脉冲激光沉积ZnO及其掺杂薄膜的研究

本文用脉冲激光沉积（PLD）法在SiO2基片上制备了ZnO薄膜和Zn1-xMnxO薄膜。X射线衍射、原子力显微镜、紫外-可见分光光度计对ZnO薄膜的测试结果表明：薄膜具有（103）面的择优取向，表面比较平坦；SiO2基片上制备的薄膜在387nm附近存在明显的吸收边，且薄膜的吸收对基片温度变化不明显。通过对Zn1-xMnxO薄膜的吸收光谱分析得出：Mn离子的掺杂改变了ZnO薄膜的禁带宽度，随Mn离子的掺杂量的增加，薄膜禁带宽度增加；薄膜的光吸收也从直接跃迁过渡为间接跃迁过程。     

CoFe合金薄膜的制备及原子力表征

室温下采用射频磁控溅射技术在涤纶纺粘非织造布表面沉积钴铁(CoFe)合金薄膜.通过原子力显微镜(AFM)观察了CoFe合金薄膜在无纺织布表面沉积的微观结构,并较为系统地分析了溅射时间、溅射压强及溅射功率对CoFe合金薄膜微观结构的影响.结果表明,磁控溅射的工艺参数配置对CoFe合金薄膜表面形貌的影响很大,溅射时间的长短、溅射功率的大小对成膜的均匀性有很大影响,在一定的溅射压强(0.5Pa)时合金颗粒将会因团聚而急速增大.     

YZO薄膜的Sol-gel制备及其性能

采用Sol-gel法在普通载玻片上制备YZO薄膜.研究了陈化时间和Y掺杂量对薄膜晶体结构、表面形貌和光学性能的影响,并分析和探讨了工艺参数与结构和性能之间的关系.实验结果表明,YZO薄膜为纤锌矿结构,呈c轴择优取向生长,平均透光率(380～760nm)超过85%.实验还发现,陈化时间存在最优值,YZO薄膜随着Y掺杂量的增加晶体结晶质量下降.     

Growth and Characterization of YBCO Thin Films by Sequential Deposition and Annealing

A novel thin film growth procedure, sequential deposition and annealing (SDA), which contains the advantages of both in situ and ex situ procedures, was proposed. Y₁Ba₂Cu₃O_{7 – x} (YBCO) high temperature superconducting thin films were grown and characterized by the SDA procedure. Purely c-axis-oriented YBCO thin films with no foreign phases and other oriented grains were successfully prepared. The superconducting transition properties of SDA-grown YBCO thin films were measured by measurement of inductance and resistance. The inductance measurements gave a T _c ^onset of 85 K and a T _c of 5 K. The resistance measurements gave a T _c ^onset of 90 K and a T _c of 5 K. Atomic force microscopy studies showed that SDA-grown YBCO thin films had micrometer-size grains surrounded by many nanometer-size grains. The nanometer-size grains in SDA-grown YBCO thin films are responsible for degradation of superconducting transition properties.     

溅射法制备TiO2薄膜过程中靶中毒现象的消除及样品表征

用氧脉冲直流反应磁控溅射法,在载玻片衬底上制备了不同初始氧浓度和不同断氧时间％的多晶TiO2纳米薄膜,并对薄膜的厚度、晶体结构及表面形貌进行了研究。研究发现,脉冲式通氧能有效消除靶中毒,将薄膜沉积速率最大提高到3～5nm／min,并且当断氧时间大于30s时,沉积速率在2．5nm／min以上;薄膜的晶体结构和形貌随着氧浓度和断氧时间而变化,在初始氧浓度为30％、断氧时间为30s时,金红石结构样品具有最佳结晶程度,并且薄膜的表面平整、晶粒尺寸分布均匀,而锐钛矿结构的最佳结晶条件是氧浓度30％或50％、断氧时间20s.     

Peculiarities of Pinning and Microwave Absorption Hysteresis in Thin Superconducting Films

The results of experimental and theoretical studies of the hysteretic microwave absorption (MWA) in the superconducting Bi₂Sr₂CaCu₂O₈ thin films are presented. It has been found experimentally that the hysteresis loop manifests some unusual features such as the non-monotone hysteresis variation and the change of a hysteresis sign. We have shown that such unusual behavior is due to the special nature of the bulk pinning in a superconducting film with a thickness comparable with the field penetration depth. The theoretical model of the MWA hysteresis has been developed taking into account the inhomogeneous distribution of centers with different symmetry of a pinning potential and their variation with the magnetic field value.     

