1.3 GHz单cell超导射频腔等离子体清洗放电研究(英文)

场致发射限制超导射频腔加速梯度增长。为了减少超导射频腔场致发射,在室温条件下,设计搭建了1.3GHz单cell超导射频腔等离子体清洗实验装置,开展等离子体清洗放电研究。使用CST软件模拟腔中的电磁场分布并且优化外部品质因数得到合适的放电条件。随着压强、前向功率和含氧量的变化,实验探讨了Ar/Ar-O₂放电的物理特征和电子激发温度的变化趋势。残余气体分析结果表明,Ar/O₂等离子体清洗能够消除腔体内表面的碳化物。Field emission limits the accelerating gradient increase in SRF cavities. In order to reduce field emission of SRF cavities, the plasma processing experimental setup of a 1.3 GHz single-cell SRF cavity is designed and built to carry out plasma processing discharge research at room temperature. The electromagnetic field distribution is simulated and the external quality factor is optimized to provide a suitable discharge condition using CST software. It is explored that the physical property of Ar/Ar-O₂ discharge and the variation trend of electron excitation temperature with the changes of pressure, forward power and O₂ content in experiment. The result of residual gas analysis indicates that Ar/O₂ plasma processing can eliminate the carbide of the inner surface of cavity.     

大气压等离子体辅助多晶硅薄膜化学气相沉积参数诊断

本文采用发射光谱法诊断了大气压下Ar气、SiCl₄及H₂气混合气体（Ar/SiCl₄/H₂）射频放电等离子体射流特性.利用Si原子谱线强度计算了电子激发温度并以此估算了Si原子数密度,研究了射频功率及气体流量对电子激发温度和Si原子数密度以及SiCl₄解离率的作用. 关键词： 大气压等离子体射流 发射光谱 电子激发温度 多晶硅薄膜沉积     

13.56 MHz 低频功率对60 MHz射频容性耦合等离子体的电特性的影响

使用补偿朗缪尔探针诊断技术,研究了60MHz/13.56MHz双频激发容性耦合等离子体的空间电子行为,得到了电子能量概率函数(EEPF)随径向位置和低频输入功率的演变行为. 实验结果表明,13.56MHz射频输入功率的变化主要影响低能电子的布居,其影响随气压升高而加大. 在等离子体放电中心以外,EEPF呈现出双峰分布的特性,同时发现从放电中心到极板边缘,次能峰有逐渐向高能区漂移的现象,次能峰的出现显示了中能电子的增强的加热效应. 通过EEPF方法,计算了等离子体的电子温度、电子密度. 讨论了等离子体中的电 关键词： 双频激发容性耦合等离子体 朗缪尔探针诊断 电子加热模式     

电负性气体的掺入对容性耦合Ar等离子体的影响

本文利用朗缪尔静电探针对掺入了电负性气体O₂, Cl₂, SF₆的由4068 MHz激发的单射频容性耦合Ar等离子体进行了诊断测量. 测量结果表明: 随着电负性气体流量的增加, 电子能量概率分布函数出现了高能峰, 高能峰且有向高能侧漂移的现象; 电负性气体掺入Ar等离子体后显著降低了等离子体的电子密度; 电子温度随着电负性气体流量比的增加而升高. 另外, 本文还测量了掺入三种电负性气体后在不同流量比下的混合气体等离子体的电负度α . 对实验现象进行了初步的解释. 关键词： 电负性等离子体 电子密度 电子温度 电负度     

