金刚石砂轮V形尖端切向磨削修整试验研究

针对超硬模具微结构磨削过程中金刚石砂轮V形尖端几何精度难以保证以及修整困难等问题,提出碳化硅修整轮切向磨削修整方法,采用不同修整参数对树脂结合剂和金属结合剂金刚石砂轮V形尖端进行修整试验,并采用修整后的金刚石砂轮进行了微结构阵列磨削试验。结果表明:在一定的修整参数下,树脂结合剂和金属结合剂金刚石砂轮的尖端圆弧半径分别达到3.5μm和2.0μm;两种砂轮尖端圆弧半径随着修整轮进给速度、修整深度的增加而增大,随着金刚石砂轮转速和修整轮粒度号的增加而减小;金属结合剂金刚石砂轮修整效率较低,修整后的尖端圆弧半径较小。微结构阵列磨削结果表明,修整后的两种金刚石砂轮能够满足微结构加工,而且发现树脂结合剂金刚石砂轮加工的微结构表面质量较好,更易于实现延性域磨削。     

陶瓷飞行体的微沟槽结构曲面精密磨削与减阻性能

为减小飞行阻力和增强雷达散射,提出采用精密磨削和微细磨削组合加工工艺在陶瓷飞行体表面加工出曲面微沟槽结构。首先,利用精密修整后的金刚石砂轮圆环形端线沿数控曲线插补轨迹将陶瓷加工成光滑曲面,然后利用微细修整成角度为60°的金刚石砂轮V形尖端在曲面上沿飞行体轴向方向加工出微沟槽结构,最后通过风动试验分析不同曲面结构对空气阻力的影响。磨削试验结果显示,精密磨削和微细磨削组合加工可在高度32 mm、直径30 mm和表面粗糙度0.262?m的陶瓷曲面上加工出深度为578~581?m、角度为61.56°和尖端半径为48?m的微沟槽结构,其深度误差仅为3?m,曲面加工的平均形状误差为142?m,加工精度可控制在0.5%以内。此外,加工后的陶瓷表面粗糙度主要受砂轮粒度和磨削工艺的影响。风动试验结果表明:微沟槽结构曲面分别比光滑和粗糙曲面减小轴向阻力约36%和42%,也比光滑曲面减小侧面阻力约39%。因此,陶瓷飞行体的光滑曲面被加工出规则可控的微沟槽结构可以减小飞行阻力。     

微流道精密磨削技术及自驱动检测芯片实验研究

针对病原体检测用芯片需要蠕动泵和离心机外加驱动的问题,设计微V槽流道的自驱动芯片,研究微液体流动的微流道拓扑结构及其精密磨削技术。因为激光等物理加工难以保证微拓扑结构精度,所以采用金刚石磨削技术实现石英玻璃表面的微V槽流道精密加工。基于多轴联动技术和机械物理去除原理开发了砂轮微尖端的高效精密在位修整工艺,可将磨粒精密修尖至同一角度,进行机械精密复制的塑性域微磨削。然后,实验分析微V槽流道的尖角、表面粗糙度、梯度等对微液体流速的影响。最后,制造出病原体检测的微流控芯片。研究结果显示,更大梯度、更小尖角和更小粗糙度以及尖角端分布的纳米流道可以大幅提高微液体流速。而且,微流道的V槽尖端半径为15μm,表面粗糙度为30 nm,可诱导微液体运动。在此基础上,研发的自驱动微流控芯片不需离心机就能够检测出布鲁氏菌的病原体核酸,检测灵敏度可以小于100 ag/μL。     

微结构模芯的精密磨削及其在微注塑成形中应用

针对微结构聚合物元器件的批量化生产与制造效率低等问题,采用精密修整成V形尖端的金刚石砂轮,在自润滑性和脱模性良好的钛硅碳陶瓷模芯表面加工制造出形状精度可控的V沟槽阵列结构,然后利用微注塑成形工艺将模芯表面的V沟槽阵列结构一次成形复制到聚合物表面,高效注塑成形制造出倒V形阵列结构的聚合物工件。分析了微模芯的表面加工质量与形状精度,研究了熔体温度、注射速度、保压压力、保压时间等微注塑成形工艺参数对微结构聚合物注塑成形角度偏差和填充率的影响。实验结果表明：通过微细磨削加工技术和微注塑成形工艺可以高效率、高精度地制造出规则整齐的微结构注塑工件,注射速度对微成形角度偏差的影响最大,保压压力对微成形填充率的影响最大,微结构模芯的微细磨削形状精度值为4.05 μm,微成形的最小角度偏差和最大填充率分别为1.47°和99.30%。     

