Studies of Thermal Diffusion in Planar Absorber Designs for the Micro-X Rocket

We have studied a potential design for a transition-edge sensor (TES) microcalorimeter array for the Micro-X High Resolution Microcalorimeter X-ray Imaging Rocket. Diffusion simulations of a design that places a small TES in the center of the pixel with a large in-plane absorber around the TES demonstrate that with high-quality gold films (RRR >6) 2 eV resolution is attainable in a 700 μm pixel, meeting the Micro-X requirement. X-ray hits directly on the TES, however, create a non-gaussian high energy tail to the device response. This high energy tail contains 5% of incident photons and cannot be removed by lowering the optimal filter bandwidth.      

Distributed Antenna-Coupled TES for FIR Detector Arrays

We report progress toward large arrays of sensitive TES bolometers for submillimeter and far-infrared wavelengths with noise equivalent power (NEP) suitable for either imaging from a cooled space telescope or ground based spectroscopy. The arrays are based on a pixel design that makes use of a distributed transition edge sensor (TES) coupled to a slot antenna array. We have electrically characterized prototype detectors consisting of 256 TiN hot-electron TES microbolometers biased in parallel with T _c =50 mK. The measured electron-phonon thermal conductance of prototype devices is as low as 1.1 pW/K at 50 mK corresponding to an electrical NEP of 4×10⁻¹⁹ W/Hz^1/2. The time constant of two detectors with different geometries and transition widths was measured under a range of bias conditions. We have measured time constants ≳10⁻³ seconds, which is long enough for straightforward multiplexing with existing multiplexer technology.      

Development of a TES Microcalorimeter with a Mushroom Shaped Absorber Deposited on an Insulating Layer in an Overhang Region

A 3×3+1 superconducting transition-edge sensor (TES) microcalorimeter-array has been developed for the energy dispersive spectrometer performed on a transmission electron microscope. For increasing sensitive area, each TES microcalorimeter consisted of a Ti/Au bilayer and a mushroom shaped absorber. The mushroom shaped absorber is made from a Au layer of 0.5?μm thick. Geometrical dimensions of the surface area of the TES and the absorber are 350?μm×350?μm and 330?μm×330?μm, respectively. The absorber stem of 150?μm×150?μm in the cross sectional area is deposited on the center of the TES surface. A Ta₂O₅ insulating layer of 0.1?μm thick is inserted between the overhang layer of the absorber and the TES surface. One pixel of the TES microcalorimeter was operated for detecting X-ray photons emitted from an ⁵⁵Fe source.     

Large Area Transition Edge Sensor X-ray Microcalorimeters for Diffuse X-ray Background Studies

We are developing transition edge sensor (TES) mirocalorimeters with large area (0.72 mm \(^2\) ) absorbers to study the keV diffuse X-ray background. The goal is to develop a 2 cm \(^2\) array of 256 pixels for a sounding rocket payload. We present a pixel design which includes a Mo/Au bilayer TES coupled to a large (850 x 850 x 0.2 \(\upmu \) m \(^3\) ) gold absorber. Our simulations indicate that such a design can achieve energy resolution as good as 1.6 eV FWHM in our target bandpass of 0.05–1 keV. Additionally, thermal modelling shows that for typical gold layers, the position-dependent variation of the pulse shape over the large area of the absorber is not expected to significantly degrade this energy resolution. An array of devices will be fabricated in late 2013 to test this design.     

