超高真空电子束蒸发合成晶态AlN薄膜的研究

用超高真空蒸发Ａｌ膜，结合氮化合处理工艺在Ｓｉ（１００）衬底上制备了ＡｌＮ晶态薄膜，用Ｘ射线衍射，傅立叶变换红外光谱和Ｘ射线光电子能谱等测试分析技术研究了薄膜的微结构特征。结果表明：经过１０００℃分钟氮化处理后，能形成具有（００２）择优取向的ＡｌＮ薄膜。     

AlN薄膜的成分,相结构和氧化性能

用Ｘ射线光电子能谱（ＸＰＳ）剥层分析方法，研究ＡｌＮ薄膜在大气中加热时的氧化性能，结果表明，常温时ＡｌＮ薄膜稳定；在７００℃加热时，Ａｌ２Ｏ３膜开发增厚，ＡｌＮ被氧化，加热温度愈高ＡｌＮ被氧化得愈剧烈。     

磁光盘多层结构AIN和AlSiN薄膜材料研究

本文研究了磁光材料保护膜ＡＩＮ和ＡＩＳｉＮ薄膜材料，讨论了它们的性能与溅射工艺参数的关系，研究了ＡＩＮ及ＡｌＳｉＮ薄膜对磁光盘材料的保护作用，研究同时表明：ＡＩＮ及ＡｌＳｉＮ保护膜能对磁光材料起干涉增强磁光克尔效应作用。     

Ti／AlN快速退火界面反应的实验研究

在电子封装用的ＡｌＮ陶瓷多晶衬底上生长２５０ｎｍ的Ｔｉ膜，并进行快速退火。用ＲＢＳ（卢瑟福背散剂）、ＡＥＳ（俄歇有谱）、ＳＩＭＳ（干净人离子质谱）ＸＲＤ（Ｘ射线衍射）等实验技术对界面反应进行了分析研究，用划痕实验测量了退火对Ｔｉ／ＡｌＮ粘附力的影响。实验结果表明：快速退火时，Ｔｉ，Ａｌ，Ｎ以及ＡｌＮ中掺杂的Ｏ均发生明显的界面扩散和界面反应，样品表面的Ｏ和ＡｌＮ衬底中掺杂的Ｏ都向Ｔｉ膜中扩散，在较低     

纳米GaAs—SiO2镶嵌复合薄膜的制备

利用射频磁控共溅法制备了纳米ＧａＡｓ－ＳｉＯ２镶嵌复合薄膜，通过Ｘ射线衍射，透射电镜和Ｘ射线光电子能谱等手段研究了薄膜的结构及其与沉积时基片温度间的关系，结果表明，薄膜由晶态的ＧａＡｓ及非晶ＳｉＯ２组成，ＧａＡｓ在沉积过程中未明显氧化，且以纳米颗粒形成的均匀地弥散在ＳｉＯ２中；ＧａＡｓ的平均粒径依赖于沉积时的基片温度，获得了ＧａＡｓ的平均粒径在３～１０ｎｍ的ＧａＡｓ→ＳｉＯ２镶嵌复合薄膜。     

纳米GaAs—SiO镶嵌复合薄膜的发光特性

采用射频磁控共溅射法制备了纳米ＧａＡｓ－ＳｉＯ２镶嵌复合薄膜。通过Ｘ射线衍射、透射电镜观察和Ｘ射线光电子能谱等手段研究了薄膜的结构及其与沉积过程中基片温度间的关系。测量了薄膜的光致发光特性。表明，薄膜由晶态的ＧａＡｓ及非晶Ｓdisplay status两相组成，ＧａＡｓ在沉积过程中未明显氧化且以纳米颗粒形式均匀地弥散；ＧａＡｓ的平均粒径依赖于沉积时的基片温度。通过控制基片温度，成功地获得了ＧａＡｓ的平均粒径分     

AlN陶瓷衬底的SIMS和XRD测量

ＡｌＮ陶恣成分怀发对于ＡｌＮ的性能具有决定性作用，用二次离子质谱（ＳＩＭＳ）和Ｘ射线衍（ＸＲＤ）对清华大学材料系电子封装用的ＡｌＮ陶瓷进行了研究。ＳＩＭＳ谱表明ＡｌＮ衬底中除Ａｌ，Ｎ以我有Ｃ，Ｏ，Ｓｉ，Ｃａ，Ｙ等元素，其中有些是表面污染。衬底的ＳＩＭＳ深度分析表明样品Ｏ，Ｃａ，Ｙ信号都很强，且分布均匀，说明样口 含有Ｙ２Ｏ３，ＣａＯ添加剂，ＡｌＮ样品的ＸＲＤ谱与ＡｌＮ的ＪＣＰＤＳ卡片对照，在测量范     