60MHz电容耦合等离子体中电子能量分布函数特性研究

甚高频(频率大于30 MHz)耦合放电源由于能产生大面积高密度的等离子体而受到了人们的广泛关注. 采用电流、电压探针以及朗缪尔探针诊断技术对60MHz射频激发产生的容性耦合等离子体的放电特性及电子行为进行了研究. 实验结果表明,等离子体的等效电阻/电容随着射频输入功率的增加而减小/增加;等离子体中电子行为不仅依赖于射频输入功率,还与放电气压密切相关;放电气压的增加导致电子能量概率分布函数(EEPF)从双温Maxwellian分布向Druyvesteyn分布转变,而且转变气压远低于文献所报道的数值,这主要是由于在60MHz容性耦合等离子体中电子反弹共振加热效率大为降低. 关键词： 甚高频容性耦合等离子体 朗缪尔探针诊断 电子加热模式     

直流偏置对射频容性耦合放电特性的影响

直流偏置能较好抑制射频容性耦合等离子体(radio frequency capacitively coupled plasma, RF-CCP)表面充电效应, 但仍存在其对RF-CCP放电参量影响规律不明确, 电源对参量控制复杂等问题. 构建了直流源与射频源的板-板结构RF-CCP仿真模型, 在射频源基础上施加负直流源, 研究直流偏置对RF-CCP放电特性影响, 并比较射频与直流偏置对放电参量影响差异. 结果表明, 无直流源时, 周期平均电子密度N_{e, ave}, 周期平均电子温度T_{e, ave}均为对称分布, N_{e, ave}呈现两端小、中间大的凸函数分布, T_{e, ave}在距极板4 mm以内鞘层区均有陡然上升, 极大值出现在距极板1 mm左右处; 直流源会使等离子体主体区N_{e, ave}升高并发生偏移, 直流源侧N_{e, ave}降低, 对侧N_{e, ave}增加, 且对侧增加速率较快. 直流偏置可改善单侧电子温度与电子通量, 但提高电子密度能力弱于射频源. 实际工程中, 若欲提高单侧电子温度与电子通量, 应施加直流源, 若提高整体电子密度, 应提高射频源功率.      

ICP等离子体鞘层附近区域发光光谱特性分析

为了独立控制鞘层附近区域离子密度和离子能最分布,采用光发射谱(OES)测量技术,对不同射频功率、放电气压和基底偏压下感应耦合等离子体鞘层附近区域辉光特性进行了研究.原子谱线和离子谱线特性分析表明,在鞘层附近区域感应耦合等离子体具有较高的离子密度和较低的电子温度.改变放电气压和射频功率,对得到的光谱特性分析表明,鞘层附近区域离子密度随射频功率的增大而线性增大,在低压下随气压的升高而增大.低激发电位原子谱线强度增加迅速,高激发电位原子谱线强度增加缓慢,而离子谱线强度增加很不明显.改变基底直流偏压,对得到的发射光谱强度变化分析表明,谱线强度随基底正偏压的增加而增大.随着基底负偏压的加入,谱线强度先减小而后增大;直流偏压为-30 V时,光谱强度最弱.快速离子和电子是引起Ar激发和电离过程的主要能量来源.     

射频容性耦合等离子体放电特性的光谱诊断

利用流体模型模拟和发射光谱实验诊断相结合的方法,研究了中等气压、中等功率下射频容性耦合等离子体的放电特性。理论上,采用基于流体模型的COMSOL软件仿真,建立一维等离子体放电模型,以Ar气为工作气体,研究了不同气压以及不同射频输入功率下等离子体电子温度和电子密度的分布规律。实验上,依据仿真模型设计制作了相同尺寸的密闭玻璃腔体和平板电极,采用13.56 MHz射频放电技术电离腔体内的工作气体Ar气,测量了不同气压、不同射频输入功率时放电等离子体的发射光谱。通过分析和选择适当的Ar Ⅰ和Ar Ⅱ的特征谱线,分别利用玻尔兹曼斜率法以及沙哈-玻尔兹曼方程计算了等离子体的电子温度与电子密度,并结合模拟仿真结果对光谱诊断结果进行了修正。结果表明：当气体压强为300~400 Pa、输入功率为600~800 W时,等离子体近似服从玻尔兹曼分布,此时利用光谱法得到的等离子体参数与仿真结果相符合。仿真模拟与光谱实验诊断相结合的方法可初步诊断出中等气压下等离子体的放电参数,增加了玻尔兹曼斜率法和沙哈-玻尔兹曼方程在等离子体放电中的使用范围,扩大了光谱法在低电子密度容性耦合等离子体参数诊断的应用场合,为中等气压容性耦合等离子体在工业与军事上的应用研究提供了重要物理状态的分析手段。     

