Fabrication and characterization of micromachined high-frequency tonpilz transducers derived by PZT thick films

Miniaturized tonpilz transducers are potentially useful for ultrasonic imaging in the 10 to 100 MHz frequency range due to their higher efficiency and output capabilities. In this work, 4 to 10-microm thick piezoelectric thin films were used as the active element in the construction of miniaturized tonpilz structures. The tonpilz stack consisted of silver/lead zirconate titanate (PZT)/lanthanum nickelate (LaNiO3)/silicon on insulator (SOI) substrates. First, conductive LaNiO3 thin films, approximately 300 nm in thickness, were grown on SOI substrates by a metalorganic decomposition (MOD) method. The room temperature resistivity of the LaNiO3 was 6.5 x 10(-6) omega x m. Randomly oriented PZT (52/48) films up to 7-microm thick were then deposited using a sol-gel process on the LaNiO3-coated SOI substrates. The PZT films with LaNiO3 bottom electrodes showed good dielectric and ferroelectric properties. The relative dielectric permittivity (at 1 kHz) was about 1030. The remanent polarization of PZT films was larger than 26 microC/cm2. The effective transverse piezoelectric e31,f coefficient of PZT thick films was about -6.5 C/m2 when poled at -75 kV/cm for 15 minutes at room temperature. Enhanced piezoelectric properties were obtained on poling the PZT films at higher temperatures. A silver layer about 40-microm thick was prepared by silver powder dispersed in epoxy and deposited onto the PZT film to form the tail mass of the tonpilz structure. The top layers of this wafer were subsequently diced with a saw, and the structure was bonded to a second wafer. The original silicon carrier wafer was polished and etched using a Xenon difluoride (XeF2) etching system. The resulting structures showed good piezoelectric activity. This process flow should enable integration of the piezoelectric elements with drive/receive electronics.     

Modeling and optimization of high-frequency ultrasound transducers

Obtaining an accurate transducer model for a high-frequency transducer can be troublesome using traditional models, such as the KLM model, since it is often difficult to measure precisely the piezoelectric, dielectric, and mechanical properties of the transducer. This paper describes an alternative method of modeling transducers using network theory. The network theory model for a transducer is determined from a measurement of the transducer impedance in water and the pulse-echo response of the system for a given electrical source and load. A discussion of how this model can be used to optimize the design of an electrical matching circuit is given. This method is illustrated by designing a two-element transmission line matching circuit for a miniature 53 MHz transducer. Excellent agreement between the network model prediction and the experimental response is obtained     

Half-thickness inversion layer high-frequency ultrasonic transducers using LiNbO3 single crystal.

Half-thickness inversion layer high-frequency ultrasonic transducers were fabricated using lithium niobate (LiNbO3) single crystal plate. The transducers developed for this study used a 36 degrees rotated Y-cut LiNbO3 thin plate with an active element thickness of 115 microm. The designed center frequency was in the range of 30 to 60 MHz. Half-thickness inversion layer was formed after the sample was annealed at a high temperature, and it is shown that the inversion layer thickness can be controlled by the temperature. Silver powder/epoxy composite and parylene were used as acoustic matching layers. A lossy silver epoxy was used as the backing material. Using an analytical method, the electrical impedance for different inversion layer ratios was determined. The measured resonant frequency was consistent with the modeled data. Even-order higher frequency broadband ultrasonic transducers with a center frequency at 60 MHz was obtained using half-thickness inversion layer of LiNbO3 single crystal.     