甩胶喷雾热分解法制备ITO薄膜及光电性能研究

按In:Sn(物质的量比)=9:1,InCl3·4H2O和SnCl4·5H2O为前驱物,采用自制甩胶喷雾热分解制备薄膜装置在普通玻璃衬底上沉积了ITO薄膜,结果表明,采用自制甩胶喷雾热分解制备薄膜新装置成功制备出ITO薄膜。该装置结构简单、操作方便。制备ITO薄膜优化条件为:甩胶转速800r/min、衬底温度250℃、退火温度450℃、载气为空气、流量为7L/min、液体雾化速度0.2ml/min、雾粒速度3.5m/s。薄膜的沉积时间为5min,薄膜厚度约1000nm,最低电阻率为0.75*10-4Ω·cm,薄膜在可见光范围(波长在400-700nm)内平均透光率为87.2%。衬底温度在200℃以上时呈现立方相结构。     

磁控溅射沉积Cu-W薄膜的特征及热处理的影响

采用磁控共溅射法制备含钨1.51%~14.20%(原子分数,下同)的Cu-W合金薄膜,并用EDX、XRD、SEM、显微硬度仪和电阻仪研究了其成分、结构及性能。结果表明,添加W可显著细化Cu-W薄膜基体相晶粒,晶粒尺寸随W含量的增加而减小,Cu-W薄膜呈纳米晶结构。Cu-W薄膜中存在W在Cu中形成的fcc Cu(W)非平衡亚稳过饱和固溶体,固溶度随W含量的增加而提高,最大值为10.65%。与纯Cu膜对比发现,薄膜的显微硬度和电阻率总体上随W含量的增加而显著增大。经200℃、400℃及650℃热处理1h后,Cu-W薄膜基体相晶粒长大,EDX分析显示晶界处出现富W第二相;薄膜显微硬度降低,电阻率下降,降幅与退火温度呈正相关。添加W引起的晶粒细化效应以及退火中基体相晶粒度增大分别是Cu-W薄膜微观结构和性能形成及演变的主要原因。     

正偏压作用下多弧离子镀ZrO2薄膜的组织结构与力学性能研究

在氧气和氩气的混合气体中,以O2/Ar流量比固定为1/4的条件,通过改变正偏压大小,采用多弧离子镀方法制备了新型高k栅介质——ZrO2薄膜。通过X射线衍射(XRD)和原子力显微镜(AFM)研究了在不同正偏压作用下正偏压值与薄膜的相结构、表面形貌之间的关系,利用纳米压痕仪测量了不同正偏压作用下沉积得到的ZrO2薄膜的硬度及弹性模量,并观察了ZrO2薄膜经不同温度退火处理后的相结构及表面形貌的变化。结果表明,在各个正偏压条件下,薄膜结构呈微晶或非晶;ZrO2薄膜的均方根粗糙度随着正偏压的升高而降低;正偏压为100V时硬度和弹性模量均达到最大值,分别为16.1GPa和210GPa。     

溶胶—凝胶法制备（Pb,Cd,La）TiO3薄膜及其特性

采用溶胶－凝胶法及均胶工艺,分别在石英玻璃和硅单晶上制备（Ｐｂ,Ｃｄ,Ｌａ）ＴｉＯ２薄膜。用ＳＥＭ分析薄膜的形貌,用ＦＴ－ＩＲ及ＤＴＡ等技术对ＰＣＬＴ薄膜及凝胶粉晶化情况进行分析。用ＸＲＤ对不同基片、不同厚度薄膜成相的影响进行了分析讨论。     

Preparation and Characterization of Epitaxial-Grown Ba0.65Sr0.35TiO3 Thin Films by the Sol-Gel Process on Pt/MgO Substrates

Epitaxial-grown barium-strontium-titanate (BST, Ba_0.65Sr_0.35TiO₃) thin films have been successfully deposited on Pt/MgO (100) substrates using sol-gel techniques. Crack-free 350-nm-thick films were fabricated using a multilayer spinning technique and calcination at 650°C in oxygen for 1 hr. The X-ray diffraction pattern showed that (001) planes of BST films were mainly laid parallel to Pt (100) and MgO (100). The dielectric constant and dissipation factor for BST thin films at a frequency of 10 kHz were 480 and 0.02, respectively. The results of the temperature-dependence of the dielectric constant and dissipation factor showed that sol-gel–derived BST films had Curie temperatures of about 35°C and diffused ferroelectric phase transition characteristics. The leakage current density through the BST films was about 2.75 × 10^–7 A/cm² at an applied voltage of 3 V. The BST films exhibited a well-saturated ferroelectric hysteresis loop with remnant polarization P _r = 2.8 C/cm² and coercive field E _c = 52 kV/cm.     

Evaluation of ion conductivity of ZrO2 thin films prepared by reactive sputtering in O2, H2O, and H2O + H2O2 mixed gas

Hydrated ZrO₂ thin films were prepared by reactive sputtering in O₂, H₂O, and H₂O + H₂O₂ mixed gas, and the effect of the sputtering atmosphere on ion conductivity of the films was investigated. The results showed that the films deposited in O₂ gas exhibited poor ion conductivity; however, the ion conductivities of the films deposited in the other two kinds of atmosphere were similar and 300-500 times higher than that of the films deposited in O₂ gas. It was indicated that the higher ion conductivity of the films was caused by lower film density and higher water content.