共查询到16条相似文献,搜索用时 62 毫秒
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设计了一个新型的结构完全对称的双向MEMS电容式惯性传感器.该传感器主要由可动质量块、栅形条、支撑梁、连接梁、阻尼调整梳齿组成.设计的结构采用变电容面积的检测方式,在降低空气阻尼的同时也降低了对DRIE工艺的要求,并通过加大测试信号电压来降低电路噪声,从而提高传感器的分辨率.用有限元工具ANSYS详细讨论了传感器的参数和性能,并模拟验证了设计的双向传感器的交叉效应近似为零.制作了滑膜阻尼测试器件,在大气压下,测得的品质因子可达514,验证了该结构设计可以提高传感器的分辨率和该工艺设计的可行性. 相似文献
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A novel MEMS inertial sensor with enhanced sensing capacitors is developed. The designed fabricated process of the sensor is a deep RIE process, which can increase the mass of the seismic to reduce the mechanical noise, and the designed capacitance sensing method is changing the capacitance area, which can reduce the air damping between the sensing capacitor plates and reduce the requirement for the DRIE process precision, and reduce the electronic noise by increasing the sensing voltage to improve the resolution. The design and simulation are also verified by using the FEM tool ANSYS. The simulated results show that the transverse sensitivity of the sensor is approximately equal to zero. Finally, the fabricated process based on silicon-glass bonding and the preliminary test results of the device for testing grid capacitors and the novel inertial sensor are presented. The testing quality factor of the testing device based on the slide-film damping effect is 514, which shows that the enhanced capacitors can reduce mechanical noise. The preliminary testing result of the sensitivity is 0.492pf/g. 相似文献
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The comb capacitances fabricated by deep reactive ion etching (RIE) process have high aspect ratio which is usually smaller than 30 : 1 for the complicated process factors, and the combs are usually not parallel due to the well-known micro-loading effect and other process factors, which restricts the increase of the seismic mass by increasing the thickness of comb to reduce the thermal mechanical noise and the decrease of the gap of the comb capacitances for increasing the sensitive capacitance to reduce the electrical noise. Aiming at the disadvantage of the deep RIE, a novel capacitive micro-accelerometer with grid strip capacitances and sensing gap alterable capacitances is developed. One part of sensing of inertial signal of the micro-accelerometer is by the grid strip capacitances whose overlapping area is variable and which do not have the non-parallel plate's effect caused by the deep RIE process. Another part is by the sensing gap alterable capacitances whose gap between combs can be reduced by the actuators. The designed initial gap of the alterable comb capacitances is relatively large to depress the effect of the maximum aspect ratio (30 : 1) of deep RIE process. The initial gap of the capacitance of the actuator is smaller than the one of the comb capacitances. The difference between the two gaps is the initial gap of the sensitive capacitor. The designed structure depresses greatly the requirement of deep RIE process. The effects of non-parallel combs on the accelerometer are also analyzed. The characteristics of the micro-accelerometer are discussed by field emission microscopy (FEM) tool ANSYS. The tested devices based on slide-film damping effect are fabricated, and the tested quality factor is 514, which shows that grid strip capacitance design can partly improve the resolution and also prove the feasibility of the designed silicon-glass anodically bonding process. 相似文献
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倾斜梳齿的MEMS电容式传感器惯性脉冲响应特性研究 总被引:2,自引:0,他引:2
DRIE(Deep Reactive Ion Etching)工艺加工的高深宽比梳齿电容不能保证绝对平行.本文在考虑低真空空气阻尼力的同时,研究了梳齿电容倾斜的MEMS传感器对脉冲惯性信号的响应,并分析了DRIE工艺因素对器件性能的影响.研究结果表明,当传感器为没有静电力反馈的双边电容结构时,梳齿电容的不平行对传感器的响应位移、惯性脉冲响应线性度范围影响明显,且随着封装真空度增加而加重.若传感器有静电力反馈,惯性脉冲响应的灵敏度降低,但DRIE工艺因素的影响程度降低.为了抑制DRIE工艺导致的梳齿电容不平行因素的影响,文中还设计了一个新型的变电容面积的MEMS惯性传感器,并用ANSYS初步分析了其性能,设计了其详细的制作工艺流程. 相似文献
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设计了一个新型的结构完全对称的双向MEMS电容式惯性传感器.该传感器主要由可动质量块、栅形条、支撑梁、连接梁、阻尼调整梳齿组成.设计的结构采用变电容面积的检测方式,在降低空气阻尼的同时也降低了对DRIE工艺的要求,并通过加大测试信号电压来降低电路噪声,从而提高传感器的分辨率.用有限元工具ANSYS详细讨论了传感器的参数和性能,并模拟验证了设计的双向传感器的交叉效应近似为零.制作了滑膜阻尼测试器件,在大气压下,测得的品质因子可达514,验证了该结构设计可以提高传感器的分辨率和该工艺设计的可行性. 相似文献
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MEMS惯性传感器可靠性试验方法研究 总被引:1,自引:0,他引:1
