气压对大面积等离子体片电子密度分布的影响

利用脉冲磁约束线形空心阴极放电装置,在15mT磁场约束下,产生了持续时间为200μs、峰值放电电流为3A、面积为60cm×60cm的大面积等离子体片。采用快帧法和旋转空心阴极法,在90~210Pa内,利用朗缪尔探针首次获得了不同气压的等离子体片的厚度向电子密度分布及其演化构成的二维分布图;研究了在同等峰值放电电流条件下,等离子体片达到最大厚度向峰值电子密度时,气压对所需放电时间、最大厚度向峰值电子密度及电子密度半高宽的影响。结果表明:在相同的峰值放电电流条件下,等离子体片达到最大厚度向峰值电子密度的时间随气压的降低而减小;气压越低,最大厚度向峰值电子密度越大,电子密度半高宽越小。     

微空心阴极维持辉光放电的时空特性

利用流体模型在氩气环境下模拟得到了微空心阴极维持辉光放电的电势、电子密度、离子密度和电场等放电参数的时空分布特性.模拟结果表明,微空心阴极维持辉光放电在不同的时刻表现出不同的放电模式.放电的初始阶段为汤生放电模式;第二阶段为汤生放电模式向空心阴极效应放电模式过渡阶段,微空心阴极维持辉光放电得到初步发展;第三阶段为空心阴极效应放电模式,微空心阴极维持辉光放电区逐渐形成;第四阶段为放电的稳态阶段.在稳态放电状态下,空心阴极腔内的电子和离子密度峰值达到10~(15)cm~(-3),位于空心阴极腔的中心位置,维持辉光放电区电子密度可以达到10~(13)cm~(-3).研究结果同时表明,微空心阴极放电促进了微空心阴极维持辉光放电的形成;同时微空心阴极维持辉光放电也促进了微空心阴极放电的发展.另外,实验研究表明,第二阳极对微空心阴极腔内外的电势、电场和带电粒子密度的分布均有重要影响,并且对维持辉光放电区域的影响更加明显.第二阳极是形成维持辉光放电的必要条件.     

高气压空气环状感性耦合等离子体实验研究和参数诊断

等离子体的电子密度分布, 电子碰撞频率分布, 覆盖面积, 厚度是影响其覆盖目标电磁散射特征的关键属性. 对此, 本文开展了在20 cm×20 cm×7 cm石英腔内感性耦合等离子体(ICP)的放电实验, 观察了在高气压条件下, 空气ICP的环形放电形态, E-H模式跳变现象和分层结构, 测量了其电负性核心区和电正性边缘区宽度和厚度随功率、气压的变化趋势, 并通过COMSOL Multiphysics对平板线圈磁场强度分布的分析和电负性气体扩散理论给予上述现象合理的解释, 同时, 利用微波透射干涉法测量了核心区域的电子密度随功率和气压的变化曲线, 利用理论模型计算了边缘区域的电子密度分布, 最后通过辅助气体Ar发射谱线的玻尔兹曼图形法得到了核心区和边缘区的电子激发温度.     

电极构形对形成大面积放电均匀性影响

 设计并制作了空心阴极、钮扣阴极、针阴极和条形阴极，利用CCD照相，在5cm×5cm口径范围内，分别对四种阴极放电的空间均匀性进行了研究。实验表明，在预电离电压800V，主放电电压3kV和气体气压约30Pa的条件下，利用空心阴极放电，能够获得空间较为均匀的放电等离子体。放电等离子体可以用作普克尔盒电光开关的等离子体电极。     

流体-亚稳态原子传输混合模型模拟空心阴极放电特性

利用流体-亚稳态原子传输混合模型研究了氩气矩形空心阴极放电稳态时的参数. 数值计算得到了压强为10 Torr时的电势、电子、离子和亚稳态氩原子密度以及电子平均能量的分布. 结果表明电子和离子密度峰值为4.7×10¹² cm^-3, 亚稳态原子密度峰值为2.1×10¹³ cm^-3. 本文同时对流体-亚稳态原子传输混合模型和单一流体模型模拟得到的放电参数进行了比较. 结果表明, 分步电离是新电子产生的重要来源, 亚稳态原子对空心阴极放电特性有重要影响. 与单一流体模型相比, 混合模型计算得到的电子密度升高, 阴极鞘层宽度和电子平均能量降低. 关键词： 空心阴极放电 流体-亚稳态原子传输模型 电子密度 分步电离     

大气压微等离子体射流电子密度研究

采用微空心阴极放电装置,利用光学方法和电学方法研究了大气压流动Ar和N₂混合气体中产生的微等离子体射流特性。研究发现,随着电源输入功率增大到一定数值,微空心阴极装置中两个电极间气体发生击穿,通过击穿气隙气体的流动会沿着气流方向产生最大为4 mm的等离子体射流。放电电流为准连续的脉冲放电形式,其中放电电流脉冲宽度约为0.1 μs。分别利用爱因斯坦方程和等离子体发射光谱中谱线的Stark展宽方法计算了电子密度。结果发现,2种计算方法得出的微等离子体射流的电子密度均在1015·cm-3的量级。研究还发现,功率对微等离子体射流电子密度影响不大。利用气体击穿理论,对以上结论进行了定性分析。     

微空心阴极维持放电的实验研究

为在高气压下形成大体积均匀等离子体,将微空心阴极放电(MHCD)作为等离子体阴极,引入另一阳极而设计为微空心阴极维持放电(MCSD)的发生装置.实验研究了MCSD的产生放电条件,通过在氩气中添加少量氮气,分析氮分子第一正带系发射光谱的方法测量了MCSD中羽流区不同位置的气体温度.研究表明,当等离子体阴极电流增加到一个临...     

