Analysis of optical emission spectroscopy data during silicon etching in SF6/O2/Ar plasma

Silicon etching is an essential process in various applications,and a major challenge for etching process is anisotropic high aspect ratio etching characteristics.The etch profile is determined by the plasma parameters and process parameters.In this study,the plasma state with each process parameters were analyzed through the optical emission spectroscopy(OES)plasma diagnostic sensor by both chemical and physical approaches.Electron temperature and electron density were additionally acquired using the corona model with OES data that provides chemical species information,and the etch profile was evaluated through scanning electron microscope measurement data.The results include changes in profile with gas ratio,bias power,and pressure.We figure out that factors like ion energy and ion angular distribution as well as chemical reaction affect the anisotropic profile.     

Temporal and spatial evolution measurement of laser-induced breakdown spectroscopy on hydrogen retention in tantalum

Fuel retention measurement on plasma-facing components is an active field of study in magnetic confinement nuclear fusion devices.The laser-induced breakdown spectroscopy(LIBS)diagnostic method has been well demonstrated to detect the elemental distribution in PFCs.In this work,an upgraded co-axis LIBS system based on a linear fiber bundle collection system has been developed to measure the hydrogen(H) retention on a tantalum(Ta) sample under a vacuum condition.The spatial resolution measurement of the different positions of the LIBS plasma can be achieved simultaneously with varying delay times.The temporal and spatial evolution results of LIBS plasma emission show that the H plasma observably expands from the delay times of 0-200 ns.The diameter of Ta plasma is about 6 mm which is much less than the size of H plasma after 200 ns.The difference in the temporal and spatial evolution behaviors between H plasma and Ta plasma is due to the great difference in the atomic mass of H and Ta.The depth profile result shows that H retention mainly exists on the surface of the sample.The temporal and spatial evolution behaviors of the electron excited temperature are consistent with that of the Ta emission.The result will further improve the understanding of the evolution of the dynamics of LIBS plasma and optimize the current collection system of in situ LIBS in fusion devices.     

Investigation on plasma characteristics in a laser ablation pulsed plasma thruster by optical emission spectroscopy

In order to further improve the propulsion performance of pulsed plasma thrusters for space micro propulsion, a novel laser ablation pulsed plasma thruster is proposed, which separated the laser ablation and electromagnetic acceleration. Optical emission spectroscopy is utilized to investigate the plasma characteristics in the thruster. The spectral lines at different times,positions and discharge intensities are experimentally recorded, and the plasma characteristics in the discharge channel are concluded through analyzing the variation of spectral lines. With the discharge energy of 24 J, laser energy of 0.6 J and the use of aluminum propellant, the specific impulse and thrust efficiency reach 6808 s and 70.6%, respectively.     

Characteristics of temporal evolution of particle density and electron temperature in helicon discharge

On the basis of considering electrochemical reactions and collision relations in detail,a direct numerical simulation model of a helicon plasma discharge with three-dimensional two-fluid equations was employed to study the characteristics of the temporal evolution of particle density and electron temperature.With the assumption of weak ionization,the Maxwell equations coupled with the plasma parameters were directly solved in the whole computational domain.All of the partial differential equations were solved by the finite element solver in COMSOL MultiphysicsTM with a fully coupled method.In this work,the numerical cases were calculated with an Ar working medium and a Shoji-type antenna.The numerical results indicate that there exist two distinct modes of temporal evolution of the electron and ground atom density,which can be explained by the ion pumping effect.The evolution of the electron temperature is controlled by two schemes:electromagnetic wave heating and particle collision cooling.The high RF power results in a high peak electron temperature while the high gas pressure leads to a low steady temperature.In addition,an OES experiment using nine Ar I lines was conducted using a modified CR model to verify the validity of the results by simulation,showing that the trends of temporal evolution of electron density and temperature are well consistent with the numerically simulated ones.     

Temporal and spatial study of differently charged ions emitted by ns-laser-produced tungsten plasmas using time-of-flight mass spectroscopy

Tungsten (W) is an important material in tokamak walls and divertors.The W ion charge state distribution and the dynamic behavior of ions play important roles in the investigation of plasma-wall interactions using laser-ablation-based diagnostics such as laser-induced breakdown spectroscopy and laser-induced ablation spectroscopy.In this work,we investigate the temporal and spatial evolutions of differently charged ions in a nanosecond-laser-produced W plasma in vacuum using time-of-flight mass spectroscopy.Ions with different charge states from 1 to 7 (W+ to W7+) are all observed.The temporal evolutions of the differently charged ions show that ions with higher charge states have higher velocities,indicating that space separation occurs between the differently charged ion groups.Spatially-resolved mass spectroscopy measurements further demonstrate the separation phenomenon.The temporal profile can be accurately fitted by a shifted Maxwell-Boltzmann distribution,and the velocities of the differently charged ions are also obtained from the fittings.It is found that the ion velocities increase continuously from the measured position of 0.75 cm to 2.25 cm away from the target surface,which indicates that the acceleration process lasts through the period of plasma expansion.The acceleration and space separation of the differently charged ions confirm that there is a dynamic plasma sheath in the laser-produced plasma,which provides essential information for the theoretical laser-ablation model with plasma formation and expansion.     

