基于Si衬底的CdSe薄膜蒸镀工艺研究

采用真空蒸发技术在Si(100)基底上制备了CdSe纳米晶薄膜,利用X射线衍射仪(XRD)、膜厚测试仪、原子力显微镜(AFM)方法对不同蒸发电流下制备的薄膜的结晶情况、表面形貌进行分析表征.结果表明:蒸发电流对CdSe薄膜的结晶性能和表面形貌有显著影响.当蒸发电流为75 A时,CdSe薄膜沿(002)方向的衍射峰相对较强,沿c轴取向择优生长优势明显,薄膜厚度约为160 nm,晶粒尺寸约为40 nm,颗粒均匀;薄膜表面平整光滑,表面粗糙表面粗糙度(5.63 nm)相对较低,薄膜结晶质量较好.     

热蒸发制备CdSe薄膜及其光电特性研究

采用真空热蒸发法技术制备CdSe薄膜,通过XRD、SEM、Hall效应和分光光度计测试了薄膜的结构、表面形貌、I-V特性和光学透过率。结果表明:CdSe薄膜(100)晶面的面间距为0.369 nm,晶粒大小约为10.2 nm,薄膜表面晶粒分布较为均匀;CdSe薄膜与锡和银的肖特基势垒高度分别为0.76 V和0.69 V;CdSe薄膜的光透过率在远红外区较高,且呈上升趋势;折射率随波长增加按指数规律减小;根据Tauc关系和Urbach规则,获得能量带隙为1.79 eV和Urbach能量为0.217 eV。     

CdSe纳米晶薄膜的制备与特性研究

采用真空热蒸发技术,在光学玻璃基片上生长出排列整齐、高质量的CdSe纳米晶薄膜.通过X射线衍射(XRD)、X射线光电子能谱分析(XPS)、扫描电镜(SEM)、傅里叶红外光谱(IR)等进行表征.结果表明,薄膜结晶性能较好,纳米晶颗粒约为40 ～70 nm,呈半月状,排列整齐;化学元素配比为49.4∶50.6,稍微富Se;红外透过率高,禁带宽度为1.89 eV,高于块状的CdSe晶体(1.70 eV).     

非晶锗的低温晶化和光学特性研究

本文采用直流磁控溅射在(100)硅衬底上沉积了单层锗薄膜,分别用拉曼光谱和X射线衍射研究了薄膜的结晶性,通过对结晶性的研究发现,在衬底温度为200℃时溅射功率为150W时结晶性开始变好,功率增至250W的过程,锗薄膜的择优取向发生(220)向(331)的变化.这样在无金属掺杂的情况下得到了结晶性较好的样品.光致发光结果表明,非晶锗在可见光区有较强的发光现象,发光峰位中心分别在648.1nm和713.0nm.发光峰位不随晶粒尺寸变化而变化,但峰强对晶粒大小的依赖性很强,平均晶粒较大的锗薄膜在可见光区发光现象不显著.     

溅射压强对W掺杂ZnO薄膜结构及光学性能的影响

在不同溅射压强下,通过射频(RF)磁控溅射在石英玻璃衬底上沉积得到W掺杂ZnO薄膜(WZO).对样品的结晶性能,表面形貌和光学性能进行测试分析,结果表明:在适当溅射压强下,薄膜具有良好的结晶性和光学性能.随着溅射压强的增加,薄膜的结晶性先变好后变差,晶粒尺寸先增大后减小,在1.0 Pa时薄膜的结晶性最好,且晶粒尺寸最大,约为32 nm;所有WZO薄膜样品的平均透光率超过80;;光致发光主要由本征发光和缺陷引起的蓝光发光组成,在1.0Pa时薄膜还有明显的Zn;缺陷,在1.2Pa时薄膜有明显的Oi缺陷.     

Fe、Ni共掺杂ZnO薄膜的溶胶-凝胶法制备及性能研究

采用溶胶-凝胶法在玻璃基片上旋涂生长了ZnO、Fe, Ni单掺杂及(Fe,Ni)共掺杂ZnO薄膜.产物的显微照片及XRD图谱结果表明, 该方法所制备的ZnO薄膜表面均匀致密,都存在(002)择优取向,具有六角纤锌矿结构,晶粒尺寸平均在13 nm 左右,振动样品磁强计(VSM)测试结果显示掺杂ZnO薄膜均存在室温铁磁性.光致发光(PL)测量表明所有样品薄膜的PL谱主要由较强的紫外发光峰(394 nm)、蓝光峰(420 nm)、绿光峰(480 nm)组成.Fe、Ni单掺杂和共掺杂并不改变ZnO薄膜的发光峰位置,但掺杂后该紫外发光峰减弱,420 nm处的蓝光峰增强.     