双频容性耦合等离子体密度径向均匀性研究

利用自主研制的全悬浮双探针, 对影响双频容性耦合等离子体径向均匀性的因素进行了研究. 发现低频功率、放电气压和放电间距对径向均匀性有明显影响. 合适的低频功率、放电气压及较大的极板间距可以得到更均匀的等离子体. 采用与实验相同的放电参数, 利用改进的二维流体模型进行理论模拟, 得到了不同极板间距下径向离子密度分布, 并和实验测量结果进行了比较, 两者的变化趋势基本符合. 关键词： 双频容性耦合等离子体 径向均匀性 全悬浮双探针 二维流体模型     

甚高频激发容性耦合氩等离子体的电子能量分布函数的演变

甚高频激发的容性耦合等离子体由于离子通量和能量的相对独立可控而受到人们的关注. 本文采用朗缪尔探针诊断技术测量了40.68 MHz激发的容性耦合Ar等离子体的特性(如电子能量概率分布、电子温度和密度等)随宏观参量的演变情况. 实验结果表明, 电子能量概率分布随着气压的增加从双麦克斯韦分布逐步转变为单麦克斯韦分布并最终演变为Druyvesteyn分布, 而射频激发功率的增加促进了低能电子布居数的增强; 在从等离子体放电中心移向边界的过程中, 低能电子的布居数显著下降, 而高能电子的布居则有所上升; 放电极板间距的变化直接导致了等离子体中电子加热模式的转变. 另外, 我们也对等离子体中的高低能电子密度和温度的分配情况进行了讨论.     

Diagnosis of a low pressure capacitively coupled argon plasma by using a simple collisional-radiative model

This paper proposes a simple collisional-radiative model to characterise capacitively coupled argon plasmas driven by conventional radio frequency in combination with optical emission spectroscopy and Langmuir probe measurements. Two major processes are considered in this model, electron-impact excitation and the spontaneous radiative decay. The diffusion loss term, which is found to be important for the two metastable states (4s[3/2]₂, 4s'[1/2]₀), is also taken into account. Behaviours of representative metastable and radiative states are discussed. Two emission lines (located at 696.5 nm and 750.4 nm) are selected and intensities are measured to obtain populated densities of the corresponding radiative states in the argon plasma. The calculated results agree well with that measured by Langmuir probe, indicating that the current model combined with optical emission spectroscopy is a candidate tool for electron density and temperature measurement in radio frequency capacitively coupled discharges.     

Collisionless bounce resonance heating in dual-frequency capacitively coupled plasmas

We present the experimental evidence of the collisionless electron bounce resonance heating (BRH) in low-pressure dual-frequency capacitively coupled plasmas. In capacitively coupled plasmas at low pressures when the discharge frequency and gap satisfy a certain resonant condition, the high energy beamlike electrons can be generated by fast sheath expansion, and heated by the two sheaths coherently, thus the BRH occurs. By using a combined measurement of a floating double probe and optical emission spectroscopy, we demonstrate the effect of BRH on plasma properties, such as plasma density and light emission, especially in dual-frequency discharges.     

