基于DCT算法的种子点相位解包算法

移相干涉术由于其高精度被广泛应用在光学元件的面形测量上,而由移相算法得到的相位数据被包裹在[-π,π]之间。基于区域生长理论的相位解包算法(种子点法)可以高精度地实现连贯区域的相位解包,基于离散余弦变换的最小二乘解包(DCT)算法可以实现矩形区域的相位解包,而实际测量中,经常会碰到被测件的有效区域为非矩形的分离区域。因此,在分析前两种算法优缺点的基础上,提出了基于DCT算法的种子点相位解包算法。首先运用DCT算法对整个包裹相位进行解包,然后运用种子点法分别解包各分离区域,再通过DCT算法求得的种子点干涉级次实现各分离区域解包相位的统一。实验结果表明,该方法克服了种子点法和DCT算法的缺点,可以准确、快速地实现分离区域干涉图包裹相位的解包,且比这两种算法具有更好的稳定性和更高的精度。     

长干涉腔波长移相计算的自适应相位筛选法

波长移相干涉仪可用于大口径光学元件的测试。其移相量需经过标定方可采用定步长移相算法计算相位分布。在长腔长测试条件下,由于激光器的波长调谐驱动源的精度有限,采用定步长移相算法求解相位分布的精度不高。在分析干涉腔长和波面计算误差的基础上,提出了一种自适应相位筛选计算方法。根据电压-相位标定曲线采集多组周期干涉图,对干涉图中的光强值进行均匀分布抽样后,对其进行随机移相计算,求取每帧干涉图精确的步进移相量,从中筛选出移相量为π/2的四帧干涉图,利用四步移相计算公式求得精确的相位分布。实验结果表明,在波长移相干涉仪中运用该方法,可以很好地解决长腔长测试条件下的相位计算问题,与未进行筛选的计算结果比较,其测试精度得到了显著提高。     

基于物体像的干涉条纹图像中散斑噪声的识别方法

散斑噪声是激光干涉时的普遍现象,其覆盖被测表面对应区域的形状信息,造成测量误差。针对斜入式激光干涉测量中散斑噪声的特点,提出一种基于物体像的散斑噪声的识别方法。该方法通过统计物体像中有效测量区域和背景区域内灰度分布的特点,自动计算出判定散斑噪声的上下阈值。基于物体像与干涉条纹图像间微米级的映射关系,得到干涉条纹图像中散斑噪声的位置。设计了相关实验,对干涉条纹图像中识别出的散斑噪声区域进行修补,消除了包裹相位图中一个条纹周期内相邻像素点间大于π的相位突变。     

FFT动态相位重建算法的滤波窗影响分析

为了优化相位重建算法，针对波面干涉图的傅里叶频谱，分析了不同滤波窗口的分布特征和频谱响应，通过计算机仿真和实验测试，确定了FFT动态相位重建算法的最佳滤波窗口类型。其中处理仿真干涉图重建的波面与原始波面的波面峰谷值残差为0.008 5λ，波面均方根值残差为0.000 1λ；处理实验干涉图获得的波面与移相干涉测量法获得的波面峰谷值残差为0.009 3λ，波面均方根值残差为0.000 5λ。结果表明:选取Hamming窗进行滤波处理并重建的相位经拟合后得到的波面较参考波面的面形残差最小，相位重建精度优于0.01λ，可进一步应用于大口径光学元件的测量中。     

基于样本块匹配的干涉图延拓方法

在快速傅里叶变换(FFT)方法处理单幅干涉图原理的基础上,提出一种基于样本块匹配的干涉图延拓方法,利用干涉图像的可信度和等照度线特征,来确定待填充块的优先权,然后在干涉图的已知区域寻找与待填充块最相似的样本块来进行填充。充分利用了干涉图的条纹特征,结合梯度变化方向有效地合成纹理信息,具有很好的延拓效果。最后将该干涉图延拓方法与傅里叶变换,合适的滤波函数和相位解包方法结合起来形成整套单幅干涉图处理方法。采用该单幅干涉图处理方法获得的波面峰谷值与Zygo移相干涉仪得到的平均相差不到λ/100,并且两种方法获得的波面均方根值平均相差不到λ/200。     

干涉条纹图像处理的相位解包新方法

干涉图的处理是光干涉计量中的关键技术.采用泰曼一格林型干涉系统,建立被测物与干涉相位之间的数学模型,通过MATLAB软件,实现对被测参数的自动化测量.基于二维快速傅里叶方法的基本原理,提出一种新的相位解包算法--菱形种子算法,通过识别1个种子点,然后依次向相邻4点扩展,再把这4个点作为第二批种子点,依次向各自的4点邻域扩展,以菱形轨迹遍历所有的有效信息点,以到达整幅图像相位解包的目的.采用该算法测量薄膜样片的厚度,测试结果与ZYGO测试结果比较,PV误差为0.036 4λ,RMS最大误差为0.003λ,证明该算法虽然处理的是单幅干涉图,但可以得到高精度的相位分布.     

