光谱共焦显微技术研究进展

光谱共焦显微技术结合了共焦显微镜的高空间分辨率和光谱分析的高波长分辨率,凭借精度高、适用性强、无损检测等特性,广泛应用于工业生产、生物医疗和半导体芯片等领域。首先介绍点光谱共焦系统的原理,指出点光谱共焦检测效率低的缺点。其次,针对光谱共焦显微技术的关键性能指标改善,阐述了在光源、色散物镜和光谱信号检测等方面所取得的主要成果,并对各类光源进行定性对比。随后展示光谱共焦显微技术的扫描方法,梳理了相关研究进展,并总结了相关方法的优点和缺点。最后,展望光谱共焦显微技术未来的发展趋势。     

双波长激光共聚焦生物芯片检测与图像处理

基于共聚焦检测原理,建立了双波长生物芯片检测系统。采用体全息滤光片,利用其反射衍射和带阻滤光特性,无需切换或改变光路,在同一光路中即可实现Cy3与Cy5荧光双波长扫描检测。提出了基于顺序形态变换的生物芯片荧光点阵图像的网格化处理方法,并对Cy3与Cy5荧光试剂点样玻片进行了扫描实验,对实验所得荧光点阵图像进行了网格化处理。实验结果显示,系统的检测灵敏度达到0.1 fluo/μm2,网格化算法简单、有效。     

光纤共焦扫描显微图像渐晕校正的研究

光纤共焦扫描显微镜是一种使用单模光纤代替传统共焦扫描显微镜的针孔来形成点光源与点探测器的激光共焦扫描显微系统。本文在详细地分析了光纤共焦扫描显微镜的双振镜扫描系统产生渐晕原因的基础上,给出了渐晕校正的详细算法,并设计了与扫描采集集成为一体的硬件校正系统。     

生态芯片及其在医学和生物学中的应用

本文阐述了生物芯片的制作原理及杂交信号的检测方法及其在生物医学中的应用。生物芯片的制作工艺主要分两大类：一类是采用在芯片点阵上直接合成寡核苷酸的方法;另一类是用点阵或喷墨打印法将纳升级的微量DNA溶液直接以阵列形式点放并固化在芯片载体上,生物芯片主要通过杂交信号进行检测。对于荧光标记的杂交信号的检测方法,主要有激光荧光扫描显微镜、激光扫描共焦显微镜、带有CCD相机的荧光显微镜、光纤生物传感器等。对于生物素标记的杂交信号的检测方法,主要有化学发光法、光激发磷光物质存储屏法。DNA基因芯片在生物医学中有着重大的应用前景。     

并行共焦显微检测技术及其研究进展

共焦显微术是一种重要的微小物体成像技术,由于具有高精度、高分辨率及容易实现三维重构图像的优势而被广泛应用于微纳三维形貌测量。近年来,并行共焦显微检测技术引起各国专家的广泛关注,该技术将单点扫描变为多路同时并行探测,大大提高了三维检测速度。综述了并行共焦显微检测技术的基本原理,系统论述了近年来国内外在并行共焦显微检测技术方面的研究进展以及作者在这方面的研究。按照实现并行检测的方法对7种并行共焦显微检测技术进行了分类介绍,并指出了各种方法的优缺点。最后总结了目前存在的技术难题,分析了未来的发展趋势,为我国进一步开展此项研究提供技术参考。     

蓝紫光的腔增强空气喇曼光谱

喇曼光谱是一种无损、快速检测物质成分的方法。为了提高监测灵敏度, 对408nm波段半导体激光器的腔增强自发喇曼散射进行了研究。利用输出功率500mW、线宽0.9nm的408nm半导体激光器作激发光, 把激光耦合入共焦球面镜腔, 两面共焦球面镜的反射率分别为96.5%和99.5%, 部分激光返回半导体激光器形成光反馈, 半导体激光器与共焦腔形成共振。对装置的光反馈过程进行了探讨, 并对外腔的模式匹配和频率匹配分别进行了分析。结果表明, 共焦腔内功率达到15W, 功率增强了30倍; 用90°探测构型收集喇曼信号, 完成了空气喇曼信号检测; 1s积分时间, 获得N₂信号900个计数。此共振增强腔大大增强了喇曼散射信号, 有潜力应用于多种气体的在线检测或高灵敏度检测。     

