Effect of wafer size on the film internal stress measurement by wafer curvature method

Wafer curvature method has been applied to determine the internal stress in the films using Stoney’s equation. During the film deposition, the wafer fixation on the sample holder will restrict the deformation of the rectangle-shaped wafer, which may result in the stress datum difference along length and width direction. In this paper, the effect of wafer size and the wafer fixation on the TiN film internal stress measured by wafer curvature method was discussed. The rectangle-shaped wafers with different length/width ratios (L/W=1:1, 2:1, 3:1 and 4:1) were fixed as a cantilever beam. After the TiN films deposition, the profiles of the film/wafer were measured using a stylus profilometer and then the internal stress was calculated using the Stoney equation in the film. The results showed that the fixed end of the wafers limited to some degree the curvature of the wafers along the width direction. For film internal stress measured by wafer curvature method, the wafer profile should be scanned along the length direction and the scan distance should be greater than or equal to half of wafer length. When the length/width ratio of the wafer reached 3:1, the wafer curvature and the calculated stress were basically the same at different positions along the length direction. For film internal stress measured by wafer curvature method, it was recommended that the length/width ratio of wafer should be considered to be greater than or equal to 3:1, and the deformed profile was scanned along the length direction.     

对水利工程项目建议书阶段设计取费问题的讨论与建议

通过相关规范、法规进行分析,对于实行立项简化程序未编制项目建议书的水利工程,项目建议书阶段的设计工作应该取费,但不宜直接套用现行设计取费标准;建议根据项目特点在计算的设计费基础上按0.5～0.8的折扣系数取费。     

聚羧酸助磨剂合成及其性能

利用水泥粉磨过程中的机械力促使水解聚马来酸酐（HPMA）与聚乙二醇单甲醚（MPEG）进行酯化反应形成聚羧酸助磨剂。试验研究了HPMA、MPEG、HPMA与MPEG的混合物、HPMA与MPEG的反应合成物对水泥助磨效果以及对砂浆性能的影响。结果表明,HPMA与MPEG都有一定的助磨性,HPMA与MPEG的混合物和反应合成物具有更佳的助磨性能,且可以改善水泥砂浆的流动性能和显著提高水泥砂浆的早期强度。激光拉曼光谱测试表明HPMA与MPEG的混合物和反应合成物与水泥共同粉磨后吸附在水泥颗粒表面,具有相似的拉曼位移图谱。     

基于三次B样条有限元法的BBMB方程数值解

对空间和时间坐标分别采用三次B样条有限法和Crank-Nicolson差分法求得非线性BBMB方程的数值解,应用Von-Neumann稳定性理论证明了此方法的无条件稳定性,并且通过两个例子验证了该方法的有效性与可行性.     

基于全量补偿算法的结构损伤识别

频率和振型是反应结构动力特性的主要模态参数,文中对损伤结构的频率和振型进行了研究。通过实测损伤结构的频率和振型,利用矩阵理论修正理论有限元模型,使之与实测损伤结构的频率和振型一致;将修正的理论有限元模型表达成单元刚度矩阵与损伤因子的线性组合,把损伤识别问题转化为组合系数的识别问题。给定损伤因子的合理取值范围,用优化方法求解损伤因子。通过对十跨桁架结构的数值仿真,仅用结构的前5阶频率和振型就能很好的识别结构的损伤,且该方法不需要对实测振型进行归一化处理,具有较强的实用性。     

Broadband excited Na3Tb(PO4)2:Ce3+/Eu2+ green/yellow-emitting phosphors with high color purity for LED-based application

To enhance the display quality of light-emitting diodes (LEDs), it is of great significance to exploit green/yellow-emitting phosphors with narrow emission band, high quantum yield, and excellent color purity to satisfy the application. Herein, orthophosphate-based green/yellow-emitting Na₃Tb(PO₄)₂:Ce³⁺/Eu²⁺ (NTPO:Ce³⁺/Eu²⁺) phosphors have been successfully synthesized by a facile solid-state reaction method. The absorption band of NTPO samples was extended to the near-ultraviolet region and the absorption efficiency was significantly improved owing to a highly efficient energy transfer from Ce³⁺/Eu²⁺ ion to Tb³⁺ ion in NTPO host certified by time-resolved PL spectra. Upon 300 nm excitation, the NTPO:Ce³⁺ is characterized by ultra-narrow-band green emission of Tb³⁺ with an absolute quantum yield of 94.5%. Unexpectedly, NTPO:Eu²⁺ emits bright yellow light with a color purity of 73% as a result of the blending of green light emission from Tb³⁺ and red light emission from Eu³⁺. The thermal stability has been improved by controlling the stoichiometric ratio of Na⁺. The prototype white LED used yellow-emitting NTPO:Eu²⁺ phosphor has higher color-rendering index (Ra = 83.5), lower correlated color temperature (CCT = 5206 K), and closer CIE color coordinates (0.338, 0.3187) to the standard white point at (0.333, 0.333) than that used green-emitting NTPO:Ce³⁺ phosphor, indicating the addition of the yellow light component improved the Ra of the trichromatic (RGB) materials.     

自动金刚石刀头磨弧机

针对采用激光焊接工艺的金刚石锯片上，其金刚石刀头内弧面需要磨抛的工艺要求，研发了一种自动金刚石刀头磨弧机。该设备将金刚石刀头放置在作间歇回转的工作转盘上，工作转盘由槽轮机构驱动；磨削砂轮安装在拖板系统上，拖板的间歇往复运动由一种在滑块上开有长槽的曲柄滑块机构实现，可满足工作转盘转位时，拖板停歇；工作转盘停歇时，拖板运动的工作要求。用靠模控制砂轮磨削的进给量。通过靠模的更换及设计能快速装卡的刀头夹具，可实现对不同弧度刀头的磨弧。本文介绍了该设备的结构组成、设计参数的选择及相关的设计方案，并对在滑块上开有长槽的曲柄滑块机构的设计方法进行了详细地讨论。     

热处理对Mg-Y-Mn-Sc合金显微组织演变的影响

采用光学显微镜、扫描电子显微镜和X射线衍射分析等研究了MgY5Mn1Sc0．3镁合金的显微组织特征及热处理条件下的组织结构演变行为。结果表明：铸态组织由粗大的晶粒构成，晶内出现大量“辫子”状孪晶和呈线状排列的颗粒相，晶内和晶界上没有观察到枝晶和共晶组织，Y元素出现严重偏聚，主要富集在颗粒相中。在固溶处理条件下，组织结构演变和再结晶同时发生，伴随发生组织“球化”、分散相的溶解和聚集以及晶粒由大变小再由小变大。通过维氏硬度HV10的测定，探讨了试验合金的热处理行为。     

基于等效电路分析的航空锂电池工作特性研究

针对航空锂电池安全保障问题,提出了一种基于等效电路模型的锂电池工作特性分析方法。该方法通过PNGV等效电路处理,实现对航空锂电池物理反应过程的电路模拟,并基于此研究了航空锂电池的工作特性。实验结果表明,该方法能够实现对航空用75 Ah锂电池等效电路的有效模拟,等效模型能够有效分析不同条件下的电池工作状态,获得锂电池工作特性规律,为锂电池的安全航空应用提供保障。