电子束蒸发制备YBCO超导薄膜研究

采用电子束沉积制备YBCO超导薄膜,研究了760℃—840℃的不同退火温度下高温热处理对YBCO薄膜双轴织构、表面形貌及超导性能的影响。超导临界电流密度测试、X射线衍射(XRD)和扫描电镜(SEM)的结果表明,退火温度在在800℃时,YBCO薄膜具有良好的织构和平整致密的表面形貌,在77K自场下的临界电流密度J可达4.2×106/cm2。     

短时高温热处理工艺对YBCO超导薄膜结构和性能的影响

通过无氟高分子辅助金属有机物沉积法(PA-MOD)制备了YBCO超导薄膜,研究了785～845℃的不同短时高温热处理对YBCO薄膜双轴织构、表面形貌及超导性能的影响.X射线衍射(XRD)和扫描电镜(SEM)的结果表明,经800℃短时高温处理的YBCO薄膜具有良好的双轴织构和平整致密的表面形貌.物性测量(Quantum-DesignSQUID)的结果表明,该薄膜超导转变温度达到90K,77K自场下的临界电流密度(Jc)为2MA/cm2.     

3英寸双面YBCO高温超导外延薄膜研究

本文采用倒筒直流溅射方法(ICS)结合基片变速双轴旋转方式原位生长Φ3英寸双面YBCO高温超导外延薄膜.膜厚分布最大偏差小于10%,薄膜样品的中心与边缘部分的Tc0均达到90K,ΔTc≤0.3K,FWHM(005)≈0.2°,Rs(10GHz,77K)≈0.8mΩ,Jc值分布在2.2～3.1MA*cm-2之间,表明样品均匀性良好.     

TFA-MOD方法制备YBCO超导薄膜研究

采用TFA-MOD方法在LaAlO3(001)单晶基片上制备了性能良好的YBCO超导薄膜:临界电流密度(Jc)可达3MA/cm2(77K,0T),超导转变温度Tc≈90K,转变宽度ΔTc=0.5K,其一次涂层厚度达338nm.通过X射线衍射(XRD)分析表明YBCO具有纯c-轴取向、无a-轴取向的晶粒存在.ω扫描分析表明该YBCO薄膜具有很好的面外外延性,其摇摆曲线的半高宽(FWHM)为0.653°. 用SEM分析也表明膜的表面无裂纹存在,表面平整,没有a轴晶粒生长.     

不同气氛下LaMnO_3缓冲层后退火效应研究北大核心CSCD

在第二代高温涂层导体离子束辅助沉积技术(IBAD)路线中,LaMnO_3(LMO)作为超导层的生长面,直接影响到YBCO的性能,为改善LMO的织构、形貌等,对磁控溅射法制备的LMO薄膜进行了后退火处理,本实验系统研究了后退火处理对LMO物相、织构、表面形貌等的影响,并进一步研究了后退火效应对超导层的影响.结果表明后退火处理有助于改善LMO表面形貌,优化LMO微结构,在潮湿Ar-5%H2气氛下,LMO缓冲层改善率最高,在经湿Ar-5%H2后退火处理的LMO缓冲层上制备的超导层具有最佳的性能,在77K自场下,临界电流密度达到1.2 MA/cm^2.     

不同气氛下LaMnO_3缓冲层后退火效应研究

在第二代高温涂层导体离子束辅助沉积技术(IBAD)路线中,LaMnO_3(LMO)作为超导层的生长面,直接影响到YBCO的性能,为改善LMO的织构、形貌等,对磁控溅射法制备的LMO薄膜进行了后退火处理,本实验系统研究了后退火处理对LMO物相、织构、表面形貌等的影响,并进一步研究了后退火效应对超导层的影响.结果表明后退火处理有助于改善LMO表面形貌,优化LMO微结构,在潮湿Ar-5%H2气氛下,LMO缓冲层改善率最高,在经湿Ar-5%H2后退火处理的LMO缓冲层上制备的超导层具有最佳的性能,在77K自场下,临界电流密度达到1.2 MA/cm~2.     

