制作工艺误差对X射线组合折射透镜聚焦性能影响研究

本文主要介绍对X射线组合折射透镜的制作工艺误差对其聚焦性能影响的研究结果. 首先给出采用深度X射线光刻技术制作的PMMA材料圆柱面型X组合折射透镜的工艺测试结果,得出制作工艺误差值,定性分析制作工艺误差对X射线组合折射透镜聚焦性能的影响. 然后根据实际的制作工艺误差建模,给出详尽的理论分析和定量的理论模拟结果. 最后在北京同步辐射装置(BSRF)上,构建基于PMMA材料的圆柱面型X射线组合折射透镜的微束聚焦实验系统,实际测试了有明显工艺误差和尽量消除工艺误差的两种X射线组合折射透镜的聚焦性能,给出实测结果 关键词： X射线组合折射透镜 制作工艺误差 X射线聚焦性能 同步辐射     

高能X射线组合透镜聚焦性能的实验结果

高能X射线组合透镜是一种基于折射效应的新型X射线光学元件。报道了这种新型X射线光学元件聚焦性能的最新实验结果。设计的高能X射线组合透镜为聚甲基丙烯酸甲酯(PMMA)材料,包括40个相同的、顺序排布的平凹折射单元,折射单元的球面半径为200μm,组合透镜的几何口径约为500μm,长度约为8 mm,焦距约为1.3 m。简要描述了PMMA材料X射线组合透镜的制作技术和制作过程。并给出了X射线组合透镜聚焦性能测试实验系统和实验条件。最后给出8 keV单色X射线辐射下,PMMA材料X射线组合透镜的聚焦性能的测试结果,对实际测试结果进行了分析和讨论,得出结论,焦距等参量与理论计算结果基本吻合。     

X射线长组合折射透镜的理论和实验研究

结合矩阵光学方法与衍射理论,得到研究X射线长组合折射透镜光学性能(包括焦斑尺寸、有效光束半径和强度增益等)的理论方法。设计并采用LIGA技术实际制作了顶点曲率半径50μm的抛物面型PMMA材料长X射线组合折射透镜,在北京同步辐射装置(BSRF)的形貌站(4W,1A)对其在8keV时的聚焦性能进行了实际测试。给出了模拟计算和实测结果,并进行了分析讨论,实测结果显示了良好的聚焦效果,理论与实验结果基本吻合。     

铜材料X射线聚焦组合透镜的设计与制作

铜材料X射线聚焦组合透镜是一种基于折射效应的X射线聚焦元件。简单介绍了组合透镜的设计理论研究结果,并据此对材料作了选择。针对铜材料组合透镜,分析了组合透镜结构参数、X射线工作波长的选择对组合透镜光学性能的影响。在此基础上,设计了组合透镜的结构参数,使其在硬X射线波段具有较好的聚焦性能,并能获得较高的焦斑强度。采用准LIGA技术制作了铜材料X射线组合透镜,给出了部分铜材料X射线组合透镜结构测量结果。     

级联式平面抛物面型X射线组合折射透镜的设计与制作

X射线组合折射透镜(CRL)已逐步成为同步辐射光源下X射线聚焦光学器件的标准配件之一,它具有结构紧凑、易调节校准、适用光子能量范围大等优点.本文设计了一种级联式平面抛物面型CRL,它将N1个具有较大抛物面几何孔径(R0)的折射单元I与N2个具有较小抛物面顶点曲率半径(R)的折射单元II级联,以解决常规CRL设计过程中焦斑尺寸与透过率的矛盾.采用PMMA材料,利用LIGA技术制作了一组级联式平面抛物面型CRL,其中折射单元I的主要结构参数为N1=15,R1=200μm,2R01=564μm;折射单元II的主要结构参数为N2=20,R2=50μm,2R02=140μm.在上海光源同步辐射线束上,所制作的级联式平面抛物面型CRL实现了对初始光斑尺寸为200μm×100μm的入射X射线的一维聚焦,测试得到的焦距为1.052 m,横向焦斑尺寸为24.9μm@8 keV,透过率为2.19%.     

