用于气体检测的热激励MEMS悬臂梁谐振器

笔者设计了一种电热激励压阻检测的微悬臂梁谐振器．悬臂梁上的敏感层吸附特定的气体后,可以通过测量质量变化所导致的悬臂梁谐振频率的变化而得出待测气体的浓度．该谐振器的加工基于SOI硅片和ICP刻蚀技术．通过有限元仿真得出了悬臂梁的应力温度分布曲线,从而证实了该方案可以提供比普通结构更适宜于气体敏感材料工作的温度分布．从理论和实验上分析了谐振器在不同激励电压下的频率响应．实验结果表明,该谐振器具有较高的谐振频率和品质因数,其激励电压与振动幅值成线性关系．     

基于应力集中的压阻式微悬臂梁设计

为了提高应力检测的灵敏度,提出了一种基于应力集中的新型压阻式微悬臂粱设计方法.首先,通过在硅基悬臂梁上加工出一些条缝结构作为应力集中区域,利用应力集中效应来提高应力检测的灵敏度,并在梁上沿硅的(100)面<110>晶向布置4个压阻元件组成惠斯通电桥来进行应力检测.其次,用有限元法分析了不同参数的孔缝结构对应力分布的影响.结果表明,与传统的无应力集中区域的微悬臂梁结构相比,可以有效提高应力检测的灵敏度.当参数优化后的微悬臂梁尺寸为500μm×180μn×10μm,缝结构尺寸为50μm×20μm时,应力检测的灵敏度可以提高2.68倍.     

力平衡式三轴微加速度计的设计与分析

设计了一种具有单一检测质量的力平衡式三轴微加速度计．采用硅-硅键合工艺形成作为单一检测质量块的硅片组合。利用全差分电容检测法实现对加速度三轴分量的检测．通过提高检测质量的重心，有效增加了X、Y轴的灵敏度．利用ANSYS仿真软件对该微加速度计进行了模态及静力学分析，提出了优化设计参数．3个检测模态（1阶、2阶和3阶模态）的频率分别为1．329kHz、1．345kHz和2．174kHz．通过优化设计，提高了3阶模态和4阶模态的频率差距，降低了其他高阶模态的干扰．在100g（g为重力加速度）的Z向加速度作用下，悬臂梁所受的最大应力为46MPa。小于单晶硅的弯曲极限值70-200MPa．静力学分析表明，加速度计的悬臂梁结构参数能够满足加速度计的力学性能要求．     

微悬臂梁传感器工作模式理论分析研究

简要地介绍了微悬臂梁传感器的工作原理和主要特性,着重介绍了微悬臂梁传感器动、静态工作模式下的理论分析方法和提高灵敏度的主要方法。微悬臂梁传感器在动态工作模式下灵敏度极高,但在液态环境下使用易受到液体阻尼效应的影响,只适于在空气中运行使用;相对于动态模式,静态模式受液体黏性的影响较小,更适于在液态中使用。     

提高工业数字射线照相灵敏度的新途径

介绍工业数字射线照相提高钢焊缝中微小缺陷检测灵敏度的新途径：利用微焦点X射线源＋高灵敏探测器＋最佳投影放大率，能陵其IQI（像质计）灵敏度、影像对比度和空间分辨率，达到等价于甚至优于常规ISO T3类射线胶片的效果。     

微悬臂梁动态特性表征用真空系统的仿真研究

本文研究了用于表征微悬臂梁动态特性的高真空系统,研究了用于夹持微悬臂器件的样品台和用于调节真空室内压力的精密可调漏气阀.该阀在不同压力区间下采取机械机构和压电陶瓷驱动器改变阀门开度,具有精度高、适用范围广等优点,利于实验研究和工程测试.模拟分析结果表明该阀能精确调节10-6Pa～103 Pa内压力.系统设置了减振支架和底座,用波纹管连接真空室和抽气系统,对系统振动信号的模拟计算表明所用减振支架和底座能够减小杂质振动信号对微悬臂梁动态特性测定的干扰.采用一般商用漏气阀控压,对微悬臂梁品质因数的测定实验结果表明了表征系统及精密阀的实用前景.     