升华再结晶法制备AIN晶须及其生长特性

以ＡｌＮ粉体为原料，加入适量的ＣａＯ－Ｂ２Ｏ３矿化剂，采用升华再结晶法制备ＡｌＮ晶须，初步探讨了反应器及其合成温度对产物的种类的影响，研究了晶须的结构特征及其生长机理，结果表明，初期的合成产物包括ＡＬＮ晶柱、晶须和非晶ＡｌＮ纤维，以ＶＬＳ机制生长；后期产物为ＡｌＮ晶须，表现为ＶＳ生长机制：ＸＲＤ及ＴＥＭ分析表明，晶须大多呈现沿（２１１０）、（１０１ｌ）和（０００１），ｌ＝０、１、２、３的晶面生长，     

多孔陶瓷薄膜表面形貌研究

用原子力显微镜（ＡＦＭ）观察Ａｌ２Ｏ３、Ａｌ２Ｏ３－ＳｉＯ２及Ａｌ２Ｏ３－ＳｉＯ２－ＴｉＯ２复合陶瓷薄膜的表面形貌,Ｘ射线衍射（ＸＲＤ）分析表明,Ａｌ２Ｏ３薄膜的上为γ－Ａｌ２Ｏ３;Ａｌ２Ｏ３－ＳｉＯ２薄由γ－Ａｌ２Ｏ３和非晶诚ＳｉＯ２组成;而Ａｌ２Ｏ３－ＳｉＯ２－ＴｉＯ２薄膜的相成分为Ａｌ２Ｏ３、ＴｉＯ２、Ａｌ４Ｔｉ２ＳｉＯ１２和非晶态ＳｉＯ２,各相的含量随化学成分变化而变化,ＡＦＭ观察结果表明     

助烧剂对热压Si3N4基陶瓷组织结构的影响

用ＸＲＤ，ＳＥＭ，ＴＥＭ分析了用Ｙ２Ｏ３＋Ａｌ２Ｏ３及Ｙ２Ｏ３＋ＡｌＮ做助烧剂的两种热压Ｓｉ３Ｎ４基陶瓷的组织结构，用ＥＤＸＡ分析了Ｓｉ，Ａｌ，Ｙ等元素的含量。结果表明，两种Ｓｉ３Ｎ４都是由长柱状β相组成；     

钛酸锶钡薄膜掺杂改性研究进展

钛酸锶钡(BaxSr1-xTiO3,BST)薄膜具有优良的铁电、介电性能,在可调谐微波器件、动态随机存储器、红外探测器阵列等方面具有良好的应用前景.综述了近年来BST薄膜掺杂改性研究所取得的进展,特别是对晶格掺杂和晶界掺杂进行了较详细的评述,并对目前BST薄膜掺杂研究的几个前沿问题进行了详细的讨论.     

Designed Patterning of Mesoporous Metal Films Based on Electrochemical Micelle Assembly Combined with Lithographical Techniques

Mesoporous noble metals and their patterning techniques for obtaining unique patterned structures are highly attractive for electrocatalysis, photocatalysis, and optoelectronics device applications owing to their expedient properties such as high level of exposed active locations, cascade electrocatalytic sites, and large surface area. However, patterning techniques for mesoporous substrates are still limited to metal oxide and silica films, although there is growing demand for developing techniques related to patterning mesoporous metals. In this study, the first demonstration of mesoporous metal films on patterned gold (Au) substrates, prefabricated using photolithographic techniques, is reported. First, different growth rates of mesoporous Au metal films on patterned Au substrates are demonstrated by varying deposition times and voltages. In addition, mesoporous Au films are also fabricated on various patterns of Au substrates including stripe and mesh lines. An alternative fabrication method using a photoresist insulating mask also yields growth of mesoporous Au within the patterning. Moreover, patterned mesoporous films of palladium (Pd) and palladium–copper alloy (PdCu) are demonstrated on the same types of substrates to show versatility of this method. Patterned mesoporous Au films (PMGFs) show higher electrochemically active surface area (ECSA) and higher sensitivity toward glucose oxidation than nonpatterned mesoporous Au films (NMGF).     

