平面电容传感器参数优化设计及实验

平面电容传感器的性能指标由结构参数决定,如何优化结构参数使传感器达到良好的性能是传感器设计的关键.基于三维有限元仿真模型,研究了感应面积一定的条件下,电极对数、电极宽度与间距比对传感器信号强度、灵敏度及穿透深度的影响.采用神经网络方法优化结构参数,在保证穿透深度的条件下,获得较好的信号强度.研制了不同结构参数的PCB型平面电容传感器,并将其用于介电材料检测,实验结果证明了传感器参数优化测量的有效性.     

目标导体对近感电容传感器电极电容影响研究

电容传感器是利用探测电极间电容的变化来实现目标近感探测的.对两电极电容传感器,分别探讨了探测大目标导体和小目标导体时电极的自电容、互电容以及等效电容的变化趋势,结果表明,电容传感器在遇目标后,其电极间的自电容均会增大,而互电容则减少.大目标导体会导致电极间等效结构电容增大,而小目标导体的介入不会影响电极间的等效结构电容.     

边缘电场传感器测量金属衬底绝缘层厚度

针对金属衬底上的绝缘层,研究基于边缘电场传感器的厚度测量方法。位于同一平面的传感电极形成边缘场电容,边缘电场将穿透绝缘层,在衬底表面发生突变。本文用三电容模型分析了传感器的测量原理,衬底作为一个浮动电极分别与两个传感器电极构成平行极板电容,与边缘场电容共同构成传感电容。通过二维仿真讨论了电容结构参数对传感电容的影响。实验结果表明,边缘场电容传感器应用于金属衬底上的绝缘层测量时,表现出边缘场电容与平行板电容复合的特性,传感器灵敏度高。当绝缘层厚度相比电极长度较小时,电极的间距对传感器电容输出影响小。     

内置式电容层析成像系统传感器优化设计

电容层析成像系统重建图像的质量主要依赖于系统的观测矩阵,即灵敏度矩阵,灵敏度矩阵的特性又由传感器的结构参数所决定的。本文提出了采用反映灵敏度矩阵特性的条件数作为主要的电容传感器优化设计指标,结合表示传感器电极总体灵敏程度的电容变化量指标,兼顾最大、最小电容测量值满足测量范围的要求,进行综合优化设计。通过有限元方法,分析了内置式传感器电极结构参数对电容测量值和灵敏度矩阵的影响,并利用综合指标进行了优化,获得了一组内置式传感器的优化结构参数。     

双阵列式电容传感器特性研究

针对电容层析成像技术的局限性,提出了新型双阵列电容传感器。利用传感器相邻极板灵敏度不均匀的特点,通过测量相邻极板电容以获得传感器内部局部浓度,重建管道内部传感器截面的相浓度分布。建立有限元模型,对不同电极数的电容传感器结构进行分析,研究了管道介电常数、电极覆盖率等传感器参数对灵敏场不均匀度的影响,得出优化的传感器参数。实验结果显示,该方法可以有效获取传感器截面局部浓度。     

不同检测电容结构对MEMS电容传感器性能的影响分析

改进传感器检测电容几何结构能有效改善传感器的性能。本文对梳齿电极结构、栅形电极结构及梳栅电极结构检测电容的性能特点进行分析比较,重点分析了振子质量、空气阻尼、系统阻尼系数比以及灵敏度等特性,得出在相同的外轮廓尺寸、支撑梁、振子厚度以及振子到衬底的距离的条件下,栅形结构传感器的振子质量最大,空气阻尼最小,适合制作高分辨率的传感器;在大气下,梳齿结构灵敏度增加的同时空气阻尼力也会增加,且振子质量较小,适合制作高灵敏度,低分辨率传感器结构;梳栅结构的特点居于两者之间,适合制作需要兼顾分辨率和灵敏度的传感器。通过实例计算,证明了该结果。     