原子力显微镜中微悬臂梁/探针横向力的标定

利用微加工制造的微悬臂梁／探针尖已经广泛应用在微观表面性质测试和微纳米尺度加工等领域，成为微纳米研究领域中不可缺少的重要工具．为了能够定量研究原子力显微镜中探针与表面的相互作用力，需要对微悬臂梁／探针的力学性能进行表征．本文简要地论述了原子力显微镜中微悬臂梁的形变光反射原理和探针与表面的接触刚度理论．阐明了微悬臂梁横向力标定的重要性．综述了目前几种微悬臂梁／探针横向力的标定方法、简单的推倒过程和特点、     

基于MESFET的GaAs基微加速度计的设计与性能测试

利用金属-半导体结型场效应晶体管(MESFET)作为微加速度计的敏感单元,设计一种4梁-质量块微加速度计结构.通过ANSYS分析软件进行仿真,敏感单位放置于悬臂梁根部的应力最大处,以获得最大的灵敏度.将封装好的微加速度计结构,利用惠斯通电桥测试电路,检测不同载荷下的输出特性,验证了微加速度计的力电耦合效应.测试结果表明,该微加速度计的线性度较好,其最大加载范围可达到24 g,且饱和区的灵敏度可达到4.5 mV/g,为高灵敏微传感器的研究奠定了一定的基础.     

压阻式硅微二维加速度计的加工与测试

提出了一种压阻式的硅微二维加速度计,该加速度计采用4个相互垂直的悬臂梁支撑中间有刚硬柱体的结构,利用合理布置的压敏电阻构成的惠斯通电桥测量水平面内两个方向的加速度．结合微结构的力学分析模型以及压阻原理分析了加速度计的灵敏特性、采用硅微机械加工工艺完成了加速度计的加工,应用微系统分析仪、激光拉曼光谱应力测试仪以及振动台分别对加工出的微结构形貌、残余应力、频响以及灵敏特性进行了相关测试．测试结果表明,两个方向的输出值均灵敏度高、线形度较好,胸灵敏度为1、0174mV／g（g为重力加速度）,线性系数为0．99991,y向灵敏度为0．89761mV／g,线性系数为0．99945．微加速度计的频响曲线较为平坦,其共振频率大约为670Hz．     

用于挥发性有机化合物探测的微悬臂梁传感器

在研制成功的用于化学气体探测的热驱动微悬臂梁谐振器的基础上,提出了基于这种微悬臂梁谐振器,并以聚合物涂层作为挥发性有机化合物吸附敏感层的谐振式气体传感器.利用3种聚合物材料：聚氧化乙烯（PEO）、聚乙烯醇（PVA）和聚乙二醇乙醚醋酸酯（PEVA）,在微悬臂梁谐振器上制备气体敏感层,探测6种挥发性有机化合物：甲苯、苯、乙醇、丙酮、己烷和辛烷.通过有限元分析估计了聚合物涂层的工作温度.用喷射法制备了PVA和PE-VA涂层,用点滴法制备了PEO涂层.测试了传感器的开环幅频特性,实验检测了气体传感器的谐振频率变化与分析物蒸气浓度的关系以及传感器对相对湿度的响应,分析了传感器的灵敏度和线性度.实验结果表明,这种涂覆聚合物敏感层的热驱动微悬臂梁谐振器为探测挥发性有机化合物提供了良好的平台.根据实验结果,可开发几种基于不同聚合物敏感层的高灵敏度微型气体传感器.     

Silicon made resonant microcantilever: Dependence of the chemical sensing performances on the sensitive coating thickness

A gas sensor based on the use of a resonating microcantilever has been realized by using a polymer sensitive coating. From the theoretical study of the microcantilever sensitivity, it has been deduced that the sensitivity is enhanced when the resonant frequency or the sensitive coating thickness are increased. The sensitive coating thickness influence has then been verified experimentally by using polyetherurethane (PEUT) as sensitive coating for ethanol detection. From these measurements, some drawbacks are shown: the coating thickness increase leads to a sensor response time increase and a frequency noise increase which worsens the limit of detection. Conclusions are then made about the sensitive coating optimization depending on application constraint considerations.     