Temporal and spatial dynamics of optical emission from laser ablation of the first wall materials of fusion device

Laser-induced breakdown spectroscopy(LIBS) has been developed to in situ diagnose the chemical compositions of the first wall in the EAST tokamak. However, the dynamics of optical emission of the key plasma-facing materials, such as tungsten, molybdenum and graphite have not been investigated in a laser produced plasma(LPP) under vacuum. In this work, the temporal and spatial dynamics of optical emission were investigated using the spectrometer with ICCD.Plasma was produced by an Nd:YAG laser(1064 nm) with pulse duration of 6 ns. The results showed that the typical lifetime of LPP is less than 1.4 μs, and the lifetime of ions is shorter than atoms at ~10~(-6)mbar. Temporal features of optical emission showed that the optimized delay times for collecting spectra are from 100 to 400 ns which depended on the corresponding species. For spatial distribution, the maximum LIBS spectral intensity in plasma plume is obtained in the region from 1.5 to 3.0 mm above the sample surface. Moreover, the plasma expansion velocity involving the different species in a multicomponent system was measured for obtaining the proper timing(gate delay time and gate width) of the maximum emission intensity and for understanding the plasma expansion mechanism. The order of expansion velocities for various species is V_C~+ V_H V_(Si)~+ V_(Li) V_(Mo) V_W.These results could be attributed to the plasma sheath acceleration and mass effect. In addition, an optimum signal-to-background ratio was investigated by varying both delay time and detecting position.     

Plasma diagnostics by optical emission spectroscopy on manganese ore in conjunction with XRD,XRF and SEM-EDS

Manganese (Mn) is an important industrial mineral. Information about the chemical and phase constitution along with the concentration of impurities presented in Mn ore is compulsory in assessing its suitability for different applications. We performed the qualitative and quantitative analysis of low-grade Mn ore (LGMO) using laser-induced breakdown spectroscopy (LIBS) in conjunction with x-ray diffraction (XRD), x-ray fluorescence (XRF) and scanning electron microscopy (SEM) coupled with energy dispersive x-ray electron spectroscopy (EDS). The optical emission spectra of the LGMO sample displayed the presence of Mn, Si, Ca, Fe, Al, Mg, V, Ti, Sr, Ni, Na, Ba and Li. The plasma parameters, electron temperature and number density were estimated using the Boltzmann plot and Stark broadening line profile methods and were found to be 7500 K±750 K and 8.18±0.8×10¹⁷ cm⁻³, respectively. Quantitative analysis was performed using the calibration-free LIBS (CF-LIBS) method and its outcome along with XRD, XRF and SEM-EDS data showed almost analogous elemental composition, while the LIBS method gave acceptably precise elemental analysis by detecting the low atomic number element Li besides V and Sr. The results obtained using LIBS for the LGMO exhibited its ability as a powerful analytical tool and XRF, XRD and SEM-EDS as complementary methods for the compositional analysis of complex low-grade mineral ore.     

OH and O radicals production in atmospheric pressure air/Ar/H2O gliding arc discharge plasma jet

Atmospheric pressure air/Ar/H_2O gliding arc discharge plasma is produced by a pulsed dc power supply. An optical emission spectroscopic(OES) diagnostic technique is used for the characterization of plasmas and for identifications of OH and O radicals along with other species in the plasmas. The OES diagnostic technique reveals the excitation Tx?≈?5550–9000 K, rotational Tr?≈?1350–2700 K and gas Tg?≈?850–1600 K temperatures, and electron density n?(1.1-1.9) ′101 4 cm~(-3) e under different experimental conditions. The production and destruction of OH and O radicals are investigated as functions of applied voltage and air flow rate. Relative intensities of OH and O radicals indicate that their production rates are increased with increasing Ar content in the gas mixture and applied voltage. nereveals that the higher densities of OH and O radicals are produced in the discharge due to more effective electron impact dissociation of H_2O and O_2 molecules caused by higher kinetic energies as gained by electrons from the enhanced electric field as well as by enhanced n e.The productions of OH and O are decreasing with increasing air flow rate due to removal of Joule heat from the discharge region but enhanced air flow rate significantly modifies discharge maintenance properties. Besides, Tgsignificantly reduces with the enhanced air flow rate. This investigation reveals that Ar plays a significant role in the production of OH and O radicals.     