A Fabrication Route for Arrays of Ultra-low-Noise MoAu Transition Edge Sensors on Thin Silicon Nitride for Space Applications

We describe a process route to fabricate arrays of Ultra-low-Noise MoAu Transition Edge Sensors (TESs). The low thermal conductance required for space applications is achieved using 200?nm-thick Silicon Nitride (SiN _x ) patterned to form long-thin legs with widths of 2.1?μm. Using bilayers formed on SiN _x islands from films with 40 nm-thick Mo and Au thicknesses in the range 30 to 280 nm deposited by dc-sputtering in ultra-high vacuum we can obtain tunable transition temperatures in the range 700 to 70?mK. The sensors use large-area absorbers fabricated from high resistivity, thin-film β-phase Ta to provide impedance-matching to incident radiation. The absorbers are patterned to reduce the heat capacity associated with the nitride support structure and include Au thermalizing features to assist the heat flow into the TES. Arrays of 400 detectors at the pixel spacing required for the long-wavelength band of the far-infrared instrument SAFARI are now being fabricated. Device yields approaching 99% are achieved.     

Photodiode array for position-sensitive detection using high X-ray flux provided by synchrotron radiation

Synchrotron radiation provides a high intensity source over a large range of wavelengths. This is the prominent quality that has laid the foundations of the EXAFS development (Extended X-ray Absorption Fine Structure). EXAFS data can be collected in different ways. A full scan requires 5 to 10 min, compared to the one-day data collection of a conventional Bremsstrahlung X-ray tube.Recently, by using the new photodiode array (R 1024 SFX) manufactured by Reticon, it has been possible to reduce the data collection time to less than 100 ms. The key elements of this new EXAFS method are a dispersive optics combined with a position sensitive detector able to work under very high flux conditions. The total aperture of 2500 μm × 25 μm for each pixel is well suited to spectroscopic applications. Besides its high dynamic range (> 10⁴) and its linearity, the rapidity of the readout allows a flux of 10⁹–10¹⁰ photons/s over the 1024 sensing elements.     

Kilopixel X-ray Microcalorimeter Arrays for Astrophysics: Device Performance and Uniformity

We are developing kilopixel arrays of TES microcalorimeters to enable high-resolution x-ray imaging spectrometers for future x-ray observatories and laboratory astrophysics experiments. Our current array design was targeted as a prototype for the X-ray Microcalorimeter Spectrometer proposed for the International X-ray Observatory, which calls for a 40×40-pixel core array of 300?μm devices with 2.5?eV energy resolution (at 6?keV). Here we present device characterization of our 32×32 arrays, including x-ray spectral performance of individual pixels within the array. We present our results in light of the understanding that our Mo/Au TESs act as weak superconducting links, causing the TES critical current (I _c ) and transition shape to oscillate with applied magnetic field (B). We show I _c (B) measurements and discuss the uniformity of these measurements across the array, as well as implications regarding the uniformity of device noise and response. In addition, we are working to reduce pixel-to-pixel electrical and thermal crosstalk; we present recent test results from an array that has microstrip wiring and an angle-evaporated copper backside heatsinking layer, which provides copper coverage on the four sidewalls of the silicon wells beneath each pixel.     

Fabrication of Ultrasensitive TES Bolometric Detectors for HIRMES

The high-resolution mid-infrared spectrometer (HIRMES) is a high resolving power (R ~?100,000) instrument operating in the 25–122 μm spectral range and will fly on board the Stratospheric Observatory for Far-Infrared Astronomy in 2019. Central to HIRMES are its two transition edge sensor (TES) bolometric cameras, an 8 × 16 detector high-resolution array and a 64 × 16 detector low-resolution array. Both types of detectors consist of Mo/Au TES fabricated on leg-isolated Si membranes. Whereas the high-resolution detectors, with a noise equivalent power (NEP) ~ 1.5 × 10^?18 W/rt (Hz), are fabricated on 0.45 μm Si substrates, the low-resolution detectors, with NEP ~ 1.0 × 10^?17 W/rt (Hz), are fabricated on 1.40 μm Si. Here, we discuss the similarities and differences in the fabrication methodologies used to realize the two types of detectors.     

