中大口径轴对称光学非球面超精密磨削数控机床的研制

通过系统分析轴对称中大口径方形光学非球面包络法加工原理,提出了非球面磨削加工机床各轴系运动的数学控制模型,设计并研制了非球面精密磨削加工机床及机床速度、位移双闭环控制系统,在研制的加工机床上进行了330×300mm的方形光学非球面镜片磨削试验,并采用数字型电感测微仪设计了非球面在线检测系统,通过对加工后的光学非球面进行在线检测,试验结果表明设计并研制的光学非球面磨削加工机床加工精度满足光学非球面镜片加工面形精度PV值达到4μm的要求,且加工效率高,适用于中大口径非球面磨削加工。     

非球面光学零件的超精密磨削技术

本文首先介绍了非球面光学零件的作用、硬脆材料的超精密加工的一个热点──延性方式磨削，实现延性方式磨削的条件和应用了延性方式磨削技术的非球面光学零件的超精密磨削加工机床，最后介绍了非球面光学零件的ELID起精密后削技术。     

X、Y方向非等R值微小非球面模具超精密磨削试验

基于模压成型技术的复杂曲面光学玻璃透镜制造难度较大,主要制约因素是高精度复杂曲面光学模具的加工难度大。文中针对典型的高精度X、Y方向非等R值微小非球面模具,进行斜轴单点CXZB四轴联动超精密磨削试验,通过加工路径规划、磨削补偿、磨削表面测量与评价,验证了加工方法的可行性。研究发现,X、Y方向非等R值微小非球面模具PV值控制在0.38μm以下,表面粗糙度分别为Ra5 nm和Rz39 nm,加工表面呈光学镜面,模具加工质量完全满足后续的玻璃模压成型要求。     

一种非球面超精密单点磨削与形状误差补偿技术

随着各种小型的非球面光学零部件的广泛应用,其成型模具的制造精度要求也日趋提高.针对目前我国尚未完全掌握非球面模具的超精密磨削技术的情况,对超精密单点磨削和形状误差补偿方法进行研究.利用在位接触式的测量系统的测量数据重构实际的磨削轮廓曲线.根据实际磨削轮廓与目标轮廓之间的法向距离,求解出法向残余误差,并提出基于超精密单点斜轴磨削的形状误差补偿方法.利用超精密磨床对口径为6 mm的超硬碳化钨的非球面光学模具进行超精密磨削、在位测量与误差补偿试验,经过两次循环,其形状精度(Peak to valley,PV)从449 nm改善至182 nm.     

非球面光学元件加工检测方法的研究

对非球面光学元件加工检测进行了试验和研究,得出了具体的测试方案。在非球面大口径光学元件的精密磨削中,其磨削阶段的检测技术是工件加工的关键。通过对大口径非球面光学元件加工中工件旋转轴(A轴)、砂轮旋转轴(B轴)、工件平移轴(X轴)、砂轮平移轴(Y轴)、砂轮回转轴(C轴)的位置和速度所进行的检测,证明了所使用的检测方法是可靠的,能够顺利地完成对非球面光学元件加工过程的检测,实现了非球面光学元件的精密磨削,满足了设计的要求。     

轴对称非球面模具加工中的补偿技术研究

研究精密磨削以及超精研磨轴对称非球面模具中 ,磨削力和速度变化对加工表面精度的影响因素 ,提出一种使用软件技术对加工误差进行补偿控制以提高加工精度的方法。     

非轴对称非球面平行磨削误差补偿技术研究

针对非轴对称非球面的成形加工法柔性不足及球形砂轮加工法对工具和机械的要求太高的缺点,提出采用普通圆弧金刚石砂轮加工的平行磨削法。对于新方法加工中存在的加工误差问题,提出在非轴对称非球面加工中使用带倾角圆弧修整器及对主轴半径和副轴半径误差采用离线补偿的加工技术。通过理论分析和试验表明此方法可达到提高非轴对称非球面的加工精度的效果。     

