用于透明平板平行度和均匀性测量的单元件干涉仪

提出了一种基于单元件干涉的用于检测透明介质平整度和均匀性的干涉仪.该干涉仪的核心元件是一个菱形分光棱镜.激光光源的平面波光束的一半光束透过待测样品,另一半光束直接透过空气,然后分别入射到菱形分光棱镜的两垂直面并在分光面相遇、相干.通过旋转待测样品改变相干的两束光光程差,从而使干涉条纹发生移动.形成的相干光被分光板分成两束,一束进入光电探测器用于探测干涉条纹移动数的整数部分,另一束则进入电荷耦合探测器用于采集干涉条纹图来计算干涉条纹移动数的小数部分.通过计算条纹移动数反推出光程差的变化量,再结合折射率或样品厚度信息则可以计算出样品厚度或折射率的分布,从而检测出透明介质的平行度和均匀性.模拟仿真和光学实验均证明了本方法的可行性、准确性和稳定性.     

用Fe:LiNbO_3晶体的四波混频实时获得温度场的干涉分布

本文利用Fe:LiNbO_3晶体的四波混频现象,基于双曝光全息术原理,实时获得相位物体(即温度场)的干涉分布,并给出实验结果。一、前言四波混频(FWM)的相位共轭光学的出现,尤其是光折晶体,为全息术开避了一个新的领域。它不但为光学信息处理,诸如图象相减、边缘增强等,而且为全息干涉计量提供了一个重要的实时途径。我们在以前已报道过利用Fe:LiNbO_3晶体的简并四波混频实时地检测动态位相物体     

基于干涉条纹图像对比法测量微位移

研究了基于迈克尔逊干涉条纹对比法测量微位移的实验。用He-Ne激光器、反射镜和分束镜组成的干涉光路,其中一个反射镜固定在被测物体上,通过被测物体的移动带动反射镜移动使干涉光路发生变化,从而导致干涉条纹的改变。在形成干涉条纹的位置利用线阵CCD采集干涉条纹图像,用序列图像对比的方法对图像进行处理和计算,得出被测物体的微位移。实验表明利用序列图像对比的方法测量微位移,方法切实可行、测量准确度高、测量的精度能够达到微米量级。     

迈克耳孙干涉仪旋转样品法测量透明玻璃厚度

使用迈克耳孙干涉仪通过旋转样品测量透明玻璃厚度.与白光干涉原理测薄片厚度不同,实验通过改变在光的传播路径上垂直放置的透明玻璃与光传播方向的角度,使相干光的干涉条纹发生变化,利用干涉条纹与转过角度、透明玻璃厚度之间的关系,通过实验准确测量出透明玻璃的厚度.     

激光自混频干涉法测量表面粗糙度的研究

对半导体激光自混频干涉法测量表面粗糙度中的干涉效应进行了理论分析,推导了干涉信号与表面粗糙度的数学关系式,讨论了影响测量信号的因素及表征表面粗糙度的评定参数,即表面轮廓的方均根偏差。结果表明,随着加工表面粗糙度的降低,反射光的强度逐渐增加,被测物体表面的反射率越高,越有利于测量。     

基于条纹调制的透明物体表面缺陷检测方法

针对透明物体后表面的寄生反射对单视角下表面缺陷光学检测的干扰问题，提出了基于条纹调制的透明物体表面缺陷检测方法，以消除后表面的寄生反射。为分析透明物体对入射光通量的影响，建立了基于条纹投影的透明物体光学成像模型。该模型揭示了透明物体双表面的形貌变化可以由双形貌参数来表征，且双参数共同构成余弦分布的平均强度和对比强度。提出了一种多频时域迭代策略以估计表面的双形貌参数，通过投影多频条纹序列到待测透明物体表面，并通过数值拟合投影条纹频率和调制强度之间的余弦分布，从振幅中提取表面的双形貌参数。实验结果证明所提出的检测方法能够在消除后表面寄生反射干扰的同时准确识别和定位出透明物体的表面缺陷。     

SBN:Cr晶体的光折变四波混频相位共轭特性实验研究

从实验上研究了同成分SBN:Cr晶体在He-Ne激光照射下的四波混频相位共轭特性.首先测量了在不同泵浦光与信号光光强比m及不同光束夹角2θ的情况下,晶体的四波混频相位共轭反射率R随泵浦光强比p的变化关系.其次测量了泵浦光束与信号光束耦合方向对SBN:Cr晶体的四波混频相位共轭特性的影响,并就两种不同掺杂浓度的晶体样品进行了对比,所得实验结果与理论分析基本一致.最后,利用SBN:Cr晶体四波混频相位共轭特性进行了图象畸变消除实验.     

