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碳化硅(SiC)单晶基片已广泛应用于微电子、光电子等领域.本文针对传统游离磨料研磨加工的缺点,提出了固结磨料研磨SiC单晶基片技术,以前期研究的SiC单晶基片研磨膏配方,试制了一系列固结磨料研磨盘,研究了固结磨料研磨SiC单晶基片(0001)C面时的材料去除率、表面粗糙度及平面度,并与游离磨料研磨进行了对比.结果表明,固结磨料研磨后样品表面有深度较浅的划痕,游离磨料研磨后表面没有划痕,但表面呈凹坑状;游离磨料研磨后工件表面粗糙度轮廓最大高度Rz远大于固结磨料研磨;固结磨料研磨的材料去除率高于游离磨料,固结磨料研磨后的表面粗糙度Ra远低于游离磨料研磨,固结磨料研磨可提高平面度;研究结果可为进一步研究固结磨料化学机械研磨盘、固结磨料研磨工艺参数及机理提供参考依据. 相似文献
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纳米蒙脱石填充PTFE和UHMWPE的摩擦磨损性能 总被引:3,自引:0,他引:3
用纳米蒙脱石(nano-MMT)对聚四氟乙烯(PTFE)和超高分子量聚乙烯(UHWMPE)进行填充改性,在往复式滑动摩擦试验机上进行摩擦磨损实验,用扫描电镜观察了材料摩擦表面形貌.结果表明:nano-MMT可以提高PTFE和UHWMPE材料的耐磨性,而PTFE基和UHWMPE基复合材料的摩擦系数无明显增大.与UHMWPE相比,nano-MMT更能提高PTFE基材料的耐磨性;nano-MMT/PTFE复合材料比nano-MMT/UHMWPE复合材料具有更低的摩擦系数和更好的导热性;纯PTFE、纯UHWMPE和10%nano-MMT/PTFE复合材料磨损机理主要为粘着和犁沟效应,而10%nano-MMT/UHWMPE复合材料表现为犁沟和疲劳机制. 相似文献
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针对目前超精密圆柱滚子加工精度和一致性很难保证的问题,提出了利用行星式双平面研磨方式进行圆柱滚子的加工方法。同时对该方法的加工原理进行分析以及对保持架进行了模态仿真。在研究了圆柱滚子双平面加工运动轨迹基础上,发现靠近研磨盘中心以及研磨盘边缘的轨迹线分布比较集中,而靠近研磨盘中间环带部分的轨迹线分布较为均匀。据此设计并加工了实验装置,采用基于双平面轨迹均匀方法进行超精研磨和抛光。实验研究表明,工件的圆度误差达到了0.295μm,批直径变动量达到了1μm,表面粗糙度Ra达到了0.054μm,圆柱滚子的表面质量可以达到镜面级别,微观加工纹路具有多向性。公差等级达到了国家标准0级要求。 相似文献
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《高分子材料科学与工程》2021,37(5)
文中研究了20%的碳纤维(体积分数)改性聚四氟乙烯在干摩擦和水润滑摩擦条件下的摩擦系数、磨损性能和摩擦振动性能。结果表明:(1)在干摩擦下,随着线速度增加,摩擦界面生成大量的热,黏着磨损和磨粒磨损严重,表面越来越粗糙,摩擦系数明显变大,摩擦振动加速度增加。而在水润滑条件下,随着线速度增加,摩擦界面间形成了一层水润滑膜,使摩擦系数降低,另外由于转速增加,使流噪声增加,从而使振动增加。(2)在干摩擦下,随着比压增加,摩擦系数和摩擦振动变化较大,而在水润滑条件下,随着比压增加,摩擦系数和摩擦振动变化较小。(3)干摩擦时,碳纤维增强聚四氟乙烯复合材料在不同比压下的磨损机理主要是磨粒磨损和黏着磨损;水润滑条件下,碳纤维增强聚四氟乙烯复合材料在高比压下的磨损机理主要是黏着磨损。因此,碳纤维改性聚四氟乙烯复合材料应该在水润滑条件下应用有利于提高耐磨性,降低摩擦系数和摩擦振动。 相似文献
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采用往复式滑动摩擦磨损(SRV)试验机研究了高铬铸铁及三维网络结构Al2O3陶瓷增强高铬铸铁复合材料的干摩擦磨损性能,测量了高铬铸铁和Al2O3陶瓷/高铬铸铁复合材料在不同摩擦频率及载荷下的摩擦系数和磨损率;用扫描电镜观察磨损表面形貌,并分析了三维网络Al2O3陶瓷对复合材料磨损机制的影响。结果表明:陶瓷Al2O3与高铬铸铁基体之间具有良好的界面结合,复合材料的摩擦系数随摩擦频率和载荷的变化保持稳定,耐磨性远优于高铬铸铁,而且随着摩擦频率和载荷的增加,Al2O3陶瓷/高铬铸铁复合材料的抗磨损性能明显提高,这是由于复合材料中Al2O3与高铬铸铁相之间三维空间结构和良好的界面结合有利于摩擦载荷的传递;三维Al2O3陶瓷骨架在磨损表面形成硬的网络突体并起承载作用,能有效保护金属基体;磨损机制为氧化磨损及磨粒磨损共同作用。 相似文献
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采用金相显微镜、扫描电镜表征了含Nb高碳钢的显微组织,并采用MFT-3000型摩擦磨损试验机,在室温下研究了摩擦载荷、滑动速度及滑动时间对铸态高碳钢的摩擦性能的影响。结果表明,铸钢组织由莱氏体和珠光体组成,洛氏硬度为37.3HRC。随施加载荷、滑动速度的增加,磨损失重量增加;摩擦系数随载荷增加而降低,随滑动速度增加而增加,随滑动时间的延长先增加后趋于稳定。磨损机制是以粘着磨损为主的粘着与磨粒磨损的混合磨损,高速、长时间滑动时,还存在明显的氧化磨损。 相似文献
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We present an interpretation of the lapping hardness of commercially available optical glasses in terms of a micromechanics model of material removal by subsurface lateral cracking. We analyze data on loose abrasive microgrinding, or lapping at fixed nominal pressure, for many commercially available optical glasses in terms of this model. The Schott and Hoya data on lapping hardness are correlated with the results of such a model. Lapping hardness is a function of the mechanical properties of the glass: The volume removal rate increases approximately linearly with Young's modulus, and it decreases with fracture toughness and (approximately) the square of the Knoop hardness. The microroughness induced by lapping depends on the plastic and elastic properties of the glass, depending on abrasive shape. This is in contrast to deterministic microgrinding (fixed infeed rate), where it is determined from the plastic and fracture properties of the glass. We also show that Preston's coefficient has a similar dependence as lapping hardness on glass mechanical properties, as well as a linear dependence on abrasive size for the case of brittle material removal. These observations lead to the definition of an augmented Preston coefficient during brittle material removal. The augmented Preston coefficient does not depend on glass material properties or abrasive size and thus describes the interaction of the glass surface with the coolant-immersed abrasive grain and the backing plate. Numerical simulations of indentation are used to locate the origin of subsurface cracks and the distribution of residual surface and subsurface stresses, known to cause surface (radial) and subsurface (median, lateral) cracks. 相似文献
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A model for lapping of glass 总被引:3,自引:0,他引:3