同面散射场电容式砂含水量传感器的研究

针对电容式砂含水量传感器的特殊结构,本文从同面散射场电容传感器的等效电容的分析出发,优化了电容极板的大小;使用有限元法分析了极板间距、极板对数以及极板结构对传感器灵敏度的影响;并对传感器的隔离板材料的介电常数选择问题进行了探讨。结果表明双电极小极板结构的普通陶瓷隔离的传感器结构尺寸小,灵敏度高。本研究对同面散射场电容式砂含水量传感器的结构参数优化有实际指导意义。     

基于有限元的电容临近传感器研究

建立了电容临近传感器的三维仿真数学模型,用FEA对不同参数的传感器进行了仿真,比较分析了被测物距离、电极宽度、电极长度间隙比等对传感器灵敏度的影响,并与理论计算进行比较,结果表明:测量系统的灵敏度与电极宽度和电极长度间隙比近似成正比,与被测物距离近似成反比.该研究对电容临近传感器的结构设计有指导意义.     

基于硅晶圆键合工艺的MEMS电容式超声传感器设计

针对目前电容超声传感器多采用表面工艺制备,存在振膜应力大、厚度均匀性控制差且表面需要沉积分立电极而造成传感器灵敏度低、归一化位移小、频率易偏差的缺点,提出基于硅晶圆键合工艺的MEMS电容超声传感器。采用应力小、厚度均匀的SOI顶层硅作为敏感单元的一体化全振微传感薄膜,无需沉积分立电极,易于加工且频率偏差小。通过下电极的区域化定义及巧妙互联,避免了非活跃区的寄生电容。通过ANSYS及MATLAB对所设计的5种工作频率在124 kHz～484 kHz之间、满足水下成像需求的传感器结构进行性能分析,表明传感器的电容变化量为650.62 fF/Pa～10.827 fF/Pa,满足现有条件的信号检测,输出电压灵敏度可达1.700 mV/Pa。与同频率指标的传统基于牺牲工艺而制备的金属-氮化膜堆栈结构对比表明,本结构频率可预测性高,偏差仅为0.0535%;振膜变形更均匀,归一化位移提高0.0432%以上;灵敏度平均提高11.9249 dB。     

基于电场感应的冰层厚度检测传感器及其系统的研究

给一个金属电极通过电阻施加交流激励,当冰或水作为电介质接近该电极时,电极周围的电场发生改变,表现为该电极与"虚地"形成的电容的改变.利用这一电场感应机理,设计了同面多电极电容式冰层厚度传感器; 利用MAXWELL软件对传感器检测机理进行了仿真,并通过实验验证了利用电场感应的方法测量冰层厚度的可行性,仿真结果和实验结果证明该方法能实现定点冰层厚度的准确测量.     

基于流固耦合模型的微超声传感器仿真分析

建立了基于流体固体耦合单元的电容式微超声传感器(cMUT)的有限元模型,通过对模型进行 声场仿真分析,研究传感器阵列在不同介质中工作时的声场特性,如,谐振频率,发射声压等;分析了传感 器振动膜半径、空腔厚度以及传感器单元间距的变化对其发射声压幅值和带宽的影响.仿真分析的结果 表明:增大传感器的发射声压带宽,可以通过增大振动膜半径、减小空腔厚度或者减小传感器阵列中单元 的距离来实现。     

Characterization of capacitive micromachined ultrasonic transducers

This paper describes numerical and experimental characterization of capacitive micromachined ultrasonic transducers (CMUTs) for ultrasound transmission. Simulations based on a finite elements method to model the electromechanical behaviour of CMUTs and to determine the dimensions of elementary cells are presented. In particular, we analyse how the collapse voltage and the capacitance are affected by different parameters of a circular cell and by different bias voltages. The fill factor is defined as the ratio of the top electrode radius to the membrane radius and we study the influence of the fill factor in the performances of CMUTs. The fabrication process of a CMUT uses anodic bonding of a SOI wafer on a borosilicate glass substrate and we compare experimental results with numerical results in terms of eigenfrequencies, bandwidth, quality factor and capacitance for non-metallized and metallized membranes.     

电容式微加工超声传感器（cMUT）的有限元仿真

介绍了电容式微加工超声传感器(cMUT)的基本结构和工作原理.同时使用有限元方法对cMUT的运行情况进行模拟.提出了两个ANSYS模型来阐述cMUT的塌陷电压与谐振频率.一个3D模型用来阐述制造过程中的残余应力对cMUT谐振频率的影响.另外一个3D模型阐述不同的运行环境对cMUT的谐振频率的影响.     

