i－line光刻高均匀照明系统光能分布的计算模拟

叙述了ｉ－ｌｉｎｅ光刻高均匀照明系统的均匀照明原理，以及其具有特殊面形（非球面）、特殊结构（非共轴）、超光学表面（由多个非共轴光学表面组成）的光学系统的光能分布计算模拟的原理、方法。作为例子，用所编写的程序计算模拟了我们近来设计的一曝光系统几个重要光学表面上具有权重的点列图和光能分布曲线。     

光学系统计算机辅助装调(CAA)机理的研究

文章对光学系统加工装调中影响象质的各种误差来源进行了分析,并对误差互补的可行性进行计算机模拟。从模拟的结果看,光学元件之间误差具有互补性,它使得计算机辅助装调成为可能。计算机辅助装调的方法步骤在文中作了详细的描述。     

半径误差对OTF下降量的关系式

在光学系统存在半径误差所引起的各种初级象差系数增量关系式的基础上,本文导出了半径误差对OTF下降量的简明关系式,它将为制订光学零件半径公差提供较客观的分析基础。     

通用光线光路计算公式

本文叙述了适用于各种面形(球面、非球面、平面、非轴对称面)的共轴和非共轴光学系统的通用光线光路计算公式。这些公式均适用于计算机编程进行光学计算。     

非共轴非球面光学系统计算软件设计

本文描述了一个非常规光学系统计算软件。光学系统可包括倾斜、偏心的球面和非球面。本文解决了一般非共轴光学系统初始数据建立问题,提供了光学系统图形显示,并对光线光路追迹结果进行了一些处理和讨论。     

GOLD—新一代复杂光学系统分析优化软件包

介绍ＧＯＳＡ程序的换代产品－ＧＯＬＤ软件包。这是北京理工大学研制的一种实用化的可对各种非对称、非常规复杂光学系统进行象质分析和结构优化的大型光软件。本文说明该软件的适应范围和主要功能。     

复合优化理论在不共轴光学系统CAD中的应用

讨论在不同轴光学系统的计算机辅助设计中如何用“复合优化”理论，主要是如何模拟评价函数，又怎样进行适应法处理，“复合优化”有何特色，并列举实例说明。     

变尺度法在光学优化中的应用

详细介绍了一种优化算法－变尺度法并把这种算法借助Ｃ语言开发的程序用于光学优化设计中，设计了几种典型的光学系统。设计过程中表现了这种方法的快速收敛性和稳定性，结果和理论相符。     

离轴反射式光学系统设计

提出通过光瞳和视场离轴,实现无中心遮拦的离轴反射式光学系统设计方法。在同轴三反射光学系统基础上,将光瞳和视场适当离轴,实现镜间遮拦的消除。分主镜或次镜为系统孔径光阑两种情况,导出同轴三反射光学系统初级像差公式和初始结构参数计算公式。由三反射系统成像性质,进一步总结无焦光路条件。根据设计理论计算离轴三反射系统初始结构,利用Zemax优化得到无中心遮拦的离轴三反射空间观测望远镜。入瞳320mm,视场(±0.3°)×(±0.6°),焦距1800mm。     

井冈山103A-X2型放映机光学系统的校正方法

光学系统的调整校正是放映机维修保养的一个重要项目。放映机光学系统分为照明光学部分(指反光镜、氙灯及其调整机构等)和成像光学部分(指放映镜头、银幕等)。需要经常检查、校正的主要是照明光学部分。移动式放映机和固定式放映机相比较，由于移动式放映机轻便小巧，机头体积有     

The Use of Diffraction-based Criteria of Image Quality in Automatic Optical Design

In automatic optical design it is customary to minimize the mean square value of the aberrations along selected rays. This leads in different cases to different ‘best forms of correction’ of primary and higher-order aberration terms. Image evaluation theory, on the other hand, shows that it is the variances of the wave-aberration and of an aberration difference function which determine the tolerances on aberrations, and the best forms of correction, according to the Strehl intensity ratio and transfer function theory respectively. The consequences of using different criteria of image quality are investigated, and it is shown that significantly poorer image quality can result from using more ‘ad hoc’ criteria instead of those based on diffraction theory. It is then shown how the use of canonical variables makes possible the simple use of the appropriate variances as diffraction-based criteria of image quality for optical systems. To optimise the system using least squares techniques then requires new forms of the normal equations. This procedure is described, it being shown that the method of damped least squares, and the Lagrange method of undetermined multipliers, may still be applied to the problem.     