导光均光微槽透镜阵列精密磨削及其热压微成型

薄壁LED照明依赖丝网印刷的微阵列导光板,但其表面油墨点阵易老化,且微结构很难优化。因此,在导光板表面设计出高斯分布的空间微槽透镜阵列,并采用数控微磨削技术对其进行加工,替代市面丝网印刷的2D微圆阵列。首先,用微光学原理模拟导光板导光效率和出光均匀度,优化微透镜阵列的形状、尺寸和分布。利用金刚石砂轮微尖端在PMMA导光板表面精密磨削出微透镜阵列,检测其导光效率及均匀性。最后,利用微磨削加工的微阵列成型钢模芯开发微透镜阵列的快速热压微成型工艺。微光学分析表明,微槽透镜阵列比微方形透镜阵列和微半球透镜阵列分别提高导光效率6%和15%。而且,微槽透镜阵列变间距高斯分布比等间距分布提高导光效率32%,提高出光均匀度73%。试验结果显示,微磨削可以控制微槽透镜阵列加工的表面质量和形状精度,应用于LED导光板后比丝网印刷的导光板提高导光效率7%和出光均匀度9%。此外,开发3 s的快速热压微成型工艺,可以加工出变间距和变深度的微槽透镜阵列,比丝网印刷的微圆阵列提高照度26%和出光均匀度49%。因此,微空间结构优化的微槽透镜阵列比丝网印刷的2D微圆阵列可附加出更高的微光学应用价值。     

面齿轮蜗杆砂轮的成形修整工艺误差建模及补偿方法

蜗杆砂轮磨削是面齿轮的精加工工艺,蜗杆砂轮修整精度直接影响面齿轮磨削精度。本文分析了修整工艺误差对磨削齿面误差的影响规律,并提出了一种面齿轮蜗杆砂轮的成形修整工艺误差建模及补偿方法。首先,建立面齿轮蜗杆砂轮的数学模型,分析面齿轮蜗杆砂轮的成形修整原理,提出利用圆柱齿轮磨齿机的多轴耦合联动实现面齿轮蜗杆砂轮的成形修整。其次,将修整工艺误差分为轴向位置和径向位置误差,分析轴向位置和径向位置误差对磨削齿面误差的影响规律,提出成形修整工艺误差的补偿方法。最后,进行蜗杆砂轮补偿修整、面齿轮磨削加工及测量实验,实验表明：左齿面齿形误差由补偿前51.9μm到补偿后7.9μm,右齿面齿形误差由补偿前35.3μm到补偿后17.6μm,验证了误差补偿方法的有效性。     

圆弧形金刚石砂轮的数控对磨成形修整试验

针对圆弧形金刚石砂轮精密修整的操作困难和装置复杂的问题,提出一种新的数控对磨成形修整方法.在该成形修整中,金刚石砂轮被驱动沿着圆弧插补运动轨迹与GC磨石对磨,逐渐形成砂轮的圆弧形轮廓,用于超硬材料的曲面磨削.在建立砂轮圆弧形轮廓的数控修整模式的基础上,分析定位误差与修整形状偏差的关系.此外,建立修整精度和修整率的评价指标,进行正交试验,研究修整工艺参数,即砂轮转速、行走速率和进给深度,对修整精度和修整率的影响.对该数控修整模式分析表明,在该数控对磨成形修整中不同半径的砂轮圆弧形轮廓能够被修整成形,可用于不同曲率的曲面磨削.同时,当定位误差在0.1 mm以内时,最大的修整形状偏差不超过5μm/10 mm.成形修整试验结果显示,影响修整精度和修整率的主要修整工艺参数分别为砂轮转速和行走速率.增加砂轮转速可以同时改善修整精度和修整率;增加行走速率会提高修整率,但会降低修整精度.此外,采用适宜的修整工艺,目标形状误差和目标修整率可以分别达到25.1μm/8mm和7.31x10-3mm3/mm3,分别提高修整精度2～3倍和修整率约7倍.     