Half-thickness inversion layer high-frequency ultrasonic transducers using LiNbO/sub 3/ single crystal

Half-thickness inversion layer high-frequency ultrasonic transducers were fabricated using lithium niobate (LiNbO₃) single crystal plate. The transducers developed for this study used a 36deg rotated Y-cut LiNbO₃ thin plate with an active element thickness of 115 mum. The designed center frequency was in the range of 30 to 60 MHz. Half-thickness inversion layer was formed after the sample was annealed at a high temperature, and it is shown that the inversion layer thickness can be controlled by the temperature. Silver powder/epoxy composite and parylene were used as acoustic matching layers. A lossy silver epoxy was used as the backing material. Using an analytical method, the electrical impedance for different inversion layer ratios was determined. The measured resonant frequency was consistent with the modeled data. Even-order higher frequency broadband ultrasonic transducers with a center frequency at 60 MHz were obtained using half-thickness inversion layer of LiNbO₃ single crystal     

Phase-matched air ultrasonic transducers using corrugated PVDF filmwith half wavelength depth

A new type of large area PVDF film air transducer is proposed. The transducer features a high power output and a sharp beam angle. Conventionally known curved length mode resonators with two clamps at both ends have a resonance frequency determined by the curvature. In the present work, PVDF was formed into alternating concave and convex multiple curved sections, eliminating clamps, i.e., a periodic corrugation structure using a single PVDF film. Each convex and concave section has a common resonance frequency. A common excitation voltage induces vibration for each section, and the vibration direction is normal to the film surface. The vibration phase of convex section is shifted 180 degrees from the concave section. These waves add constructively to form a strong acoustic beam when corrugation height is approximately one-half of the wavelength. The corrugation height controls propagation path difference, canceling excitation phase difference. The design principle based on a uniform vibration mode is presented. Experimental investigations using 8.8×2.5-, 10×5-, and 20×20-cm² transducers are presented. Side lobes unique to this corrugation structure have been observed. A theoretical analysis of the side lobes is also presented. According to the theory, choosing the corrugation height appropriately will reduce side lobes to -15 dB with regard to the main lobe, and the observed side lobe height agreed with the theoretical result     

Fabrication and performance of high-frequency composite transducers with triangular-pillar geometry

A single-element, 40-MHz, 3-mm diameter transducer was fabricated with a geometric focus at 9 mm. The transducer was based on a piezo-composite substrate with triangular-shaped composite pillars. The 2-way bandwidth of 50% and impedance magnitude were in agreement with that predicted using finite-element modeling. A one-way radiation pattern was collected using a needle hydrophone. The one-way -3 dB beamwidth at the geometric focus was measured to be 120 mum and the -3 dB depth of field was 2.5 mm. This is in good agreement with the theoretical predictions of 112.5 mum and 2.4 mm. The triangular-pillar composite transducer was then compared with a transducer with square composite pillars with similar volume fraction of active ceramic. A 9.5 dB reduction in the amplitude of the secondary resonance was found for the triangular-pillar composite as well as a 30% gain in the 2-way pulse bandwidth. A 256-element 30-MHz linear array was fabricated as a preliminary investigation into the use of the triangular pillar as the substrate in a high-frequency linear array transducer. In vivo images were generated with both the single-element and linear-array transducers.     

Development of a real-time, high-frequency ultrasound digital beamformer for high-frequency linear array transducers

A real-time digital beamformer for high-frequency (>20 MHz) linear ultrasonic arrays has been developed. The system can handle up to 64-element linear array transducers and excite 16 channels and receive simultaneously at 100 MHz sampling frequency with 8-bit precision. Radio frequency (RF) signals are digitized, delayed, and summed through a real-time digital beamformer, which is implemented using a field programmable gate array (FPGA). Using fractional delay filters, fine delays as small as 2 ns can be implemented. A frame rate of 30 frames per second is achieved. Wire phantom (20 microm tungsten) images were obtained and -6 dB axial and lateral widths were measured. The results showed that, using a 30 MHz, 48-element array with a pitch of 100 microm produced a -6 dB width of 68 microm in the axial and 370 microm in the lateral direction at 6.4 mm range. Images from an excised rabbit eye sample also were acquired, and fine anatomical structures, such as the cornea and lens, were resolved.     