高能X射线聚焦组合透镜的理论研究

X射线聚焦组合透镜是一种利用折射效应对X射线辐射聚焦的新型元件。针对X射线波段的特性,综合考虑折射和吸收效应得出组合透镜的衍射屏函数,并利用衍射理论推导出X射线组合透镜的设计理论。利用统计学理论中一阶、二阶原点矩表征像面处的光学性能,使设计更简洁。该理论方法可方便地推广到双凹折射单元情况。通过数值计算分析了像向处强度分布的二阶中心矩以及焦点处辐射强度随组合透镜结构参最的变化关系,给出了一种铝基X射线组合透镜的结构参量设计结果。对于设计的组合透镜结构参量,计算了当X射线辐射能量分别为0．93 keV．9．89 keV和29．78 keV时,X射线辐射经过组合透镜后的焦点强度分布。     

微束斑X射线源及X射线光学元件

高质量的X射线源,尤其高亮度的微纳束斑X射线源是现代X射线光学高清晰成像最为关键的部件之一,在工业无损探伤、生命科学、材料科学等科学研究和实际应用中具有重要的意义。简单介绍了微束斑X射线源的产生方法及发展历史,并对微束X射线光学涉及到的聚焦X射线光学元件（如X射线掠入射反射镜、布拉格法反射镜、多层膜反射镜、多层膜光栅、X射线波带片、毛细管聚焦透镜和复合折射透镜等）的主要特点作了简要的系统介绍。最后展望了微细束X射线在微纳检测与分析等方面的应用前景。     

Kinoform单透镜的硬X射线聚焦性能

Kinoform单透镜可以高效聚焦硬X射线至纳米量级, 在X射线纳米显微学和纳米光谱学领域有着重要的应用前景. 基于衍射光学和傅里叶光学理论, 给出了X射线经由Kinoform单透镜聚焦的物理模型, 基于数值模拟, 研究了不同材料、光子能量、台阶数量和顶点曲率半径对Kinoform单透镜聚焦性能的影响. 结果表明, 孔径为1 mm的Kinoform单透镜对30 keV的X射线聚焦, 可以得到14 nm焦斑、62 μm焦深, 且可实现4个量级的光强增益和大于30%的光强透过率.     

背面曝光技术制作沙漏状X射线组合折射透镜

在分析沙漏状X射线组合折射透镜（X-ray compound refractive lens,XCRL）的折射聚焦理论的基础上,设计并利用背面曝光技术制作了SU-8材料的沙漏状XCRL,该技术在保证图形准确性的同时减少了工艺步骤,使制作更加简便易行.在10?keV单色X射线辐射下,对制作的透镜进行了聚焦性能的实验测试,结果表明,所制作的透镜较好地实现了一维聚焦. 关键词： 组合折射透镜 背面曝光 沙漏状 SU-8     

EP-FXT聚焦镜真实表面状态的性能模拟方法

后随X射线望远镜(follow-up X-ray telescope, FXT)是爱因斯坦探针卫星的主要载荷之一.为了获取高信噪比的数据,实现对观测天体的高精度定位, FXT使用Wolter-Ⅰ型X射线聚焦光学系统,该系统一直是X射线空间天文观测中的重要设备.根据Wolter-Ⅰ型的聚焦原理,结合实际的加工特点,利用蒙特卡罗模拟算法对影响光学成像质量的几个关键参量,如表面粗糙度、面形误差进行了模拟,结合模拟结果对各参量的作用效果进行了分析.之后利用PANTER实验室提供的聚焦镜性能测试结果对模拟方法进行了验证,同时对面形误差参量进行了限制.最终聚焦镜结构热控件半能量宽度(half energy width, HEW)模拟与实测结果基本一致.该模拟过程可以很有效地应用于聚焦镜加工工艺的摸索,为FXT的聚焦镜测试和标定工作提供参考.结合实测标定数据,该模拟方法生成的有效面积、渐晕和点扩散函数等可用于在轨观测标定数据库.     