大口径光学元件超精密加工技术与应用

大口径光学元件超精密加工技术是多种学科新技术成果的综合应用,促进了民用和国防等尖端技术领域的发展,在国家大光学工程的推动下,我国的超精密加工技术取得显著的成果。围绕大口径光学元件“高精度磨削＋确定性抛光”超精密加工体系,介绍该领域研究进展及厦门大学微纳米加工与检测联合实验室取得的相关研究成果,主要针对光学元件磨削和抛光两个加工流程,详细分析磨削装备技术、磨削工艺技术、精密检测技术、可控气囊抛光技术、加工环境监控技术和中频误差评价技术等关键技术的研究应用情况。这些技术研究从超精密加工的需求出发,借鉴国内外的研究经验和成果,通过对装备、工艺、检测等各方面整合,形成具有自主知识产权的大口径光学元件磨抛超精密加工体系,从而实现大口径光学元件高精度、低缺陷加工。     

微小非球面光学模具单点斜轴误差补偿磨削

针对微小非球面光学透镜模具的纳米单点斜轴误差补偿磨削进行研究。通过分析比较传统的直交轴磨削法,提出微小非曲面光学模具的单点斜轴磨削方式,有效避免微细砂轮在加工微小非球面时发生干涉情况;采用单点恒定磨削方式提高微小非球面磨削的稳定性及精度。通过分析磨削区域内微细砂轮与微小非球面的干涉情况,从而合理计算并选用较高强度的微细砂轮。提出微小非球面误差补偿磨削策略,分析砂轮的对心误差(x轴向和y轴向)对形状精度的影响,采用法向残余误差补偿的方法对加工后的形状误差进行超精密补偿磨削。利用超精密磨床对口径为2 mm的超硬热压模具碳化钨材料的微小非球面进行纳米单点斜轴误差补偿磨削试验,经过三次超精密磨削及误差补偿循环,其形状精度PV从1 034 nm改善至146 nm,表面粗糙度达到Ra2.19 nm。     

大口径SiC离轴非球面的高效磨削加工

研究了空间遥感器用大口径SiC离轴非球面的超声复合磨削加工工艺。分别对磨削原理、金刚石砂轮结合剂选择、机床选取、磨削参数设定等进行了分析,并设计和规划了磨削工艺流程。基于逆向工程原理建立了高精度离轴非球面模型,创立了激光跟踪仪精磨阶段在线测量大口径离轴非球面的工艺。结合工程实践对一口径为700mm×700mm的SiC高次离轴非球面元件进行了逆向工程建模和超声磨削加工试验,并利用激光跟踪仪进行了在线检测。经过3个周期(每个周期4h)的修磨,其面形精度PV值和RMS值分别由45.986μm和7.949μm收敛至12.181μm和2.131μm;与三坐标测试结果进行对比,其PV值和RMS值的偏差分别为0.892 3μm和0.312 8μm。实验显示,提出的磨削工艺实现了大口径SiC离轴非球面的快速精确磨削,其加工精度、效率以及表面质量都有了很大的提高。     

Research on the error analysis and compensation for the precision grinding of large aspheric mirror surface

The purpose of this paper is to propose a compensation grinding method for large aspheric mirror surface. Because the tradition grinding is not suitable for large aspheric mirror surface, in this paper, a grate parallel grinding in 3-axis and an on-machine measurement system are applied. Based on that, it presents the errors that mainly affect the form accuracy and technology of compensation grinding. An experiment of compensation grinding was carried out for large aspheric mirror surface. With the separation of decentering, wheel arc, and residual grinding system error, the PV value further decreased comparing to tradition compensation. These results indicated that this compensation can improve the form accuracy significantly in large aspheric mirror surface grinding.     