MEMS惯性传感器在军事与商业应用中的一个主要问题便是可靠性试验方法尚未标准化,因而目前绝大多数MEMS惯性传感器器件的可靠性试验依据的是傲电子的试验标准。但是,这些标准对于这类器件的适用性却受到许多机构的质疑,国外关于该问题的研究也已起步。汇总了MEMS惯性传感器器件的结构和工作原理等信息,重点总结了该类器件的典型环境失效机理,并将典型的环境载荷情况与失效机理进行了对比分析:从现有的微电子可靠性试验标准中选取了针对不同环境失效机理的试验方法。并对其适用性问题进行了讨论。 相似文献
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BOB SCANNELL 《今日电子》2011,(9):49-50,53
最近的传感器技术发展使得机器人和其他工业系统设计实现了革命性的进步。除了机器人以外,惯性传感器有可能改善其系统性能或功能的应用还包括:平台稳定、工业机械运动控制、安全/监控设备和工业车辆导航等。这种传感器提供的运动信息非常有用,不仅能改善性能,而且能提高可靠性、安全性并降低成本。 相似文献
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介绍了一种用于料位检测的电容式传感器的结构设计方法。并针对所设计的传感器,给出了相应的检测电路及其原理,同时给出了通过该传感器对砂石样本得出的具体检测数据的试验结果。 相似文献
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Dong Linxi Chen Jindan Yan Haixia Huo Weihong Li Yongjie Sun Lingling 《半导体学报》2009,30(3):034008-034008-6
The comb capacitances fabricated by deep reactive ion etching (RIE) process have high aspect ratio which is usually smaller than 30 : 1 for the complicated process factors, and the combs are usually not parallel due to the well-known micro-loading effect and other process factors, which restricts the increase of the seismic mass by increasing the thickness of comb to reduce the thermal mechanical noise and the decrease of the gap of the comb capacitances for increasing the sensitive capacitance to reduce the electrical noise. Aiming at the disadvantage of the deep RIE, a novel capacitive micro-accelerometer with grid strip capacitances and sensing gap alterable capacitances is developed. One part of sensing of inertial signal of the micro-accelerometer is by the grid strip capacitances whose overlapping area is variable and which do not have the non-parallel plate's effect caused by the deep RIE process. Another part is by the sensing gap alterable capacitances whose gap between combs can be reduced by the actuators. The designed initial gap of the alterable comb capacitances is relatively large to depress the effect of the maximum aspect ratio (30 : 1) of deep RIE process. The initial gap of the capacitance of the actuator is smaller than the one of the comb capacitances. The difference between the two gaps is the initial gap of the sensitive capacitor. The designed structure depresses greatly the requirement of deep RIE process. The effects of non-parallel combs on the accelerometer are also analyzed. The characteristics of the micro-accelerometer are discussed by field emission microscopy (FEM) tool ANSYS. The tested devices based on slide-film damping effect are fabricated, and the tested quality factor is 514, which shows that grid strip capacitance design can partly improve the resolution and also prove the feasibility of the designed silicon-glass anodically bonding process. 相似文献
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A novel MEMS inertial sensor with enhanced sensing capacitors is developed. The designed fabricated process of the sensor is a deep RIE process, which can increase the mass of the seismic to reduce the mechanical noise, and the designed capacitance sensing method is changing the capacitance area, which can reduce the air damping between the sensing capacitor plates and reduce the requirement for the DRIE process precision, and reduce the electronic noise by increasing the sensing voltage to improve the resolution. The design and simulation are also verified by using the FEM tool ANSYS. The simulated results show that the transverse sensitivity of the sensor is approximately equal to zero. Finally, the fabricated process based on silicon-glass bonding and the preliminary test results of the device for testing grid capacitors and the novel inertial sensor are presented. The testing quality factor of the testing device based on the slide-film damping effect is 514, which shows that the enhanced capacitors can reduce mechanical noise. The preliminary testing result of the sensitivity is 0.492 pf/g. 相似文献
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针对微惯性测量单元原始输出信息受零偏、标度因数、非正交误差等误差项干扰影响测量精度的问题,提出一种无需借助高精度转台的MEMS IMU快速原位标定方案。在分析MEMS惯性传感器输出特性的基础上建立传感器误差模型,利用六面体夹具设计IMU 24位置连续转停标定方案,以重力及各次旋转角度为参考信息完成传感器误差标定。针对加速度计零偏、标度因数、非正交误差9个参数构造标定模型,采用牛顿法估计误差参数最优值,考虑陀螺仪零偏与标度因数6个误差参数,利用最小二乘法计算误差参数最优估值。分别进行加速度计、陀螺标定补偿实验,实验结果表明,提出的MEMS IMU快速原位标定方法能快速得到传感器误差参数,提高了输出数据精度。 相似文献
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