几种单晶半导体材料在压痕下的变形与断裂行为比较

采用显微压痕方法研究了Si、Ge、GaAs和InP四种半导体单晶的变形与断裂行为.通过测量[100]取向单晶体面内的显微硬度,裂纹开裂的临界压痕尺寸以及断裂韧性,分析了这四种材料力学性能的面内各向异性行为.结果表明:在压痕载荷的作用下,Si和Ge的塑性变形以剪切断层为主,而GaAs和InP则通过滑移系的开动协调变形.[100]取向的Si、Ge、GaAs和InP四种单晶的面内显微硬度、弹性模量和断裂韧性表现出不同程度的各向异性.裂纹长度与压痕尺寸间的关系表明,与GaAs和InP相比,Si、Ge具有较小的临界压痕尺寸和拟合直线斜率,这一临界压痕尺寸和拟合直线斜率的变化规律分别与材料的硬度和断裂韧性的变化规律一致.     

火焰喷涂NiCrBSi涂层的纳米力学性能

为揭示热喷涂涂层在不同尺度下的力学性能,在45钢基体上制备了平均厚度为750μm的火焰喷涂NiCrBSi涂层,利用纳米压痕技术研究了不同压痕深度下涂层表/截面力学性能、弹塑性和压痕变形行为。结果表明:涂层表/截面力学性能均呈现明显的尺寸效应,硬度、弹性模量、弹塑性随压入深度增加不断降低。涂层表面表现出高弹性,其压痕弹性功与总压痕功的比值ηIT在500nm深度内达到52%,而涂层截面为40%;涂层截面具有高硬度和高模量,其纳米硬度和弹性模量在2000nm深度内比涂层表面分别高28%和33%。涂层压痕变形表现为理想塑性、凹陷、凸起和裂纹等多种特征,随着压入深度增加,涂层表/截面弹塑性差异逐渐降低,并在2500nm深度同时下降到35%。涂层单一薄层结构在不同方向具有相同的硬度和弹性模量,但随压入深度增大,压头包含的涂层体积增大,相邻薄层,特别是孔隙、裂纹、层间边界等缺陷对涂层性能的影响逐渐增强,导致涂层表/截面硬度和弹性模量的差异性随压痕深度增加不断降低。     

基于AFM纳米硬度测量系统的实验

为了解决用AFM自身压痕软件进行纳米硬度测量时无法直接获得载荷-压深曲线和由于受到扫描陶管扫描范围的限制而进行多点压痕实验范围有限的问题,建立了三维微动工作台和原子力显微镜相结合的纳米压痕硬度测量系统.基于该系统,对单晶薄膜材料进行了单点压痕实验,得出该系统适合进行纳米硬度测量的结论;并对薄膜材料的纳米硬度和弹性模量进行了分析,讨论了尺寸效应对两者的影响.另外,进行了40×40的点阵压痕实验,得到了材料整个压痕面的三维形貌图和三维硬度图.     

维氏压痕对常压固相烧结碳化硅陶瓷材料力学性能的影响

为了研究维氏压痕裂纹对常压固相烧结碳化硅陶瓷(SSiC)材料力学性能的影响, 通过扫描电镜观察了0.1~100 N的压痕载荷下产生的表面裂纹及裂纹剖面的状况, 并测试了相应载荷下的力学性质, 探讨了压痕法测量SSiC材料硬度、韧性等力学性质的适当压力载荷. 结果表明, SSiC材料压痕裂纹起始的临界压力载荷介于0.1~0.2 N; 当压痕载荷小于0.5 N时, 裂纹尺寸小于5 μm, SSiC材料的平均弯曲强度受影响程度较小. 此外, 当压痕载荷为10 N以上时, 压痕法测得的维氏硬度值趋近定值, 且所得到的裂纹是半圆形裂纹, 因此, 10 N为采用压痕法准确测量SSiC材料硬度及韧性的最低压痕载荷值.     

压痕法评价钛铌合金表面(TiNb)C强化层显微硬度及断裂韧性

采用压痕法研究了钛铌合金表面(TiNb)C强化层内层状组织对显微硬度的影响，在有效测试载荷的作用下，测量大量压痕的尺寸及裂纹长度，再利用经验公式，对断裂韧性进行计算。结果表明：随着测试载荷的增加，在垂直表面方向，“硬壳-软底”结构导致的基底效应逐渐显著，有效测试载荷为2 N,L-Ⅱ层的平均硬度为2 594.13 HV;在垂直横截面方向，强化层厚度导致的边缘效应逐渐显著，有效测试载荷为1 N,L-Ⅲ层的平均硬度为2 334.88 HV;L-Ⅱ层具有较大的颗粒尺寸，其硬度和断裂韧性均优于L-Ⅲ层。     