射频磁控溅射生长ZnO薄膜及性能研究

采用射频磁控溅射技术在玻璃衬底生长ZnO及ZnO∶ Al薄膜,通过改变氩氧比、衬底温度和溅射功率获得样品.用X射线衍射仪、紫外-可见分光光度计、扫描电子显微镜进行表征.结果发现:室温下40W的溅射功率1h的溅射时间,改变氩氧比获得样品.XRD图谱中无明显衍射峰出现;紫外可见光分光光度计测试结果显示400nm波长以下,透光率在90;以上.说明薄膜生长呈无定形.衬底温度高于200℃样品,XRD有明显(002)衍射峰出现,在400～ 800 nm波长范围,透光率在88;以上,衬底温度300℃时,XRD衍射峰半高宽最小,晶粒尺寸大.TEM显示:衬底300℃晶粒尺寸最大,晶体发育好.在200℃掺铝ZnO薄膜,(002)峰不明显,有(101)峰出现.     

单晶硅衬底上Ge填埋层低温应力诱导重结晶制备多晶硅薄膜

本文采用电子束蒸发法,室温下在Si(400)的基片上生长含锗(Ge)填埋层的非晶硅薄膜,其结构为a-Si/Ge/Sisubstrate,并在真空中进行后续退火.采用Raman散射(Raman Scattering)、X射线衍射(X-ray Diffraction)、高分辨电子扫描显微镜(HRSEM)、光学显微镜和热重差热分析(DSC)等手段,研究退火后样品晶化特性和晶化机理.结果表明,室温下生长的含有250 nm Ge填埋层的生长态样品在400℃退火5h,薄膜基本全部实现晶化,并表现出明显的Si (111)择优取向.样品分别在400℃、500℃、600℃和700℃退火后薄膜的横向光学波的波峰均在519cm-1附近,半高宽大约为6.1 cm-1,且均在Si(111)方向高度择优生长.退火温度为600℃的样品对应的晶粒尺寸约为20 μm.然而,在相同的薄膜结构(a-Si/Ge/Si substrate)的前提下,当把生长温度提高到300℃时,温度高达到700℃退火时间5h后,薄膜依然是非晶硅状态.差热分析表明,室温生长的样品,在后续退火过程中伴随界面应力的释放,从而诱导非晶硅薄膜重结晶成多晶硅薄膜.     

在钛酸锶衬底上外延生长ZnO薄膜及其性能研究

用脉冲激光淀积法(PLD)在(111)面SrTiO3衬底上外延生长ZnO单晶薄膜.样品分别在衬底温度为350℃、500℃、600℃下外延生长.X射线衍射(XRD)的结果表明,所得的ZnO单晶薄膜结晶性能好,只出现(002)和(004)两个衍射峰,(002)峰的半高宽度(FWHM)为0.23°.在荧光光谱中我们只观察到来源于带边激子跃迁的强UV发射,并且随着生长温度的升高,紫外峰的强度逐渐增强.样品的SEM图像表明所得ZnO薄膜表面平整,晶粒均匀.衬底温度为600℃时,所得到的ZnO薄膜结构完整,晶粒尺寸最大,均匀;而且紫外发射最强.     

厚度对Mg-Sn共掺ZnO薄膜结构和光电性能的影响

采用溶胶凝胶(Sol-Gel)旋涂法在抛光石英衬底上制备不同厚度Mg-Sn共掺的ZnO薄膜.用XRD、SEM、UV-Vis、PL、FT-IR光谱仪和四探针等对薄膜的微观结构、表面形貌、室温光致发光及光电特性进行表征.薄膜结构分析显示样品均沿c轴高度择优取向,呈六角纤锌矿晶体结构,随着膜厚的增加,薄膜结晶度明显提高,薄膜晶粒尺寸逐渐增大.由SEM照片观察到,厚度的增加明显促进了薄膜表面颗粒生长的均匀性与致密性.由光致发光谱表明:厚度增加,薄膜的本征发光峰增强且均出现较强的紫外发光峰和蓝光发光峰.FT-IR结果显示780 nm厚的薄膜在高波数区域红外吸收明显比320 nm和560 nm弱.薄膜电阻率随厚度增加由1.4×10-2 Ω·cm减小至2.6×10-3Ω·cm,且薄膜透过率均保持在90;左右.     