Laser beam relaying with phase-conjugate diffractive optical elements

A diffractive optical element is used to relay complex laser beam profiles by phase conjugation. It has the advantage over a conventional afocal system of avoiding light concentration at the intermediate focal point. Theoretical and experimental results show that the image quality is a function of alignment errors and mode-size changes. When the optical system is within the calculated tolerances, the diffractive optic reproduces images of high quality.     

声子晶体平板组合成像特性分析

用多重散射方法分析了声子晶体单平板和多平板的成像特性。发现：在特定频率范围内,引入等效负折射率后,单板负折射成像可用反Snell定律描述;多层声子晶体平板成像服从依次成像规律,可类比传统几何光学中共轴球面系统的成像,引入实物实像、虚物虚像等概念;平板透镜不改变出射波的出射方向,仅使出射位置产生平移;多平板透镜的累加成像与等厚度的单一平板透镜成像具有相同的效果。平板透镜的这些成像特点,使其在成像质量、加工方法、系统组合等方面比球面透镜更具优势。     

Nondestructive measurement of an optical fiber refractive-index profile by a transmitted-light differential interference contact microscope

A novel transmitted-light differential interference contrast (DIC) system is used for nondestructive measurement of the refractive-index profile (RIP) of an optical fiber. By means of this system the phase of a measured light beam can be modulated with an analyzer, and the phase distribution of a fiber is obtained by calculation of the various interference patterns. The measurement theory and structure and some typical applications of this system are demonstrated. The results of measuring RIPs in graded-index fiber are presented. Both the experimental results and theoretical analysis show that the system takes the advantage of high index resolution and of sufficient measurement accuracy for measuring the refractive index of the optical fiber. The system has strong ability to overcome environmental disturbance because of its common-path design. Moreover, one can use the system to measure the RIP along the fiber axis and acquire an image of the three-dimensional RIP of the fiber.     

光栅调制和积分抽样

通过对光学图象调制和光电成像系统的抽样过程的研究，得出两条结论：１）光学图象的调制函数和抽样函数都具有周期重复特性，调制图象和抽样图象的频谱分布服从抽样定理；２）用谐频光栅进行图象调制和用点阵对图象抽样都可以精确恢复原图象，而阵列光栅的图象调制和光电成象系统中的积分抽样对图象恢复具有不同的效应。     

成像光学工程面临的光学问题

文章简单论述了现代成像光学主要领域的情况,指出非球面反射系统是发展的必然趋势。讨论了加工与检验方面的基本情况及应着重深入研究的问题。对镜坯材料也提了一点看法。     

Realizations of focus invariance in optical-digital systems with wave-front coding

We report experimental verification of an extended depth of focus (EDF) system with near-diffraction-limited performance capabilities. Dowski and Cathey [Appl. Opt. 34, 1859-1866 (1995)] described the theory of this system in detail. We can create an EDF system by modifying a standard incoherent optical system with a special cubic phase plate placed at the aperture stop. We briefly review the theory and present the first optical experimental verification of this EDF system. The phase plate codes the wave front, producing a modified optical transfer function. Once the image is transformed into digital form, a signal-processing step decodes the image and produces the final in-focus image. We have produced a number of images from various optical systems using the phase plate, thus demonstrating the success of this EDF system.     

Tolerance optimization of a mobile phone camera lens system

In the manufacturing process for the lens system of a mobile phone camera, various types of assembly and manufacturing tolerances, such as tilt and decenter, should be appropriately allocated. Because these tolerances affect manufacturing cost and the expected optical performance, it is necessary to choose a systematic design methodology for determining optimal tolerances. In order to determine the tolerances that minimize production cost while satisfying the reliability constraints on important optical performance indices, we propose a tolerance design procedure for a lens system. A tolerance analysis is carried out using Latin hypercube sampling for evaluating the expected optical performance. The tolerance optimization is carried out using a function-based sequential approximate optimization technique that can reduce the computational burden and smooth numerical noise occurring in the optimization process. Using the proposed design approach, the optimal production cost was decreased by 28.3% compared to the initial cost while satisfying all the constraints on the expected optical performance. We believe that the tolerance analysis and design procedure presented in this study can be applied to the tolerance optimization of other systems.     

Resolution of aplanatic systems with various semiapertures, viewed from the two sides of the diffracting aperture

With the vector plane-wave spectrum and stationary phase method, a rigorous vector diffraction model of an aplanatic system when the polarized point source is at an arbitrary location on the optical axis is presented. The computer simulation is used to discuss in detail the effects of various angular semiapertures on the object and image sides on the resolution. Results show that angular semiapertures on the object and image sides have an obvious effect on the resolution and image fields, which indicates that the classical Wolf theory [Proc. R. Soc. London, Ser. A253, 358 (1959)] cannot be applied to the study of imaging properties of an aplanatic system when the point source is not located at infinity in the direction of the axis.