基于激光干涉仪的角度测量技术

介绍了一种基于激光干涉技术的精密角度测量系统 ,该系统利用干涉仪在几何量测量中的干涉测量技术 ,以激光作为干涉光源 ,迈克尔逊干涉仪作为干涉测量装置 ,通过角度转换装置将角度量转换为可以反映干涉光路中光程差变化的线位移量 ,由此引起干涉条纹的变化 ,再通过相应电路对干涉条纹进行一系列处理 ,从而实现了对大转角的精密测量。与以往类似系统相比 ,该系统具有结构简单、误差恒定、测量精度高、测角范围大、易于数字化等特点     

基于PSD的长跨度孔系同轴度误差测量系统

以激光作为准直基准,研制了基于位置敏感探测器(PSD)的长跨度孔系同轴度误差测量系统。多功能测头在孔系内通过自定心机构确定各被测截面,测头前端的PSD检测激光光斑位置以确定各孔截面中心坐标,并进而评定出孔系同轴度误差。推导出激光自准直数学模型,根据该模型由四自由度工作台调整激光器位置,实现了激光自准直。使用本测量系统完成了激光自准直实验和孔系同轴度误差测量实验。实验结果表明:经准直后激光束与工件两端孔中心连线之间的偏差在±0.032 mm以内,与三坐标测量机相比,本系统同轴度误差测量的相对误差为8%,具备了较高的准直精度和同轴度误差测量精度。     

空间测量定位系统测角不确定度分析及检定

空间测量定位系统是一种基于旋转激光平面进行角度交汇定位的新型网络式测量系统。为了对该系统进行严格的量值溯源,建立了测角模型,对系统单站测角不确定度进行了分析与验证。首先根据系统测量原理,推导出单站水平角和垂直角计算公式。然后在系统误差传递特性基础上,分析了测角模型中误差项的来源及影响,并对单站测角不确定度进行了估计。最后采用DFT-720A型号手动分度台作为角度基准,利用多面棱体和平行光管调整同轴度,对系统单站的水平测角不确定度进行了检定,分析了实验调整误差对检定结果的影响,实验结果表明该系统水平测角不确定度为2.4″(置信概率为99.73%),是实现高精密坐标测量的基础。     

基于LabVIEW的激光双频外差干涉纳米位移测量系统

工业的发展对位置测量精度提出了越来越高的要求。测量外差干涉仪由于其自身测量范围广、测量速度高、稳定性好、分辨率高的特点,在纳米测量领域中得到广泛的应用。提出了一种基于LabVIEW的外差干涉纳米位移测量系统,该系统采用外差干涉仪作为位置检测单元,利用LabVIEW图形化编程语言开发了纳米精度位移测量系统。该系统可广泛应用于纳米计量和超精密测量领域。     

高精度标准单晶硅球直径测量系统的研究

为建立我国高准确度固体密度基准和质量自然基准,对高精度标准单晶硅球直径测量系统进行了研究.论述了平面波前激光干涉法测量直径的原理和方法,分析了相移扫描、温度测量控制、以及硅球体积计算等系统的关键组成部分,并给出了各部分的实验结果.理论分析和实验结果表明,整个直径测量系统目前的不确定度为3 nm.     

激光干涉光刻工艺开发与应用研究

成功开发出以劳厄干涉为基础的激光干涉光刻系统与工艺,该工艺可在大面积范围内加工二维周期性图形,非常适合于生产光电子器件和微电子器件的周期性结构。通过实验研究了使用该工艺加工表面纳米结构的流程,对比了几种光刻胶在该工艺中的性能特点。该工艺不需要掩模、昂贵的短波长光源和成像透镜。初步实验结果表明:该工艺可以生产大面积亚微米周期的光栅、点阵以及锥形结构,为激光干涉光刻加工纳米结构的后续工作奠定了基础。     

基于全光纤Mach-Zehnder干涉仪的温度测量系统

设计了一种可测量小范围温度扰动的全光纤M ach-Zehnder干涉测量系统。简单介绍了全光纤M ach-Zehnder干涉仪的基本结构和工作原理,并推导了干涉条纹移动距离与测量臂长度变化之间的关系式;在理论分析的基础上,搭建了一全光纤M ach-Zehnder干涉仪系统,通过在有标识刻线的接收屏上直接观察测量干涉条纹的移动距离来确定测量臂光纤的温度变化,最终,确定了测量臂光纤加热温度和干涉条纹移动距离之间的关系;通过实验结果分析可知,该干涉系统可实现小范围温度扰动的准确测量,测量精度可达到℃/18。     