Electrical characters and optical emission spectra of VBD coupled SBD excited by sine AC voltage in atmospheric air

In this paper,volume coupled surface barrier discharge(V-SBD) with three structures possessing different volumes is excited by sine AC power in atmospheric air.Discharge images,waveforms of applied voltage and discharge current,and optical emission spectra simulating rotational and vibrational temperatures are recorded and analyzed.The effects of applied voltage on emission intensities of N_2(C~3Π_u→ B~3Π_g) and N_2~+(B~2∑_u~+ → X~2E_g~+),and rotational and vibrational temperatures are investigated.The results show that as applied voltage rises,emission intensities and rotational temperatures increase while vibrational temperatures decrease.In addition it is found that,as applied voltage varies,the rotational temperature of surface discharge changes faster than that of volume discharge.     

Preliminary results of optical emission spectroscopy by line ratio method in the RF negative ion source at ASIPP

Optical emission spectroscopy (OES) using the trace rare gases of Ar and Xe have been carried out in a radio frequency (RF) driven negative ion source at Institute of Plasma Physics, Chinese Academy of Science (ASIPP), in order to determine the electron temperature and density of the hydrogen plasma. The line-ratio methods based on population models are applied to describe the radiation process of the excited state particles and establish their relations with the plasma parameters. The spectral lines from the argon and xenon excited state atoms with the wavelength of 750.4 and 828.0 nm are used to calculate the electron temperature based on the corona model. The argon ions emission lines with the wavelength of 480 and 488 nm are selected to calculate the electron density based on the collisional radiative model. OES has given the preliminary results of the electron temperature and density by varying the discharge gas pressure and RF power. According to the experimental results, the typical plasma parameters is T_e ≈ 2–4 eV and n_e ≈ 1×10 ¹⁷– 8×10¹⁷ m⁻³ in front of plasma grid.     

Study of axial double layer in helicon plasma by optical emission spectroscopy and simple probe

In this work we used a passive measurement method based on a high-impedance electrostatic probe and an optical emission spectroscope (OES) to investigate the characteristics of the double layer (DL) in an argon helicon plasma.The DL can be confirmed by a rapid change in the plasma potential along the axis.The axial potential variation of the passive measurement shows that the DL forms near a region of strong magnetic field gradient when the plasma is operated in wavecoupled mode,and the DL strength increases at higher powers in this experiment.The emission intensity of the argon atom line,which is strongly dependent on the metastable atom concentration,shows a similar spatial distribution to the plasma potential along the axis.The emission intensity of the argon atom line and the argon ion line in the DL suggests the existence of an energetic electron population upstream of the DL.The electron density upstream is much higher than that downstream,which is mainly caused by these energetic electrons.     

Generation of reactive atomic species of positive pulsed corona discharges in wetted atmospheric flows of nitrogen and oxygen

The emission spectra of excited radicals(OH(A~2E),O(3p~3 P),H_α(3P)) and emissive species(N_2~+(B~2∑_u~+),N_2(C_3Π_u)) produced by positive pulsed high-voltage needle-plane corona discharges in atmospheric N_2 and O_2 flows wetted with 10%H_2O at 80 ℃ are used to investigate the relative concentrations of the produced radicals.The results indicate that the tendencies of the concentrations of radicals with discharge conditions are similar to each other due to their similar excitation processes by electron collision.The influence of oxygen flow mixed with the nitrogen flow on the emission intensities of O(3p~5P → 3s~5S_2~.),H_α(3P → 2S),N_2_+(B~2∑_u~+ → X~2∑_g+0-0),and N_2(C~3Π_u → B~3Π_g 1-0) is presented.When the flow rate of oxygen addition is varied from 0-30 ml min~(-1),the emission intensities of O(3p~5P → 3s~5S_2~0.),H_α(3P → 2s),and N_2~+(B~2∑_u~+ →X~2∑_g 0-0) increase and reach a maximum.Then,if the oxygen flow rate increases further,the emission intensities tend to decrease.However,the intensity of N_2(C~3Π_u → B~3Π_g1-0) decreases monotonously with the increasing oxygen flow,which indicates that the electron density decreases with the increasing oxygen flow.By the tendencies of the relative intensities to N_2(C~3Π_u → B~3Π_g 1-0),the concentrations of the total produced O,H,and N_2~+ are shown to increase with the oxygen flow.Based on the reactions for the production of H and O without and with the addition of O_2,the analytic solutions for H and O production are derived in accordance with the experimental results.