用于测量陶瓷断裂韧性的Vickers和Knoop压痕裂纹技术

采用 Vickers 压痕裂纹测量法或 Knoop 压痕～强度法等压痕技术进行了陶瓷的断裂韧性测量。反应烧结 Si_3N_4,热压 Si_3N_4和 SiC 等结构陶瓷用于研究显微结构非均质性和热残余应力对断裂韧性值的影响。人工水晶用于研究晶体学取向和断裂韧性之间的关系。研究发现,Knoop 压痕～强度法比 Vickers 压痕裂纹测量法更适合于非等轴晶系的晶体断裂韧性测量。其原因是 Knoop 压痕的主裂纹和缺口试样的裂纹都沿着同样的晶面扩展,而 Vickers 径向裂纹对却须沿着相互正交的晶面扩展,仅其中的一个晶面与缺口试样的裂纹扩展面一致。在 Vickers 压痕裂纹技术的基础上,用以计算 K_(1c)值不含弹性模量 E 项的 Evans 式(21),似乎能显示出显微结构对 K_(1c)值的影响;含有弹性模量 E 项的 Evans 式(22),似乎能反映出残余热应力对 K_(?)值的影响。所有上述的陶瓷材料,除了反应烧结 Si_3N_4,其压痕和裂纹关系 a~2～C~(3/2)的线性回归相关系数都相当,甚至>0.99。这表明了 Vickers 压痕技术在测定陶瓷的断裂韧性方面具有一定的实用性。     

单晶氮化镓纳米压痕与划痕实验

为分析单晶氮化镓的微观变形机理,使用纳米压痕仪对单晶氮化镓进行压痕与划痕实验.结果表明单晶氮化镓压痕过程存在弹塑转变过程即"pop-in"现象,分析得出此现象是由材料的位错萌生和扩展导致,压痕周围产生凸起现象导致计算硬度和弹性模量偏大,通过模型修正得到更真实的硬度和弹性模量数据.单晶氮化镓的变载划痕过程发生弹塑转变和脆塑转变,弹塑变形阶段深度-位移曲线波动平稳,表面光滑;而脆性阶段曲线波动幅度较大,表面产生侧向裂纹且朝着划痕方向45°对称分布.得到弹塑转变的临界载荷为389 mN,脆塑转变临界载荷为1227 mN,因此单晶氮化镓塑性加工区域应在389～1227 mN之间,该区域内易加工出光滑表面.通过不同载荷划痕实验,发现划痕压头所受的切削力和摩擦系数随划痕载荷的增大而增大,因此氮化镓加工时应选择合理的加工载荷.     

用纳米压痕法研究玻璃表面复合薄膜的力学性能

采用溶胶凝胶法在玻璃基体上制备了CeO2-TiO2单层膜、TiO2-SiO2单层膜和CeO2-TiO2/TiO2-SiO2双层膜,采用纳米压痕和划痕法对薄膜的机械性能(纳米硬度、弹性模量、临界载荷、摩擦系数)进行了分析.实验结果表明,双层膜与玻璃基体的附着力以及弹性模量、硬度等指标均大于单层膜,由TiO2-SiO2组成的内层,对强化附着力起到了关键作用.     

Li_2O-Al_2O_3-SiO_2微晶玻璃超光滑表面纳米硬度实验研究

介绍了纳米压痕技术的原理和方法.采用三角锥形Berkovich金刚石压头对Li2O-Al2O3-SiO2微晶玻璃的超光滑表面(Ra=0.079 nm)进行了纳米压痕实验.结果表明,当载荷低于300 mN时,微晶玻璃表现出延性特性.此外,在不同的载荷条件(20 mN~300 mN)下微晶玻璃的硬度和弹性模量存在较大的差异,分析其原因分别是纳米压痕的尺寸效应和材料发生了塑形变形.通过将实验得到的微晶玻璃的纳米硬度值与传统计算方法得到的硬度值进行比较,发现传统方法得到的硬度值较大,其原因是传统硬度计算方法忽略了材料的弹性恢复.     