On the theory of X-ray refractive optics: Exact solution for a parabolic medium

The exact solution is obtained for a propagator describing x-ray propagation through a refractive parabolic medium. Such a medium arises in compound many-element refractive x-ray lenses that are used in synchrotron radiation sources. The solution obtained allows one to analyze such lenses in detail to predict their operation in particular applications (beam focusing, microobject imaging, and Fourier transform).     

A method based on diffraction theory for predicting 3D focusing performance of compound refractive X-ray lenses

A method based on the diffraction theory for estimating the three-dimensional (3D) focusing performance of the compound refractive X-ray lenses is presented in this paper. As a special application, the 3D X-ray intensity distribution near the focus is derived for a plano-concave compound refractive X-ray lens.Moreover, the computer codes are developed and some results of 3D focusing performance for a compound refractive X-ray lens with Si material are shown and discussed.     

A theoretical method based on Fourier spectrum analysis for the focusing performances of the X-ray compound refractive lenses

It is important to predict the intensity distribution in focusing plane for designing the X-ray compound refractive lenses. On the basis of analyzing the structure of X-ray compound lenses and comparing it with Fraunhofer diffraction system, it is concluded that the X-ray focusing system can be regarded as a kind of Fraunhofer diffraction system. Therefore, a method based on Fourier spectrum analysis is presented to predict the intensity distribution in the focusing plane for the X-ray lenses. A brief analysis on the relationship between the parameters of X-ray lenses and their focusing performance is also given in this paper.     

Application of the probability theory in predicting 3D focusing behaviors of compound X-ray refractive lenses

A theoretical method based on the diffractive theory is used for predicting three-dimensional (3D) focusing performances of the compound X-rays refractive lenses (CRLs). However, the derivation of the 3D intensity distribution near focus for the X-ray refractive lenses is quite complicated. In this paper, we introduce a simple theoretical method that is based on the first and second moments in the theory of probability. As an example, the 3D focusing performance of a CRL with Si material is predicted. Moreover, the results are compared with those obtained by the diffractive theory. It is shown that the method introduced in this paper is accurate enough.     

High‐energy X‐ray optics with silicon saw‐tooth refractive lenses

Silicon saw‐tooth refractive lenses have been in successful use for vertical focusing and collimation of high‐energy X‐rays (50–100 keV) at the 1‐ID undulator beamline of the Advanced Photon Source. In addition to presenting an effectively parabolic thickness profile, as required for aberration‐free refractive optics, these devices allow high transmission and continuous tunability in photon energy and focal length. Furthermore, the use of a single‐crystal material (i.e. Si) minimizes small‐angle scattering background. The focusing performance of such saw‐tooth lenses, used in conjunction with the 1‐ID beamline's bent double‐Laue monochromator, is presented for both short (～1:0.02) and long (～1:0.6) focal‐length geometries, giving line‐foci in the 2 µm–25 µm width range with 81 keV X‐rays. In addition, a compound focusing scheme was tested whereby the radiation intercepted by a distant short‐focal‐length lens is increased by having it receive a collimated beam from a nearer (upstream) lens. The collimation capabilities of Si saw‐tooth lenses are also exploited to deliver enhanced throughput of a subsequently placed small‐angular‐acceptance high‐energy‐resolution post‐monochromator in the 50–80 keV range. The successful use of such lenses in all these configurations establishes an important detail, that the pre‐monochromator, despite being comprised of vertically reflecting bent Laue geometry crystals, can be brilliance‐preserving to a very high degree.     

Aspherical lens shapes for focusing synchrotron beams

Aspherical surfaces required for focusing collimated and divergent synchrotron beams using a single refractive element (lens) are reviewed. The Cartesian oval, a lens shape that produces perfect point‐to‐point focusing for monochromatic radiation, is studied in the context of X‐ray beamlines. Optical surfaces that approximate ideal shapes are compared. Results are supported by ray‐tracing simulations. Elliptical lenses, rather than parabolic, are preferred for nanofocusing X‐rays because of the higher peak and lower tails in the intensity distribution. Cartesian ovals will improve the gain when using high‐demagnification lenses of high numerical aperture.