标准数字CMOS工艺中LC谐振回路的改进和应用

提出了一种在标准数字CMOS工艺条件下,提高片上螺旋电感性能的实用方法,以及在缺少双层多晶硅电容的情况下,可以大大节约芯片面积的一种电容实现方法.介绍了这两种方法在电路设计中的一种应用,即利用0.35μm 1P4M标准数字CMOS工艺实现的、单片集成的LC压控振荡器.     

一种非校正14位CMOS A/D转换器

设计了一种高精度A/D转换器电路.为了提高匹配精度,内部DAC采用一种电容DAC的新型分段结构;通过版图设计优化,可在不进行数字校正的情况下达到14位的分辨率,最大程度地减小了设计复杂性和功耗.整体电路采用0.6 μm标准CMOS工艺线进行投片验证,实现了14位转换,转换时间达到2.5 μs.     

混沌随机数发生器的设计

为了使由模拟电路实现的混沌随机数发生器可以在标准数字CMOS工艺上实现,设计了一类基于MOS电容的混沌随机数发生器,可以作为一个通用IP,用于SOC的设计.当电路工作时,用于电容设计的MOS管的栅极与衬底之间形成耗尽层,利用串联补偿方法提高电容的线性度.所设计的混沌随机数发生器已经在TSMC的0.25μm、标准的数字n阱COMS工艺进行流片,对芯片的测试工作也已完成,测试结果显示,生成的随机数具有良好的随机性能.     

包含交流耦合CTIA与数字CDS的CMOS图像传感器设计

设计了一种带隔直电容的交流耦合CTIA像元电路与数字相关双采样（DCDS）结构的CMOS图像传感器系统。在传统的CTIA像元电路中增加隔直电容,通过控制光电二极管的偏压,达到减小光电二极管暗电流的目的;同时采用片外数字CDS结构,通过在片外实现复位信号与像元积分信号的量化结果在数字域的减法,可以减小图像传感器像元的复位噪声和固定图案噪声（FPN）。基于0.35 m标准CMOS工艺对此CMOS图像传感器进行流片,像元阵列为256256,像元尺寸为16 m16 m。测试结果表明交流耦合CTIA像元电路可以将光电二极管的偏压控制在零偏点附近,此时其暗电流最小;采用了数字CDS结构后,图像传感器像元的时域噪声及固定图案噪声均有不同程度降低。     

混沌随机数发生器的设计

为了使由模拟电路实现的混沌随机数发生器可以在标准数字CMOS工艺上实现,设计了一类基于MOS电容的混沌随机数发生器,可以作为一个通用IP,用于SOC的设计.当电路工作时,用于电容设计的MOS管的栅极与衬底之间形成耗尽层,利用串联补偿方法提高电容的线性度.所设计的混沌随机数发生器已经在TSMC的0.25μm、标准的数字n阱COMS工艺进行流片,对芯片的测试工作也已完成,测试结果显示,生成的随机数具有良好的随机性能.     

嵌入式开关电容DC-DC变换器的新颖控制技术

提出了一种针对单片集成开关电容DC-DC变换器进行优化的设计方案.阐述了开关电容DC-DC变换器电路的拓扑结构及其基本工作原理,给出了单片集成开关电容DC-DC变换器的等效电阻控制方法.考虑到集成工艺的兼容性问题,在电路设计时,用n沟MOSFET替代二极管;为了改善变换器的输出特性,在标准2μm p阱双层多晶硅单层金属CMOS工艺中增加了一次MOSFET阈值电压的调整步骤,实现了升压开关电容DC-DC变换器的单片集成.芯片面积为0.4mm2,测试结果显示,在变换器输入电压为3V,输出电压为5V,电路开关频率为9.8MHz时,输出功率为0.63mW,效率达到68%.     

嵌入式开关电容DC-DC变换器的新颖控制技术

提出了一种针对单片集成开关电容DC-DC变换器进行优化的设计方案.阐述了开关电容DC-DC变换器电路的拓扑结构及其基本工作原理,给出了单片集成开关电容DC-DC变换器的等效电阻控制方法.考虑到集成工艺的兼容性问题,在电路设计时,用n沟MOSFET替代二极管;为了改善变换器的输出特性,在标准2μm p阱双层多晶硅单层金属CMOS工艺中增加了一次MOSFET阈值电压的调整步骤,实现了升压开关电容DC-DC变换器的单片集成.芯片面积为0.4mm2,测试结果显示,在变换器输入电压为3V,输出电压为5V,电路开关频率为9.8MHz时,输出功率为0.63mW,效率达到68%.     