蓝宝石基片上制备双面Tl_2Ba_2CaCu_2O_8超导薄膜

在蓝宝石基片上,以CeO2为缓冲层制备了高质量的双面Tl2Ba2CaCu2O8(Tl-2212)超导薄膜。以金属铈靶作为溅射源生长了c轴取向的CeO2缓冲薄膜,并对CeO2薄膜进行了高温处理,有效改善了其结晶质量和表面形貌。采用两步法制备了双面的Tl-2212超导薄膜。XRD测试显示,薄膜为纯的Tl-2212相,且其晶格c轴垂直于衬底表面。超导薄膜的Tc为106K,Jc(77K,0T)为3.5MA/cm2,微波表面电阻Rs(77K,10GHz)为390μΩ。     

蓝宝石衬底上射频溅射法生长CeO2外延薄膜研究

实验采用射频溅射法在(1 102)蓝宝石基片上制备(00l)取向CeO2外延薄膜.低温、低溅射功率都会导致CeO2薄膜呈(111)取向生长.当基片温度在700℃～750℃,溅射功率在100～150W范围内能够制备得到高质量(00l)取向CeO2缓冲层.所制备的CeO2薄膜具有优良的面内面外取向性和平整的表面.用这些缓冲层作为生长面制备得到的YBa2Cu3O7-δ(YBCO)超导薄膜为完全(00l)取向,且面内取向性良好,并具有优越的电学性能:其临界转变温度(Tc)为89.5K,临界电流密度Jc(77K,0T)约1.8×106 A/cm2,微波表面电阻Rs(77K,10GHz)大约为0.50mΩ,能较好的满足微波器件应用中的需要.     

溅射法快速沉积YBCO超导薄膜的研究北大核心CSCD

溅射法制备高温超导YBa2Cu3O7-δ(YBCO)薄膜材料目前存在的主要问题是沉积速率慢,制备效率低,大面积薄膜均匀性差.本文中,设计了多工位盒型靶直流溅射镀膜系统,提高了YBCO薄膜沉积速率和制备效率,一次工艺流程可沉积六片产品,总薄膜沉积速率最高可到250nm/h.基片自转与公转相结合,提高了薄膜的面内均匀性,同时研究了公转速度与自转速度的关系以及它们对薄膜生长的关系,发现只有在基片公转速度合适的情况下才能生长出性能好的薄膜.LaAlO3(LAO)单晶基片上YBCO薄膜临界电流密度超过2.8MA/cm2(77K,500nm,0T),薄膜微波表面电阻Rs(10GHz,77K)﹤0.2mΩ,1.8英寸内薄膜面内厚度起伏小于3%,双面薄膜一致性好,能够满足微波器件应用的要求.     

喷雾沉积热分解法在SrTiO3和织构的Ag基底上制备YBa2Cu3O7-x涂层超导膜

本文研究了用喷雾沉积热分解法在(110)Ag单晶、{110}<011>Ag带、(100)SrTiO3三种不同的基底上制备YBa2Cu3O7-x涂层超导薄膜.通过对溶液成份,载气流量,沉积温度,退火时间等条件的系统研究,我们发现上述参数与薄膜的成份,表面形貌,织构以及超导性能有密切的关系.在Ag单晶基底上所获的YBCO薄膜具有很强的平面双轴织构,起始转变温度达到了90K,Jc值超过了104A/cm2(77K,0T);改进试验装置后,以织构Ag为基底,制备出了15cm长的YBCO超导带材,Jc值达到了104A/cm2(77K,0T).同时,我们发现温度梯度在热分解区间内对薄膜的形成起到了重要的作用.随后我们又在喷雾加热系统中附加一个金属加热圆筒,以改善加热区间的温度梯度,薄膜的性能得到了明显的提高.在(100)SrTiO3上的YBa2Cu3O7-x薄膜,(102)极图的FWHM值达到了0.70°,薄膜的起始超导转变温度为91K(ΔTc=1.5K),Jc值接近105A/cm2.     

