Underlap channel metal source/drain SOI MOSFET for thermally efficient low-power mixed-signal circuits

In this paper it has been shown that employing an underlap channel created by varying the lateral doping straggle in dopant-segregated Schottky barrier SOI MOSFET not only improves the scalability but also suppresses the self-heating effect of this device. Although in strong inversion region the reduced effective gate voltage due to voltage drop across the underlap lengths reduces the drive current, in weak/moderate inversion region defined at I_D=5 μA/μm and V_DS=0.5 V the analog figures of merit such as transconductance, transconductance generation factor and intrinsic gain of the proposed underlap device are improved by 15%, 35% and 20%, respectively over the conventional overlap channel structure. In addition to this, at V_DD=0.5 V the gain-bandwidth product in a common-source amplifier based on proposed underlap device is improved by ～20% over an amplifier based on the conventional overlap channel device. The mixed-mode device/circuit simulation results of CMOS inverter, NAND and the NOR gates based on these devices also show that at V_DD=0.5 V the switching energy, static power dissipation and the propagation delay in the case of proposed underlap device are reduced by ～10%, ～35% and ～25%, respectively, over the conventional overlap device. Thus, significant improvement in analog figures of merit and the reduction in digital design metrics at lower supply voltage show the suitability of the proposed underlap device for low-power mixed-signal circuits.     

A resistive-feedback LNA in 65 nm CMOS with a gate inductor for bandwidth extension

In order to get a wideband and flat gain, a resistive-feedback LNA using a gate inductor to extend bandwidth is proposed in this paper. This LNA is based on an improved resistive-feedback topology with a source follower feedback to match input. A relative small inductor is connected in series to transistor׳s gate, which boosts transistor׳s effective transconductance, compensates gain loss and then leads the proposed LNA with a flat gain and wider bandwidth. Moreover, the LNA׳s noise is partially inhibited by the gate inductor, especially at high frequency. Realized in standard 65-nm CMOS process, this LNA dissipates 12 mW from a 1.5-V supply while its core area is 0.076 mm². Across 0.4–10.6 GHz band, the proposed LNA provides 9.5±0.9 dB power gain (S₂₁), better than −11-dB input matching, 3.5-dB minimum noise figure, and higher than −17.2-dBm P_1 dB.     

In situ modification of low-cost Cu electrodes for high-performance low-voltage pentacene thin film transistors (TFTs)

We demonstrate low-voltage pentacene thin film transistors (TFTs) using in situ modified low-cost Cu (M-Cu) as source–drain (S/D) electrodes and solution-processed high capacitance (200 nF/cm²) gate dielectrics. Under a gate voltage of ?3 V, the device with M-Cu electrodes shows a much higher apparent mobility (1.0 cm²/V s), a positively shifted threshold voltage (?0.62 V), a lower contact resistance (0.11 MΩ) and a larger transconductance (12 μS) as compared to the device with conventional Au electrodes (corresponding parameters are 0.71 cm²/V s, ?1.44 V, 0.41 MΩ, and 5.7 μS, respectively). The enhancement in the device performance is attributed to the optimized interface properties between S/D electrodes and pentacene. Moreover, after encapsulation the M-Cu electrodes with a thin layer of Au in the aim of suppressing unfavorable surface oxidation, the electronic characteristics of the device are further improved, and highly enhanced apparent mobility (2.3 cm²/V s) and transconductance (19 μS) can be achieved arising from the increased conductivity of the electrode itself. Our study provides a simple and feasible approach to achieve high performance low-voltage OTFTs with low-cost S/D electrodes, which is desirable for large area applications.     