光纤激光水听器消偏振衰落技术研究

针对光纤激光传感器信号解调过程中干涉仪输出干涉条纹可见度受输入光偏振态变化和两臂单模光纤双折射效应的影响,介绍了一种简单的光纤干涉仪消除偏振衰落技术,通过在M ichelson光纤干涉仪上加2个法拉第旋转镜来提高输出条纹可见度。使用琼斯矩阵法对干涉仪系统进行理论计算,证明法拉第旋转镜旋转角度在理想的45°附近时能达到很好的消偏振衰落效果,并通过实验进行了有效的验证。     

高精度单频激光干涉仪的设计与试验研究

提出了一种光学8倍频的耦合差动式干涉光路,其结构设计简洁紧凑,光路布局对称性好,光程差倍增,符合阿贝原则和结构变形最小原则。对系统精度在理论分析的基础上进行了估算,得出了在10mm范围内干涉仪综合精度的理论值约为±1．8nm。采用与电容测微仪比对的方法对该系统进行检测,利用线性回归的方法对测量结果进行处理。试验结果表明：该干涉测量系统的精度约为14nm。     

空间大地测量新技术及应用

随着空间及卫星定位技术的飞速发展,各种空间定位技术及应用也愈来愈多.本文简要介绍了甚长基线干涉测量(VLBI)技术、激光测月(LLR)技术、卫星激光测距(SLR)技术、卫星雷达测高技术、多普勒定轨和无线电定位系统(DORIS)、精密测距及其变率测量系统(PRARE),以及合成孔径雷达干涉测量(InSAR)等空间定位测量技术,重点阐述了GPS新技术及应用.     

混联复合机床转台定位精度的激光测量与补偿

传统的数控机床进给轴定位精度的检测方法,存在精度低、方法落后、检验重复性差等缺点。因此,采用目前国际先进的激光干涉法检测混联复合机床转台的定位精度,以评价和提高其精度。对干涉仪的测量原理、测量方法和数据处理进行了分析,认为空气折射率是干涉仪应用中的主要误差来源,并分析了其原因和补偿方法。最后,给出了基于激光干涉仪的机床定位精度检测和补偿方案。     

基于激光干涉技术的大尺寸绝对测量方法的研究

大型工件在制造过程中,面临着各式各样的检测任务,大尺寸测量技术成为现代测试技术的一个越来越重要的分支,为提高大尺寸工件静态几何量的检测精度,将激光干涉仪与传统测长机相结合,提出两种基于激光干涉技术的大尺寸高精度的绝对测量方法.通过对两种测量方法的不确定度理论分析和实验比对,验证方法的准确度和可行性.一方面激光干涉仪传统的动态测量转换为高精度的静态量检测,拓展了激光干涉仪的应用领域,同时弥补了测长机在绝对测量能力方面的不足,提高了测长机的测量精度和检测效率.     

Head–disk spacing measurement based on Michelson interferometry using white light illumination

Head–disk spacing of hard disk drives was measured based on Michelson interferometry using white light illumination. This method utilizes the phase comparison of two interference fringe patterns formed respectively on the inner surface of a glass disk and the air bearing surface of a slider through the glass disk. To suppress interference noise and to further enhance measurement accuracy, low coherent white light was adopted as an illuminating source to replace high coherent laser. A high sensitive CCD digital camera was used to compensate for the attenuation of the brightness and contrast of the interference fringe pattern in the white light-based Michelson interferometer. The captured images and the measured results indicate that the application of white light illumination effectively improves the interference fringe pattern, and the measurement error of extracting the ridgeline can be consequently reduced five times in comparison with a laser. Spacing resolution (=λ/2w) was enhanced to 0.68 nm/pixel in our experiment, closely approaching the extreme spacing resolution (at the largest fringe interval w _max) of 0.64 nm/pixel. Indirect and direct methods for determining fringe interval were proposed, and the latter provides higher accuracy. Head–disk spacing was measured at different spacing resolutions of 2.61 and 0.68 nm/pixel to clarify the effect of fringe interval on measurement accuracy. The results show that tested spacing at larger fringe interval achieves not only better agreement with the calculated example, but also better deviation tolerance characteristics. Based on the advantages, measurement of 10 nm spacing was realized with high accuracy and good repeatability.     

Stroboscopic interferometer system for dynamic MEMScharacterization

We describe a computer-controlled stroboscopic phase-shifting interferometer system for measuring out-of-plane motions and deformations of MEMS structures with nanometer accuracy. To aid rapid device characterization, our system incorporates (1) an imaging interferometer that records motion at many points simultaneously without point-by-point scanning, (2) an integrated computer-control and data-acquisition unit to automate measurement, and (3) an analysis package that generates sequences of time-resolved surface-height maps from the captured data. The system can generate a detailed picture of microstructure dynamics in minutes. A pulsed laser diode serves as the stroboscopic light source permitting measurement of large-amplitude motion (tens of micrometers out-of-plane) at kilohertz frequencies. The high out-of-plane sensitivity of the method makes it particularly suitable for characterizing actuated micro-optical elements for which even nanometer-scale deformations can produce substantial performance degradation. We illustrate the capabilities of the system with a study of the dynamic behavior of a polysilicon surface-micromachined scanning mirror that was fabricated in the MCNC MUMPS foundry process     

