高吸收,耐强辐射热释电材料的研究

在PZT中通过掺杂得到了本体“黑”化的PZT热释电陶瓷。该材料室温下热释电系数为1.8×10~(-8)C/cm~2·K,在第一相变点(约34.5℃)达26.3×10~(-8)C/cm~2·K,介电常数为220.6。反射光谱显示陶瓷对可见光、近红外及紫外部分有强烈吸收,因此可用于这些波段内的强辐射探测。     

稀土氧化物掺杂对BST陶瓷热释电性能的影响

采用轧膜成型工艺制备了掺杂有稀土氧化物的钛酸锶钡(BST)陶瓷,研究了不同稀土(Sc,Y,La,Ce,Pr,Nd和Sm)氧化物掺杂对其微观形貌、介电性能和热释电性能的影响。结果表明,Sc掺杂大幅降低了BST陶瓷的εr,严重劣化了BST陶瓷的热释电性能,并引起了长条状晶粒在BST陶瓷中的出现;Y掺杂则显著提高了BST陶瓷的热释电性能,并最终获得了εr为7111、tanδ为0.65×10–2、热释电系数p为5.5×10–7C·cm–2·℃–1、探测率优值Fd为8.49×10–5Pa–1/2的热释电BST陶瓷材料,有望在红外探测领域得到应用。     

利用动态法测量相变热释电材料的热释电系数

用动态法测量了相变热释电材料(Ba0.65Sr0.35)TiO3薄膜的热释电系数,并对相变热释电系数的计算进行了理论分析.先测量了传统热释电材料LiTaO3单晶薄片的热释电系数,温度信号和热释电电压存在90°相位差,热释电系数为2.1×10-8C cm-2K-1,与文献测量值、理论计算一致,说明测试系统真实可靠.用动态法测量了工作在1.5 V偏压下的(Ba0.65Sr0.35)TiO3薄膜,输出电压由DC电压和AC电压构成,前者由(Ba0.65Sr0.35)TiO3薄膜的漏电流引起,后者为热释电响应电压.热释电响应电压与正弦温度信号同相位,其振幅与正弦温度信号的振幅成正比.理论计算表明,动态法测量相变热释电材料时,热释电响应电压与温度信号同相位变化是由相变热释电材料的电容随温度信号的变化引起的.     

一种新型三路自适应热释电系数测试系统

基于动态电流法设计了一种新型热释电系数测试系统,其新颖之处在于首创设计了三路自适应微电流放大电路模块,该模块解决了弱热释电材料需要小动态范围,高灵敏度微电流放大而强热释电材料需要大动态范围,低灵敏度微电流放大的矛盾.系统先利用计算机对三路自适应微电流放大电路进行控制,再利用其强大的信息处理能力来获取热释电系数与温度的关系曲线,并在计算机上以数据和图形形式显示出来.实验结果证明,该新型三路自适应热释电系数测试系统既能满足弱热释电性材料,也能满足强热释电性材料热释电系数的测试要求.     

热释电系数的测量方法

描述热释电系数的两种测量方法。其一为电荷积分法，测试系统简单，测量数据准确，且能满足零电场条件下的测量。其二为动态电流法，采用调制热源技术，研究在特定温度条件下热释电材料的动态热释电响应。     

热释电薄膜单片式非致冷红外焦平面阵列的研究

采用改进的溶胶-凝胶(sol-gel)技术,在Pt/Ti/SiO2/Si3N4/SiO2/Si基片上研制出具有优良热释电性能的BST,PLT和PZT铁电薄膜,它们是制备单片式非致冷红外焦平面阵列的优选探测材料。解决了制备热释电薄膜单片式非致冷红外焦平面阵列的关键技术,成功研制出8元、9元、10元线列和8×8元阵列,器件电压响应率(RV)达8.6×103V/W。     