Impact of gate metal work-function engineering for enhancement of subthreshold analog/RF performance of underlap dual material gate DG-FET

This work presents a systematic comparative study of analog/RF performance for underlap dual material gate (U-DMG) DG NMOSFET. In previous works, improved device performances have been achieved by use of high dielectric constant (k) spacer material. Although high-k spacers improve device performance, the intrinsic gain of the device reduces. For the analog circuits applications intrinsic gain is an important parameter. Hence, an optimized spacer material having dielectric constant, k = 7.5 has been used in this study and the gain is improved further by dual-material gate (DMG) technology. In this paper we have also studied the effect of gate material having different work function on the U-DMG DG NMOSFETs. This device exploits a step function type channel potential created by DMG for performance improvement. Different parameters such as the transconductance (g_m), the gain per unit current (g_m/I_ds), the intrinsic gain (g_mR_o), the intrinsic capacitance, the intrinsic resistance, the transport delay and, the inductance of the device have been analyzed for analog and RF performance analysis. Analysis suggested that the average intrinsic gain, g_m/I_d and g_m are increase by 22.988%, 16.10% and 27.871% respectively compared to the underlap single-material gate U-DG NMOSFET.     

Effect of Halo structure variations on the threshold voltage of a 22 nm gate length NMOS transistor

This paper reports on the effects of the Halo structure variations on threshold voltage (V_th) in a 22 nm gate length high-k/metal gate planar NMOS transistor. Since the V_th is one of the important physical parameter for determining the functionality of complementary metal-oxide–semiconductor device, this experiment will focus on finding the best combination on process parameter to achieve the best value of V_th. The Halo structure variable process parameters are the Halo implantation dose, the Halo implantation tilting angle, the Source/Drain implantation dose and the compensation implantation dose. The design of the planar device consists of a combination of high permittivity material (high-k) and a metal gate. Titanium dioxide was used as the high-k material instead of the traditional SiO₂ dielectric and tungsten silicide was used as the metal gate. The optimization process was executed using Taguchi's L₉ array to obtain a robust design. Taguchi's Nominal-the-Best signal-to-noise ratio was used in an effort to minimize the variance of V_th. The results show that the V_th values have least variance and the mean value can be adjusted to 0.289 V±12.7% which is in line with projections made by the International Technology Roadmap for Semiconductors.     

Self-aligned inversion n-channel In0.2Ga0.8As/GaAs metal–oxide–semiconductor field-effect-transistors with TiN gate and Ga2O3(Gd2O3) dielectric

A self-aligned process for fabricating inversion n-channel metal–oxide–semiconductor field-effect-transistors (MOSFET’s) of strained In_0.2Ga_0.8As on GaAs using TiN as gate metal and Ga₂O₃(Gd₂O₃) as high κ gate dielectric has been developed. A MOSFET with a 4 μm gate length and a 100 μm gate width exhibits a drain current of 1.5 mA/mm at V_g = 4 V and V_d = 2 V, a low gate leakage of <10^?7 A/cm² at 1 MV/cm, an extrinsic transconductance of 1.7 mS/mm at V_g = 3 V, V_d = 2 V, and an on/off ratio of ～10⁵ in drain current. For comparison, a TiN/Ga₂O₃(Gd₂O₃)/In_0.2Ga_0.8As MOS diode after rapid thermal annealing (RTA) to high temperatures of 750 °C exhibits excellent electrical and structural performances: a low leakage current density of 10^?8–10^?9 A/cm², well-behaved capacitance–voltage (C–V) characteristics giving a high dielectric constant of ～16 and a low interfacial density of state of ～(2～6) × 10¹¹ cm^?2 eV^?1, and an atomically sharp smooth Ga₂O₃(Gd₂O₃)/In_0.2Ga_0.8As interface.     