移相干涉术中有分割遮拦干涉图的相位展开

在质量图导引路径积分法的基础上,提出了一种适用于移相干涉术中有分割遮拦干涉图的相位展开方法,可以有效地解决不同有效区域之间相位展开结果不连续的问题.首先,采用图像修复方法,根据有效区域中包裹相位的纹理特征对遮拦区域进行填充,使被遮拦分割的各个有效区域连通,相位展开路径可以通过各个有效区域.在此基础上,提出了一种新的质量图,导引相位展开沿着相位变化最小的路径穿过各个有效区域之间的填充区域,以保证不同有效区域中属于同一干涉级次的包裹相位主值加减2π的倍数相同.研究结果表明,这种方法能有效地防止相位展开结果中2π整数倍的全局误差,使不同有效区域相位展开结果连续.     

从一幅载频全息图中实现相位重构的新算法

为了实现对单幅载频下涉图进行相位重构.提出了一种避免相位"解包裹"的简易算法.该算法从载频干涉图中解出所求相位的两个偏导数,然后对两个偏导数积分从而得到所求的相位.利用该算法分别对计算机模拟的干涉图和实验所得干涉图进行相位重构,重构结果均表明该算法能够很好地从载频干涉图样中实现相化重构.并且由于避免了相位"解包裹"的过程,从而简化了相位重构的流程,同时也避免了由相位解包带来的错误或误差.此外,该方法在重构相位时,对干涉图中强度分布的不均匀性不敏感.     

基于π/4相移平均的多光束干涉相位提取算法

菲佐干涉仪中如存在多光束干涉现象,干涉光强将不再是严格的余弦分布形式.在导出菲佐干涉仪中多光束干涉光强公式的基础上,给出了将其近似为理想多光束干涉光强公式的条件.推导了对多光束相移干涉图用四幅算法求解的相位计算误差,并据此提出了基于π/4相移平均的多光束干涉相位提取算法:通过采集相移间隔π/4的两组干涉图序列,将两次计...     

基于插值法波面拟合的球面光学元件检测

为了实现在线自动化检测球面光学镜片的面形偏差,在已有的光学检测系统基础上,对光学检测系统采集的干涉图样进行图像处理和波面拟合算法研究。首先对干涉图样预处理,再根据球面光学镜片大多是圆形孔径,对预处理后的干涉条纹通过最小二乘法拟合出干涉图样的圆边界,确定数据取值边界点的中心和半径值;然后采用Multi-quadric函数插值法拟合出波面的面形轮廓,计算波面的峰谷偏差EPV值及均方根偏差ERMS值;最后用上述方法对Zygo干涉仪采集的干涉图的处理结果与Zygo干涉仪测试结果进行比较分析。结果表明:通过边界处理可有效提高波面拟合精度,采用multi-quadric函数插值法拟合可以理想的还原出波面,且测量误差与国标相比能够控制在0.2的误差范围内,与Zygo干涉仪检测结果相比可以控制在0.03误差范围内,都能够满足球面光学镜片在线检测的精度要求。     

基于FFT的薄膜厚度干涉测量新方法

在研究二维FFT法进行干涉测试基本原理的基础上,提出一种基于二维FFT的薄膜厚度测量新方法。利用搭建的泰曼-格林型干涉系统,用CCD接收、采集卡采集,可获得被测膜层的干涉条纹图像。编制算法处理软件,可实现对干涉条纹图中薄膜边缘识别、区域延拓、滤波、波面统一等的处理,从而获得带有薄膜信息的面形分布,实现对薄膜样片厚度的自动化测量。研究结果表明：所测薄膜厚度的峰谷值为0．2562,均方根值为0．068λ,说明采用基于FFT的薄膜厚度干涉测量新方法测量薄膜厚度具有较高的精度。     

Method of reconstructing wavefront aberrations by use of Zernike polynomials in radial shearing interferometers

A novel method of reconstructing wavefront aberrations by use of Zernike polynomials for radial shearing interferometers is discussed. This method uses matrix formalism to calculate the Zernike coefficients of a wavefront under test and shows the validity of reconstructing an arbitrary wavefront aberration from an interferogram taken by a radial shearing interferometer. We also propose a new interferometer setup to determine the shape and the direction (concave or convex) of wavefront aberration in a single measurement.     

