频闪干涉仪在微机电系统动态表征中的应用

微机电系统(MEMS)测试的主要目的是为工程开发中的设计和模拟过程提供数据反馈，其中一个重要方面就是MEMS器件动态特性的高速可视化．介绍了一种基于计算机控制的频闪干涉测试系统，用来测量可动MEMS器件的离面运动，实现了纳米级分辨力，该系统采用改进的相移干涉算法，使用一个大功率激光二极管(LD)作为频闪照明的光源，可以实现1MHz范围内大幅值(十几微米)的微运动测量，这种高离面灵敏度的测量方法特别适合进行微机械(光学)元件的动态特性测量．通过研究一个多晶硅微谐振器的动态特性说明了系统的强大功能。     

飞秒激光微精细加工技术与MEMS动态测试技术

本文阐述了飞秒激光微精细加工技术的原理特点,在微机械和微光学中的应用,及其在加工研究中取得的一些进展;提出一种基于计算机视觉、显微干涉及激光多普勒的 MEMS 的动态测试技术,实现 MEMS 器件平面运动幅度的快速测量、平面和离面运动的测量和离面运动的瞬态测量。     

飞秒激光微精细加工技术与MEMS动态测试技术

本文阐述了飞秒激光微精细加工技术的原理特点，在微机械和微光学中的应用，及其在加工研究中取得的一些进展；提出一种基于计算机视觉、显微干涉及激光多普勒的MEMS的动态测试技术，实现MEMS器件平面运动幅度的快速测量、平面和离面运动的测量和离面运动的瞬态测量。     

利用频闪成像方法进行微机电系统的计量

为了实现MEMS器件的计量,一个基于频闪成像原理的MEMS动态测试平台被构建,用于在全频率、相位和电压输入范围内表征器件的全三维运动。系统利用高亮度LED和LD作为脉冲光源,有效冻结MEMS器件的面内和离面运动,能在从静止状态到1MHz很宽的频率范围内对MEMS器件进行表征,达到了纳米级分辨力。通过实验对一个微谐振器进行了三维运动测量,在扫频和扫幅两种工作模式下,配合强大的数据分析软件,给出器件运动的幅频和相频特性曲线,为分析器件的动态性能提供了可靠数据。     

基于频闪法的MEMS动静态测试系统

为了对MEMS器件的3D形貌、垂向位移与形变、共振频率等特性进行精确的非接触式的测量,研制了一种基于激光频闪法的MEMS动静态测试系统.该系统以改进了的泰曼干涉仪为核心,采用激光照明,结合五步相移算法,获得MEMS器件静态表面的3D形貌图.使激光频闪的频率与MEMS器件驱动信号源频率一致可以获得相对"冻结"不变的3D形貌.改变频闪激光相对于MEMS器件驱动信号源的相对相位延时,可以获得周期内的MEMS器件离面运动轨迹等参数.本文设计并实现了与该系统配套的数据处理软件.该系统对于离面运动的测量精度可达1nm,最高测试频率可达500kHz.通过对可变形反射镜的测试验证了该系统的可靠性与通用性.     

基于分形小波变换的MEMS动态模糊图像亚像素检测技术

基于机器微视觉的微机电系统（MEMS）动态测试系统,提出了一种分形小波变换亚像素检测技术提取MEMS运动轨迹算法.该算法结合电耦合器件（CCD）成像机理,利用图像的分形参数进行随机分形插值对图像边缘进行重建,通过小波变换实现重建后图像亚像素精度的边缘检测.在连续光照明条件下,对MEMS平面微运动模糊图像进行检测处理,提取和分析了MEMS运动轨迹.将该方法和在频闪条件下测得的MEMS器件的平面微运动幅值的结果进行了比对分析和讨论.由实验结果可以看出,本方法有较高的测量精度,其测量绝对误差小于0.02像素.     

