Experimental determination of light-element k-factors using the extrapolation technique: Oxygen segregation in aluminium nitride

It is shown that quantitative light-element (Z < 10) analysis and κ-factor determination of light elements can be routinely conducted, analogous to quantification of elements with Z >, using X-ray energy-dispersive spectroscopy. The extrapolation technique was used to determine the κ-factors, κ_OAI = 0.88 ± 0.10 and κ_NAI = 1.61 ±0.22 at zero thickness. These values are found to be in good agreement with theoretically calculated κ-factors. The limitations and applicability of the extrapolation technique for light-element analyses are discussed. An example of light-element quantification is provided in the analysis of oxygen segregation to inversion domain boundaries in aluminium nitride.