Three-dimensional profile stitching measurement for large aspheric surface during grinding process with sub-micron accuracy

A novel measurement method is proposed to realize three-dimensional (3D) profile stitching for large aspheric surface. The proposed method is based on the multiple sub-regions stitching technology applying a four-axis fixture and a commercial small-range profiler. The partition of sub-regions is due to the effective profiler’s range and the characteristic parameters of aspheric surface, and the measurement for each sub-region within the profiler’s range is achieved through the fixture to translate and rotate the aspheric surface. Then a stitching algorithm including the multi-body theory, the invariability of curvature radiuses and the least square principle is established to reconstruct the full 3D profile. Simulations of multiple sub-regions stitching for different aspheric surfaces are performed to predict the stitching accuracy of proposed method and analyze the influence of alignment errors in Y direction caused by the rotation error along Z direction (Δβ_w,g). The stitching accuracy of proposed method is verified by measuring the 3D profile of an off-axis parabolic surface and an axisymmetric aspheric surface. The experimental standard deviations of stitching errors are 0.16 μm and 0.42 μm, which are less than the form errors of aspheric surface during grinding process. The results show that the proposed method achieves 3D profile stitching for large aspheric surface with sub-micron accuracy.     

Experimental study on elastic deformation machining process for aspheric surface glass

Elastic deformation machining is a fabrication method that exploits the elastic deformation properties of materials under stress. Coupled with plane lapping machining process, this new fabrication method is suitable for machining complex aspheric surfaces. Upon completion of the machining process, the workpiece under process will be shaped into a desired surface form. The elastic deformation machining has several advantages over traditional fabrication methods, i.e., high machining compatibility and high fidelity of material property during machining process. The subject of this study is to determine the surface shape of the finished glass workpiece after the lapping process of the elastic deformation machining. The experimental results were compared with theoretical calculations. In the case when the vacuum pressure is 50 kPa, the maximum deviation value between the deformation curves from the theoretical calculation and the experiment results is within 62 μm. In order to improve the precision of form surface, the vacuum pressure is modified from 50 to 42 kPa. This reduction corresponds to a change of workpiece thickness when it is lapped. The results of the change of vacuum pressure show that the form accuracy produced is improved significantly and agrees very well with theoretical calculations. The maximum deviation in this case is 1.6 μm. The study indicates that the experimental plane lapping setup that exploits the material elasticity property can be utilized to fabricate aspheric lenses with axisymmetric surface and low complexity.     

ALON高陡度薄壁保形非球面的超精密磨削工艺

为了实现新型红外陶瓷ALON高陡度薄壁保形非球面的超精密磨削加工,首先根据ALON的材料属性和高陡度薄壁保形非球面的结构特性,进行了其超精密磨削加工工艺性分析,并基于有限元计算方法,完成了面向ALON高陡度薄壁保形非球面的精密夹具的设计以及关键参数的优化。然后完成了ALON的超精密磨削工艺实验,工艺实验结果表明减小工件转速和砂轮粒度都会降低ALON的平均表面粗糙度Ra值,但砂轮粒度对磨削后ALON的表面粗糙度影响更显著。最后实现了ALON高陡度薄壁保形非球面的超精密磨削加工,磨削后的ALON高陡度薄壁保形非球面的面形精度PV值为2μm,表面粗糙度Ra值可达8.6nm。     

磨削加工技术的发展趋势

综述了磨削加工的发展趋势,主要包括高速磨削、超高速磨削、精密和超精密磨削、缓进给磨削、高效深切磨削、砂带磨削及绿色磨削技术.分析了超高速磨削加工的机理及超高速磨削的优越性.阐述了高速超高速磨削加工技术的发展前景.     

钽合金精密镜面研磨工艺的实验研究

采用传统的精密机械研磨方法,对钽钨铪合金进行了精密研磨实验研究.通过大量实验,优化出了适合此类材料的研磨工艺,得到Ra25nm左右的光滑表面.该研磨方法成本低、污染小、操作简便.实验表明,磨料特性、研磨压力和研磨液的成分配比等参数对研磨效果的影响较大.     

磨削工艺方案对曲轴加工精度及节拍的影响

本文以不同工艺方案对曲轴磨削加工节拍和主轴颈同轴度加工精度的影响进行分析,确定曲轴磨削加工的工艺方法.