国外MEMS计量测试技术研究现状及借鉴

随着体积小、精度高、智能化的MEMS器件得到越来越多的应用,MEMS计量测试技术的研究越来越重要.为了进一步提高和完善我国MEMS计量测试技术,介绍了国外多个机构和组织的MEMS计量规划和技术现状,梳理了先进的MEMS计量测试技术研究工作,指明了在哪些方面需要借鉴国外先进的研究经验和成果.可以帮助国内研究者了解国内外M...     

显微干涉法在MEMS结构三维形貌测试中的应用

鉴于三维形貌在微机电系统(MEMS)测试领域的重要地位及显微干涉法在光学计量领域的高精度性能,开展了显微干涉法在MEMS结构三维形貌测试中的应用研究.基于小波变换极高的去噪性能及处理无载波条纹的优点,包裹相位采用连续小波变换的方法提取.基于展开相位拐点与符号歧义点的单应性,开展了通过检测展开相位拐点并对展开相位进行校正的方法恢复非单调条纹图的真实相位的研究.采用上述方法,成功测试了微梁的静、动态三维形貌及手机芯片的翘曲变形.该项研究为MEMS结构的三维形貌测试提供了高精度且简单快速的测量手段.     

MEMS器件虚拟运行中运动规律求解器的设计与实现

针对虚拟运行（在器件动态模型的基础上对MEMS器件运动性能进行评测的设计工具,其作用在于建立MEMS设计参数与器件运行之间的直接联系）中运动规律的联立、求解和实时仿真等问题,分析了几种典型MEMS器件的动态模型,提出了运动规律求解器的设计原理和体系结构,其中包括三项关键技术：物理运动规律在部件库系统中的形式化表示,物理问题自动求解的推理算法,以及离线编译的优化技术。最后,设计和实现了运动规律求解器原型系统,并在该系统中测试了微泵的虚拟运行,达到了通过修改阀片设计参数和膜片驱动参数实时观察虚拟运行中状态相应变化的目标,即在微泵的设计参数与其运行之间建立了直接的关联关系。     

基于模糊图像合成技术的MEMS平面微运动测试技术

随着微电子机械系统(MEMS)研究的深入和产业化的需求，捡测技术在其中的重要性越来越大．基于机器微视觉的MEMS动态测试系统．利用模糊图像合成技术对MEMS的平面微运动特性参数进行提取和分析．利用图像处理方法对MEMS谐振器做扫频和扫压测量，获得了MEMS器件的平面微运动特性，并对测量结果进行了分析和讨论．由实验结果可以看出，这种方法有较高的测量精度，测量重复性误差为100nm．     

Optical deflection measurement for characterization of microelectromechanical systems (MEMS)

Nonintrusive measurement of small out-of-plane motions of microscale structures is critical to the development of microelectromechanical systems (MEMS). This paper presents a low-cost deflection measurement system for MEMS structures based on a fiber optic displacement sensor. The system is demonstrated in the characterization of a microwave switch. The deflection system had a demonstrated sensitivity of 290/spl plusmn/32 /spl mu/V/nm over a deflection range of 100 /spl mu/m. The calibration and linearity of the system are described, and the static and dynamic performance is compared to more elaborate systems.     

Characterization of MEMS transducer performance using near-field scanning interferometry

Sophisticated ultrasonic transducer microarrays based on micro-electro-mechanical-systems (MEMS) technologies are quickly becoming a reality. A current challenge for many researchers is characterizing the dynamic performance of these and other micro-mechanical devices. In this work, the performance characteristics of a MEMS ultrasonic transducer array were successfully measured using a scanning heterodyne interferometer system. The dynamic response of the entire transducer array was measured, and the results were compared with theoretical predictions. Individual elements were found to vibrate with Bessel-like displacement patterns, and they were resonant at approximately 4 MHz. The full array showed variations in peak out-of-plane displacement levels across the device of ~16%, and isolated elements that were dramatically over-responsive and under-responsive. The measured variations across the array may have an undesirable impact on the performance of the transducer and its radiated field     

Eigenvalue Analysis of MEMS Components with Multi-defect using Infinite Element Method Algorithm