采用硅V型槽的一维光纤阵列的研制

阐述了一维光纤阵列的研制方法,分析了V型槽法中硅V型槽腐蚀机理,计算了V型槽的开口及间距与光纤半径及纤芯截面圆心距的关系,给出了最小槽深与光纤半径及V型槽开口的关系式。用各向异性腐蚀技术制作了硅V型槽,比较了紫外及红外粘接剂的性能,进行了光纤的排列、粘接及抛光,制作出一维光纤阵列。用原子力显微镜测量光纤阵列表面粗糙度为纳米量级,用ZYGO数字干涉仪检测光纤的端头位置误差为3~5 μm。该项工作为二维光纤阵列的高精度制备奠定了基础。     

基于PMAC的微V槽阵列精密机床研发及其误差补偿

针对微V槽阵列元件V槽间距高精度等加工要求,开展了一种微V槽阵列元件磨削加工机床的研究与开发。介绍了机床的机械结构整体布局和主要零部件选型,并详细介绍了机床控制及驱动系统的结构系统。在机床软硬件平台支持下,基于工控机+PMAC运动控制器完成了系统控制软件的开发。针对微V槽间距较高的精度要求,开展了利用激光干涉仪进行测量和误差补偿的研究,并利用所研发的机床进行了加工实验的加工样件检测。实验和检测结果表明,所研发的微V槽阵列机床加工定位精度可控制在±0.5μm内,满足对微V槽阵列元件的高精度要求。     

轴承滚道磨削中金刚石滚轮修整技术的应用

轴承滚道的加工精度直接影响轴承的制造精度,针对滚道磨削加工过程中精密成形修整问题,介绍了磨削用金刚石滚轮的制造方法、安装过程、修整应用工艺参数及其影响规律,同时对该方法在典型滚道中的应用实例进行了试验研究。使用新研制金刚石滚轮修整的砂轮加工出的套圈,经检测其滚道半径精度为±5μm,圆度误差为5μm,滚道位置精度为±0. 01 mm。结果表明:金刚石滚轮修整法可以用于复杂结构轴承滚道磨削中,尤其适用于多滚道磨削加工的砂轮修整,滚道之间的位置精度和修整效率均有明显提高。     

Experimental study on fabrication and evaluation of micro pyramid-structured silicon surface using a V-tip of diamond grinding wheel

A mechanical fabrication of micro pyramid-structured silicon surface is proposed using crossed grooving with a 60° V-tip of diamond grinding wheel. It can obtain high form-accuracy, good surface quality and efficient productivity in contrast to laser machining and etching, and also assure a high aspect ratio in contrast to other mechanical processes. In order to describe its micro-structured topography, a white-light interferometer was employed, and its measured point cloud was matched using an Iterative Closest Point (ICP) algorithm. In micro grinding, a novel CNC mutual-wear truing was first developed to sharpen the wheel V-tip; then, the effects of microscopic wheel topography, silicon crystal-orientation and grinding parameter were investigated on ground micro-topography, truing ratio and material removal ratio; finally, its form-accuracy, pyramid top radius, groove tip radius, surface roughness and aspect ratio were evaluated. It is shown that better microscopic grain protrusion topography on wheel V-tip produces much larger material removal ratio and much better micro-structured topography in micro grinding, but it leads to much less truing ratio in finer GC truing. In micro grinding, silicon crystal-orientation has little effect on micro-structured topography due to diamond crystal-orientations that are randomly distributed on wheel V-tip. Although the micro pyramid-structured form error is only about 3.4 μm, its V-groove bottom and pyramidal top have very large form errors (23.1-47.9 μm) due to the sharpness of wheel V-tip and the frangibility of micro pyramid top. On increasing feed speed, its pyramid top radius decreases and its groove tip radius slightly increases, ultimately leading to an increase in aspect ratio, whereas its surface quality descends. It is concluded that the micro-pyramid arrays may be precisely patterned on silicon surface using a SD600 wheel with crossed tool paths, on-machine V-tip truing and the depth of cut in 1 μm.     