用短相干光源测量平行平板玻璃的光学均匀性

为了解决传统干涉绝对测量法不能测量前后表面平行度很好的光学玻璃和晶体均匀性问题,提出了在以短相干光为光源的泰曼-格林干涉仪上,通过调整参考光路的光程,使被测样品的前后表面分别处在零光程差位置,这样从样品两面反射回来的光就不会同时满足和参考光相干涉的条件,从而解决了前后面的反射光干涉混叠问题.用虚光栅移相莫尔条纹法处理采集到的干涉图,得到位相数据,代入绝对测量法的计算公式,得出待测样品的折射率分布.对厚度为13 mm、口径为75 mm的光学平板玻璃进行测量.结果表明,光学均匀性检测准确度可达到2.6×10－6,被测样品折射率偏差的峰谷值为Δnpv=6.06×10－6,均方根值为Δnrms=8.96×10－7.     

透射波前测量中寄生条纹的产生原理及移除方法

在平行平板类元件透射波前的测量过程中,在干涉强度图上有时会产生寄生条纹,会给透射波前的测量引入较大的误差。阐述了寄生条纹的产生机理,仿真分析了寄生条纹对透射波前测量误差的影响,介绍了调节移除寄生条纹的方法。对一平板类透射元件进行了实验对比,分别测量了在具有寄生条纹时和移除寄生条纹后的透射波前。根据对比结果可以看出,该调节方法能有效地消除寄生条纹对透射波前测量的影响,使测量结果能更真实地反应出元件透射波前的分布。     

单元件干涉数字全息的光线追迹模型

基于棱镜对的单元件干涉可以获得透射物体的相位信息,即数字全息,具有结构紧凑、干涉条纹稳定、测量精度高等优点。采用光线追迹方法,综合考虑了棱镜对的方位角旋转、斜面偏心等参数,建立了光线追迹等效模型,仿真了数字全息干涉条纹,给出了条纹密度变化及倾斜的解析表达式。针对单模和多模光纤等微结构光学元件,获得了干涉数字全息图,并反演出其折射率分布。搭建了显微成像单元件干涉实验装置,获得了实际测量干涉图样,实验与仿真结果一致,证明了本模型的有效性。     

Holographic reverse shearing interferometry with high measurement sensitivity

The possibility of studying phase objects by reverse shearing interferometry with high measurement sensitivity is demonstrated. Phase objects are studied in two stages. In the first stage, holographic reverse shear interferograms are measured with and without an object under nonlinear conditions with tuning to frequent reference fringes. In the next stage, these interferograms are optically processed to obtain two interference patterns. The behavior of the interference fringes is the same as in the case of conventional double-beam interferometry with a standard reference wave. The increase in the measurement sensitivity in the thus-obtained interference patterns is due to the use of higher diffraction orders reconstructed from the holographic interferograms. A possibility of controlling the width of interference fringes is considered. The results of experimental approval of this technique are presented.     

Two-wavelength dispersion holographic lateral-shift interferometry

It is demonstrated that two-wavelength holographic interferometry with a small lateral shift in a grating interferometer makes it possible to study the dispersion characteristics of transparent objects using probe beams with arbitrary wavelengths. Interference patterns reconstructed represent fringes on the reconstructed image of the object, which characterize the value of the derivative of the difference between the refractive indices of the medium under study at the probe wavelengths along the direction of the shift. The results of experiments employing the method proposed are presented.     

N-point spatial phase-measurement techniques for non-destructive testing

Spatial phase-measurement interferometry techniques commonly used in non-destructive testing are affected by a number of fundamental error sources. This paper focuses on the major limitations for phase calculations using standard N-point algorithms. These limitations include: the wrong carrier frequency, unequally spaced fringes, detector non-linearities and variations in the dc fringe intensity. The character and magnitude of these errors are quantified by using computer simulations. A displacement measurement of a bent plate using different algorithms on the same data shows that practical limitations are unequally-spaced fringes and variations in dc intensity and fringe visibility. These errors limit the resolution of this type of measurement to about a tenth of a wave r.m.s.     