抑制容器荧光干扰的双轴共焦拉曼检测方法

为消除拉曼光谱检测中样品装载容器的荧光背景干扰,利用样品拉曼信号光与容器产生的荧光不共焦的特性,设计了一种双轴共焦的检测光路结构。实验结果表明:来自容器的荧光干扰幅度出现数量级的衰减,拉曼信号光幅度下降了约30%;双轴共焦拉曼检测方法能够避免传统共轴共焦检测方法中拉曼信号光和荧光混合接收的问题,解决了荧光干扰对拉曼信号动态检测范围的限制,实现了对荧光材料容器装载样品拉曼信号的有效检测。     

具有高空间分辨力的双极性绝对式差动共焦检测方法

提出一种用于超精密三维微细结构测量的横向光学超分辨、轴向纳米级分辨的绝对式高空间分辨力共焦检测方法,该方法利用超分辨光瞳滤波技术最大程度地改善共焦显微系统的横向分辨力,利用探测器轴向偏置的双探测共焦光路布置和双探测信号归一化差动接受最大程度地改善共焦显微系统的轴向分辨力,最终实现共焦检测系统的高空间分辨力双极性绝对测量.文中以整形环形光横向超分辨为例,初步验证了提出的高空间分辨力差动共焦扫描检测方法的有效性.实验表明:当入射激光束波长λ=632.8nm,测量物镜数值孔径取NA=0.85,ε=0.5,μM=6.95时,整形环形光瞳式差动共焦传感器的横向分辨力优于0.2μm,轴向分辨力优于2nm.     

一种用于太赫兹共焦扫描图像复原的复合算法

THz 共焦扫描成像中,由于太赫兹激光器不可能恒定输出和采集信号微弱等原因,导致成像质量有待提高;数字图像复原方法是一种节约系统成本和空间的有效手段。文中提出了一种用于太赫兹共焦扫描图像复原的基于两步背景抑制、中值非局部均值(MNLM)滤波和灰度变换的复合方法,并将此方法用于真实太赫兹图像,与中值滤波、开运算和非局部均值滤波相比较。真实图像处理结果表明,此方法具有较好的复原效果,尤其是图像对比度有明显提高。     

微流控芯片核酸分析系统及其精准医学应用

目前临床病原菌检测主要依赖细菌培养的方法,该方法周期长、准确性低,且容易产生交叉污染和人体感染等问题。提出微流控芯片核酸恒温扩增分子诊断技术,开发离心进样空气隔离微流控芯片和共焦面成像光学检测系统,采用旋转扫描信号采集方法和薄层空气浴流动加热比例-积分-微分温控方法对呼吸道病原菌进行实验和分析。研制恒温扩增微流控芯片核酸分析系统,将系统检测灵敏度提高至10copies,降低样品试剂消耗量至0.94μL,在45min内能够同时进行多种病原菌指标的并行分析鉴定。通过100例临床样品实验测试,得到所提系统与传统聚合酶链反应所得结果的总符合率大于98%,可满足医院、社区医疗、乡镇卫生诊所等低成本精准医疗应用的需要。     

Development of the readout system for waveguide multilayer optical card

Waveguide multilayer optical card （WMOC） is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling ＆ processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic （VB） language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor.     

Nanoimprint Lithography -A Next Generation High Volume Lithography Technique

IntroductionNanoimprint Lithography is a well-acknowl-edged low cost, high resolution, large area pattern-ing process. It includes the most promising methods,high-pressure hot embossing lithography (HEL) [2],UV-cured imprinting (UV-NIL) [3] and micro contactprinting (m-CP, MCP) [4]. Curing of the imprintedstructures is either done by subsequent UV-lightexposure in the case of UV-NIL or by cooling downbelow the glass transition temperature of the ther-moplastic material in case of HEL…     

Collinear phase-matching study of terahertz-wave generation via difference frequency mixed in GaAs and Inp

The collinearly phase-matching condition of terahertz-wave generation via difference frequency mixed in GaAs and InP is theoretically studied. In collinear phase-matching, the optimum phase-matching wave hands of these two crystals are calculated. The optimum phase-matching wave bands in GaAs and lnP are 0.95-1.38μm and 0.7-0.96μm respectively. The influence of the wavelength choice of the pump wave on the coherent length in THz-wave tuning is also discussed. The influence of the temperature alteration on the phase-matching and the temperature tuning properties in GaAs crystal are calculated and analyzed. It can serve for the following experiments as a theoretical evidence and a reference as well.     