PbO和Bi_2O_3-Li_2CO_3助烧剂对Pb(Zr_(0.9)Ti_(0.1))O_3厚膜热释电性能的影响

采用丝网印刷工艺制备了Pb(Zr0.9T0.1)O3(PZT)厚膜,研究了过量PbO和Bi2O3-Li2CO3共同助烧对PZT厚膜低温烧结特性、微观结构、相构成以及介电和热释电性能的影响。结果表明:随着过量PbO及Bi2O3-Li2CO3添加量的增加,PZT厚膜的烧结温度和晶粒尺寸均逐渐降低。当PbO过量6.4%(质量分数)、Bi2O3-Li2CO3添加量为5.4%(质量分数)时,PZT厚膜可在900℃低温下致密成瓷,且其热释电系数和探测率优值均得到大幅提高;所得样品在30℃时的热释电系数为10.6×10–8C.cm–2.K–1,探测率优值为8.2×10–5Pa–1/2。     

铁电复合材料TGS—PVDF的介电和热释电性能的研究

制备了TGS-PVDF铁电复合材料,测量了该材料的介电常数、介质损耗和热释电系数,计算了该材料的热释电优值因子,并初步测试了由该材料制成的热释电探测器的性能。     

PZT厚膜与Si衬底互扩散阻挡层研究

在Pt/Ti/SiO2/Si基片上,利用电泳沉积制备PZT热释电厚膜材料.为防止Pb和Si互扩散,在Pt底电极与SiO2/Si衬底间通过直流磁控溅射制备了TiOx薄膜阻挡层.对具有0、300 nm和500 nm TiOx阻挡层的PZT厚膜材料用SEM和能量色散谱仪(EDS)表征了Pb和Si互扩散情况,用动态热释电系数测量仪测试了热释电系数.结果表明,当TiOx阻挡层为500 nm时,可阻挡Pb和Si互扩散,热释电性能最好.热释电系数p=1.5×10-8 C·cm-2·K-1,相对介电常数εr=170,损耗角正切tanδ=0.02,探测度优值因子Fd=1.05×10-5pa-0.5.     

PZT热释电红外探测器

讨论了锆太酸铅(PZT)热释电材料的选择原则,介绍了Zr/Ti为94/6的PZT热释电陶瓷材料的制作,并以此材料为敏感元制作成PZT红外探测器。对其基本结构、制作时存在的问题进行了研究。所制作的探测器D(500K,10Hz) 为5.7×10~8cmhz~(?)/W不仅可用于一般的热辐射探测,还可用于强辐射(如激光)的测量。     

Ferroelectric thin and thick films for microsystems

Ferroelectric oxide thin and thick films are interesting materials for microsystem devices because of their wide range of useful properties, particularly the pyroelectric and piezoelectric effects. The ability to grow these films at relatively low temperatures onto a wide range of substrates, including silicon, is especially important. This paper discusses the use of CSD processes to grow high-quality ferroelectric PZT30/70 thin films onto platinised silicon substrates at low temperatures (from 400°C to 575°C), with particular reference to their use in pyroelectric infra-red detector arrays and other MEMS devices. The various factors important to the use of sol–gel processes are discussed, including mechanisms for sol ageing and for perovskite nucleation and growth. The latter is interesting, involving the formation of a transient Pt₃Pb phase that acts as a nucleation layer for the templated growth of the PZT layer. The effects of Mn doping on the resulting materials properties are discussed. It leads to a strong asymmetry in the ferroelectric hysteresis behaviour as well as improved pyroelectric performance. Techniques for increasing the thickness of sol–gel layers, and the reasons for the appearance of nanoporosity, are reviewed. Finally, the use of sol–gel techniques for the fabrication of composite piezoelectric ceramic thick films (10–20 μm thick) at low temperatures (710°C) are discussed.     

