-联萘二酸。     

兼容型低目标特征涂层

掺锡氧化铟（ITO）薄膜同时具备在近红外波段的低反射和红外波段的高反射特性,其介电常数可由Drude自由电子模型描述。SiO薄膜在特定的红外波长处有很强的吸收。将二者结合,可实现特定的光谱选择性。本文对SiO/ITO膜系的光谱选择性进行了研究,讨论了膜系结构对反射光谱的影响。通过用特征矩阵计算反射光谱,发现适当调整膜系的组合方式及选择膜层参量,用SiO/ITO膜系可以做成兼容型红外低目标特征涂层。     

CdSiP2单晶退火研究

以高纯(6N) Cd、Si、P单质为原料,采用双温区气相输运法和改进的垂直布里奇曼法合成生长出等径尺寸为φ17 mm×65 mm的CdSiP2单晶锭,经切割抛光得到CdSiP2晶片.将样品分别置于真空、镉气氛、磷气氛和在同成分粉末包裹中进行了退火试验.采用X射线能量色散谱仪(EDS)和傅里叶红外分光光度计(FTIR)对退火前后的晶片组分及红外透过谱进行了测试分析.结果表明:四种氛围退火前后样品的组分变化不大,原子比接近理想的化学计量比;镉气氛下退火对晶片的红外透过率改善较为显著,在1600 ～ 4500 cm-1范围内的红外透过率由46;～52;提高到51; ～57;,接近CdSiP2晶体红外透过率的理论值.     

AgGa0.7In0.3Se2晶体热膨胀行为研究

采用一种新的定向方法,快速定出了AgGa0.7In03Se2晶体c轴方向,制备得到[001]、[100]方向的块状样品;采用德国B(a)hr公司的WinTA 100热膨胀仪对其进行测试,分别获得了晶体沿c轴、a轴方向的热膨胀系数,分析了它们随温度变化的规律以及晶体出现反常热膨胀的机制;计算出晶体的体热膨胀系数和各向异性因子,分析讨论了晶体非轴向热膨胀系数在不同温度下随cos2φ的变化规律.     

ZnGeAs2多晶合成与表征

ZnGeAs2是黄铜矿结构的三元化合物半导体材料,在红外非线性光学方面有重要应用前景.本文探讨了ZnGeAs2多晶的形成途径和合成机理,报道了一种ZnGeAs2多晶合成方法.以高纯(6N)Zn、Ge、As单质为原料,按化学计量比,富Zn1‰和As2‰配料,采用双温区合成方法,辅以机械、温度振荡和梯度降温的合成工艺,合成出均匀致密的单相ZnGeAs2多晶.经XRD和EDS分析表明:合成产物为黄铜矿结构的单相ZnGeAs2多晶,晶胞常数为a=b=0.56745 nm,c=1.11580 nm,与标准PDF卡片(No.730397)一致;各组成元素的原子比Zn∶Ge∶AS=1.00∶0.98∶1.95,接近理想化学计量比.上述分析结果表明,合成产物可用于ZnGeAs2单晶生长,为进一步研究ZnGeAs2晶体的非线性光学性能和应用奠定了较好的基础.