Fabrication of SiGe optical waveguides using VLSI processingtechniques

The fabrication of rib waveguides in SiGe using the local oxidation of silicon (LOCOS) was investigated. Samples consisted of strained Si_.97Ge_.03 or Si_.94Ge_.06 waveguiding layers with silicon cladding layers. The structural stability of these strained layers during thermal cycling up to 1050°C was examined using X-ray rocking curve analysis, scanning electron microscopy, and Nomarski microscopy of etched samples. Since single SiGe layers sufficiently thick to support optical waveguiding are typically above the equilibrium critical thickness, dislocation formation during high-temperature processing is unavoidable. This work concentrated on minimizing these dislocations. It was found that the dislocation density induced by the processing can be minimized by using a strain-compensating mask layer as a barrier to oxidation. For a specified thermal oxide layer thickness, higher oxidation temperatures were found to minimize the dislocation density relative to oxidation at temperatures closer to the metastable limit. Furthermore, the large birefringence found in all strained-layer SiGe waveguides is significantly reduced after LOGOS processing. These effects were used to fabricate the first reported optical waveguides and photonic devices in SiGe using standard VLSI-type processing. The device is a 1.3/1.55-μm duplexer with wavelength isolation of roughly 10 dB     

Fabrication of surface plasmon waveguides and integrated components on Cytop

The fabrication and physical characterisation of waveguides and integrated components on Cytop are described. The waveguides consist of a thin narrow Au stripe, on an optically infinite layer of Cytop. The integrated components implemented with this waveguide consist of Y-junctions, Mach-Zehnder interferometers and couplers. The waveguides and components are dimensioned such that they propagate long-range surface plasmon-polariton waves when cladded with an index-matched fluid. The fabrication process flow and individual process steps are described in detail. Physical characterisation was conducted on structures having undergone intermediate process steps and on finished structures. The attenuation of waveguides measured through cut-back is in good agreement with theoretical expectations, and mode outputs observed via an infra-red camera are of very good quality. The waveguides and components are useful for (bio)chemical sensing in aqueous solutions.     

A SIMPLE SOLUTION FOR MULTILAYER METALLIC OPTICAL WAVEGUIDES

A simple solution for a multilayer metallic optical waveguide by transforming it intoan equivalent three-layer slab waveguide is presented. The dispersion relation of the equivalentthree-layer slab waveguide is solved by using a simple iterative formula. This method itself isexact and can approach any accuracy desired. Moreover, the numerical results for four-layer andfive-layer structures show that the second-order solution is also accurate enough. It is simple andhas the same form of expressions for TE and TM modes and for different layer structures.     

Phase matched magneto optical single mode rib waveguides based on geometrical adjustments

In this work, we demonstrate via numerical simulation the design rules that must be imposed on the geometry of magneto optical rib waveguides to make them behave as single-mode and phase matched rib waveguides.     

A MATRIX METHOD FOR SOLVING PLANAR DIELECTRIC OPTICAL WAVEGUIDES

A matrix method used in multilayer stack of dielectric films is applied-to planar dielectric optical waveguides. A simple and applicable method for obtaining characteristic equation is presented.     

Fabrication of planar polymer waveguides for evanescent-wave sensing in aqueous environments

We present a detailed account of processing issues related to fabrication of optical waveguide sensors intended for evanescent-wave sensing in aqueous solutions or surface-bound fluorescence excitation in biological samples. The waveguides consist of a polymer layer on top of a fluoropolymer (Cytop^™) cladding. The fluoropolymer is closely index-matched to water, providing a symmetric cladding environment which simplifies optical excitation and provides tunability in penetration depth not available with other evanescent-wave techniques. We present methods of controlling the wettability of the fluoropolymer surface and improving adhesion to the core waveguide layer. Furthermore, we demonstrate the application of the waveguide structure to fluorescence imaging of cultured cells.     