柔顺车路能量采集减速带设计与动力学建模

非线性多稳态能量采集系统模型复杂、结构参数较多,由于测量、加工、装配过程中不可避免的存在误差,这些结构参数都存在一定的不确定性.而关键参数的微小变化都可能对系统输出电压产生显著影响,特别当多不确定参数同时存在时,可能会对系统能量采集性能产生更加复杂的影响.因此,研究多不确定参数作用下非线性能量采集系统的随机行为十分必要.本文针对具有双不确定参数的双稳态能量采集系统,首先,利用Routh Hurwitz定理分析了确定性双稳态系统平衡点的稳定性及其静态分岔特性;继而,借助正交多项式逼近法,将具有两个相互独立的不确定机电耦合系数的随机双稳态系统转化为等价确定性扩阶系统,使系统的随机响应问题转换为等价系统的响应问题;之后,从全局和局部两个角度出发,通过等价系统与确定性系统吸引子、吸引域、相轨、均方电压以及能量转化率的对比,揭示了不确定参数对系统动力学行为和发电性能的影响.结果表明,在一些敏感的参数区间内,两机电耦合系数的不确定性均会导致系统运动状态发生变化,且不确定参数强度越大,系统会越早通过倍周期分岔级联进入混沌状态;此外,在两机电耦合系数的不确定性作用下,系统均方电压均会出现一定程度的降低;且与电方程中机电耦合系数相比,机械方程中机电耦合系数对系统的影响更显著,当两不确定参数共同作用时,系统的能量采集性能变化更显著.     

Collapse voltage analysis of central annular ring metallized membrane based MEMS micromachined ultrasonic transducer

In this paper we have explored central annular ring metallized capacitive micromachined ultrasonic transducer (CMUT) structure. The metallization is done partially and it is patterned in such a way that it forms a flat ring on the surface of the membrane. This will decrease the price of the device as the need of metallization is less. Moreover, it is seen that the maximum displacement that the membrane can attain just before collapsing does not change even for partial metallization. It is perceived that with decreasing the area of the electrode the collapse voltage increases and vice versa. Changing the gap height has a huge impact on the collapse voltage. We have also examined the effect of different membrane materials on collapse voltage. Changing the membrane thickness hardly affects the value of collapse voltage. The electrode thickness is infinitesimally small as compared to the membrane thickness and is neglected in the analytical modeling approach. The analytical results are compared with three-dimensional (3-D) finite element method (FEM) model results. Excellent agreements between them are observed.

     

Detailed investigation of capacitive micromachined ultrasonic transducer design space

In this study, we present general design guidelines for MEMS ultrasonic transducers, capacitive micromachined ultrasonic transducers (CMUTs), obtained from finite element models with a statistical design of experiment approach. The design space is illustrated using 2-D response surfaces as a function of various geometrical parameters and material selections. Important transducer figure of merits such as operation frequency, fractional bandwidth, collapse voltage and transformer ratio are investigated. Our study illustrates that while keeping geometrical parameters constant, changing the material selection to silicon carbide from silicon dioxide results in a 2.4 times increase in the transformer ratio, and more than 2.5 times increase in the operating frequency while keeping the bandwidth the same. Furthermore, our studies indicate that for a CMUT membrane with an aspect ratio of 4, using a spring constant value obtained analytically results in an error of 160% for the collapse voltage and transformer ratio values.     