混凝土直切槽平台巴西圆盘冲击劈裂拉伸断裂特性试验和数值模拟研究

采用变截面霍普金森压杆(SHPB),对高速冲击荷载下混凝土的断裂特性和裂纹演化进程进行了研究。对含复合型裂纹直切槽平台巴西圆盘(CSTFBD)进行劈裂拉伸试验,并结合理论研究了不同水灰比、不同应变率、不同预设裂纹长度和倾角对裂纹分布及断裂韧性的影响;采用扩展有限单元法(XFEM)模拟了具有不同预设裂纹倾角试件的开裂进程,得出开裂过程中试件内部的应力分布情况。结果表明,复合断裂韧性比对预制裂纹倾角的变化敏感,与裂纹长度和倾角呈负相关,而与应变率无关;次生裂纹的开裂并非发生在预设裂尖处,且裂纹倾角越大,裂尖应力集中越小、主裂纹发展越缓慢。     

Instrumented and Vickers Indentation for the Characterization of Stiffness,Hardness and Toughness of Zirconia Toughened Al_2O_3 and SiC Armor

Instrumented and Vickers indentation testing and microstructure analysis were used to investigate zirconia toughened alumina(ZTA) and silicon carbide(SiC).Several equations were studied to relate the Vickers indentation hardness,Young's modulus and crack behavior to the fracture toughness.The fracture in SiC is unstable and occurs primarily by cleavage leading to a relatively low toughness of 3 MPa m~(1/2),which may be inappropriate for multi-hit capability.ZTA absorbs energy by plastic deformation,pore collapse,crack deviation and crack bridging and exhibits time dependent creep.With a relatively high toughness around 6.6 MPa m~(1/2),ZTA is promising for multi-hit capability.The higher accuracy of mediar equations in calculating the indentation fracture toughness and the relatively high c/a ratios above 2.5suggest median type cracking for both SiC and ZTA.The Young's modulus of both ceramics was most accurately measured at lower indentation loads of about 0.5 kgf,while more accurate hardness and fracture toughness values were obtained at intermediate and at higher indentation loads beyond 5 kgf respectively.A strong indentation size effect(ISE) was observed in both materials.The load independent hardness of SiC is 2563 HV,putting it far above the standard armor hardness requirement of 1500 HV that is barely met by ZTA.     

Loose abrasive lapping hardness of optical glasses and its interpretation

We present an interpretation of the lapping hardness of commercially available optical glasses in terms of a micromechanics model of material removal by subsurface lateral cracking. We analyze data on loose abrasive microgrinding, or lapping at fixed nominal pressure, for many commercially available optical glasses in terms of this model. The Schott and Hoya data on lapping hardness are correlated with the results of such a model. Lapping hardness is a function of the mechanical properties of the glass: The volume removal rate increases approximately linearly with Young's modulus, and it decreases with fracture toughness and (approximately) the square of the Knoop hardness. The microroughness induced by lapping depends on the plastic and elastic properties of the glass, depending on abrasive shape. This is in contrast to deterministic microgrinding (fixed infeed rate), where it is determined from the plastic and fracture properties of the glass. We also show that Preston's coefficient has a similar dependence as lapping hardness on glass mechanical properties, as well as a linear dependence on abrasive size for the case of brittle material removal. These observations lead to the definition of an augmented Preston coefficient during brittle material removal. The augmented Preston coefficient does not depend on glass material properties or abrasive size and thus describes the interaction of the glass surface with the coolant-immersed abrasive grain and the backing plate. Numerical simulations of indentation are used to locate the origin of subsurface cracks and the distribution of residual surface and subsurface stresses, known to cause surface (radial) and subsurface (median, lateral) cracks.     

砌浆层状复合材料珍珠层的应变率效应

为了分析具有砌浆结构的层状复合材料的应变率效应,以珍珠层为研究对象,采用纳米压入法测试珍珠层力学性能,利用连续刚度测量法得到不同加载速率下材料的硬度值和弹性模量。利用扫描电子显微镜观察珍珠层不同方向的砌浆微结构形貌,并结合微观结构对比分析不同压入深度和不同应变率两种工况下,珍珠层表层与横断面方向的力学性能。结果表明:在相同加载条件下,珍珠层表层方向的弹性模量小于其横断面方向的弹性模量,而表层方向硬度值则大于横断面方向的硬度值;当应变率恒定时,珍珠层弹性模量与硬度随压入深度增加而增加,当压入深度达到750nm后,弹性模量不再随压入深度变化而变化;当压入深度恒定时,硬度值、弹性模量和弹性回复率均随着应变率的增加而变大。     

Mechanical properties of ZnS nanobelts

Mechanical properties of ZnS nanobelts were measured at room temperature by direct nanoindentation experiments. It was found that the ZnS nanobelts achieve 79% increase in hardness but 52% decrease in elastic modulus compared to bulk ZnS. The nanobelts were found to exhibit creep under indentation. Indentation cracking was preferred along the belt growth direction. Indentation deformation behavior and fracture mechanisms of the ZnS nanobelts are discussed in conjunction with their crystalline structure, size effect, and surface-to-volume ratio.     

