声光式外差干涉仪的光路设计与分析

制造业的发展迫切需要对高速加工过程中的物体进行测量和定位,利用声光调制法实现外差干涉能产生较高的频差可以实现高速测量.文中对声光式外差干涉仪的光路设计进行了分析,提出了空间分离一级衍射光和零级衍射光的一种方案,并且对光拍频的接收,光路的调整进行了分析,实验结果证明该实验系统可以用于外差干涉测量.     

共光路外差干涉仪中激光束角漂移的影响

共光路外差干涉仪中激光束角漂移的影响＊李鹏生于瀛洁张琢于英满（哈尔滨工业大学哈尔滨１５０００１）０引言双频激光共光路外差干涉仪测量表面微细形貌原理如图１所示［１］,光路１和光路２的干涉信号的光强由光电元件接收。通过分析计算［２］,可得如下关系式：１．...     

双频激光干涉仪在机床坐标测量中光路的调整方法

本文介绍使用双频激光干涉仪测量机床定位坐标误差的三角调整方法,和用块规架代替磁力表架及采用五角棱镜等减小测量误差的方法。     

简化光路的激光干涉仪及其应用

文中论述了简化光路激光干涉仪的原理,并对该仪器的测试精度和在机械工程中的应用进行了详尽分析。     

超精密外差利特罗式光栅干涉仪位移测量系统

开展了扫描干涉光刻机工作台超精密位移测量的实验研究,以提高扫描干涉光刻机的环境鲁棒性。针对扫描干涉光刻机工作台位移测量精度,提出了新型高环境鲁棒性外差利特罗式光栅干涉仪测量系统。介绍了系统测量原理,设计了测量系统,提出了基于Elden公式的系统死程误差建模方法。设计制造了尺寸仅为48mm×48mm×18mm的光栅干涉仪。基于误差模型计算了死程误差,计算结果表明:对于1.52mm死程的光栅干涉仪,宽松的环境波动指标(温度波动为0.01℃、压力梯度为±7.5Pa、相对湿度波动为1.5%、CO2含量波动为±50×10-6)仅引起±0.05nm的死程误差。最后,设计了基于商用双频激光平面镜干涉仪的测量比对系统,开展了光栅干涉仪原理验证实验和测并量稳定性实验。原理验证实验表明:光栅干涉仪原理正确且系统分辨率达0.41nm。测量稳定性实验表明:常规实验室环境下,环境波动引起的死程误差为7.59nm(3σ)@0.9Hz1~10Hz,优于同等环境条件下平面镜干涉仪的31.11nm(3σ)@0.9Hz1~10Hz。实验结果显示系统具有很高的环境鲁棒性。     

适用于工业现场的小型化双波长激光外差干涉仪

适用于工业现场的小型化双波长激光外差干涉仪李彬，梁晋文（东南大学机械系南京２１００１８）（清华大学精仪系北京１０００８４）０引言多波长激光干涉测量利用合成波长概念，可以在降低或不降低测量灵敏度的前提下，延长干涉测量的非多值区间（ｕｎａｍｂｉｇｕｏｕｓ...     

一种测量表面粗糙度的激光外差干涉仪

本文讨论激光外差干涉技术测量表面粗糙度仪器的工作原理。作者利用两个声光调制器产生差频光,解调拍频信号并进行鉴相处理,精确测量表面粗糙度。文中还讨论了设计研制的表面粗糙度外差干涉仪的具体技术问题,对不同样品及加工表面进行实测,并与传统触针测试方法、干涉显微镜所得到的结果进行了比对,理论分析与实验结果一致:仪器灵敏度为10(?),测量精度10nm。     

外差干涉仪中金属反射镜对测量精度的影响

根据金属反射理论,偏振光经金属反射镜反射后会变成椭圆偏振光。本文研究了光路干涉仪中偏振方向相互垂直的线偏振光通过金属反射镜后引起的椭圆偏振光的不正交性和偏心度,并研究了此偏振光经渥拉斯顿棱镜后引起的频率混叠误差的机理和变化规律。经矢量分析得到,该误差是一阶非线性误差,吴正弦规律变化,误差的最大值随安装方位误差的增大而增大。本文给出了具体的计算实例和误差补偿措施,对实现外差干涉仪的高精度测量是极为重要的。     

光路系统元件运动对全息测量的影响研究

本文研究激光全息三维位移测量中光路系统元件运动对测量的影响。重点分析了干版位移,参考光点光源位移和物光点光源位移对被测物体位移的测量结果的影响,并推导了相关的计算公式,最后给出了实验结果。     

一种新型迈克尔逊干涉仪条纹计数器的设计

设计了一种对不同背景光强具有自动适应性的迈克尔逊干涉仪的干涉条纹计数器。利用光敏电阻把干涉条纹的明暗变化转换为电信号的变化,通过对电压波形的分析,提出了一种通过波形电平变化顺序是否符合周期性变化规律的计数方法。实验证明,计数器原理简单,可以适应不同的背景光强,具有精确度高、操作简便可靠等优点。     