Gain improvement and microwave operation of 4H–SiC MESFET with a new recessed metal ring structure

A new multi-recessed 4H-SiC MESFET with recessed metal ring for RF embedded circuits is proposed (MR2-MESFET). The key idea in the proposed structure is based on the elimination of the spaces adjacent to gate and stopped the depletion region extending towards drain and source and the reduction of the channel thickness between gate and drain to increase breakdown voltage (V_BR); meanwhile the elimination of the gate depletion layer extension to source/drain to decrease gate-source capacitance (C_gs). The influence of multi-recessed drift region and recessed metal ring structures on the characteristics of the MR2-MESFET is studied by numerical simulation. The optimized results show that the V_BR of the MR2-MESFET is 119% larger than that of the conventional 4H–SiC MESFET (C-MESFET); meanwhile maintain 85% higher saturation drain current. Therefore, the maximum output power density of the MR2-MESFET is 23.1 W/mm compared to 5.5 W/mm of the C-MESFET. Also, the cut-off frequency (f_T) and the maximum oscillation frequency (f_max) of 24.9 and 91.7 GHz are obtained for the MR2-MESFET compared to 11 and 40 GHz of the C-MESFET structure, respectively. The proposed MR2-MESFET shows a maximum stable gain (MSG) exceeding 23.6 dB at 3.1 GHz which is the highest gain yet reported for SiC MESFETs, showing the potential of this device for high power RF applications.     

The role of water in the device performance of n-type PTCDI-C8 organic field-effect transistors with solution-based gelatin dielectric

Gelatin is a natural protein, which works well as the gate dielectric for N,N-dioctyl-3,4,9,10-perylene tetracarboxylic diimide (PTCDI-C₈) organic field-effect transistors (OFETs). An aqueous solution process was applied to form the gelatin gate dielectric on poly(ethylene terephthalate) (PET) by spin-coating and subsequent casting. The field-effect mobility in the saturation regime (μ_FE,sat) and the threshold voltage (V_T) values of a typical 40 nm PTCDI-C₈ OFET are (0.22 cm² V⁻¹ s⁻¹, 55 V) in vacuum and (0.74 cm² V⁻¹ s⁻¹, 2.6 V) in air ambient. The maximum voltage shift in hysteresis is also reduced from 10 V to 2 V when the operation environment for PTCDI-C₈ OFETs is changed from vacuum to air ambient. Nevertheless, a slight reduction of electron mobility was found when the device was stressed in the air ambient. The change in the device performance has been attributed to the charged ions generation owing to water absorption in gelatin in air ambient.     

Dependence of annealing on stability of transparent amorphous InGaZnO thin film transistor

Bottom-gate transparent IGZO–TFT had been successfully fabricated at relatively low temperature (200 °C). The devices annealing for 4 h at 200 °C exhibit good electrical properties with saturation mobility of 8.2 cm²V^?1s^?1, subthreshold swing of 1.0 V/dec and on/off current ratio of 5×10⁶. The results revealed that the stability of TFT devices can be improved remarkably by post-annealing treatment. After applying positive gate bias stress of 20 V for 5000 s, the device annealing for 1 h shows a larger positive V_th shift of 4.7 V. However, the device annealing for 4 h exhibits a much smaller V_th shift of 0.04 V and more stable.     

Operational frequency degradation induced trapping in scaled GaN HEMTs

Cut-off frequency increase from 12.1 GHz to 26.4 GHz, 52.1 GHz and 91.4 GHz is observed when the 1 μm gate length GaN HEMT is laterally scaled down to L_G = 0.5 μm, L_G = 0.25 μm and L_G = 0.125 μm, respectively. The study is based on accurately calibrated transfer characteristics (I_D-V_GS) of the 1 μm gate length device using Silvaco TCAD. If the scaling is also performed horizontally, proportionally to the lateral (full scaling), the maximum drain current is reduced by 38.2% when the gate-to-channel separation scales from 33 nm to 8.25 nm. Degradation of the RF performance of a GaN HEMT due to the electric field induced acceptor traps experienced under a high electrical stress is found to be about 8% for 1 μm gate length device. The degradation of scaled HEMTs reduces to 3.5% and 7.3% for the 0.25 μm and 0.125 gate length devices, respectively. The traps at energy level of E_T = E_V + 0.9 eV (carbon) with concentrations of N_IT = 5 × 10¹⁶cm^− 3, N_IT = 5 × 10¹⁷cm^− 3 and N_IT = 5 × 10¹⁸cm^− 3 are located in the drain access region where highest electrical field is expected. The effect of traps on the cut-off frequency is reduced for devices with shorter gate lengths down to 0.125 μm.     