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Effect of load on tribofilms at the contact interface under dry sliding conditions at 500 °C
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This paper presents a study of the effect of load on the retention of the tribofilms formed at the interface of a dry sliding contact between exhaust valve material, Nimonic alloy (N 80A) and valve‐seat material, ductile cast iron (GGG‐40), at a temperature of 500 °C. The role of tribofilms in influencing friction and wear behaviour at elevated temperature is highlighted. Reciprocating pin‐on‐disc experiments were conducted using a hemispherical shaped pin sliding against a flat disc at 20 Hz oscillating frequency, 2 mm stroke at loads of 20 N to 50 N. Low coefficient of friction, in the range of 0.13 to 0.15, was observed at loads up to 40 N whereas at a load of 50 N, the average coefficient of friction increased to 0.29. Optical and scanning electron micrographs with energy dispersive spectroscopy analysis indicate evidence of formation and retention of well compacted and strongly adhering tribofilms at loads up to 40 N. At 50 N, even though more abrasive wear is seen, initial deterioration and subsequent reforming of the tribofilms with increasing sliding time is observed. Overall, more wear was observed for the valve‐seat material as compared to the valve material. Raman spectroscopy primarily indicates the presence of hematite on the worn surfaces at loads of 20 N to 40 N, whereas magnetite presence is strongest at the highest load of 50 N. Increase in tribofilm hardness was observed with increase in contact load whereas the thickness of the tribofilm was not significantly affected by the contact load. 相似文献
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Polyetherimide (PEI), commercially known as ULTEM and manufactured by GEC (USA), is one of the newest high-performance thermoplastics. Its graphite and short-glass-fibre (GF) filled composition was evaluated for friction and wear properties. Tribological studies of the material sliding against mild steel, under different loads, counterface roughnesses and sliding distances were performed on a pin and disc configuration. It was observed that this composite displayed very good wear resistance due to glass-fibre reinforcement and low friction due to the solid lubricant graphite. The wear mechanism was studied with scanning electron microscopy by observing the worn pin and disc surfaces. Fatigue was observed to be the main factor in wear, along with adhesive and abrasive modes. 相似文献
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A grinding process that uses loose abrasives for the beveling of lenses is presented. Determination of the parameters of grinding tools with loose abrasives for beveling applications with various optical elements is discussed. The process of grinding with loose abrasives for a lapping operation is analyzed by examination of the influence of optical glass material parameters on material removal and surface roughness for lens manufacturing conditions. The model established for this analysis uses the concept of lateral fracture, which is based on removal of optical glass material by rolling abrasive particles. The particles remove material by lateral cracking. The abrasive mineral Barton Garnet was used in the lapping experiments. Under specific large-diameter lens manufacturing conditions, lapping time values at the conventional removal depth have been obtained for various optical glasses. 相似文献
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金属填充PTFE复合材料的摩擦磨损性能研究 总被引:21,自引:0,他引:21
利用MHK-500型环块磨损实验机,对金属Cu、pb及Ni填充改性的PTEFE复合材料在干摩擦条件下与GCr15轴承钢对摩时的摩擦磨损性能进行了系统研究,并利用JEM-1200EX/S分析电子显微镜和光学显微镜对PTEE复合材料的磨屑及摩擦磨损表面进行了考察。摩擦磨损实验的结果表明,金属填料Cu、Pb及Ni大大改善了PTFE复合材料的耐磨性,PTFE复合材料的磨损量比纯PTFE降低了1-2个数量级 相似文献
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硅线石填充双马来酰亚胺摩擦学性能的研究 总被引:1,自引:1,他引:0
用M-200型试验机在干摩擦条件下考察了硅线石单独填充双马来酰亚胺(BMI)和硅线石与聚四氟乙烯(PTFE)共同填充BMI两类复合材料的摩擦学特性。结果表明,适量的Sa能降低BMI的摩擦系数和磨损量,但会在对偶件上造成划伤,PTFE与Sa共同填充BMI,不仅能进一步降低复合材料的μ和磨损量,而且能有效地抑制对偶件上的划伤,经过分析,Sa填充BMI的复合材料,对磨时其表面较高的粗糙度和Sa硬粒子友承 相似文献