Growth and luminescence properties of large‐scale zinc oxide nanotetrapods

Large‐scale zinc oxide (ZnO) nanotetrapods have been grown on p‐type Si (111) substrate by oxidizing zinc pieces in air by thermal evaporation technique without the presence of any catalyst. The size and morphology of the nanostructures was found to depend on experimental parameters. The grown nanostructures were characterized by X‐ray Diffraction (XRD), Photoluminescence (PL), Scanning Electron Microscopy (SEM), Transmission Electron Microscopy (TEM), High Resolution TEM (HRTEM) and analysis of elemental composition was done by Energy Dispersive X‐ray analysis (EDX). The EDX spectrum shows that the grown product contains Zn and O only. The X‐ray diffraction pattern indicates that the microstructure of the obtained products is typical hexagonal wurtzite ZnO. The optical properties were studied using room temperature PL spectroscopy which indicates that the products are of high optical quality and the near band edge UV transition peak intensity increases with decrease in tetrapod size. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

热蒸发法原位生长-维氧化锌纳米材料及其场发射特性研究

利用磁控溅射在ITO电极上沉积氧化锌薄膜,以氧化锌薄膜为种子层,采用热蒸发法合成ZnO一维纳米材料,利用XRD和SEM方法对氧化锌一维纳米材料的微观结构进行分析,测试其场发射性能.结果显示,氧化锌纳米材料为钉子状结构,每个氧化锌纳米钉由几微米大的钉帽和细棒组成,垂直于基底生长.场发射性能研究表明它具有较低的开启场强,高的发射电流和好的稳定性,是一种优良的冷阴极电子发射源.     

Structure‐controlled growth of ZnO nanonails by thermal evaporation technique

Wurtzite ZnO nanonail structures have been grown on sapphire substrate by simple thermal evaporation of Zn powder in oxygen ambient. Growth parameters such as growth temperature and oxygen gas flow have been examined for the growth of nanonail structure. It is found that the nanonail structures repeatedly grow under a certain relation between the growth temperature and the oxygen flow. Also, at higher growth temperature, the nanonails grow in the form of branched‐structures. The grown ZnO nanonails have hexagonally well‐faceted cap and grow mostly perpendicular to the sapphire substrate. Excellent luminescence properties of a strong UV emission peak with negligible green band have been obtained at room temperature. (© 2011 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Catalyst‐free thermally‐evaporated growth and optical properties of ZnO nanowires on Si,GaN and sapphire substrates

Vertically well‐aligned zinc oxide nanowires (NWs) with high density were successfully synthesized on Si, sapphire and GaN/sapphire substrates by thermal evaporation of zinc powders without catalysts or additives. The growth behavior of ZnO NWs was strongly dependent on the substrate materials. The effects of the substrate position on the structures and properties of ZnO NWs were primarily discussed. The morphology and crystallinity of the resultant NWs were studied by scanning electron microscope, transmission electronic microscope and X‐ray diffraction. The photoluminescence (PL) characteristics of the ZnO NWs on the different substrates were studied. The results showed that the as‐grown ZnO NWs exhibit a sharp and strong ultraviolet emission at 3.27 eV and a very weak green emission at around 2.48 eV, indicating that the a‐synthesized NWs have excellent PL properties with good crystalline quality and can be an ideal candidate for making luminescent devices. By comparison of PL spectra, we revealed that the green‐to‐UV emission intensity ratios were considerably dependent on the substrate materials, which was explained by the difference in the structural morphology of the produced nanowires.     

化学还原法向二氧化硅人工欧泊中填充Se

本文提出了一种新的调节人工欧泊晶体的光学带隙的方法.采用改进的溶剂蒸发法将单分散SiO2微球组装成在红外光区具有光子带隙的人工欧泊,采用化学还原法向欧泊中填充高折射率材料Se,改变其光学带隙特性.采用扫描电子显微镜(SEM)、X射线衍射和可见-近红外光谱仪(VIS-NIR)等对Se-SiO2三维光子晶体的形貌、结构和光学性能进行了观察测试.研究结果表明Se以纳米晶粒的形式均匀地包覆在SiO2微球表面,与相同晶格周期的SiO2光子晶体相比,Se-SiO2光子晶体的带隙发生明显的红移.     