Improved formula of wavefront reconstruction from a radial shearing interferogram

A radial shearing (RS) interferogram obtained by the carrier fringe method is essentially the combination of radial and lateral shearing. The previous phase reconstruction algorithm neglects the effect of lateral shearing on the obtained RS interferogram. A mathematical formula for wavefront reconstruction from an RS interferogram is deduced. If the phase difference of the tested wavefront phase, the RS ratio s, and the laterally sheared amount x(0) in the x direction and y(0) in the y direction, respectively, have been determined, the tested wavefront phase can be precisely reconstructed using this formula. The result of simulation analysis and experiment shows that the formula is correct and more accurate.     

Enhancement of measurement sensitivity in determination of changes in the shape of a wavefront by holographic lateral-shearing interferometry

A method for increasing measurement sensitivity in the visualization of dynamics of changes in wavefront shape with the use of holographic lateral-shearing interferometry is considered. At the first stage of this method, a photograph of a reference shear interferogram obtained with tuning to closely spaced fringes is recorded under linear conditions. After chemical treatment, the photograph of the reference shear interferogram is installed in exactly its initial position. At the second stage, a series of photographs of lateral-shear interferograms of the wavefront under study is recorded under nonlinear conditions using the photograph of the reference interferogram. The photographs of the lateral-shear interferograms are optically processed by two coherent beams with selection of the highest diffraction orders, which makes it possible to visualize the dynamic component of the wavefront deformation with an increase in the measurement sensitivity (the static component is excluded in this case). The effect of the degree of nonlinearity of photograph recording on the range in which the measurement sensitivity can be controlled during the optical processing of a pair of matched photographs or one double-exposure photograph of interferograms recorded at different values of a lateral shift is analyzed.     

What spatial light modulators can do for optical microscopy

With the availability of high‐resolution miniature spatial light modulators (SLMs) new methods in optical microscopy have become feasible. The SLMs discussed in this review consist of miniature liquid crystal displays with micron‐sized pixels that can modulate the phase and/or amplitude of an optical wavefront. In microscopy they can be used to control and shape the sample illumination, or they can act as spatial Fourier filters in the imaging path. Some of these applications are reviewed in this article. One of them, called spiral phase contrast, generates isotropic edge enhancement of thin phase samples or spiral‐shaped interference fringes for thicker phase samples, which can be used to reconstruct the phase topography from a single on‐axis interferogram. If SLMs are used for both illumination control and spatial Fourier filtering, this combination for instance allows for the generalization of the Zernike phase contrast principle. The new SLM‐based approach improves the effective resolution and avoids some shortcomings and artifacts of the traditional method. The main advantage of SLMs in microscopy is their flexibility, as one can realize various operation modes in the same setup, without the need for changing any hardware components, simply by electronically switching the phase pattern displayed on the SLMs.     

含中心遮拦剪切干涉图的波前重建新方法

在利用剪切干涉测量共轴折返式光学系统波像差时,会得到含中心遮拦的环形剪切干涉图。但是,目前的剪切干涉波前重建方法大多适用于圆形或矩形区域。提出了一种适用于含中心遮拦环形剪切干涉图的波前重建方法。该方法是一种基于Zernike环多项式的模式法。仿真和分析了不同剪切比、单项像差、噪声对重建精度的影响,结果表明:该算法具有较高的重建精度,剪切比小于6%时,相对重建误差小于10%;对像散的重建精度较高,对球差和慧差的重建精度相对较低;具有较好的抗噪性。该方法已应用于实验室开发的交叉光栅横向剪切干涉仪的干涉图像波前重建中。     

基于单幅干涉图的波前重构技术研究

条纹中心法是干涉测量技术中分析单幅干涉图的一种重要处理方法,该方法主要包括图像预处理、波前重构和样品表面形貌及参数的测量等三个部分。研究了条纹中心法的关键技术,特别是应用协方差矩阵法求解泽尼克多项式以进行波前重构的过程。提出了基于单幅干涉图自动波前重构的流程方法。最后应用该流程方法处理由泰曼-格林干涉系统采集的精密抛光铝制盘基片表面形成的一幅干涉图像。实验结果表明,该方法可以实现单幅干涉图的自动波前重构,干涉波前重构的拟合精度可达1．4686×10^-6nm,还可以自动获得精密抛光铝制盘基片表面的形貌及参数。     

Comparison of results of interferometric phase extraction algorithms for three-dimensional flow-field tomography

A comparison of the results of interferometric phase information retrieval and subsequent tomographic reconstruction from deformed wavefront projections by phase unwrapping is presented. In interferogram processing, conventional fringe tracking and Fourier transform methods have been utilized for comparison. With these methods by injecting carrier fringes, the projection data of any axial cross section can be extracted in all projection directions to implement three-dimensional tomographic reconstruction. The results of experiments of a simulated temperature field prove that the phase extraction based on the Fourier transform method produces tomographic reconstruction much superior to the conventional fringe tracking technique.