Effect of electrode size and silicon residue on piezoelectric thin-film membrane actuators

Piezoelectric micro-electromechanical systems (MEMS) often adopt a membrane structure to facilitate sensing or actuation. Design parameters, such as membrane size, thickness of the piezoelectric thin film, and electrode types, have been studied to maximize actuation, sensitivity, or coupling coefficient. This paper is to demonstrate numerically and experimentally that the size of silicon residue and its relative size to the top electrode are two critical yet unrecognized parameters in maximizing the actuation displacement of PZT thin-film membrane actuators. To study effects of the silicon residue, we have developed a finite element model using ANSYS. The model consists of five components: a square passive silicon membrane, a silicon substrate, a PZT thin film, a square top electrode, and a silicon residue region. In particular, the silicon residue has a circular inner diameter and a square outer perimeter with a trapezoidal cross section. Predictions of the finite element model lead to several major results. First, when the silicon residue is present, there exists an optimal size of the top electrode maximizing the actuator displacement. Second, the optimal electrode size is roughly 50–60% of the inner diameters of the silicon residue. The displacement of the membrane actuator declines significantly as the electrode overlaps with the silicon residue. Third, the maximal actuator displacement decreases as the inner diameter of the silicon residue decreases. Aside from the finite element analysis, a mechanics-of-material model is also developed to predict the electrode size that maximizes the actuator displacement. To verify the simulation results, eight PZT thin-film membrane actuators with progressive electrode sizes are fabricated. These actuators all have a square membrane of 800 μm × 800 μm with the inner diameter of the silicon residue controlled between 500 and 750 μm. A laser Doppler vibrometer is used to measure the actuator displacements. The experimental measurements confirm that there exists an optimal size of the top electrode maximizing the actuator displacement.     

钟形振子式角速率陀螺机电耦合特性分析

钟形振子作为钟形振子式角速率陀螺的核心敏感元件,其机电耦合特性将直接影响钟形振子式角速率陀螺的整体性能.针对钟形振子式角速率陀螺在设计制作过程中未涉及的机电耦合特性展开分析,提出利用弹性力学中的能量原理和拉格朗日方法建立钟形振子机电耦合模型的方法,解决了钟形振子驱动与检测间的多场建模问题,实现了钟形振子的机电耦合关系的线性表征.首先通过分析压电驱动与检测原理,通过坐标变换给出压电电极在钟形振子作用的压电势能表述;利用弹性力学中的能量原理和拉格朗日方法建立钟形振子的机电耦合模型,分析压电电极与钟形振子特性间的关系,确定钟形振子的压电电极参数.最后通过试验手段,验证分析结果的正确性和可用性.     

Performance enhancement of a piezoelectric linear array transducer by half-concave geometric design

A geometric design for array elements of a piezoelectric linear array transducer is proposed and evaluated. The design concept is based on the half-concave geometry, in which the radiating surface is concave while the other surface remains plane. A ∼1.8 MHz piezoelectric linear array transducer with half-concave elements has been designed, fabricated and evaluated. A dicing method was developed to shape the concave surfaces of the piezo elements and matching layers. By comparing the transducer performance, a traditional linear array transducer with similar dimension has been fabricated. It was found that the half-concave array transducer has significantly broader −6 dB bandwidth (96%), higher effective electromechanical coupling coefficient (0.62), and lower insertion loss (−21 dB) compared to those (76%, 0.55, and −25 dB, respectively) of the plane array transducer. The enhanced coupling coefficient and bandwidth are caused by the broaden resonance of the elements, which is induced by the continuously varying thickness in the designed geometry. The increased sensitivity is mainly attributed to the focused radiating surface.     

一种高频宽带水声换能器的研制

研制了一种宽带、高频压电复合材料圆环阵水声换能器.该换能器的宽带结果是通过采用降低压电材料机械品质因数Qm值和多模耦合振动两种方法实现的.通过径向切割压电陶瓷圆环、灌注环氧树脂得到压电复合材料圆环,再将不同壁厚的压电复合材料圆环轴向叠堆而成敏感元件,对敏感元件进行模具封装,引出电极引线,得到换能器.利用ANSYS软件对结构进行仿真,得到敏感元件谐振频率和带宽随压电陶瓷圆环厚度、高度和平均半径的变化规律,并根据仿真结果确定了换能器敏感元件的最优设计方案.将由最优参数得到的两个压电复合材料圆环轴向叠堆,制作了双圆环叠堆复合材料换能器.经测试,该换能器形成了明显的双模耦合振动,该换能器谐振频率为375 kHz,其-3 dBd工作带宽为90 kHz,最大发送电压响应达148 dB.实现了换能器的高频、宽带、水平全向发射声波的设计目标.