Improvement and validity of shock measurements using heterodyne laser interferometer

The improvement and validity of shock measurements using only the laser head (heterodyne laser interferometer) of a commercial laser Doppler vibrometer was investigated by comparing acceleration waveforms measured by a homodyne laser interferometer with those measured by a heterodyne laser interferometer. The acceleration waveforms were generated from the displacement waveforms obtained with a reference quadrature homodyne laser interferometer by applying a numeric differentiation process twice. The differences between the two acceleration waveforms were found to be small with the measurement uncertainty in case of high acceleration level. In a further investigation, the accuracy of the shock measurements taken by the homodyne and heterodyne laser interferometers were compared in computational simulation. The results indicated that the accuracy of the heterodyne laser interferometer was superior to that of the homodyne laser interferometer.     

共光路径向剪切干涉仪的设计

针对常规像移式干涉仪无法用于大口径、长光路光学系统波像差检测的工程问题,设计了共光路径向剪切干涉仪以消除采用标准波面所引入的系统误差.设计中采用由三角棱镜与斜方棱镜组合而成的胶合棱镜组作为波面剪切器件,将待测波面与其复制波面产生干涉,并通过一组有不同相对孔径的透镜切换装置来控制干涉仪剪切比.与4D动态干涉仪在不同条件下...     

A proposed design for a polarization-insensitive optical interferometer system with subnanometric capability

A bidirectional, fringe-counting, two-beam interferometer system is described that can be used for precision length measurement with any laser source that is adequately coherent for the application. The two electrical phase-quadrature signals required for bidirectional electronic counting are obtained from photodetectors at the two interferometer outputs. A thin metal film design for the beam-splitter coating introduces the required phase difference of nearly 90° for both the perpendicular and parallel polarization components. Electronic alignment and control are performed by a system used to continuously monitor the signals produced from the outputs and automatically process these signals to achieve the optimum performance from the interferometer. Interferometers using the technique require a limited amount of optical alignment and all of the electronic adjustments are automatically controlled by the electronic system. These instruments are economical to manufacture and easy to apply in practice, readily achieving subnanometric accuracy in the measurement of changes in optical path.     

激光干涉仪引力波探测器的基本光学结构

引力波是爱因斯坦广义相对论的重要预言,引力波探测是当代物理学最重要的前沿领域之一。以引力波探测为基础的引力波天文学是一门新兴的交叉科学,是对传统电磁辐射天文学的巨大拓展与补充。作为一种大型的精密光学仪器并作为引力波天文学研究的关键设备,激光干涉仪引力波探测器已在世界各地蓬勃发展起来,开辟了引力波探测的新时代。给出了激光干涉仪引力波探侧器的工作原理和基本光学结构,讨论了主要的性能参数,分析了光学镜的结构特点及测量方法。     

一种基于飞秒光频梳频域干涉的绝对测距方法

飞秒光频梳(光梳)在激光测距领域有着重要应用。本文研究基于飞秒光频梳的频域干涉绝对测距技术,提出了一种新的基于傅里叶变换的频域峰值间隔测距方法,分析了测距原理并进行了多组绝对测距实验。实验结果表明通过频域峰值间隔测距可以实现绝对测距,被测距离1.2 mm时测距精度最高,最大误差?12 nm。在光谱的分析处理上,提出一种基于复小波变换的相位斜率测距的方法。结果表明相位斜率测距法可以实现距离信息的提取,在被测距离1.2 mm时测距精度最高,最大误差?16 nm。最后与经典傅里叶分析法进行了比较,比较结果表明频域峰值间隔测距法得到的实验结果精度好于相位斜率测距法和傅里叶分析法。     

干涉仪在分光计调整中的应用

分光计的调整相对繁琐,其中最关键的一步就是如何调整分光计的中心轴和望远镜的光轴垂直。现提出了如何巧妙地应用干涉仪对分光计的载物台装置进行水平调节,并给出了快速、精确调整望远镜光轴和分光计中心轴垂直的方法。使用该方法在很大程度上缩短了调节时间并且提高了测量的准确性。     

Subnanometric calibration of a differential interferometer

A novel self-calibration method is proposed for calibrating differential interferometers with subnanometer resolution, and the basic characteristics of the method are discussed. Analysis shows that without using any external reference, the calibration accuracy approaches the resolution limit of the interferometer, which is determined by the signal-to-noise ratio (SNR) and the stability of the measurement system. A compact differential interferometer that uses a laser diode as the light source has been developed in order to demonstrate the viability of the proposed calibration method. The conventional fringe-counting and phase modulation methods are combined in order to extend the measurement range and improve the resolution of the interferometer. The developed interferometer was calibrated using the new method, and the calibration results were compared to those obtained by a comparison calibration method that uses a capacitance displacement sensor as the reference.