Coaxial probes for scanning near-field microscopy

This paper deals with the development of coaxial aperture tips integrated in a cantilever probe for combined scanning near-field infrared microscopy and scanning force microscopy. A fabrication process is introduced that allows the batch fabrication of hollow metal aperture tips integrated on a silicon cantilever. To achieve the coaxial tip arrangement a metal rod is deposited inside the hollow tip using the focused ion beam technique. Theoretical calculations with a finite integration code were performed to study the transmission characteristics of coaxial tips in comparison with conventional aperture probes. In addition, the influence of the geometrical design parameters of the coaxial probe on its optical behaviour is investigated.     

Optoelectronic detector probes for scanning near-field optical microscopy

A brief explanation of the optoelectronic probe concept and a comparison between the implementation of passive waveguide probes and optoelectronic probes in scanning near-field optical microscopy (SNOM) is presented. The first probe realizations using cleaved semiconductor crystals and the work at present in progress using microfabricated Si pyramids are described. These crystals with evaporated metal electrodes forming a slit aperture with subwave-length dimensions work as metal–semiconductor–metal photodetectors. Their optical detection behaviour is investigated by measuring the intensity distribution of a laser focal point. Measurements where the external bias voltage is changed show that it is possible to modify the detection behaviour of the device because of the varying depletion widths. The last part of the article describes a concept where pyramidal probes should function simultaneously as sensors for scanning force microscopy (SFM) to measure topography and as optoelectronic probes for scanning near-field optoelectronic microscopy (SNOEM).     

Femtosecond near-field scanning optical microscopy

We have developed an instrument for optically measuring carrier dynamics in thin-film materials with ≈150 nm lateral resolution, ≈250 fs temporal resolution and high sensitivity. This is accomplished by combining an ultrafast pump–probe laser spectroscopic technique with a near-field scanning optical microscope. A diffraction-limited pump and near-field probe configuration is used, with a novel detection system that allows for either two-colour or degenerate pump and probe photon energies, permitting greater measurement flexibility than that reported in earlier published work. The capabilities of this instrument are proven through near-field degenerate pump–probe studies of carrier dynamics in GaAs/AlGaAs single quantum well samples locally patterned by focused ion beam (FIB) implantation. We find that lateral carrier diffusion across the nanometre-scale FIB pattern plays a significant role in the decay of the excited carriers within ≈1 μm of the implanted stripes, an effect which could not have been resolved with a far-field system.     

Femtosecond near-field scanning optical microscopy

We have developed an instrument for optically measuring carrier dynamics in thin-film materials with approximately 150 nm lateral resolution, approximately 250 fs temporal resolution and high sensitivity. This is accomplished by combining an ultrafast pump-probe laser spectroscopic technique with a near-field scanning optical microscope. A diffraction-limited pump and near-field probe configuration is used, with a novel detection system that allows for either two-colour or degenerate pump and probe photon energies, permitting greater measurement flexibility than that reported in earlier published work. The capabilities of this instrument are proven through near-field degenerate pump-probe studies of carrier dynamics in GaAs/AIGaAs single quantum well samples locally patterned by focused ion beam (FIB) implantation. We find that lateral carrier diffusion across the nanometre-scale FIB pattern plays a significant role in the decay of the excited carriers within approximately 1 microm of the implanted stripes, an effect which could not have been resolved with a far-field system.     

Instrumentation for dual-probe scanning near-field optical microscopy

To investigate local carrier motions, we developed a dual-probe scanning near-field optical microscope (SNOM) with two fiber probes where one is for photoexcitation and the other is for light collection. This instrumentation is based on two important techniques: the design of probe structures and distance control between the sample surface and the two probes. A finite-difference time-domain method numerically analyzed and optimized the design for high efficiency photoexcitation and light collection, while a dual band modulation realized distance control. Real time detection of the oscillations of the probe tips using different frequencies independently controls the distance between the probe tip and the sample surface as well as the distance between the two probes. Thus, the collection probe can be scanned around an illumination probe without destroying the probe tips. To demonstrate our SNOM, we performed photoluminescence spectroscopy under the dual-probe configuration and observed carrier motions in an InGaN quantum well.     

Towards better scanning near-field optical microscopy probes — progress and new developments

Several approaches are described with the aim of producing near-field optical probes with improved properties. Focused ion beam milling allows the fabrication of small apertures in a controlled fashion, resulting in probes with excellent polarization properties and increased transmission. Microfabrication processes are described that allow the production of apertures of 30–50 nm, facilitating the mass-fabrication of apertured tip structures that can be used in a combined force/near-field optical microscope. Finally, possible future developments are outlined.     

Characterization of power induced heating and damage in fiber optic probes for near-field scanning optical microscopy

Tip-induced sample heating in near-field scanning optical microscopy (NSOM) is studied for fiber optic probes fabricated using the chemical etching technique. To characterize sample heating from etched NSOM probes, the spectra of a thermochromic polymer sample are measured as a function of probe output power, as was previously reported for pulled NSOM probes. The results reveal that sample heating increases rapidly to approximately 55-60 degrees C as output powers reach approximately 50 nW. At higher output powers, the sample heating remains approximately constant up to the maximum power studied of approximately 450 nW. The sample heating profiles measured for etched NSOM probes are consistent with those previously measured for NSOM probes fabricated using the pulling method. At high powers, both pulled and etched NSOM probes fail as the aluminum coating is damaged. For probes fabricated in our laboratory we find failure occurring at input powers of 3.4+/-1.7 and 20.7+/-6.9 mW for pulled and etched probes, respectively. The larger half-cone angle for etched probes ( approximately 15 degrees for etched and approximately 6 degrees for pulled probes) enables more light delivery and also apparently leads to a different failure mechanism. For pulled NSOM probes, high resolution images of NSOM probes as power is increased reveal the development of stress fractures in the coating at a taper diameter of approximately 6 microm. These stress fractures, arising from the differential heating expansion of the dielectric and the metal coating, eventually lead to coating removal and probe failure. For etched tips, the absence of clear stress fractures and the pooled morphology of the damaged aluminum coating following failure suggest that thermal damage may cause coating failure, although other mechanisms cannot be ruled out.     