Detection of femtomolar concentrations of HF Using an SiO(2) microcantilever

Femtomolar concentrations of hydrogen fluoride, a decomposition component of nerve agents, were detected using a SiO(2) microcantilever. The microcantilever underwent bending due to the reaction of HF with SiO(2). The microcantilever deflection increased as the concentration of HF increased. Other acids, such as HCl, had no effect on the deflection of the cantilever. The mechanism of reaction-induced bending and the correlation of microcantilever deflection with the HF concentration are discussed. The deflection in response to HF of a commercially available silicon cantilever was also studied, and its response was compared with that of the SiO(2) cantilever. Much less bending amplitude and sensitivity were observed for the silicon cantilever.     

Characterization of microcantilever spring and force sensor using nanomanipulators

In this paper the authors present the development of a characterization process for microcantilever based spring and force sensor wherein fusion of real-time vision and force feedback is used. The process applies a very small force in micronewtons using MM3A nanomanipulators and senses the corresponding deflection using vision feedback, which produces direct characterization of microcantilever for evaluating its effective spring constant. The same process has been applied to find sensitivity of a microcantilever based force sensor. In the process force feedback values are viewed on a digital storage oscilloscope and once calibrated it is directly proportional to the applied force. By having known deflections (x) on images and known values of force (F) sensed by a force feedback sensor, the spring constant of microcantilever has been found as K = 8.75 μN/μm. Using the same procedure a microcantilever based force sensor has been characterized, the resulting sensitivity of force sensor has been found as 34.35 mV/μN.     

MEMS Composite Porous Silicon/Polysilicon Cantilever Sensor for Enhanced Triglycerides Biosensing

A novel composite porous silicon/polysilicon microcantilever for biosensing applications with enhanced sensitivity is reported. It is fabricated by surface micromachining of polysilicon cantilevers followed by the formation of the surface porous layer after release by Reaction Induced Vapor Phase Stain Etch. The microcantilevers with porous surface layer are characterized by their morphology that exhibits a dual macro and nanostructure for very effective immobilization of biomolecules. The current work focuses on the fabrication of composite porous silicon/polysilicon microcantilevers, characterization of their morphology and resonance frequency, as well as demonstration of improved immobilization of enzyme resulting in enhanced sensing of triglycerides.      

Inside Front Cover: Trilayered Ceramic–Metal–Polymer Microcantilevers with Dramatically Enhanced Thermal Sensitivity (Adv. Mater. 9/2006)

A novel trilayered (ceramic–metal–polymer) design for highly sensitive, thermally responsive microcantilever arrays is reported on p. 1157 by Tsukruk and co‐workers. In this design, the topmost nanocomposite layer, reinforced with carbon nanotubes and silver nanoparticles, acts as a strong thermal‐stress‐driven actuator to enhance conventional biomaterial performance. These polymer–metal–ceramic microcantilevers with enhanced (fourfold) thermal sensitivity may serve as a basis for the next generation of uncooled thermal microsensor arrays because of outstanding thermal and spatial resolution.     

Pressure-dependent dissipation effect at multiple cantilever resonant modes

Based on the optical deflection method, the resonant characteristics of a microcantilever under various pressure have been observed at room temperature to understand the pressure-dependent dissipation effect. Especially, the quality factor of the cantilever has been measured for up to fourth harmonic mode of cantilever resonance as a function of pressure between 0.1 and 1000 Torr. By considering the intrinsic dissipation present in the system at 0.1 Torr, the pressure-dependent fluidic quality factors were determined for the multiple cantilever resonant modes. The inverse of the fluidic quality factor appears to follow two different asymptotic behaviors at high and low pressure limits, which indicates that the dynamics of the fluid, due to the oscillating cantilever, changes from Newtonian to non-Newtonian with decreasing pressure. The experimentally observed transition of the fluidic dissipation effect agrees well with the recently proposed rapidly oscillating flow model based on the Boltzmann equation, regardless of the different mode shapes.     