N2微空心阴极放电特性及其阴极溅射的PIC/MC模拟

采用两维PIC/MCC模型模拟了氮气微空心阴极放电以及轰击离子 (N₂⁺,N⁺) 的钛阴极溅射. 主要计算了氮气微空心阴极放电离子 (N₂⁺,N⁺) 及溅射原子Ti的行为分布, 并研究了溅射Ti 原子的热化过程. 结果表明: 在模拟条件下, 空心阴极效应是负辉区叠加的电子震荡; 在对应条件下, 微空心较传统空心放电两种离子 (N₂⁺,N⁺) 密度均大两个量级, 两种离子的平均能量的分布及大小几乎相同; 在放电空间N⁺的密度约为N₂⁺的1/6, 最大能量约大2倍; 在不同参数 (P, T, V)下, 轰击阴极内表面的氮离子(N₂⁺,N⁺)的密度近似均匀, 其平均能量几乎相等; 从阴极溅射出的Ti原子的初始平均能量约6.8 eV, 离开阴极约0.15 mm处几乎完全被热化. 模拟结果为N₂微空心阴极放电等离子体特性的认识提供了参考依据. 关键词： 微空心阴极放电 PIC/MC模拟 2等离子体')" href="#">N₂等离子体     

10-2～105 Pa气压范围的氦等离子体光谱分析

采用三种实验装置(介质阻挡放电装置、空心阴极放电装置和彭宁放电装置)分别测量了不同压强范围内氦等离子体的发射光谱.通过对氦等离子体发射光谱的分析,已观察到一个共同的特点,就是在三种放电条件下产生的氦等离子体中31P1→21S0的谱线强度总是最强,可以推测亚稳态氦原子的含量相当显著,但不同的装置也有不同的特点,介质阻挡放电装置能够产生准辉光放电,谱线中氦原子的谱线强度很低,而空心阴极放电与彭宁放电装置能够产生稳定均匀的等离子体,且发射足够强的光辐射.我们已对所拍摄的光谱的谱线都进行了辨认,所有结果表明原子发射光谱分析法是研究不同条件下氦等离子体状态的一种十分有效的手段.     

开放空间等离子体对微波传输影响的模拟研究

以氮气为背景气体,采用脉冲式微波产生等离子体,使用另外一束连续波作为传输模拟对象,并基于扩散效应的全域模型分析等离子体电子温度与电子密度的演化过程。实验中放电气压为300Pa,实验结果表明:在微波脉冲开始之后极短的时间内,连续波接受信号发生剧烈衰减;而在微波脉冲结束后,连续波接受信号则缓慢恢复。微波传输主要受到等离子体电子密度的影响,而全域模型的计算结果显示等离子体电子密度在开始放电时迅速上升,甚至高于放电微波频率对应的临界密度,在放电微波脉冲结束时电子密度则缓慢下降。这说明开放空间中等离子体在失去能量维持之后,由于扩散效应占主导作用,电子密度不会迅速下降,此时连续波依然会被阻碍,直到电子密度下降到连续波频率对应的临界密度以下。     

Inhomogeneous extended hollow cathode discharge for raising the current density in a forevacuum plasma source of a ribbon electron beam

The plasma parameters and the emissivity of a ribbon electron beam source based on a discharge with an inhomogeneous extended hollow cathode are measured. A constriction in the cathode cavity increases the plasma density near the emitting area boundary, which adds to the electron current density in the beam. The reason for the above effect is the formation of the plasma density distribution nonuniform across the cavity with a maximum in the middle. This maximum is caused primarily by a plasma electron flow from the constriction, which is generated by the electric field and is directed toward a slit emission-extracting aperture.     

碳纳米管阴极的短脉冲爆炸场发射与等离子体膨胀

采用碳纳米管制备了一种强流电子束发射阴极,并对碳纳米管阴极在双脉冲条件下的强流发射性能进行了研究.在双脉冲条件下获得了245 A/cm²的强发射电流密度,阴极的开启时间约为40 ns.采用高速分幅相机和CCD相机对强流电子束在空间和时间的分布进行了研究.研究表明连续脉冲实验时,离子体及其膨胀对发射电子束的强度和分布影响很大,双脉冲时脉冲间隔时间内等离子体的膨胀速率约为8.17 cm/μs.等离子体形成时没有优先位置,电子束发射的局部增强位置是随机的.结果表明碳纳米管阴极可以作为强流阴 关键词： 碳纳米管 爆炸场发射 等离子体膨胀 强流电子束     