一种新型光谱共焦位移测量系统研究

设计并搭建了一种光谱共焦位移测量系统。利用高斯拟合算法拟合每组实验数据,获取光谱响应曲线峰值对应的光波长值,采用Levenberg-Marquardt算法优化求解高斯函数的参数向量;利用双频激光干涉仪对系统进行标定,获得光波长和反射镜位移之间的对应关系;对整个系统作精度分析。实验结果表明:高斯拟合算法适合作为该位移测量系统的数据处理方法;用双频激光干涉仪对系统标定的方法能够准确定位反射镜的位置。该设计系统的测量范围为20 mm,测量精度为10μm,能够满足一定精度的测量要求。     

Verification of the indoor GPS system, by comparison with calibrated coordinates and by angular reference

This paper details work carried out to verify the dimensional measurement performance of the Indoor GPS (iGPS) system; a network of Rotary-Laser Automatic Theodolites (R-LATs). Initially tests were carried out to determine the angular uncertainties on an individual R-LAT transmitter-receiver pair. A method is presented of determining the uncertainty of dimensional measurement for a three dimensional coordinate measurement machine. An experimental procedure was developed to compare three dimensional coordinate measurements with calibrated reference points. The reference standard used to calibrate these reference points was a fringe counting interferometer with the multilateration technique employed to establish three dimensional coordinates. This is an extension of the established technique of comparing measured lengths with calibrated lengths. The method was found to be practical and able to establish that the expanded uncertainty of the basic iGPS system was approximately 1?mm at a 95% confidence level. Further tests carried out on a highly optimized version of the iGPS system have shown that the coordinate uncertainty can be reduced to 0.25?mm at a 95% confidence level.     

基于波长解调的Fabry-Perot型光纤MEMS压力传感器的设计

提出了一种新的压力传感器的设计,该传感器基于Fabry-Perot腔干涉和波长解调理论测量压力.设计用MEMS技术以及普通的光通讯接插件制作出工艺简单,分辨率高的光纤MEMS压力传感器.阐述了传感器的工作原理,分析了硅膜的厚度对传感器性能的影响以及FP腔的长度对反射光信号的影响.系统采用可调谐激光器进行信号访问,利用反射谱的相位变化完成信号解调.理论分析和模拟计算验证了传感器加工制作方案的可行性.     

Terrain height measurement by synthetic aperture radar with an interferometer

This paper describes the terrain height measurement capability of synthetic aperture radar with an interferometer assuming the radar operates on a satellite. The interferometer phase measurement uncertainty due to additive thermal noise and multiplicative speckle noise, which determine the upper limit of the height measurement accuracies of this radar system, has been obtained by numerical simulation. The height measurement accuracies attainable on a relatively flat terrain areas are of roughly the same order as range resolution when C- or X- band radar is operated at an altitude of 300 km.     

An all-optical photoacoustic spectrometer for trace gas detection

An all-optical photoacoustic spectrometer based on the diaphragm-based extrinsic Fabry-Perot interferometer (EFPI) fiber acoustic sensor for trace gas detection at atmospheric pressure and room temperature is first developed. The diaphragm-based EFPI fiber acoustic sensor is used to replace the conventional acoustic sensor in this system. Tunable erbium-doped fiber ring laser (TEDFRL) with an erbium-doped fiber amplifier (EDFA) is used as the excitation light source for the generation of the photoacoustic (PA) signal. A first longitudinal resonant PA cell with double absorption optical path is used to improve the sensitivity of the system. The advantages of all-optical photoacoustic spectrometer are immunity to electromagnetic interference, safely in flammable and explosive situations, and long distance sensing. This system is developed for the continuous and real-time measurement of acetylene gas at room temperature and atmospheric pressure. With the wavelength modulation and lock-in harmonic detection method, the minimum detectable limit of 1.56 parts-per-billion (ppb) volume acetylene (signal-to-noise ratio, SNR = 1) at the 1530.37 nm transition line was achieved.     

回转轴运动精度的干涉测量与误差补偿分析

采用激光干涉仪检测混联数控机床回转轴的运动精度,达到对其综合评价的目的,为机床的运动精度误差补偿做准备.对雷尼绍激光干涉仪的结构和角度测量原理进行了详细探讨,分析了干涉仪在回转轴运动精度测量中的主要影响因素和误差诱因;作出了角度测量中正弦近似误差特性曲线,并提出了该测量误差的数学模型;讨论了激光波长补偿的机理,提出了一种通用、简便易行的回转轴角位移精度检测方法.