四针状ZnO晶须的制备及其光致发光性能

采用热蒸发氧化锌片的方法制备四针状ZnO晶须.并用X射线能谱仪(EDS)、X射线衍射仪(XRD)、傅里叶红外光谱仪(FTIR)、场发射扫描电子显微镜(FESEM)对ZnO晶须组成、结构和形貌进行了测试表征.结果表明:四针状ZnO晶须为六方纤锌矿结构;当前期升温速率为6c℃/min,保温温度为960 ℃,锌的投放量为5 g时,制得四针状ZnO晶须形貌均一规整,晶须针脚生长完全;光致发光(PL)谱图表明:四针状ZnO晶须有两处明显的荧光发射峰,390 nm附近的紫外发射峰由ZnO近带边激子跃迁引发,514 nm附近的绿光发射峰是表面态效应与氧空位电子引发的光生空穴效应共同作用的结果.     

ZnO纳米线/纳米棒混合阵列的制备及其光致发光性能研究

使用无催化剂热蒸发法,在ZnO/Si薄膜衬底上制备了ZnO纳米线/纳米棒混合阵列.其中,纳米线的直径为10～20nm,纳米棒的直径为60～160 nn,二者混合在一起垂直生长于衬底表面.从衬底的上游到下游位置,混合,阵列中纳米线的含量逐渐下降,纳米棒逐渐增多.室温光致发光测试发现尺寸较小的纳米线阵列的紫外光发光强度比大尺寸纳米棒阵列高约5倍.持续激发光照射下,纳米线阵列的发光强度逐渐上升,停止光照后又逐渐下降到初始值,这可以用纳米线表面O2分子的解吸附和吸附过程来理解.     

ITO薄膜的厚度对其光电性能的影响

氧化铟锡(indium-tin oxide, ITO)具有在可见光范围内高度透明的特性和优良的电学特性,通常当作透明电极,被广泛应用于太阳电池和发光元器件上.本研究中用电阻加热反应蒸发的方法制备ITO薄膜,测试了膜的厚度、电阻率、可见光透过率、载流子浓度和迁移率,讨论薄膜的厚度对薄膜光电性能的影响.实验中制备的ITO薄膜,透过率良好,电阻率可达6.37×10-4Ω·cm,载流子浓度和迁移率可分别达到1.91×1020cm-3和66.4cm2v-1s-1.将实验中制备的ITO作为nip太阳能电池透明电极,其短路电流为10.13mA/cm2,开路电压为0.79V,填充因子为0.648,效率可达到5.193;.     

Optical properties of thermally evaporated CdS thin films

CdS thin films of varying thicknesses were deposited on cleaned glass substrates at room temperature by thermal evaporation technique in a vacuum of about 2 x 10^‐5 torr. UV‐VIS spectra of the films were studied using the optical transmittance measurements which were taken in the spectral region from 300 nm to 1100 nm. The absorbance and reflectance spectra of the films in the UV‐VIS region were also studied. Optical constants such as optical band gap, extinction coefficient, refractive index, optical conductivity and complex dielectric constant were evaluated from these spectra. All the films were found to exhibit high transmittance (∼ 60 ‐ 93 %), low absorbance and low reflectance in the visible/near infrared region from ∼ 500 nm to 1100 nm. The optical band gap energy was found to be in the range 2.28 – 2.53 eV. All the films annealed at 300°C for 4 hours in vacuum (∼ 10^‐2 torr) showed a decrease in the optical transmittance with its absorption edge shifted towards the longer wavelength, leading to the result that the optical band gap decreases on annealing the films. Also, on annealing crystallinity of the films improves, resulting in decrease in the optical transmittance. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

电子束蒸发制备ZnO:Al透明导电膜及其性能研究

在本实验中我们利用电子束蒸发方法在玻璃衬底上制备了ZnO:A l透明导电膜,并对所得样品在400℃下进行了退火处理。利用扫描电子显微镜观察了样品的表面形貌,利用分光光度计分析了样品的光学性质,结果表明所得样品在可见光范围具有较好的透光性。利用四探针对其进行了电学性质的测量,表明衬底温度为200℃时制备的样品电阻率可达6×10-3Ω.cm。