热处理对MgO基片的表面形貌以及对CeO_2和Tl-2212薄膜生长的影响

研究了MgO基片在高温退火时表面形貌和表面结构的变化,以及它对CeO2缓冲层和Tl-2212超导薄膜生长的影响。原子力显微镜(AFM)研究表明,在流动氧环境中1100℃温度下退火,MgO的表面首先由未退火时的皱褶形貌,演化为光滑表面,随着退火时间的延长,表面形貌最终演化为具有光滑基底的独立生长峰结构。XRD测试表明,通过高温热处理可以大幅度提高MgO基片表面结晶的完整性。在1100℃温度下热处理8小时的MgO基片上可以生长出具有高度c轴取向的CeO2(001)缓冲层。然后在此缓冲层上制备了厚度为500nm的外延Tl-2212超导薄膜,其临界转变温度(Tc)达到108.6K,液氮温度下临界电流密度(Jc)为2.8mA/cm2,微波表面电阻Rs(77K,10GHz)约为360.9μΩ。     

Fabrication of YBCO／YSZ and YBCO／MgO thick films using electrophoretic deposition with top-seeded melt growth process

Superconducting thick films were grown on single crystals MgO and YSZ by electrophoretic deposition with Y_2BaCuO_5(Y211) addition. YBCO thick films were then accomplished by sintering the precursor films above the peritectic temperature. Single crystals of MgO (3×3×0.5 mm^3) were used as top-seed to control crystal structure of the thick films. As shown by scanning electron microscopy, the morphologies of YBCO/YSZ and YBCO/MgO thick films are spherulitic texture and platelet type. The critical temperature is ～89 K for the YBCO/YSZ thick film; the onset transition temperature is 86.4 K and the transition width is ～3 K for YBCO/MgO thick film. The critical current densities (as determined by Bean model) are, in A/cm^2, 3870 (77 K) for YBCO/YSZ thick films and 2399 (77 K) for YBCO/MgO thick films, which are comparable to the best J_c reported of the thick films prepared by the same method.     

High critical current density YBa2Cu3O7−δ tapes prepared by the surface-oxidation epitaxy method

YBa₂Cu₃O_7−δ (YBCO) films with high critical current density (J_c) were successfully fabricated on nickel tapes buffered with epitaxial NiO. NiO was prepared on the textured nickel tape by the surface-oxidation epitaxy (SOE) method. We have reported so far a critical temperature (T_c) of 87 K and J_c=4–6×10⁴ A/cm² (77 K, 0 T) for the YBCO films on NiO/Ni tapes. To enhance the superconducting properties of the YBCO films on the SOE-grown NiO, depositions of thin oxide cap layers such as YSZ, CeO₂, and MgO on NiO were investigated. These oxide cap layers were epitaxially grown on NiO and provided the template for the epitaxial growth of YBCO films. Substantially improved data of T_c=88 K and J_c=3×10⁵ A/cm² (77 K, 0 T) and 1×10⁴ A/cm² (77 K, Hc, 4 T) were obtained for YBCO film on NiO, by using a MgO cap layer with a thickness of 50 nm. The method described in this paper is a simple way to produce long YBCO tape conductors with high-J_c values.     

c-Axis orientation control of YBa2Cu3O7−x films grown on inclined-substrate-deposited MgO-buffered metallic substrates

Biaxially textured YBa₂Cu₃O_7−x (YBCO) films were grown on non-textured metal substrates with inclined-substrate-deposited (ISD) MgO as template. The biaxial texture feature of the films was examined by X-ray pole-figure analysis, φ-scan, and 2θ-scan. A tilt angle of 32° of the MgO[001] with respect to the substrate normal was observed. Epitaxial growth of YBCO films with c-axis tilt angle of 32° with respect to the substrate normal was obtained on these substrates with SrTiO₃(STO) as buffer layer. Whereas, by choosing yttria-stabilized ZrO₂ and CeO₂ instead of STO as buffer layer, a c-axis untilted YBCO film was obtained. Higher values of T_c=91 K and J_c=5.5×10⁵ A/cm² were obtained on the c-axis untilted YBCO films with 0.46 μm thickness at 77 K in zero field. Comparative studies revealed a unique role of CeO₂ in controlling the orientation of the YBCO films grown on ISD-MgO buffered metal substrates.     