Effects of the alloy compositions on the phonon-polaritons in ternary mixed crystals

Composition dependence of bulk and surface phonon-polaritons in ternary mixed crystals are studied in the framework of the modified random-element-isodisplacement model and the Bom-Huang approximation. The numerical results for Several Ⅱ - Ⅵ and Ⅲ- Ⅴ compound systems are performed, and the polariton frequencies as functions of the compositions for ternary mixed crystals AlxGa1-xAs, GaPxAS1-x, ZnSxSe1-x, GaAsxSb1-x, GaxIn1-xP, and ZnxCd1-xS as examples are given and discussed. The results show that the dependence of the energies of two branches of bulk phonon-polaritons which have phonon-like characteristics, and surface phonon-polaritons on the compositions of ternary mixed crystals are nonlinear and different from those of the corresponding binary systems.     

Influence of PVK ： NPB hole transporting layer on the characteristics of organic light-emitting devices

A doping system consisting of NPB and PVK is employed as a composite hole transporting layer （CHTL）. By adjusting the component ratio of the doping system, a series of devices with different concentration proportion of PVK ： NPB are constracted. The result shows that doping concentration of NPB enhances the competence of hole transporting ability, and modifies the recombination region of charge as well as affects the surface morphology of doped film. Optimum device with a maximum brightness of 7852 cd/m^2 and a power efficiency of 1.75 lm/W has been obtained by choosing a concentration proportion of PVK ： NPB at 1：3.     

New insert layer structure OLEDs

An insert layer structure organic electroluminescent device（OLED） based on a new luminescent material （Zn（salen）） is fabricated. The configuration of the device is ITO/CuPc/NPD/Zn（salen）/Liq/LiF/A1/CuPc/NPD/Zn（salen）/Liq/LiF/A1. Effective insert electrode layers comprising LiF（1nm）/Al（5 nm） are used as a single semitransparent mirror, and bilayer cathode LiF（1 nm）/A1（100 nm） is used as a reflecting mirror. The two mirrors form a Fabry-Perot microcavity and two emissive units. The maximum brightness and luminous efficiency reach 674 cd/m^2 and 2.652 cd/A, respectively, which are 2.1 and 3.7 times higher than the conventional device, respectively. The superior brightness and luminous efficiency over conventional single-unit devices are attributed to microcavity effect.     

Analysis of error performance on Turbo coded FDPIM

Due to variable symbol length of digital pulse interval modulation（DPIM）, it is difficult to analyze the error performances of Turbo coded DPIM. To solve this problem, a fixed-length digital pulse interval modulation（FDPIM） method is provided. The FDPIM modulation structure is introduced. The packet error rates of uncoded FDPIM are analyzed and compared with that of DPIM. Bit error rates of Turbo coded FDPIM are simulated based on three kinds of analytical models under weak turbulence channel. The results show that packet error rate of uncoded FDPIM is inferior to that of uncoded DPIM. However, FDPIM is easy to be implemented and easy to be combined, with Turbo code for soft-decision because of its fixed length. Besides, the introduction of Turbo code in this modulation can decrease the average power about 10 dBm, which means that it can improve the error performance of the system effectively.     

A method for calculating the center position of collimated light

It is a key problem to accurately calculate beam spots＇ center of measuring the warp by using a collimated laser. A new method, named double geometrical center method （DGCM）, is put forward for the first time. In this method, a plane wave perpendicularly irradiates an aperture stop, and a charge couple device （CCD） is employed to receive the diffraction-beam spots, then the geometrical centers of the fast and the second diffraction-beam spots are calculated respectively, and their mean value is regarded as the center of datum beam. In face of such adverse instances as laser intension distributing defectively, part of the image being saturated, this method can still work well. What＇s more, this method can detect whether an unacceptable error exits in the courses of image receiving, processing and calculating. The experimental results indicate the precision of this method is high.     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.