Multi-frequency lateral shear interferometer system for simultaneous measurement of thickness and three-dimensional shape

This Letter demonstrates a novel lateral shear interferometer system for simultaneous measurement of three-dimensional(3D) shape and thickness of transparent objects. Multi-frequency fringe patterns can be created by tilting mirrors at different inclination angles. With a single camera, the multi-frequency fringes are recorded in one image. The phase-shift of the fringes can be generated synchronously only by moving a plane-parallel plate along an in-plane parallel direction. According to the feature of transparent materials, the thickness and 3D shape can be reconstructed simultaneously based on the relationship between the in-plane displacement and their characteristics. The experiment was conducted on a thin transparent film subjected to a shearing force,which verifies the feasibility of the proposed system.     

Simultaneous measurement of surface shape and absolute optical thickness of a glass plate by wavelength tuning phase-shifting interferometry

The absolute optical thickness and the surface shape of a glass plate of 7-in. square and 3.1mm thick was simultaneously measured by three-surface interferometry using a wavelength tuning Fizeau interferometer. The wavelength of a tunable diode laser is scanned linearly from 632 to 642 nm, at which the initial and the final phases of the interference fringes for the surface shape and for the optical thickness were separated and measured by a tunable phase-shifting technique. The number of phase variations in the interference fringes during the scanning is counted by discrete Fourier analysis, in which systematic errors caused by a nonlinearity in the wavelength scanning is corrected by a correlation analysis between the observed and theoretical interference fringes. Experimental results demonstrate that the systematic errors in the measured value were 15 nm for the surface shape and 0.6 μm for the absolute optical thickness.     

High-sensitivity holographic interferometry method for studying transparent objects with small transverse size

A new method for studying transparent objects with a small transverse size is considered. The method is based on lateral-shift holographic interferometry combining the displacement of the transparent object under investigation between the recordings of a pair of holographic interference patterns and their optical treatment. The interference patterns of the transparent object under investigation with a lateral shift equal to or larger than the linear size of the object are equivalent to the interference patterns obtained in a double-beam interferometer with a reference wave. In addition, such patterns are characterized by a higher sensitivity of imaging of optical inhomogeneities of the object under investigation. The results of experiments on testing this method for monitoring optical inhomogeneities of the active medium crystal of a solid-state laser are reported. The resultant interference patterns depict optical inhomogeneity of the crystal with a sensitivity 12 times higher.     

散射板干涉仪的原理

阐明散射板干涉仪的干涉机制，推出条纹的轨迹方程，讨论条纹的性质及其依存条件。     

Display of tilt information of vibrating object in time average mode using lateral shearing interferometry and interferometric grating

We have experimentally demonstrated vibration analysis of a reflecting object in time-average mode using shearing interferometry and interferometric grating. Experimental results show that time-average moiré fringes, formed between fringe pattern reflected from object and sinusoidal grating are modulated spatially by the amplitude of vibrating tilt. From the experimental results, information regarding tilt of vibrating objects can be determined.     

Measurement of residual wedge angle with a reversal shear interferometer

A technique for determination of residual wedge angle of high optical quality transparent parallel plate using a reversal shear interferometer-based optical system has been discussed. In this technique the parallel plate to be tested is used to introduce angular tilt in the preset two-beam interference fringes of a reversal shear interferometer. The parallelism is calculated from the angular tilt of the fringes. The technique is more sensitive compared to techniques using Fizeau interferometer and is most suitable for highly parallel transparent plate with very low residual wedge angle.     

Double sinusoidal phase modulating laser diode interferometer for thickness measurements of transparent plates

A double sinusoidal phase modulating (SPM) laser diode interferometer for thickness measurements of a transparent plate is presented. A carrier signal is given to the interference signal by using a piezoelectric transducer, and the SPM interferometry is applied to measure the thickness of a transparent plate. By combining the double-modulation technique with the Bessel function ratio method, the measurement error originating from light intensity fluctuations caused by the modulation current can be decreased greatly.The thicknesses of a glass parallel plate and a quartz glass are measured in real time, and the corresponding experimental results are also given.