在金属基片上激光沉积YBCO超导薄膜

介绍了在金属基片上激光沉积缓冲层和ＹＢａ２Ｃｕ３ｏ７－ｘ（ＹＢＣＯ）高温超导薄膜的研究结果。在带ｙｔｔｒｉａ－ｓｔａｂｉｌｉｚｅｄ－ｚｉｒｃｏｎｉａ（ＹＳＺ）缓冲层的ＮｉＣｒ合金基片上,激光原位沉积出ＹＢＣＯ超导薄膜,薄膜的零电阻转变温度度４８Ｋ,７７Ｋ时临界电流密度约为２００Ａ／ｃｍ＾２;缓冲层的取向可以通过选择适当的沉积参数来改善;用扫描隧道电子显微镜对ＹＢＣＯ薄膜的微观结构分析表明：完善的螺     

Approaches to improving critical current density of YBCO superconducting thick films deposited by electrophoresis

The irreversibility field (Hirr) of Y-based superconductor is much higher than that of Bi-based superconductor. Y-based superconductor is capable of maintaining stable electrical currents in high magnetic field and electric field, so it is a better suited mate-rial for electric-current applications. Commonly, the Y-based tapes comprise a YBCO thick film deposited on a flexible substrate, typically with an intermediate buffer layer, and an overcoat of noble metal. In this process, the interm…     

Influence of MgO surface conditions on the in-plane crystal orientation and critical current density of epitaxial YBCO films

The effect of magnesium oxide (MgO) surface conditions on in-plane grain orientation and critical current density of epitaxial YBa₂Cu₃O₇ (YBCO) films was systematically investigated. The MgO substrates were either “as received” or stored for some time, cleaned using different methods and lithographically prepared for our step-edge junction devices. The YBCO films were grown via reactive thermal co-evaporation by Theva, GmbH. The surface characterisation of MgO substrates was studied using X-ray photoelectron spectroscopy (XPS). The in-plane grain orientation of the YBCO films was studied by means of X-ray diffraction (XRD) φ-scan and the critical current density was measured for the XRD scanned samples. The surface condition of the MgO substrates was found to have a strong influence on the in-plane grain orientation and the critical current density of the YBCO films. The MgO substrates with a degraded or contaminated surface gave rise to 45° grain misorientation in YBCO films and reduced the critical current density. A final process step using a low energy Ar ion beam etching (IBE) of the MgO substrates prior to the YBCO film deposition was found effective in removing the in-plane grain misorientation and promoting the growth of perfectly aligned c-axis YBCO films.     

平面靶直流溅射制备YBCO高温超导薄膜研究

开展了平面靶溅射法制备YBa2Cu3O7-δ(YBCO)高温超导薄膜工艺研究,以达到提高沉积速率的目的。通过增加工作气体总压(Pt),采用基片旋转达到离轴溅射模式,有效地克服了传统平面靶直流溅射法中高能粒子轰击和负离子反溅射现象。在两英寸LaA lO3(LAO)基片上成功外延生长得到了微观结构良好、电学性能优越(临界电流密度Jc=2.3/2.0mA/cm2)的双面YBCO高温超导薄膜。     

MgO衬底上YBa2Cu3O7-δ台阶边沿型约瑟夫森结的制备及特性

MgO衬底上的YBa2Cu3O7-δ(YBCO)台阶边沿型约瑟夫森结(台阶结)在高灵敏度高温超导量子干涉器(superconducting quantum interference device,SQUID)等超导器件研制方面具有重要的应用价值和前景.本文对此类YBCO台阶结的制备和特性进行了研究.首先利用离子束刻蚀技术和两步刻蚀法在MgO(100)衬底上制备陡度合适、边沿整齐的台阶,然后利用脉冲激光沉积法在衬底上生长YBCO超导薄膜,进而利用紫外光刻制备出YBCO台阶结.在结样品的电阻-温度转变曲线中,观测到低于超导转变温度时的电阻拖尾现象,与约瑟夫森结的热激活相位滑移理论一致.伏安特性曲线测量表明结的行为符合电阻分路结模型,在超导转变温度TC附近结的约瑟夫森临界电流密度TC随温度T呈现出(TC-T)^2的变化规律,77 K时JC值为1.4×10^5 A/cm^2.利用制备的台阶结,初步制备了YBCO射频高温超导SQUID,器件测试观察到良好的三角波电压调制曲线,温度77 K、频率1 kHz时的磁通噪声为250μΦ0/Hz^1/2.本文结果为进一步利用MgO衬底YBCO台阶结研制高性能的高温超导SQUID等超导器件奠定了基础.