铁电薄膜非制冷红外探测器的技术发展

介绍了课题组在铁电薄膜的制备、特性研究以及非制冷红外探测技术方面的研究结果。研究获得了几种控制铁电薄膜微结构(如晶粒尺寸、晶粒形状、Ba_1-xSr_xTiO₃(BST)和PbZr_xTi_1-xO₃ (PZT)铁电薄膜的择优取向生长等)的新技术;研制出具有高度自极化特性的0.7Pb(Mg_1/3Nb_2/3)O₃-0.3PbTiO₃ (PMNT)弛豫铁电薄膜;探索了一种具有将红外转化为可见光机制的新型光读出方式;发明了PZT薄膜的低温(400 °C)生长方法。此外,还介绍了256×1线列铁电薄膜非制冷红外探测器的研制及部分成像结果。     

有源电阻RTIA红外焦平面读出电路

提出了一种基于有源电阻的电阻反馈跨导放大器(RTIA)红外焦平面读出电路,该电路采用工作在亚阈区的MOS管实现1011 以上的有源大电阻,不仅能与热释电红外探测器的高阻抗良好匹配,而且配合两管共源放大器可针对热释电微弱信号进行高增益电流放大。同时,简单的三管单元结构能够方便地置于像元之下,相比于采用特殊高阻材料实现的RTIA,不附加材料和工艺。经上华0.5 ?滋m CMOS工艺流片验证,在5 V电源电压下,该电路增益40 dB,输出摆幅3 V,在高低温测试下表现出了良好的增益带宽稳定性,适用于PZT和BST等热释电大阵列探测器。     

热释电非制冷红外焦平面现状及发展趋势

一维和二维阵列的热释电非制冷红外焦平面非常适合应用于热成像.混合式的BST铁电探测器降低了成本,市场潜力巨大.分析了热释电非制冷红外焦平面阵列探测技术的优势,介绍了热释电非制冷红外探测器工作原理及热释电非制冷红外焦平面阵列对探测材料的要求,指出了混合式及单片式热释电非制冷红外焦平面阵列发展趋势.制备高一致性和高性能的大阵列的探测元是发展非制冷红外焦平面的关键,针对我国在热释电非制冷红外焦平面阵列研究方面存在的问题,提出了下一步研究的方向及重点.     

微桥结构PZT厚膜红外探测器研究

利用KOH溶液腐蚀结合SF6气体干法刻蚀工艺制备了锆钛酸铅(PbZr0.3Ti0.7O3,PZT)厚膜热释电红外探测器,得到了器件Si基背面完全悬空的微桥绝热结构.使用由斩波器调制的黑体辐射,测试了探测器在低频段的电压响应率、噪声等效功率和探测率等参数.结果表明,探测器在调制频率为5.3 Hz时的电压响应率约为4.5×...     

Dielectric Properties of Pure (BaSr)TiO3 and Composites with Different Grain Sizes Ranging from the Nanometer to the Micrometer

Starting with a BST (Ba_0.6Sr_0.4TiO₃) nanopowder with a mean diameter of about 50 nm, the average grain size increases from the nanometer to the micrometer range (from 70 nm to 1–2 μm) by thermal annealing between 700 and 1400 °C. The dielectric properties of these pressed powders has been determined, showing that the temperature of transition decreases with grain size. In order to check this evolution in dense ceramics in which the grain size is conserved, composite materials based on ferroelectric nanograins and a non‐ferroelectric matrix have been prepared. Core–shell composites with different core sizes (150 and 50 nm) were synthesized in this way and the results obtained confirmed the decrease of the transition temperature with grain size, from 290 to 230 K respectively. Furthermore, dielectric losses are very weak in these core–shell composites—at between 0.1 and 1 % in the temperature range 150–450 K and the frequency range 1 × 10³–1 × 10⁵ Hz. Ferroelectric nanograins of BST were also incorporated into silica gel for comparison with the core–shell materials. Even for a high fraction of BST (approx. 75 %), the properties of the grains are masked by the presence of silica, which possesses a very low dielectric constant. This study has allowed the possible determination of the macroscopic dielectric properties in nanostructured ceramics.