Driving frequency effects on the mode transition in capacitively coupled argon discharges

A one-dimensional fluid model is employed to investigate the discharge sustaining mechanisms in the capacitively coupled argon plasmas, by modulating the driving frequency in the range of 40 kHz-60 MHz. The model incorporates the density and flux balance of electron and ion, electron energy balance, as well as Poisson's equation. In our simulation, the discharge experiences mode transition as the driving frequency increases, from the γ regime in which the discharge is maintained by the secondary electrons emitted from the electrodes under ion bombardment, to the α regime in which sheath oscillation is responsible for most of the electron heating in the discharge sustaining. The electron density and electron temperature at the centre of the discharge, as well as the ion flux on the electrode are figured out as a function of the driving frequency, to confirm the two regimes and transition between them. The effects of gas pressure, secondary electron emission coefficient and applied voltage on the discharge are also discussed.     

Particle simulation of radio-frequency plasma discharges of methanefor carbon film deposition

Particle-in-cell/Monte Carlo (PIC/MC) simulations of capacitively coupled radio-frequency (RF) glow discharges were carried out for low pressure CH₄ plasmas. The present computational scheme includes the motions and collisions of both neutral and charged particles. The CH₄ plasma is modeled by combining a one-dimensional PIC/MC method with a polyatomic particle collision scheme. The model considers the motions of CH₄, CH₄⁺, CH₃, C₂H₅, H₂, H, and electrons. Space and time dependent results show ionization rate is high at the sheath region. The dissociation rate of CH₄ is found to be high at the sheath as well as in the plasma bulk. Deposition rate of carbon film is calculated by sampling impinging particles at at the powered electrode. The calculations show that neutral radicals are the major depositing species for the cases studied. Ion energy impinging to the electrode was found to be strongly dependent on the “imposed” dc bias (as opposed to self-bias) voltage for a given RF voltage. Deposition rate was found to be almost independent of the “imposed” dc bias voltage as the RF voltage remained constant     

短管螺旋波放电中等离子体参数测量和模式转化研究

对长度为45 cm的短放电管螺旋波放电等离子体进行了Langmuir探针、原子发射光谱以及集成电荷耦合检测器(ICCD)检测诊断,研究螺旋波等离子体的放电特性.Langmuir探针数据显示电子密度在射频功率增加过程中出现两次大幅增长,由此确认了放电模式的转换及螺旋波放电模式的出现.发射光谱测量结果与Langmuir探针测量的电子密度数据一致,发现Ar原子和Ar离子的谱线强度与放电模式变化有着密切相关性.而通过对不同放电模式的ICCD测量,获得射频功率吸收因放电模式转变而变化的方式,认为放电模式转换时电子行为和能量传递方式也发生着变化.     

大气压氩气/空气针-环式介质阻挡放电发射光谱诊断

为了更加深入地了解氩气/空气等离子体射流内的电子输运过程及化学反应过程,通过针-环式介质阻挡等离子体发生器在放电频率10 kHz,一个大气压条件下对氩气/空气混合气进行电离并产生了稳定的等离子体射流。通过发射光谱法对不同峰值电压下氩气/空气等离子体射流的活性粒子种类、电子激发温度及振动温度进行了诊断。结果表明,射流中的主要活性粒子为N₂的第二正带系、Ar Ⅰ原子以及少量的氧原子,其中N₂的第二正带系的相对光谱强度最强、最清晰,在本试验的发射光谱中没有发现N+₂的第一负带系谱线,这说明在氩气/空气等离子体射流中几乎没有电子能量高于18.76 eV的自由电子。利用Ar Ⅰ原子激发能差较大的5条谱线做最小二乘线性拟合对等离子体射流的电子激发温度进行了计算,得到大气压氩气/空气等离子体射流的电子激发温度在7 000~11 000 K之间。随峰值电压的增大,电子激发温度表现出先增大后减小的变化趋势,这说明电子激发温度并不总是随峰值电压的增长单调变化的。通过N₂的第二正带系对等离子体振动温度进行了诊断,发现大气压氩气/空气等离子体射流振动温度在3 000~4 500 K之间,其随峰值电压的增大而减小,这意味着虽然峰值电压的提高可有效提高自由电子的动能,但当电子动能较大时自由电子与氮分子之间的相互作用时间将会缩短,进而二者之间的碰撞能量转移截面将会减小,从而导致等离子体振动温度的降低。     