聚酰亚胺的Langmiur—Blodgett膜

本文介绍了制备聚酰亚胺ＬＢ膜的“前聚物法”以及通过引入不同结构基团或各种后处理以得到不同性能的聚酰亚胺ＬＢ膜和它们各种可能的应用。     

Structural aspects of Langmuir-Blodgett and cast films of zinc phthalocyanine and zinc hexadecafluorophthalocyanine

The processing of macrocyclic phthalocyanines (Pc) in the form of thin, nanostructured films has been usually carried out via evaporation techniques, owing to the low solubility exhibited by these compounds. The fabrication of Pc ultrathin films via the Langmuir-Blodgett technique may be advantageous from a technological point of view, since parameters such as film architecture and organization can be achieved without post-thermal treatments. In this study, a parent zinc phthalocyanine (ZnPc) and its fluorinated derivative (F₁₆ZnPc) were synthesized and manipulated in the form of LB films. The morphological and structural features of ZnPc and F₁₆ZnPc Langmuir-Blodgett films containing up to 31 layers were investigated using Fourier transform infrared spectroscopy (FTIR), micro-Raman spectroscopy and X-ray diffraction analyses and were compared to ZnPc and F₁₆ZnPc cast films. The interplanar distance obtained by X-ray specular reflection decreases from 12.64 Å for ZnPc to 12.16 Å for F₁₆ZnPc. FTIR spectra indicated absence of order in the LB films from ZnPc and F₁₆ZnPc, at least in the direction perpendicular to the substrate surface. Therefore, the order observed in the X-ray diffractograms means that the molecules might be organized in crystallites that are randomly oriented in the film.     

SrTiO3（110）上水热法外延生长PbTiO3薄膜

利用低温水热合成工艺，在一定浓度皆Ｐｂ（ＮＯ）３，ＴｉＣｌｒ的混合强碱性水溶液中，和在（１２０℃，０．２５ＭＰａ）的水热反应条件下，首次成功地在ＳｒＴｅＯ３单昌衬底上生长出具有面积构的ＰｂＴｉＯ３外延薄膜。     

新型红外增透膜和保护膜EI

介绍了类金刚石碳（ＤＬＣ）膜和碳化锗（Ｇｅ＿ｘＣ＿（１－ｘ））簿膜的沉积方法、特性和在红外光学镀膜中的应用进展。     

ZrO_2薄膜的相结构与相稳定性

采用纯 Zr、添 Y_2O_3的 ZrO_2和添 MgO 的 ZrO_2为靶材,以射频溅射方法生成 ZrO_2薄膜。研究了这三个系列薄膜的物相结构,以及退火和研磨对物相结构的影响。研究表明,ZrO_2薄膜为单斜相,Y-ZrO_2和 Mg-ZrO_2薄膜为单斜相和正方相,且以正方相为主。它们的退火规律也各不相同,这与稳定剂的加入与性质有关。同时研磨并未诱导正方相向单斜相的转变。     

Nanocomposites alumina/Pt produced by PVD and thermal oxidation methods used in catalytic applications

The work was focused on the deposition of Al₂O₃+Pt composite in the form of a nanofilm adherent to the substrate with good surface development and catalytic properties on the surface of 0H20J5 foil. With this end in view, a special carousel fixture for fixing the corrugated and flat foil and then coating with Al and Pt from two magnetron sources, in order to obtain a nanofilm of Al+Pt composite, was designed. A Pt/Al laminate layer was also produced by depositing Pt first and then Al, and the other way round. The layer systems obtained this way were subject to oxidation for 48 h at 860 °C and under Ar+O₂. The surface examined has shown that the process of oxidation produces the compact sublayer of columnar crystals (whiskers) well adherent to the substrate from which the needle-like whiskers are growing. Structures of whiskers form a laminar system with a catalytic element having a very-well developed surface. Structure analyses revealed that the films obtained comprised mostly α and θ Al₂O₃ phases and missed a Pt crystalline phase. The film morphology on the basis of oxide-film sections examined by TEM showed that the α Al₂O₃ structure was generated mostly deep in oxide films and was integrated with the foil. A microanalysis showed that it was uniformly distributed in its entirety in the Pt-composite based layers; however, in the case of laminate the surface of whiskers was coated. It was found from the comparison of the laminar system activity that the composite layers revealed much better catalytic properties at lower temperature than the laminate layers.