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光化学气相沉积(光 CVD)是一种继低压化学气相沉积(LPCVD)和等离子体化学气相沉积(PECVD)之后的又一项新的低温成膜工艺。首先介绍了光化学气相沉积的物理基础,然后重点介绍了光化学气相沉积的实验方法,最后简要介绍了光化学气相沉积在薄膜制备中的一些应用。 相似文献
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SiC薄膜制备工艺进展 总被引:2,自引:0,他引:2
本文综述了SiC薄膜的制备工艺及进展,介绍了物理气相沉积、化学气相沉积、等离子化学气相沉积及光化学气相沉积等各种SiC薄膜的制备方法,简单阐述了各种工艺对薄膜性能的影响,评述了各种制备工艺的优缺点。 相似文献
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SiC薄膜制备工艺进展 总被引:6,自引:0,他引:6
本文综述了SiC薄膜的制备工艺及进展,介绍了物理气相沉积、化学气相沉积、等离子化学气相沉积及光化学气相沉积等各处SiC薄膜的制备方法,简单阐述了各种工艺对薄膜性能的影响,评述了各种制备工艺的优缺点。 相似文献
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综述了等离子体化学气相沉积法(PCVD)的特点,等离子体对化学气相沉积的作用,PCVD精细陶瓷薄膜制备系统的结构和选择,并展望了该法的发展及在精细陶瓷薄膜制备中的应用。 相似文献
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聚对苯(撑)二甲基膜的化学气相沉积(CVD)聚合 总被引:4,自引:0,他引:4
采用化学气相沉积(CVD)聚合工艺制备的对苯撑二甲基聚合物可广泛应用在航天、航空、军工、电子、生物医学工程、控制系统、文物保护、纳米材料和磁性材料等诸多领域.综述了聚对苯(撑)二甲基系列膜的化学气相沉积聚合工艺和原理,介绍了底物温度和沉积舱压力等主要因素对膜沉积率的影响和膜的一些主要性能,并讨论了典型的Parylene N膜的光氧降解性能. 相似文献
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A method is proposed for estimating the parameters of a mixture of exponential and Weibull distributions for which the accuracy of preliminary estimates obtained by graphical analysis is refined in accordance with the criterion of maximum likelihood. The efficiency of the proposed method is supported by the results of statistical modeling. 相似文献
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An approximate analytical expression is derived for the velocity of the front of the wave of change of boiling modes on a
rod and on a plate. The impact of the Thomson effect and of the heater orientation in the gravity field is included. Adequate
agreement is demonstrated between the derived relations and experimental data. 相似文献
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Liebert A Wabnitz H Grosenick D Möller M Macdonald R Rinneberg H 《Applied optics》2003,42(28):5785-5792
A novel method for the determination of the optical properties of tissue from time-domain measurements is presented. The data analysis is based on the evaluation of the first moment and the second centralized moment, i.e., the mean time of flight and the variance of the measured distribution of times of flight (DTOF) of photons injected by short (picosecond) laser pulses. Analytical expressions are derived for calculation of absorption and of reduced scattering coefficients from these moments by application of diffusion theory for infinite and semi-infinite homogeneous media. The proposed method was tested on experimental data obtained with phantoms, and results for absorption and reduced scattering coefficients obtained by the proposed method are compared with those obtained by fitting of the same data with analytical solutions of the diffusion equation. Furthermore, the accuracy of the moment analysis was investigated for a range of integration limits of the DTOF. The moment analysis may serve as a comparatively fast method for evaluating optical properties with sufficient accuracy and can be used, e.g., for on-line monitoring of optical properties of biological tissue. 相似文献
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水三相点是开尔文热力学温度的唯一基准点,也是ITS-90国际温标重要的定义固定点。因此,水三相点不确定度分析对整个温标的建立、温度量值传递起着至关重要的作用。近3年来,中国计量科学研究院研制出一系列高质量的水三相点容器,加强了水三相点的研究,为不确定度的分析提供了更为可靠的实验依据。同时,不确定度的分析也是客观评价新研制容器性能的一个重要指标。因此,根据实验结果对新研制容器所复现的水三相点进行了不确定度评定。评定结果表明,其扩展不确定度为0.16mK(k=2.69,P=0.99)。 相似文献
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