Energy dissipation in microfluidic beam resonators: Dependence on mode number

Energy dissipation experienced by vibrating microcantilever beams immersed in fluid is strongly dependent on the mode of vibration, with quality factors typically increasing with mode number. Recently, we examined energy dissipation in a new class of cantilever device that embeds a microfluidic channel in its interior-the fundamental mode of vibration only was considered. Due to its importance in practice, we examine the effect of mode number on energy dissipation in these microfluidic beam resonators. Interestingly, and in contrast to other cantilever devices, we find that the quality factor typically decreases with increasing mode number. We explore the underlying physical mechanisms leading to this counterintuitive behavior, and provide a detailed comparison to experimental measurements for which good agreement is found.     

Generalized model of resonant polymer-coated microcantilevers in viscous liquid media

Expressions describing the resonant frequency and quality factor of a dynamically driven, polymer-coated microcantilever in a viscous liquid medium have been obtained. These generalized formulas are used to describe the effects the operational medium and the viscoelastic coating have on the device sensitivity when used in liquid-phase chemical sensing applications. Shifts in the resonant frequency are normally assumed proportional to the mass of sorbed analyte in the sensing layer. However, the expression for the frequency shift derived in this work indicates that the frequency shift is also dependent on changes in the sensing layer's loss and storage moduli, changes in the moment of inertia, and changes in the medium of operation's viscosity and density. Not accounting for these factors will lead to incorrect analyte concentration predictions. The derived expressions are shown to reduce to well-known formulas found in the literature for the case of an uncoated cantilever in a viscous liquid medium and the case of a coated cantilever in air or in a vacuum. The theoretical results presented are then compared to available chemical sensor data in aqueous and viscous solutions.     

Polymeric nanolayers as actuators for ultrasensitive thermal bimorphs

Polymeric nanolayers are introduced here as active, thermal-stress mediating structures facilitating extremely sensitive thermal detection based upon the thermomechanical response of a bimaterial polymer-silicon microcantilever. To maximize the bimaterial bending effect, the microcantilever bimorph is composed of stiff polysilicon, with a strongly adhered polymer deposited via plasma-enhanced chemical vapor deposition. The polymer layers with thickness ranging from 20 to 200 nm possess a rapid and pronounced response to temperature fluctuations due to intrinsic sensitive thermal behavior. We show that by taking advantage of the thermal stresses generated by the huge mismatch of material properties in the polymer-silicon bimorph, unprecedented thermal sensitivities can be achieved. In fact, the temperature resolution of our bimaterial microcantilevers approaches 0.2 mK with thermal sensitivity reaching 2 nm/mK; both parameters are more than an order of magnitude better than the current metal-ceramic design. This new hybrid platform overcomes the inherently limited sensitivity of current sensor designs and provides the basis to develop the ultimate uncooled IR microsensor with unsurpassable sensitivity.     

Molecular interactions in self-assembly monolayers on gold-coated microcantilever electrodes

An electrochemical microcantilever (EMC) was used to study the intermolecular interaction of self-assembly monolayers (SAMs) with different n-alkanethiols chain lengths (n = 0, 4, 6, 8, 12, 16) on a Au-coated microcantilever surface. Comparing potential cycling and steps in NaClO(4) solution within the same potential range, the deflection rate of bare microcantilevers is much smaller for the former which revealed that potential excitation, i.e. the surface charge, played the dominant role in driving the instant and large deflection of the bare microcantilever, while the smaller deflection amplitude of the former implied that adsorption of ClO(4)( - ) had an adverse effect on the potential-induced stress. Upon adsorption of SAMs, the deflection amplitude of the microcantilever under the potential step was much smaller than that of a bare microcantilever, and linearly decreased with the chain length increasing for n ≤ 8 (the linear correlation coefficient and the slope are 0.98 and about - 10.4 nm per CH(2) unit, respectively), following a transition (8 ≤ n ≤ 12) to a stable state (n ≥ 12). The decrease of deflection amplitude and faster decay of deflection rate of the SAMs modified microcantilever under the potential step implyed increasing compactness of the SAMs with longer chains.