电镀金刚石砂轮高效精密修整及熔融石英磨削试验研究

大尺寸光学玻璃元件主要采用细磨粒金刚石砂轮进行精密/超精密磨削加工,但存在砂轮修整频繁、工件表面面形精度难以保证、加工效率低等缺点。采用大磨粒金刚石砂轮进行加工则具有磨削比大、工件面形精度高等优点,然而高效精密的修整是其实现精密磨削的关键技术。采用Cr12钢对电镀金刚石砂轮(磨粒粒径151 μm)进行粗修整,借助修整区域聚集的热量加快金刚石的磨损,可使砂轮的回转误差快速降至10 μm以内。结合在线电解修锐技术,采用杯形金刚石修整滚轮对粗修整后的电镀砂轮进行精修整,砂轮的回转误差可达6 μm以内,轴向梯度误差由6 μm降至2.5 μm。通过对修整前后的金刚石砂轮表面磨损形貌成像及其拉曼光谱曲线分析了修整的机理。对应于不同的砂轮修整阶段进行熔融石英光学玻璃磨削试验,结果表明,砂轮回转误差较大时,工件材料表面以脆性断裂去除为主;随着砂轮回转误差和轴向梯度误差的减小,工件表面材料以塑性去除为主,磨削表面粗糙度为Ra19.6 nm,亚表层损伤深度低至2 μm。可见,经过精密修整的大磨粒电镀金刚石砂轮可以实现对光学玻璃的精密磨削。     

树脂基圆弧金刚石砂轮的在位精密成形修整技术

针对球面、非球面及自由曲面超精密磨削加工用树脂基圆弧形金刚石砂轮难以精密修整的问题,提出基于旋转绿碳化硅(GC)磨棒的在位精密成形修整技术。在分析GC磨棒和圆弧砂轮几何关系的基础上,确定修整过程中圆弧插补轨迹的补偿方法及GC磨棒运动轨迹的设计方案。采用KEYENCE激光测微仪采集砂轮圆弧特征点,表征圆弧砂轮的修整状况。研究不同粒度的GC磨棒、进给深度和圆弧插补速度对圆弧金刚石砂轮修整率和修整精度的影响规律。研究结果表明,该修整方法可根据加工曲率半径要求实现不同圆弧半径砂轮的精密在位修整,修整后可自动消除砂轮垂直方向的位置偏差;采用400#和800#的GC磨棒对D3和D7砂轮均有较高的修整率(0.7~6.7);与400#和1500#的GC磨棒相比,800#GC磨棒更适合粒度为D3和D7圆弧金刚石砂轮的精密修整;相比圆弧插补速度,进给深度对砂轮的圆弧半径尺寸误差和形状误差影响更大,进给深度越小,圆弧半径尺寸误差和形状误差越小;修整后两种砂轮的圆弧半径误差均可控制在5%以内,D3砂轮的形状误差可控制在3μm/4 mm以内,D7金刚石砂轮可控制在6μm/4 mm以内,修整后比修整前形状误差提高14倍左右。     

ROTARY TRUING OF VITREOUS BOND DIAMOND GRINDING WHEELS USING METAL BOND DIAMOND DISKS

Abstract

Experiments on rotary truing of vitreous bond diamond grinding wheels were conducted to investigate the effects of truing speed ratio, type of diamond in the metal bond truing disks (synthetic versus natural), and diamond grit size in the grinding wheel on the wear of truing disk and on the cylindrical grinding of zirconia. Similar to G-ratio, a new parameter called D-ratio is defined to quantify the wear rate of the diamond truing disks. Experimental results show that, under the same truing condition, the truing disk with blocky, low friability synthetic diamond has a higher D-ratio than the truing disk with natural diamond. Diamond wheels trued by the disk with synthetic diamond also generate lower grinding force and rougher surface finish. High truing disk surface speed, 1.8 times higher than the surface speed of the grinding wheel, was tested and did not show any improvement in D-ratio. This study indicates that μm-scale precision form truing of the vitreous bond diamond wheel is difficult due to excess wear of the metal bond diamond truing disk.     