Manufacturing defects in the membrane of MEMS (Micro-Electro-Mechanical-Systems) structures have a significant effect on the sensitivity and working range of the device. Thus, in optimizing the design of MEMS devices, it is essential that the effects of membrane defects (e.g., cracks) can be predicted in advance. Accordingly, this study proposes the detailed two-dimensional Infinite Element Method (IEM) formulation with Infinite Element (IE)-Finite Element (FE) coupling scheme for analyzing the out-of-plane vibration of isotropic MEMS membranes containing one or more tip cracks. In the proposed approach, a degenerative computation scheme is used to condense the multiple element layers of the IEM domain to a single layer with master nodes at the boundary only. The validity of the proposed algorithm is demonstrated by comparing the results obtained for the vibration of a rectangular membrane with the analytical solutions and the solutions obtained using the conventional Finite Element (FE) method, respectively. The validated IEM algorithm is then coupled with an FE scheme to analyze various cracked membrane vibration problems. The results show that the fundamental frequency of the membrane changes in accordance with the membrane thickness, but is unaffected by the number of cracks. However, it is shown that a change in the location of the cracks may cause a shift or rotation of the wave peaks of the structural mode shape. In general, the IEM algorithm presented in this paper provides a fast modeling, direct, and accurate tool to simulate the effects of cracks on the dynamic response of MEMS membranes. Furthermore, the algorithm can be easily integrated with experimental methods in order to test for the presence of cracks as part of the MEMS membrane quality control process.     

基于激光光切法的MEMS器件高度在线检测方法(英文)

为了解决MEMS器件在加工过程中在线高度检测的困难,提出了一种基于激光光切法的MEMS器件高度在线检测方法.首先建立了用以验证激光光切法有效性的高度在线检测系统;然后提出了一种基于阈值分割、数学形态学、逐行扫描法和加权最小二乘法的快速激光中心线提取算法.实验表明,建立的高度在线检测系统的最大平均误差及误差的均方差分别为-6.38μm和1.87μm,且检测一次高度的时间为1.03 s.因此,激光光切法可以用于MEMS器件高度的在线检测.     

Lagrange's formalism for modeling of a triaxial microaccelerometer with piezoelectric thin-film sensing

Lagrange's equation has been used to construct a dynamic model of a triaxial microaccelerometer with piezoelectric thin-film sensing. A practical and representative structure is used throughout instead of the more usual spring-mass type simplified model. The elastic properties of both the silicon substrate and the PZT thin film are included by use of the laminated plate theory. The three out-of-plane bending motions of the accelerometer, symmetric, antisymmetric, and torsional, are analyzed. The accuracy of the dynamic model is confirmed by finite element analysis. The dependence of structural parameters on the characteristics of the accelerometer for two-end supported structures is discussed. The results show that the model gives close insight into the structural design of the triaxial microaccelerometer and will be a useful tool for the design, analysis, optimization, and characterization of a range of microaccelerometer devices, especially with regard to parameter optimization, and a tradeoff between sensitivity and resonant frequency.     

Nonlinear Dynamic Analysis of Electrostatically Actuated Resonant MEMS Sensors Under Parametric Excitation

Electrostatically actuated resonant microelectromechanical systems (MEMS) sensors have gotten significant attention due to their geometric simplicity and broad applicability. In this paper, nonlinear responses and dynamics of the electrostatically actuated MEMS resonant sensors under two-frequency parametric and external excitations are presented. The presented model and methodology enable simulation of the steady-state dynamics of electrostatic MEMS undergoing small motions. Response and dynamics of the MEMS resonator to a combination resonance are studied. The responses of the system at steady-state conditions and their stability are investigated using the method of multiple scales. The results showing the effect of varying the dc bias, the squeeze film damping, cubic stiffness, and ac excitation amplitude on the frequency response curves, resonant frequencies and nonlinear dynamic characteristics are given in detail. Frequency response, resonant frequency and peak amplitude are examined for variation of the dynamic parameters involved. This investigation provides an understanding of the nonlinear dynamic characteristics of microbeam-based resonant sensors in MEMS