Investigation on the thermal behavior of 0.15 μm gate-length In0.4Al0.6As/In0.4Ga0.6As MHEMT

In this study, we have successfully investigated the electrical performances of In_0.4Al_0.6As/In_0.4Ga_0.6As metamorphic high-electron-mobility transistor (MHEMT) at temperatures range from 275 K to 500 K comprehensively. By extracting the device S-parameters, the temperature dependent small signal model has been established. At room temperature, 0.15 μm T-gate device with double δ-doping design exhibits f_T and f_MAX values of 103 GHz and 204 GHz at V_ds = 1 V, an extrinsic transconductance of 678 mS/mm, and a current density of 578 mA/mm associated with a high breakdown voltage of ?13 V. Power measurements were evaluated at 40 GHz and the measured output power, linear power gain, and maximum power-added efficiency, were 7.12 dBm, 10.15 dB, and 23.1%, respectively. The activation energy (E_a) extracted from Arrhenius plots is = 0.34 eV at 150 ≦ T ≦ 350 K. The proposed device is promisingly suitable for millimeter-wave power application.     

Electrical properties and barrier modification of GaAs MIS Schottky device based on MEH-PPV organic interfacial layer

We report fabrication and electrical characterization of GaAs based metal-interfacial layer-semiconductor (MIS) device with poly[2-methoxy-5-(2^/-ethyl-hexyloxy)-1,4-phenylene vinylene] (MEH-PPV), as an interfacial layer. MEH-PPV raises the barrier height in Al/MEH-PPV/p-GaAs MIS device as high as to 0.87 eV. A Capacitance-Voltage (C–V) characteristic exhibits a low hysteresis voltage with an interface states density of 1.69×10¹¹ cm⁻² eV⁻¹. Moreover, a high transition frequency (f_c) of about 50 kHz was observed in the accumulation mode. The photovoltaic response of Al/MEH-PPV/p-GaAs device was measured under the air masses (AM) 1.0 and 1.5. The open circuit voltage (V_OC), short circuit current (I_SC), fill factor and the efficiency of the Al/MEH-PPV/p-GaAs device were found to be 1.10 V, 0.52 mA, 0.65, and 5.92%, respectively, under AM 1.0 condition.     

HCS degradation of 5 nm oxide high-voltage PLDMOS

Hot carrier (HC) injection, inducing drain and gate leakage current increase in 5 nm oxide p-channel LDMOS transistors, is investigated. Devices with two different drain implants are studied. At low gate voltage (V_GS) and high drain voltage (V_DS), reduction of the ON-resistance (R_ON) is observed. At stress times at which R_ON almost reaches its constant level, an increase of the drain leakage in OFF state (V_DS = −60 V, V_GS = 0 V) is observed. Longer stress time leads to increased gate leakage and in some cases oxide breakdown. In contrast to what was reported for devices with 25 nm gate oxide thickness, the threshold voltage of 5 nm gate oxide PLDMOS transistors does not drift. The experimental data can be fully explained by hot carrier injection and the oxide damage can be explained by two different and competing degradation mechanisms. By combining experimental data and TCAD simulations we are further capable to locate the hot spot of maximum oxide damage in the accumulation (Acc) region of the PLDMOS.     

