共查询到15条相似文献,搜索用时 78 毫秒
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掩埋隧道结在长波长VCSEL结构中的应用 总被引:1,自引:0,他引:1
采用气态源分子束外延技术在InP(100)衬底上分别生长了δ掺杂的p+-AlIn-As-n+-InP和p+-InP-n+-InP两种隧道结结构,用电化学C-V和I-V特性曲线表征了载流子浓度和电学特性,发现p+-AlInAs-n+-InP隧道结性能优于p+-InP-n+-InP隧道结. 在InP(100)衬底上生长了包含p+-AlInAs-n+-InP掩埋隧道结和多量子阱有源层的1.3μm垂直腔面发射激光器(VCSEL)结构,测试得出其开启电压比普通的pin结VCSEL小,室温下其电致发光谱波长为1.29μm. 相似文献
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采用气态源分子束外延技术在InP(100)衬底上分别生长了δ掺杂的p+-AlIn-As-n+-InP和p+-InP-n+-InP两种隧道结结构,用电化学C-V和I-V特性曲线表征了载流子浓度和电学特性,发现p+-AlInAs-n+-InP隧道结性能优于p+-InP-n+-InP隧道结.在InP(100)衬底上生长了包含p+-AlInAs-n+-InP掩埋隧道结和多量子阱有源层的1.3μm垂直腔面发射激光器(VCSEL)结构,测试得出其开启电压比普通的pin结VCSEL小,室温下其电致发光谱波长为1.29μm. 相似文献
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应用高掺杂pn结和异质结能带理论,计算了AllnAs/InP异质隧道结的电学特性,发现其性能优于AllnAS和InP同质隧道结,并得出了掺杂浓度与隧道电流的关系曲线.采用气态源分子束外延(GSMBE)设备生长了面电阻率约为10~(-4)Ω·cm~2的AllnAs/InP异质隧道结结构,并应用于制作1.3μm垂直腔面发射激光器(VCSEL),器件在室温下脉冲激射.Abstract: By using high doping pn junction and heterojunction energy band model,electrical properties of AlInAs/InP tunnel junction are calculated.It is found that AlInAs/InP hetero-tunnel junction is superior to AlInAs or InP homo-tunnel junction,and the influence of doping level on the tunneling current is discussed.AlInAs/InP tunnel junction structures are grown by gas-source molecular-beam epitaxy (GSMBE) with the specific contact resistivity of about 10~(-4) Ω·cm~2.Then such structures are adopted in the fabrication of 1.3 μm vertical-cavity surface-emitting lasers(VCSEL). 相似文献
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为了改善垂直腔面发射半导体激光器(VCSEL)的热特性,提高器件的输出功率,设计并制作了一种新型辐射桥结构VCSEL。利用有限元热分析软件ANSYS,模拟了常规结构和辐射桥结构VCSEL内部的热场分布和热矢量分布。经模拟得到,常规结构器件的热阻为4.13K/W,辐射桥结构的热阻为2.64K/W。而经实验测得,常规结构器件的热阻为4.40K/W,辐射桥结构器件的热阻为2.93K/W,实验测试结果与模拟结果吻合较好。同时测得,常规结构器件的最大输出功率为305mW,辐射桥结构器件的最大输出功率为430mW,后者的输出功率提高了40%。 相似文献
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系统阐述了金属键合的发展概况、基本工艺和方法、表征技术及其在光电器件中的应用.金属键合制备光电器件的一般工艺流程分为三步:蒸镀金属薄膜、键合、腐蚀去除衬底,列举了常用的金属键合方法及其工艺条件;并着重论述了该技术在光电器件特别是垂直腔面发射激光器(VCSEL)器件结构制作中的应用.金属键合可以实现衬底倒扣和改善器件热学性能,而对器件原有的光学性质影响不大. 相似文献
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报道了应用于医疗器械的InP基1730nm波段半导体激光器.外延片采用低压金属有机物化学气相沉积法(MOCVD)生长,有源区为5个周期的InGaAs量子阱层和InGaAsP垒层.器件采用pnpn结限制掩埋结构,有源区脊宽2μm、腔长300μm.室温下腔面镀膜后激光器管芯的阈值电流为18±5mA,8mW输出功率时的工作电流为60±5mA.采用TO封装后,100mA工作电流下激光器的输出功率大于5mW,输出波长为1732±10nm,高温恒流加速老化筛选实验表明,器件具有长期工作的可靠性,满足实用化要求. 相似文献
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InP基长波长光发射OEIC材料的MOCVD生长 总被引:1,自引:0,他引:1
为了生长能满足器件制作所需的外延片,采用低压金属有机物化学气相沉积(LP-MOCVD)方法在半绝缘InP衬底上生长了InP/InGaAs异质结双极晶体管(HBT)结构,1.55μm多量子阱激光二极管(MQW LD)以及两者集成的光发射光电集成电路(OEIC)材料结构。激光器结构的生长温度为655℃,有源区为5个周期的InGaAsP/ InGaAsP多量子阱(阱区λ=1.6μm,垒区λ=1.28μm);HBT结构则采用550℃低温生长,其中基区采用Zn掺杂,掺杂浓度约为2×1019 cm-3。对生长的各种结构分别进行了X射线双晶衍射,光致发光谱(PL)和二次离子质谱仪(SIMS)测试,结果表明所生长的材料结构已满足制作器件的要求。 相似文献