Use of transfer thermistor transducers in high-frequency alternating voltage standards

The principle of the construction and sources of error introduced by transfer thermistor transducers when reproducing and transmitting the dimensions of the unit of the volt as a high-frequency alternating current are considered.Translated from Izmeritel'naya Tekhnika, No. 5, pp. 50–51, May, 1994.     

Low-loss and wide-band double-mode surface acoustic wave filters using pitch-modulated interdigital transducers and reflectors

This paper proposes use of pitch-modulated interdigital transducers (IDTs) and reflectors for the realization of low-loss and wideband longitudinally coupled double-mode surface acoustic wave (DMS) filters. This technique offers drastic improvement of the device performances through the introduction of a sufficient number of degrees of freedom in the DMS filter design. Namely, the pass-band becomes wide and flat, and insertion loss can be reduced through the suppression of the bulk acoustic wave (BAW) scattering. First, it is shown how the BAW scattering loss can be reduced by the use of the pitch-modulated structure. The DMS filter with this structure is designed so that the frequency response becomes similar to that of the filter with the conventional unmodulated structure, and device performances are compared both theoretically and experimentally. It then is demonstrated how the total device performances are improved by the use of this technology when the device is designed optimally for given specifications. Adding to the reduced bulk wave scattering loss, various distinctive features offer drastic improvement of total device performances.     

Characterization of high-frequency, single-element focused transducers with wire target and hydrophone

In this paper, a wire-target technique was used for lateral beam profile measurements for a single-element, focused transducers in the very high-frequency range (35-60 MHz). Two wire targets made from 9-cm long tungsten wires with diameters of 8 microm and 20 microm were used as the pulse-echo targets to measure the lateral beam profiles at the focal plane of two single-element, focused transducers, a spherically focused 40 MHz transducer and a lens-focused in-house lithium niobate (LiNbO3) 60 MHz transducer. For comparison, measurements on the same transducers were performed by three small-aperture hydrophones with geometrical diameters varying from 37 microm to 150 microm. Tomographic reconstruction of the acoustic field from the spherically focused transducer also was conducted. Results obtained with the wire-target technique are comparable to those obtained with small-aperture hydrophones in characterizing lateral radiation patterns of a single-element, focused transducer in the high-frequency range (35-60 MHz). However, the wire-target method may overestimate pulse length because of the additional attenuation caused by the return path. Compared to small-aperture hydrophones, the wire-target technique is simpler and more cost effective. Its major advantage, however, is in the frequency range above 100 MHz in which commercial hydrophones are not yet available.     

Broadband EMFi-based transducers for ultrasonic air applications

In this work, we explore the possibilities of electromechanical film (EMFi) as a new material for developing broadband transducers for ultrasonic air applications. The advantages of the EMFi film are its wide usable frequency range and easiness to use, making it highly suitable for self made, customizable ultrasonic sensors. This paper presents theoretical and experimental information focused on the needs of the sensor's end user, namely, frequency response, actual dynamic mass and Young's modulus, bandwidth, sensitivity, electromechanical dynamical model, acoustic response, and directivity. It is found empirically that the behavior of the film as an almost ideal piston-like acoustic source permits accurate prediction of the characteristics of transducers built on a developable surface. The results obtained represent the first step to more complex geometries, and, ultimately, to completely customizable field ultrasonic transducers.     

Piezo-polymer transducers for ultrasonic imaging in air

Airborne polyvinylidenefluoride transducers have been designed for robotic applications in air. Characteristics of transducer prototypes are: working frequencies from 61 kHz to 86 kHz, quality factor Q from 4 to 6, and two-way insertion loss of about 90 dB. The small dimension, the lightness, and the low-cost fabrication technology allow the development of arrays or matrices for ultrasonic imaging systems in air. In this work two different image reconstruction algorithms are proposed: the first carries out a combined spectral and aperture synthesis for detecting isolated scatterers with a spatial resolution of about 2 mm; the second is based on an accurate ranging algorithm with sub-millimeter resolution at distances up to 50 cm. Finally, this work's application to the reconstruction of three-dimensional object profiles is discussed.     