Analysis of nanometer-scale InGaAs/InAs/InGaAs composite channel MOSFETs using high-K dielectrics for high speed applications

The outstanding electron transport properties of InGaAs and InAs semiconductor materials, makes them attractive candidates for future nano-scale CMOS. In this paper, the ON state and OFF state performance of 30 nm gate length InGaAs/InAs/InGaAs buried composite channel MOSFETs using various high-K dielectric materials is analyzed using Synopsys TCAD tool. The device features a composite channel to enhance the mobility, an InP spacer layer to minimize the defect density and a heavily doped multilayer cap. The simulation results show that MOSFETs with Al₂O₃/ZrO₂ bilayer gate oxide exhibits higher gm/I_D ratio and lower sub threshold swing than with the other dielectric materials. The measured values of threshold voltage (V_T), on resistance (R_ON) and DIBL for Lg = 30 nm In_0.53Ga_0.47As/InAs/In_0.53Ga_0.47As composite channel MOSFET having Al₂O₃/ZrO₂ (EOT = 1.2 nm) bilayer dielectric as gate oxide are 0.17 V, 290 Ω-µm, and 65 mV/V respectively. The device displays a transconductance of 2 mS/µm.     

Drivability improvement in Schottky barrier source/drain MOSFETs with strained-Si channel by Schottky barrier height reduction

Due to an extra barrier between source and channel, the drivability of Schottky barrier source/drain MOSFETs (SBMOSFETs) is smaller than that of conventional transistors. To reach the drivability comparable to the conventional MOSFET, the Schottky barrier height (SBH) should be lower than a critical value. It is expected that SBH can be effectively reduced by a bi-axially strain on Si. In this letter, p-channel MOSFETs with PtSi Schottky barrier source/drain, HfAlO gate dielectric, HfN/TaN metal gate and strained-Si channel are demonstrated for the first time using a simplified low temperature process. Devices with the channel length of 4 μm have the drain current of 9.5 μA/μm and the transconductance of 14 μS/μm at V_gs − V_th = V_ds = −1 V. Compared to the cubic Si counterpart, the drain current and the transconductance are improved up to 2.7 and 3.1 times respectively. The improvement is believed to arising from the reduced barrier height of the PtSi/strained-Si contact and the enhanced hole mobility in the strained-Si channel.     

Investigation and comparison of analog figures-of-merit for TFET and FinFET considering work-function variation

This paper investigates and compares the impacts of metal-gate work-function variation on important analog figures-of-merit (FOMs) for TFET and FinFET devices using 3-D atomistic TCAD simulations. Our study indicates that, at 0.6 V supply voltage and 0.2 V gate-voltage overdrive, TFET exhibits superior variation immunity regarding transconductance to drain–current ratio (g_m/I_DS), output resistance (R_out) and intrinsic gain, and comparable variability in g_m and cutoff frequency (f_T) as compared with the FinFET counterparts. In addition, how the correlations between pertinent parameters (e.g., g_m and R_out) impact the variation immunity of important analog FOMs are analyzed. Our study may provide insights for low-voltage analog design using TFET/FinFET technologies.     

Novel GaAs enhancement-mode/depletion-mode pHEMTs technology using high-k praseodymium oxide interlayer

In this study, a novel metal–semiconductor gate enhancement-mode (E-mode) and a metal–insulator-metal–semiconductor (MIMS) gate depletion-mode (D-mode) AlGaAs/InGaAs pseudomorphic high electron mobility transistor (pHEMT) on a single GaAs substrate have been developed by using high dielectric constant praseodymium insulator layer. The epitaxial layers were design for an enhancement-mode pHEMT after gate recess process. To achieve E/D-mode pHEMTs on single GaAs wafer, traditional Pt/Ti/Au metals were deposited as Schottky contact for E-mode pHEMTs and Pr/Pr₂O₃/Ti/Au were deposited as MIMS-gate for D-mode pHEMTs. This AlGaAs/InGaAs E-mode pHEMTs exhibit a gate turn-on voltage (V_ON) of +1 V and a gate-to-drain breakdown voltage of ?5.6 V, and these values were +7 V and ?34 V for MIMS-gate D-mode pHEMTs, respectively. Therefore, this high-k insulator in D-mode pHEMT is beneficial for suppressing the gate leakage current. Comparing to previous E/D-mode pHEMT technology, this E-mode pHEMTs and MIMS-gate D-mode pHEMTs exhibit a highly potential for high uniformity GaAs logic circuit applications due to its single recess process.     