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在普通MIM隧道发光结的基础上,制备了多层膜结构MIM发光结。这种结构的发光结含有两层氧化物绝缘层及双层MgF2。其发光性能优良,发光效率达10-6-10-5量级。测试表明,其光谱谱峰较普通MIM结有蓝移现象,并且I—V特性中存在强烈的负阻现象(NRP)。 相似文献
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Ortsiefer M. Gorblich M. Yan Xu Ronneberg E. Rosskopf J. Shau R. Amann M.-C. 《Photonics Technology Letters, IEEE》2010,22(1):15-17
We present long-wavelength InGaAlAs-InP vertical-cavity surface-emitting lasers (VCSELs) with a buried tunnel junction (BTJ) and a well-defined polarization accomplished by a semiconductor/dielectric subwavelength grating (SWG). The grating is incorporated in the inner VCSEL cavity and exhibits an effective birefringence for polarizations parallel and perpendicular to the grating grooves. Theoretical modeling leads to distinct design rules for VCSELs with grating structure that deviate from the conventional design without grating. Due to the large polarization-mode separation, lasing activity is enabled only for one polarization mode. BTJ-VCSELs with properly chosen SWG parameters show predictable and full polarization stability. In addition, the relevant device parameters such as threshold current are comparable to conventional BTJ-VCSELs. 相似文献
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E. E. Bloemhof 《Journal of Infrared, Millimeter and Terahertz Waves》1999,20(12):2003-2010
Detectors based on the superconducting-insulating-superconducting (SIS) junction long ago surpassed Schottky-diode semiconductor detectors as the most sensitive heterodyne mixers in the millimeter and submillimeter (far-infrared) wavelength range. Other novel superconducting device configurations have been applied as direct detectors. Though still in the early stages of development, and yet to find widespread application, they have demonstrated advantages over traditional semiconductor detectors in specialized situations. Exciting progress has been made in recent years in developing the superconducting tunnel junctions (STJ) as a photon detector for optical and near-optical wavelengths, where silicon CCD's are currently dominant. I examine some of the areas in which the properties of STJ detectors may best match the instrument capabilities that astronomical observations require, and discuss the implications of the intrinsic spectral resolution of the STJ. This capability will enable a significant increase in observing efficiency, once the technology matures, that should justify increased complexity of cryogenic systems, particularly for instruments to be used on the next generation of large ground-based telescopes. 相似文献
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