Cavitation Damage of the single-crystal nickel-base superalloy SRR99 during creep at 850°C

Various heat treatments of the single-crystal nickel-base superalloy SRR99 have been carried out to produce a wide range of initial γ′ phase morphology. The cavitation damage has been studied after creep fracture at 850°C and stresses between 400MPa and 650 Mpa. The crep fracture surfaces and longitudinal sections of crept specimens have been examined by image analysing system in order to determine the size distribution and the area fraction of (001)-planes cracks on fracture surface characterise the creep crack damage level. The cracking morphology in fractured material as a function of stress and γ′-phase size has also been investigated. The results show, that crack propagation occurred anisotropically on (001) crystallographic planes perpendicular to the aplied stress along the γ/γ′ interfaces. It was found, that creep cracks dependent on the shape and size of γ′-phases developing at the temperature and stress level.     

Element Analysis of Ceramic Coatings under Spherical Indentation with Metallic Interlayer:Part Ⅱ Ring Crack

Spherical indentation of ceramic coatings with metallic interlayer was performed by means of axisymmetric finite element analysis(FEA). Two typical ceramic coatings with relatively high and low elastic modulus deposited on aluminum alloy and carbon steel were considered. The fracture mechanics of the ceramic coatings mechanisms due to occurrence of surface ring cracks extending traverse the coating thickness under spherical indentation are investigated within the framework of linear fracture mechanics. The J-integral associated to such cracks was computed. The evolution of J-integral vs the crack length and the indentation depth was studied. The effects of the interlayer, the coating and the substrate on the J-integral evolution were discussed. The results show that a suitable metallic interlayer can improve the fracture resistance of the coating systems under the same indentation conditions through reducing the J-integral.     

Element Analysis of Ceramic Coatings under Spherical Indentation with Metallic Interlayer：Part Ⅱ Ring Crack

Spherical indentation of ceramic coatings with metallic interlayer was performed by means of axisymmetric finite element analysis （FEA）. Two typical ceramic coatings with relatively high and low elastic modulus deposited on aluminum alloy and carbon steel were considered. The fracture mechanics of the ceramic coatings mechanisms due to occurrence of surface ring cracks extending traverse the coating thickness under spherical indentation are investigated within the framework of linear fracture mechanics. The J-integral associated to such cracks was computed. The evolution of J-integral vs the crack length and the indentation depth was studied. The effects of the interlayer, the coating and the substrate on the J-integral evolution were discussed. The results show that a suitable metallic interlayer can improve the fracture resistance of the coating systems under the same indentation conditions through reducing the J-integral.     

Twyman effect mechanics in grinding and microgrinding

In the Twyman effect (1905), when one side of a thin plate with both sides polished is ground, the plate bends: The ground side becomes convex and is in a state of compressive residual stress, described in terms of force per unit length (Newtons per meter) induced by grinding, the stress (Newtons per square meter) induced by grinding, and the depth of the compressive layer (micrometers). We describe and correlate experiments on optical glasses from the literature in conditions of loose abrasive grinding (lapping at fixed nominal pressure, with abrasives 4-400 μm in size) and deterministic microgrinding experiments (at a fixed infeed rate) conducted at the Center for Optics Manufacturing with bound diamond abrasive tools (with a diamond size of 3-40 μm, embedded in metallic bond) and loose abrasive microgrinding (abrasives of less than 3 μm in size). In brittle grinding conditions, the grinding force and the depth of the compressive layer correlate well with glass mechanical properties describing the fracture process, such as indentation crack size. The maximum surface residual compressive stress decreases, and the depth of the compressive layer increases with increasing abrasive size. In lapping conditions the depth of the abrasive grain penetration into the glass surface scales with the surface roughness, and both are determined primarily by glass hardness and secondarily by Young's modulus for various abrasive sizes and coolants. In the limit of small abrasive size (ductile-mode grinding), the maximum surface compressive stress achieved is near the yield stress of the glass, in agreement with finite-element simulations of indentation in elastic-plastic solids.     

Indentation fracture of WC-Co cermets

Indentation fracture of a series of well-characterized WC-Co cermets was studied with a Vickers diamond pyramid indenter. The resulting crack length-indentation load data were analysed in terms of relations characteristic of radial (Palmqvist) and fully developed radial/median (half-penny) crack geometries. The radial crack model gave a better fit to the data on all the alloys studied. Crack shapes determined by repeated surface polishing confirmed the radial nature of the cracks. An indentation fracture mechanics analysis based on the assumption of a wedge-loaded crack is shown to be consistent with the observed linear relation between the radial crack length and the indentation load. The analysis also predicts a simple relation among the fracture toughness (K _lc), the Palmqvist toughness (W) and the hardness (H) of the WC-Co alloys.