Fabrication of single-mode polymeric optical waveguides bylaser-beam writing

A laser-beam writing system is developed for large-area optical waveguide fabrication. Single-mode embedded channel optical waveguides are successfully fabricated on both 4- and 8-in silicon substrates using deuterated fluoromethacrylate polymers by laser-beam writing in photoresist and dry etching. The propagation loss of the waveguides is as low as 0.1 dB/cm at 1.3 μm     

Cu离子交换波导的制备和折射率分布的表征

用Cu离子交换技术制备了玻璃平面光波导,利用IWKB法与离子浓度计算折射率的方法结合,得到了Cu 和Cu2 相对应的折射率分布.当离子交换深度较深时,折射率变化主要是由Cu 引起,且折射率变化较小;而当深度较浅时,折射率变化则是由Cu 和Cu2 共同作用的结果,而Cu2 的对折射率变化的贡献集中在玻璃表面.通过离子浓度计算得出5 min交换时间的折射率分布呈现准梯度折射率分布形状,而随着离子交换时间的增加所制备的平面波导通过棱镜耦合无法测到波导模式,这可能是由于波导表面折射率下降所致,其机理可能是由于Cu 的外扩散和大离子直径的Cu2 在玻璃表面附近产生的应力在高温下退火被释放的共同结果.     

电场辅助离子交换制备玻璃光波导

使用电场辅助离子交换和热离子交换技术在玻璃基片上制作了平板波导。实验结果表明,这两种方法制作的波导的有效折射率分布不同,电场辅助离子交换技术制作的波导有效折射率呈近似阶跃型分布,而热离子交换制作的波导有效折射率分布为渐变型。经数值计算发现,近似阶跃型折射率分布的波导对光场限制得更好,更适用于制作有源光器件和集成光器件。     

Fabrication of optical waveguides by the outside vapor deposition process

The outside vapor deposition process (OVD) represents one of the principle vapor deposition methods used to make glass fiber optical waveguides [1], [2]. In this brief review, each of the basic process steps (deposition, sintering, drawing) are described and the present performance capabilities are presented. Process improvements leading to hydroxyl removal, increased numerical aperture (NA), and long wavelength operation are discussed. Selected examples of fiber compositions and properties are tabulated which range from high-NA fibers suitable for short-distance applications through very-high-performance fibers for long-distance transmission.     

Fabrication of ion-exchanged optical waveguides from dilute silver nitrate melts

Optical waveguides have been fabricated from silver nitrate melts diluted with sodium nitrate. Several important advantages are gained, including control over the surface refractive index value. On the basis of regular solution theory, the relationship between the surface index and the melt dilution is determined. Modification of the index profile with dilution, as predicted by interdiffusion theory, is discussed and the self-diffusion constant of silver ions in a typical soda-lime glass is measured.     

Fabrication of planar dielectric waveguides with high optical damage threshold

We realized with a simple inexpensive process planar dielectric waveguides for the visible with the following improved properties: The waveguiding layers are mixed oxide films (∼40 percent TiO2in SiO2). They are hard and durable against mechanical and chemical attack. The losses are low and comparable to other planar waveguide materials. The films withstand high energy densities and intensities for pulsed and CW Laser irradiation, respectively.     

飞秒激光直写磁光玻璃波导研究

用飞秒激光在硼铝硅酸盐类磁光玻璃中直写光波导 。对比了 飞秒激光在TG20和TG28两种Tb³⁺浓度不同的硼铝硅酸盐玻璃中的磁光波导的效果 ,并研究 了飞秒激光脉冲的能量和偏振对波导的模式以及Verdet常数的影响。实验结果表明,圆偏振 光具有更低的 阈值能量,且诱导的折射率增量高于同功率的线偏振光,首次在实验上证明飞秒直写加工硼 铝硅酸盐磁光 玻璃时,折射率的改变主要源于离子键的三或四光子吸收过程。磁光系数测量表明, 飞秒激光的功 率与偏振对TG28中波导Verdet常数的影响较弱,Verdet常数损失量小于体材料的15%,而在TG20中 却可以达到70%。实验结果表明,TG28比TG20更适用于飞秒激光加工 磁光微结构,即通过对 磁光玻璃中掺杂离子浓度的选择,可以实现高磁光系数、高折射率调制的光学微结构的制备 。     

非线性介质膜波导中高阶TE模的色散特性

用微扰方法对非线性波动方程求解,导出了各阶近似下非线性介质膜波导中高阶TE模的色散方程和截止波长。研究了高阶TE模的色散特性。计算结果表明,具有功率激发阈值的高阶模的一个传播功率可能对应两个不同的传播常数,具有光学开关的特性。     

Fabrication of sapphire rib waveguides using a femtosecond laser

We demonstrate a method for fabricating sapphire rib waveguides with femtosecond laser micromachining technology. Finite difference beam propagation method (FD-BPM) is applied to design sapphire rib waveguides. We explore the process of etching on a sapphire substrate surface via direct laser ablation. Rib waveguides that satisfies the dimensions of our design were fabricated. Actual light propagation performance is tested, and with the cut-back method, the insertion loss of 2.9±0.5 dB/cm is measured.     