圆弧金刚石砂轮的修形及修锐技术研究

针对圆弧金刚石砂轮加工非轴对称非球面的平行磨削法中砂轮的修形精度要求较高，通常使用的水平圆弧杯状砂轮修整器很难保证加工精度的问题，提出带倾角圆弧修整器的设计方法。通过对修整器接触弧长的计算，修形延后率设计和修形补偿方法的研究及实验表明：新型圆弧修整器可满足高精度非轴对称非球面加工的要求。     

IN SITU TRUING/DRESSING OF DIAMOND WHEEL FOR PRECISION GRINDING

An application for achieving on-machine truing/dressing and monitoring of diamond wheel is dealt with in dry grinding. A dry electrical discharge （ED） assisted truing and dressing method is adopted in preparation of diamond grinding wheels. Effective and precise truing/dressing of a diamond wheel is carried out on a CNC curve grinding machine by utilizing an ED assisted diamond dresser. The dressed wheel is monitored online by a CCD vision system. It detects the topography changes of a wheel surface. The wear condition is evaluated by analyzing the edge deviation of a wheel image. The benefits of the proposed methods are confirmed by the grinding experiments. The designed truing/dressing device has high material removal rate, low dresser wear, and hence guarantees a desired wheel surface. Real-time monitoring of the wheel profile facilitates determining the optimum dressing amount, dressing interval, and the compensation error.     

大口径光学元件高精度平面磨床加工系统研究

以实现高精度、高效率、高自动化程度加工为目的,基于高精度平面磨床MGK7160的加工系统,详细分析了加工规划控制、计算机辅助制造软件系统开发、砂轮修整及动平衡、在位测量等关键配套工艺技术。在已有设备及配套工艺基础上利用400#粒度金刚石圆弧砂轮,实现口径400mm×400mm平面光学元件的加工,获得了较好的加工精度,验证了机床及加工技术系统的可靠性。     

Wear mechanism of metal bond diamond wheels trued by wire electrical discharge machining

The stereographic scanning electron microscopy (SEM) imaging was used to investigate the wear mechanism in wire electrical discharge machining (EDM) truing of metal bond diamond wheels for ceramic grinding. A piece of the grinding wheel was removed after truing and grinding to enable the examination of wheel surface and measurement of diamond protrusion heights using a SEM and stereographic imaging software. The stereographic SEM imaging method was calibrated by comparing with the profilometer measurement results. On the wheel surface after wire EDM truing and before grinding, some diamond grain protruding heights were measured in the 32 μm level. Comparing to the 54 μm average size of the diamond grain, this indicated that over half of the diamond was exposed. During the wire EDM process, electrical sparks occur between the metal bond and EDM wire, which leaves the diamond protruded in the gap between the wire electrode and wheel. These protruding diamond grains with weak bond to the wheel were fractured under a light grinding condition. After heavy grinding, the diamond protrusion heights were estimated in the 5–15 μm range above the wear flat. A cavity created by grinding debris erosion wear of the wheel bond could be identified around the diamond grain.     

ROTARY TRUING OF VITREOUS BOND DIAMOND GRINDING WHEELS USING METAL BOND DIAMOND DISKS

Experiments on rotary truing of vitreous bond diamond grinding wheels were conducted to investigate the effects of truing speed ratio, type of diamond in the metal bond truing disks (synthetic versus natural), and diamond grit size in the grinding wheel on the wear of truing disk and on the cylindrical grinding of zirconia. Similar to G-ratio, a new parameter called D-ratio is defined to quantify the wear rate of the diamond truing disks. Experimental results show that, under the same truing condition, the truing disk with blocky, low friability synthetic diamond has a higher D-ratio than the truing disk with natural diamond. Diamond wheels trued by the disk with synthetic diamond also generate lower grinding force and rougher surface finish. High truing disk surface speed, 1.8 times higher than the surface speed of the grinding wheel, was tested and did not show any improvement in D-ratio. This study indicates that μm-scale precision form truing of the vitreous bond diamond wheel is difficult due to excess wear of the metal bond diamond truing disk.     

圆弧形砂轮精密修整及其声发射在线监测技术

针对球面、非球面及自由曲面超精密磨削加工用圆弧形金刚石砂轮难以精密修整的问题,提出基于旋转绿碳化硅（GC）磨棒的端部在位精密修整方法及修整过程的声发射在线监测技术。基于圆弧形金刚石砂轮的结构特性,制订圆弧形金刚石砂轮的在位精密修整与修整过程的声发射在线监测技术方案。依据修整与在线监测方案,对D64圆弧形金刚石砂轮进行修整实验及其声发射信号采集,修整后跳动误差小于10μm,比修整前减小30μm左右,砂轮精度显著提高。利用声发射信号均方根值获取砂轮修整结束的特征预警阈值,实现了旋转GC磨棒端部在位精密修整过程的在线监测以及修整结束时间的准确判断,可以有效提高球面非球面磨削加工过程的效率。