High performance electric-double-layer amorphous IGZO thin-film transistors gated with hydrated bovine serum albumin protein

Device performance of amorphous indium gallium zinc oxide (a-IGZO) thin film transistors (TFTs) has been improved greatly by using bovine serum albumin (BSA) as the top gate dielectric. BSA is a natural protein with acidic and basic amino acid residues, which is easily hydrated in air ambient. A typical a-IGZO TFT with hydrated BSA as the top gate dielectric exhibits a field-effect mobility (μ_FE) value of 113.5 cm² V⁻¹ s⁻¹ in saturation regime and a threshold voltage (V_TH) value of 0.25 V in air ambient. The excellent device performance can be well explained by the formation of electric double layers (EDLs) near the interfaces of a-IGZO/hydrated BSA and hydrated BSA/gate electrode. The reliability issue of a-IGZO TFTs gated with hydrated BSA has been also investigated by using the life time test without encapsulation. The V_TH value increases and μ_FE,sat value reduces slightly for the a-IGZO TFT and remain stabilized over 60 days.     

A high-yield vacuum-evaporation-based R2R-compatible fabrication route for organic electronic circuits

Advances are described in a vacuum-evaporation-based approach for the roll-to-roll (R2R) production of organic thin film transistors (TFTs) and circuits. Results from 90-transistor arrays formed directly onto a plasma-polymerised diacrylate gate dielectric are compared with those formed on polystyrene-buffered diacrylate. The latter approach resulted in stable, reproducible transistors with yields in excess of 90%. The resulting TFTs had low turn-on voltage, on–off ratios ∼10⁶ and mobility ∼1 cm²/V s in the linear regime, as expected for dinaphtho[2,3-b:2′,3′-f] thieno[3,2-b]thiophene the air stable small molecule used as the active semiconductor. We show that when device design is constrained by the generally poor registration ability of R2R processes, parasitic source–drain currents can lead to a >50% increase in the mobility extracted from the resulting TFTs, the increases being especially marked in low channel width devices. Batches of 27 saturated-load inverters were fabricated with 100% yield and their behaviour successfully reproduced using TFT parameters extracted with Silvaco’s UOTFT Model. 5- and 7-stage ring oscillator (RO) outputs ranged from ∼120 Hz to >2 kHz with rail voltages, V_DD, increasing from −15 V to −90 V. From simulations an order of magnitude increase in frequency could be expected by reducing parasitic gate capacitances. During 8 h of continuous operation at V_DD = −60 V, the frequency of a 7-stage RO remained almost constant at ∼1.4 kHz albeit that the output signal amplitude decreased from ∼22 V to ∼10 V. Over the next 30 days of intermittent operation further degradation in performance occurred although an unused RO showed no deterioration over the same period.     

Scaling down of organic complementary logic gates for compact logic on foil

In this work, we realize complementary circuits with organic p-type and n-type transistor integrated on polyethylene naphthalate (PEN) foil. We employ evaporated p-type and n-type organic semiconductors spaced side by side in bottom-contact bottom-gate coplanar structures with channel lengths of 5 μm. The area density is 0.08 mm² per complementary logic gate. Both p-type and n-type transistors show mobilities >0.1 cm²/V s with V_on close to zero volt. Small circuits like inverters and 19-stage ring oscillators (RO) are fabricated to study the static and the dynamic performance of the logic inverter gate. The circuits operate at V_dd as low as 2.5 V and the inverter stage delay at V_dd = 10 V is as low as 2 μs. Finally, an 8 bit organic complementary transponder chip with data rate up to 2.7 k bits/s is fabricated on foil by successfully integrating 358 transistors.