Fabrication and characterization of polymer optical waveguides with integrated micromirrors for three-dimensional board-level optical interconnects

This paper describes the fabrication and characterization of optical/electrical printed circuit boards (O/E-PCB) with embedded multimodal step index (MM-SI) waveguides and integrated out-of-plane micromirrors (IMMs) for three-dimensional (3-D) optical interconnects. Optical circuitry is built up on PCBs using UV lithography; 45/spl deg/ input/output (I/O) couplers are fabricated by inclined exposure. Commercial polymers are used as optical core and cladding materials. Critical mirror properties of angle, surface quality, reflectivity, and coupling efficiency are characterized experimentally and theoretically. Optical and scanning electron microscopy, white light interferometry, and fiber scanning method are used in the investigations. Sloping profiles measured as a function of the incident light showed the attainment of mirror angles of /spl alpha/=36/spl deg/-45/spl deg/ with /spl plusmn/2/spl deg/ consistency. Near-field optical imaging with a white light source showed that out-of-plane beam turning was achieved. Topography investigations revealed a rectilinear negative tapering shape regardless of the incoming beam angle or type of substrate. However, higher substrate reflectancy was observed to lower the mirror angle. The average propagation loss measured for 10-cm-long waveguides at /spl lambda/=850 nm by the cut-back method was 0.60 dB/cm; the excess loss calculated for the mirror coupling was 1.8-2.3 dB. The results showed that the IMMs can be incorporated in O/E-PCBs to couple light in and out of planar waveguides. Furthermore, the presented results indicate that optical waveguides with integrated micromirrors for optical 3-D wiring can be produced compatible with volume manufacturing techniques.     

Hybrid optical switch using passive polymer waveguides andsemiconductor optical amplifiers

Optical switching can be performed by using optical amplifiers combined with a passive waveguiding network. Recently, most of the effort in optical amplifier switch modules have been focused on monolithic switches in which the entire device is fabricated on an InP substrate together with the semiconductor optical amplifiers (SOA's). In this paper, we investigate the use of SOA's with passive polymer waveguides to make hybrid switches of varying sizes. The optical amplifiers serve dual purposes, gating the signal and amplifying the signal. Amplification is needed in order to offset the losses associated with the passive waveguide elements as well as the losses from component misalignments in the switch module. Our analysis finds the largest switch module size that can be made with the architecture used. We also calculate the maximum number of switch modules which can be cascaded in order to retain a bit-error rate (BER) under 10^-9     

倒装焊芯片的焊球制作技术

介绍了芯片倒装焊的重要意义、发展趋势、基本的焊球类型、制作方法及焊球质量的检测技术。     

Electromagnetic properties of inverted dielectric waveguides

We present the inverted Π dielectric waveguide as an alternative for designing microwave devices as well as electromagnetic band gap structures. Inverted Π dielectric waveguides in cascade, and with high-index contrast, are enclosed by metallic rectangular waveguides. The generalized scattering matrix concept, together with the generalized telegraphist equations (GTE) formulism and the Modal-Matching Technique (MMT) were implemented for theoretical analysis. Numerical and experimental results confirm the possibilities of the new dielectric waveguide for designing single and low-cost microwave devices.     

Formation of lithium niobate-tantalate waveguides

Low loss diffused lithium niobate-tantalate waveguides exhibiting strong electrooptic coefficients have been made by a simple processing procedure. The formation of these waveguides takes place by the conversion of a Nb metal film to Nb oxide at a low temperature, followed by diffusion of Nb into the LiTaO₃ substrate at about 1100°C. The diffused layer has a Gaussxan composition profile. Its measured refractive index is consistent with that calculated by interpolation between the indices of LiNbO₃, and LiTaO₃. The research reported in this paper was jointly sponsored by the Office of Naval Research, Arlington, Virginia and RCA Laboratories, Princeton, New Jersey. This paper is based on a presentation at the Conference on Preparation and Properties of Electronic Materials, Boston, Massachusetts, September 1974.