Design and Fabrication of Absorber Coupled TES Microbolometers on Continuous Silicon-Nitride Windows

The implementation of TES based microbolometer arrays will achieve unprecedented sensitivities for mm and sub-mm astronomy through fabrication of large format arrays and improved linearity and stability arising from strong electro-thermal feedback. We report on progress in developing TES microbolometers using Mo/Au thin films and Au absorbing structures. We present measurements of suppressing the thermal conductance through the etching of features on a continuous Silicon-Nitride window.      

Radiation Tolerance Evaluation of the Ti/Au Bilayer TES Microcalorimeter

We have developed Ti/Au bilayer transition-edge sensor (TES) microcalorimeters for future X-ray astrophysical satellite missions such as DIOS. One possible concern on the space use of TES microcalorimeters is its radiation tolerance. We have evaluated the performance of a Ti/Au bilayer (30/40 nm thick) TES microcalorimeter with 1.5  \(\upmu \) m thick Au absorber, before and after irradiation of 150 MeV proton beam with a total dose of 10 krad, corresponding to 10 years in the low Earth orbit. No significant changes on transition temperature, sensitivity, normal resistance, and critical current were observed. The energy resolution for 5.9 keV X-rays was 5.6  \(\pm \)  0.3 eV (FWHM) after the irradiation, which was slightly worse than 5.1  \(\pm \)  0.3 eV before the irradiation. We consider that our TES has sufficient radiation tolerance in orbit.     

Effect of On-Chip Magnetic Shielding for TES Microcalorimeters

We investigated the magnet field dependence of the X-ray pulse height and the critical current of a Ti/Au bilayer TES micro-calorimeter. The pulse height was strongly affected by the magnetic field intensity applied perpendicularly to the TES surface. We found that the critical current at zero temperature, I _c0, decreased by a factor of two by applying a magnet field of ∼10 μT. Our data are consistent with a TES sensitivity proportional to (I/I _c0)^−2/3, as predicted by the Ginzburg-Landau theory. This fact implies that the shape of the R–T curve of the TES is partly determined by the critical current of the superconductor. In order to make our TES microcalorimeters less sensitive to the external magnetic field, we fabricated devices equipped with on-chip magnetic shielding. One device has a turn-around style electrical lead made of Al, in which the return line is laid beneath the Ti/Au TES. Another device has a Nb layer deposited between a multi-layer membrane. We demonstrated that the devices were usable below 200 μT with small degradation of the pulse height and energy resolution.      

Materials Development for Auxiliary Components for Large Compact Mo/Au TES Arrays

Pursuing the feasibility of scaling conventionally-micromachined transition-edge-sensor (TES) arrays, we have undertaken a study of materials suitable for array integration. A potential limitation of increased pixel count is adequate heatsinking of each detector element to its base temperature. We describe technical approaches for heat sinking large compact TES microcalorimeter arrays and calculate the achievable heatsinking based on measured material parameters. Techniques include backside-deposited thick film copper on arrays with deep-etched wells in the substrates and electroplated gold and copper-filled micro-trenches on the substrate surface. Another limitation is the sensitivity of the thin film circuit elements to applied stress, which can arise in fabrication and mounting of arrays of increasing size. We have explored stress and deposition temperature sensitivity in our molybdenum-based bilayers. Such process parameters can impact options for array heat sinking and electrical interconnects.      

Development of Superconducting Multilayer Wiring for Large Arrays of TES X-Ray Microcalorimeters

We are developing TES (Transition Edge Sensor) X-ray Microcalorimeters for future X-ray astronomy missions such as DIOS (Diffuse Intergalactic Oxygen Surveyor). Standard wiring for a large-format array requires narrow and closely-packed configuration. This can cause deleterious crosstalk especially in the Frequency Domain Multiplexing readout. Hence we have employed multilayer wiring technique. In this paper, we tested a deposition of a TES film on the multilayer wiring by sputtering. Our first trial showed that the TES pixels have large residual resistances >50?mΩ and small critical currents of <1?μA. To improve the coverage of the TES film on the wiring, we increased the thickness of TES film (Ti/Au thickness of 100/200?nm). Also to remove an oxidation layer on the Al wiring, we strengthened a reverse-sputtering (150 W, 3?min) before the sputtering of TES. After these treatments, the TES film showed a sharp transition with small residual resistance (～1?mΩ) and large critical current (>30?μA).     