Production of a large area diffuse arc plasma with multiple cathode

An arc channel at atmospheric pressure tends to shrink generally. In this paper, a non-transferred DC arc plasma device with multiple cathode is introduced to produce a large area arc plasma at atmospheric pressure. This device is comprised of a 42-mm diameter tubular chamber, multiple cathode which is radially inserted into the chamber, and a tungsten anode with a nozzle in its center. In argon/helium atmosphere, a large area and circumferential homogenous diffuse arc plasma, which fills the entire cross section surrounded by the cathode tips, is observed. Results show that the uniformity and stability of diffuse arc plasma are strongly related to the plasma forming gas. Based on these experimental results, an explanation to the arc diffusion is suggested. Moreover, the electron excitation temperature and electron density measured in diffuse helium plasma are much lower than those of constricted arc column, which indicates the diffuse helium plasma probably deviates from the local thermodynamic equilibrium state. Unlike the common non-transferred arc plasma devices, this device can provide a condition for axial-fed feedstock particles. The plasma device is attempted to spheroidize alumina powders by using the central axis to send the powder. Results show that the powder produced is usually a typical hollow sphere.     

Development of a ferroelectric cathode diode

As a promising kind of high current cold cathode,the Ferroelectric Cathode(FEC)has several significant advantages,such as a controllable trigger time,lower vacuum requirement and large emitting area fabricability.The emitting current density of the FEC fabricated at Tsinghua University was more than200 A/cm2.In order to make the ferroelectric cathode into practical applications,a high current density diode using a ferroelectric cathode was designed,based on the PIC simulation.The performance of the FEC diode was investigated experimentally.When the applied diode voltage was 60 kV,a current density of more than250 A/cm2 was obtained,and the current density distribution was also measured.     

Study of Intense Electron Beams Produced by High-Voltage Pulsed Glow Discharges

We report the generation of high-current-density (20 A/cm2) pulsed electron beams from high-voltage (48-100 kV) glow discharges using cathodes 7.5 cm in diameter. The pulse duration was determined by the energy of the pulse generator and varied between 0.2 ?s and several microseconds, depending on the discharge current. The largest electron beam current (900 A) was obtained with an oxidized aluminum cathode in a helium-oxygen atmosphere. An oxidized magnesium cathode produced similar results, and a molybdenum cathode operated at considerably lower currents. A small-diameter (<1 mm) well-collimated beam of energetic electrons of very high current density (>1 kA/cm2) was also observed to develop in the center of the discharge. Electrostatic probe measurements show that the negative glow plasma density and the electron beam current have a similar spatial distribution. Electron temperatures of 1-1.5 eV were measured at 7 cm from the cathode. The plasma density (8.5 · 1011 cm-3 at 450 A) was found to depend linearly on the discharge current. In discharges at high currents a denser and higher temperature plasma region was observed to develop at approximately 20 cm from the cathode. We have modeled the process of electron beam generation and predicted the energy distribution of the electron beam. More than 95 percent of the electron beam energy is calculated to be within 10 percent of that corresponding to the discharge voltage.     

栅网结构碳纳米管冷阴极电子光学系统的设计

基于碳纳米管冷阴极实验测试结果,采用三维粒子模拟软件对大面积碳纳米管冷阴极的场致发射特性进行了仿真,研究了栅网结构不同尺寸对碳纳米管冷阴极场致发射特性及电子注通过率的影响,并在此基础上设计出面积压缩比为18,输出电流密度为14.9 A/cm2的带状注电子枪。为进一步研制碳纳米管冷阴极电子光学系统和相关微波、毫米波电真空辐射源器件提供了技术基础。     

Determinations of plasma density and decay time in the hollow cathode discharge by microwave transmission

The microwave （MW） transmission method is employed to measure both the plasma density and the plasma decay time in the hollow cathode discharge （HCD） in argon at low pressure. The plasma density in DC-driven or pulsed HCD is on the order of 1012 cm-3, which can block the X-band MW effectively. In the case of pulsed HCD, the MW transmittance shows the same waveform as the pulsed current during the rising edge if the driving frequency is low, but with a longer delay during the falling edge. The MW transmittance reaches a constant low level when the driving frequency is high enough. The plasma decay time in the HCD system is measured to be about 100 μs around a pressure of 120 Pa. The ambipolar diffusion is considered to be the major mechanism in the decay process.     

Parameters of the Plasma Sheet Generated by a Sheet Beam in the Range of Forvacuum Pressures

Results of experimental investigations into the spatial distribution of the parameters of the plasma (electron concentration and temperature) generated by a sheet beam with energy up to 2 keV in argon at pressures from 6 to 9 Pa are presented. The electron beam was produced by a source with a plasma cathode specially designed for emission of beams in the range of forvacuum pressures. It is demonstrated that the character of distribution of the plasma parameters is caused by the corresponding distribution of the electron current density over the beam cross section, and the plasma parameters themselves also noticeably depend on the gas pressure and the magnetic field. A model of ionization processes that provides satisfactory agreement between the calculated and experimental dependences is suggested.