Analysis of fiber probes of scanning near-field optical microscope by field emission microscopy.

It is shown that field emission microscopy and related methods can be used to analyze the metal coated fiber tips, which nowadays are the most frequently used sensor for the scanning near-field optical microscopy (SNOM). Metal free and thus non field-emitting aperture for the light transmission on the tip apex can be directly seen and its parameters can be measured, which is very important for the interpretation of SNOM data.     

Surface-polariton propagation for scanning near-field optical microscopy application

Surface plasmon-, phonon- and exciton-polaritons exist on specific materials in specific spectral regions. We assess the properties of such travelling surface-bound electromagnetic waves relevant for scanning near-field optical microscopy applications, i.e. the tightness of surface binding, the attenuation, the phase velocity and the coupling with free-space electromagnetic waves. These quantities can be directly determined by photographic imaging of surface plasmon- and surface phonon-polaritons, in both the visible and mid-infared regions. Focusing of mid-infrared surface plasmons is demonstrated. Surface waveguides to transport and focus photons to the tip of a scanning near-field probe are outlined.     

Surface-polariton propagation for scanning near-field optical microscopy application

Surface plasmon-, phonon- and exciton-polaritons exist on specific materials in specific spectral regions. We assess the properties of such travelling surface-bound electromagnetic waves relevant for scanning near-field optical microscopy applications, i.e. the tightness of surface binding, the attenuation, the phase velocity and the coupling with free-space electromagnetic waves. These quantities can be directly determined by photographic imaging of surface plasmon- and surface phonon-polaritons, in both the visible and mid-infared regions. Focusing of mid-infrared surface plasmons is demonstrated. Surface waveguides to transport and focus photons to the tip of a scanning near-field probe are outlined.     

Transmission line probes for scanning photon-tunneling microscopy

Because metalized light probes for scanning photon-tunneling microscopy are tapered waveguides beyond cutoff, tapered coaxial transmission lines have been tried instead. It is shown here that insertion losses in such a line can be reduced by asymmetrically phase-apodizing the illuminating lens. Alternatively, a strip rather than a coaxial line can be used.     

Apertureless scanning near-field fluorescence microscopy in liquids

We show that apertureless scanning near-field optical microscopes that use sharp vibrating conical tips can be operated in liquid environments. We have investigated the damping of the tip oscillation as a function of its shape and as a function of its depth under the liquid surface. The degradation of the quality factor from 150 in air down to 15 in liquid does not impede to perform topographic and optical measurements with a very good sensitivity. As an example of application, we present near-field fluorescence images of dye-doped polystyrene spheres immersed in a liquid.     

Multi-wavelength heterodyne-detected scattering-type scanning near-field optical microscopy

We report on the implementation of a scattering-type scanning near-field optical microscope based on a heterodyne detection scheme, which has the ability to record near-field optical images at multiple wavelengths simultaneously. It is used to map out local field distribution and to investigate the dispersion behavior of plasmon created by nanometer-scale metallic structures. It opens up an unprecedented opportunity to study nano-photonics.     

Nano-slit probes for near-field optical microscopy fabricated by focused ion beams

The near-field probes described in this paper are based on metallized non-contact atomic force microscope cantilevers made of silicon. For application in high-resolution near-field optical/infrared microscopy, we use aperture probes with the aperture being fabricated by focused ion beams. This technique allows us to create apertures of sub-wavelength dimensions with different geometries. In this paper we present the use of slit-shaped apertures which show a polarization-dependent transmission efficiency and a lateral resolution of < 100 nm at a wavelength of 1064 nm. As a test sample to characterize the near-field probes we investigated gold/palladium structures, deposited on an ultrathin chromium sublayer on a silicon wafer, in constant-height mode.     

Nano-slit probes for near-field optical microscopy fabricated by focused ion beams

The near-field probes described in this paper are based on metallized non-contact atomic force microscope cantilevers made of silicon. For application in high-resolution near-field optical/infrared microscopy, we use aperture probes with the aperture being fabricated by focused ion beams. This technique allows us to create apertures of sub-wavelength dimensions with different geometries. In this paper we present the use of slit-shaped apertures which show a polarization-dependent transmission efficiency and a lateral resolution of < 100 nm at a wavelength of 1064 nm. As a test sample to characterize the near-field probes we investigated gold/palladium structures, deposited on an ultrathin chromium sublayer on a silicon wafer, in constant-height mode.     

Apertureless scanning near-field magneto-optical microscopy of magnetic multilayers

We imaged magnetic domains in Pt/Co/Pt multilayers using an apertureless scanning near-field optical microscope operating in reflection mode. As the magneto-optical effects are weak for this kind of structure, a polarization modulation technique with a photoelastic modulator was used to reveal the contrast between magnetic domains. In the case of a Pt/Co/Pt trilayer structure, a strong improvement in lateral resolution is observed compared with far-field magneto-optical images and good sensitivity is achieved. In the case of a Pt/[Co/Pt]Pt multilayer structure, stripe domains of 200 nm width could be resolved, in good agreement with images obtained by magnetic force microscopy on the same structure.