LIF diagnostics of hydroxyl radical in a methanol containing atmospheric-pressure plasma jet

In this paper, a pulsed-dc CH_3OH/Ar plasma jet generated at atmospheric pressure is studied by laser-induced fluorescence(LIF) and optical emission spectroscopy(OES). A gas–liquid bubbler system is proposed to introduce the methanol vapor into the argon gas, and the CH3OH/Ar volume ratio is kept constant at about 0.1%. Discharge occurs in a 6-mm needle-to-ring gap in an atmospheric-pressure CH_3OH/Ar mixture. The space-resolved distributions of OH LIF inside and outside the nozzle exhibit distinctly different behaviors. And, different production mechanisms of OH radicals in the needle-to-ring discharge gap and afterglow of plasma jet are discussed. Besides, the optical emission lines of carbonaceous species, such as CH, CN, and C_2 radicals, are identified in the CH_3OH/Ar plasma jet. Finally, the influences of operating parameters(applied voltage magnitude, pulse frequency, pulsewidth) on the OH radical density are also presented and analyzed.     

Measurements of plasma parameters in capacitively coupled radio frequency plasma from discharge characteristics: Correlation with optical emission spectroscopy

Plasma parameters from the discharge characteristics of a 13.56 MHz capacitively coupled radio frequency Ar plasma are evaluated on the basis of homogeneous discharge model for wide range of operating pressure. The homogeneous discharge model of capacitively coupled radio frequency discharge is modified to take into account the nonlinear plasma series resonance effect. The effect of drift velocity of the electron due to change in radio frequency electric field and operating pressure is also considered. Considerable dependent of plasma parameters on the drift velocity of the electron as well as on the plasma series resonance effect are observed in low pressure. An irregular variation of calculated plasma density with operating pressure is observed, which is reconfirmed with optical emission spectroscopy.     

Effect of driving frequency on electron heating in capacitively coupled RF argon glow discharges at low pressure

A one-dimensional(1D) fluid model on capacitively coupled radio frequency(RF) argon glow discharge between parallel-plates electrodes at low pressure is established to test the effect of the driving frequency on electron heating. The model is solved numerically by a finite difference method. The numerical results show that the discharge process may be divided into three stages: the growing rapidly stage, the growing slowly stage, and the steady stage. In the steady stage,the maximal electron density increases as the driving frequency increases. The results show that the discharge region has three parts: the powered electrode sheath region, the bulk plasma region and the grounded electrode sheath region. In the growing rapidly stage(at 18 μs), the results of the cycle-averaged electric field, electron temperature, electron density, and electric potentials for the driving frequencies of 3.39, 6.78, 13.56, and 27.12 MHz are compared, respectively. Furthermore,the results of cycle-averaged electron pressure cooling, electron ohmic heating, electron heating, and electron energy loss for the driving frequencies of 3.39, 6.78, 13.56, and 27.12 MHz are discussed, respectively. It is also found that the effect of the cycle-averaged electron pressure cooling on the electrons is to "cool" the electrons; the effect of the electron ohmic heating on the electrons is always to "heat" the electrons; the effect of the cycle-averaged electron ohmic heating on the electrons is stronger than the effect of the cycle-averaged electron pressure cooling on the electrons in the discharge region except in the regions near the electrodes. Therefore, the effect of the cycle-averaged electron heating on the electrons is to "heat" the electrons in the discharge region except in the regions near the electrodes. However, in the regions near the electrodes, the effect of the cycle-averaged electron heating on the electron is to "cool" the electrons. Finally, the space distributions of the electron pressure cooling the electron ohmic heating and the electron heating at 1/4 T, 2/4 T, 3/4 T, and 4/4 T in one RF-cycle are presented and compared.