Piezoceramics for high-frequency (20 to 100 MHz) single-elementimaging transducers

The performance of transducers operating at high frequencies is greatly influenced by the properties of the piezoelectric materials used in their fabrication. Selection of an appropriate material for a transducer is based on many factors, including material properties, transducer area, and operating frequency. The properties of a number of piezoceramic materials have been experimentally determined by measuring the electrical impedance of air-loaded resonators whose thickness corresponds to resonance frequencies from 10 to 100 MHz. Materials measured include commercially available compositions of lead zirconate titanate (PZT) with relatively high dielectric constants and a modified lead titanate (PT) composition with a much lower dielectric constant. In addition, materials which have been designed or modified to result in improved properties at high frequencies are studied. Conclusions concerning the influence of the microstructure and composition on the frequency dependence of the material properties are made from the calculated properties and microstructural analysis of each material. Issues which affect transducer performance are discussed in relation to the properties. For transducers larger than about 1 mm in diameter, the use of a lower dielectric constant material is shown to result in a better electrical match between the transducer and a standard 50 Ω termination. For transducers whose impedance is close to that of the connecting cables and electrical termination, equivalent circuit model simulations show improved performance without the need for electrical matching networks. Measurements of fabricated transducers show close agreement with the simulations, validating the measurements and showing the performance benefits of electrically matched transducers     

Electrostatic airborne ultrasonic transducers: modeling and characterization

An a priori theoretical model for electrostatic airborne ultrasonic transducers has been developed. The historical development of transducer modeling is briefly reviewed. This paper applies the plate-on-air-spring model to establish a mathematical formulation for the transducer behavior in terms of the characterized impedance parameters. It is clarified that such an electrostatic transducer is a capacitive-type device and obeys the reciprocity principle in the same way as a piezoelectric device. The accurate prediction of multiple resonant frequencies and transmitting responses for a typical V-grooved backplate transducer serve to substantiate the theoretical model.     

The design and characterization of micromachined air-coupledcapacitance transducers

Air-coupled capacitance transducers have been manufactured using anisotropically etched silicon backplates and commercially available dielectric films (Kapton and Mylar). The small backplate pits which result from etching, provide well ordered and highly uniform air layers between the backplate surface and thin dielectric film. Such uniformity allows the transducers to be manufactured with reproducible characteristics (a property difficult to achieve through conventional manufacturing). Impulse response studies in generation and detection, have indicated well-damped, wideband behavior, with bandwidths extending from <100 kHz to 2.3 MHz (at the -6 dB points). These bandwidths are investigated as a function of excitation pulse width, applied bias potential, and dielectric film thickness. An estimate of detection sensitivity is also provided by comparison with a calibrated laser interferometer     

PMN-PT single crystal, high-frequency ultrasonic needle transducers for pulsed-wave Doppler application

High-frequency needle ultrasound transducers with an aperture size of 0.4 mm were fabricated using lead magnesium niobate-lead titanate (PMN-33% PT) as the active piezoelectric material. The active element was bonded to a conductive silver particle matching layer and a conductive epoxy backing through direct contact curing. An outer matching layer of parylene was formed by vapor deposition. The active element was housed within a polyimide tube and a 20-gauge needle housing. The magnitude and phase of the electrical impedance of the transducer were 47 omega and -38 degrees, respectively. The measured center frequency and -6 dB fractional bandwidth of the PMN-PT needle transducer were 44 MHz and 45%, respectively. The two-way insertion loss was approximately 15 dB. In vivo high-frequency, pulsed-wave Doppler patterns of blood flow in the posterior portion and in vitro ultrasonic backscatter microscope (UBM) images of the rabbit eye were obtained with the 44-MHz needle transducer.