200Ms/s 177mW 8位折叠内插结构的CMOS模数转换器

介绍了一个采用折叠内插结构的CMOS模数转换器,适合于嵌入式应用.该电路与标准的数字工艺完全兼容,经过改进的无需电阻就能实现的折叠模块有助于减小芯片面积.在输入级,失调平均技术降低了输入电容,而分布式采样保持电路的运用则提高了信号与噪声的失真比.该200MHz采样频率8位折叠内插结构的CMOS模数转换器在3.3V电源电压下,总功耗为177mW,用0.18μm 3.3V标准数字工艺实现.     

200Ms/s 177mW 8位折叠内插结构的CMOS模数转换器

介绍了一个采用折叠内插结构的CMOS模数转换器,适合于嵌入式应用.该电路与标准的数字工艺完全兼容,经过改进的无需电阻就能实现的折叠模块有助于减小芯片面积.在输入级,失调平均技术降低了输入电容,而分布式采样保持电路的运用则提高了信号与噪声的失真比.该200MHz采样频率8位折叠内插结构的CMOS模数转换器在3.3V电源电压下,总功耗为177mW,用0.18μm3.3V标准数字工艺实现     

CMOS工艺兼容的单片集成湿度传感器

设计并制备了一个CMOS工艺兼容的集成湿度传感器,将湿度传感器与CMOS测量电路集成在同一芯片上.片上集成的湿度传感器为叉指电容式,感湿介质为聚酰亚胺,本文给出了相应的感湿模型.针对湿度传感器在全量程电容变化量较小的特点,本文采用开关电容电路作为片上微电容测量电路,讨论了电路的原理并给出了模拟结果.芯片采用3μm多晶硅栅标准CMOS工艺进行流水.测量结果表明,片上集成湿度传感器在5～35℃有较好的直流输出特性,并且长时间稳定性良好.     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Curved crystal spectrometer for the measurement of X-ray lines from laser-produced plasmas

In order to diagnose the laser-produced plasmas, a focusing curved crystal spectrometer has been developed for measuring the X-ray lines radiated from a laser-produced plasmas. The design is based on the fact that the ray emitted from a source located at one focus of an ellipse will converge on the other focus by the reflection of the elliptical surface. The focal length and the eccentricity of the ellipse are 1350 mm and 0.9586, respectively. The spectrometer can be used to measure the X- ray lines in the wavelength range of 0.2-0.37 nm, and a LiF crystal （200） （2d = 0.4027 nm） is used as dispersive element covering Bragg angle from 30° to 67.5°. The spectrometer was tested on Shengnang- Ⅱ which can deliver laser energy of 60-80 J/pulse and the laser wavelength is 0.35 μm. Photographs of spectra including the 1 s2p ^1P1-1s^2 ^1S0 resonance line（w）, the 1s2p ^3P2-1s^2 1S0 magnetic quadrupole line（x）, the 1s2p ^3P1-1 s^2 ^1S0 intercombination lines（y）, the 1 s2p ^3S~1-1 s^2 ^1S0 forbidden line（z） in helium-like Ti Ⅹ Ⅺ and the 1 s2s2p ^2P3/2-1 s622s ^2S1/2 line（q） in lithium-like Ti Ⅹ Ⅹhave been recorded with a X-ray CCD camera. The experimental result shows that the wavelength resolution（λ/△ 2） is above 1000 and the elliptical crystal spectrometer is suitable for X-ray spectroscopy.     

Preparation and Characterization of TaN ALD Precursors

High purity organic-tantalum precursors for thin film ALD TaN were synthesized and characterized.Vapor pressure and thermal stability of these precursors were studied.From the vapor pressure analysis,it was found that TBTEMT has a higher vapor pressure than any other published liquid TaN precursor,including TBTDET,TAITMATA,and IPTDET.Thermal stability of the alkyl groups on the precursors was investigated using a 1H NMR technique.The results indicated that the tertbutylimino group is the most stable group on TBTDET and TBTEMT as compared to the dialkylamido groups.Thermal stability of TaN precursors decreased in the following order:TBTDET ＞ PDMAT ＞ TBTEMT.In conclusion,precursor vapor pressure and thermal stability were tuned by making slight variations in the ligand sphere around the metal center.     

Electronic Structure of Semiconductor Nanocrystals

This paper reviews our recent development of the use of the large-scale pseudopotential method to calculate the electronic structure of semiconductor nanocrystals, such as quantum dots and wires, which often contain tens of thousands of atoms. The calculated size-dependent exciton energies and absorption spectra of quantum dots and wires are in good agreement with experiments. We show that the electronic structure of a nanocrystal can be tuned not only by its size,but also by its shape. Finally,we show that defect properties in quantum dots can be significantly different from those in bulk semiconductors.     

A rigorous proof of MIMO channel capacity’s increase with antenna number

It is well known that adding more antennas at the transmitter or at the receiver may offer larger channel capacity in the multiple-input multiple-output（MIMO） communication systems. In this letter, a simple proof is presented for the fact that the channel capacity increases with an increase in the number of receiving antennas. The proof is based on the famous capacity formula of Foschini and Gans with matrix theory.