Effect of Magnetic Fields on TiAu TES Bolometers for the SAFARI Instrument on the SPICA FIR Telescope

At the Netherlands Institute for Space Research (SRON) we are developing Transition Edge Sensors (TES) bolometers for the SAFARI Imaging Spectrometer on the SPICA telescope. With the current design of the SPICA telescope a background magnetic field of about a Gauss with fluctuations of a couple percent is expected. The effect of this external magnetic field on the bolometer needs to be well understood in order to design effective shielding. We present the results of an investigation of magnetic field on the performance of TES bolometers. For this experiment we used a Ti/Au TES bolometer which has a measured NEP of 5.0×10^?19 W/Hz^1/2. The TES is exposed to a parallel and perpendicular magnetic field of varying strength and the baseline and responsivity are determined. We see that the bolometers are sensitive to the perpendicular field but are relative insensitive to the parallel magnetic field. Fluctuations with a period of 30?mG are present as function of perpendicular magnetic field.     

Fabrication of Au/Ti TESs for Optical Photon Counting

High efficiency and negligible dark-count rates of transition-edge sensor (TES) microcalorimeters as single photon detector at telecommunications and optical visible wavelengths make them powerful tools for quantum information and quantum computation. In this work we report details on the fabrication of Au/Ti for photon counting and analyse the effects on the critical temperature and the transition steepness of the structuring process and wiring material. Au/Ti films deposited by electron-beam at substrate temperature lower than 435 K show sharp transition and reproducible T _c . Moreover, we observe that TES with Al wiring are more stable and have better characteristics of TES with Nb wiring. Using 20 micron×20 micron Ti/Au TES single photon detection has been obtained in the UV-visible range.      

A High Energy Resolution Gamma-Ray TES Microcalorimeter with Fast Response Time

We report on the development of the fast response gamma-ray TES microcalorimeter composed of a bulk Sn absorber coupled to a Ti/Au TES. In order to realize a TES microcalorimeter with a large absorber and a fast response time, besides taking saturation and linearity into account, study of the effect of thermal diffusion in the absorber on energy resolution is essential. Therefore, we performed 3 dimensional simulations using SPICE to calculate the effect of thermal diffusion in the absorber on energy resolution. By fabricating a device with the optimized heat capacity of the absorber and the thermal conductance between the absorber and the TES based on the simulation result, we have demonstrated an energy resolution of 38.4±0.9 eV at 60 keV with a time constant of 0.5 ms.      

Can the Lateral Proximity Effect Be Used to Create the Superconducting Transition of a Micron-Sized TES?

Recent measurements of micron-sized Mo/Au bilayer TESs have demonstrated that the TES can behave like an S-S′-S weak link due to the lateral proximity effect from superconducting leads. In this regime the T _c is a function of bias current, and the effective T _c shifts from the bilayer T _c towards the lead T _c . We explore the idea that a micron-sized S-N-S weak link could provide a new method to engineer the TES T _c . This method would be particularly useful when small size requirements for a bilayer TES (such as for a hot-electron microbolometer) lead to undesirable shifts in the bilayer T _c . We present measurements of a variety of micron-sized normal Au ‘TES’ devices with Nb leads. We find no evidence of a superconducting transition in the Au film of these devices, in dramatic contrast to the strong lateral proximity effect seen in micron-sized Mo/Au bilayer devices. The absence of a transition in these devices is also in disagreement with theoretical predictions for S-N-S weak links. We hypothesize that a finite contact resistance between the Nb and Au may be weakening the effect. We conclude that the use of the lateral proximity effect to create a superconducting transition will be difficult given current fabrication procedures.     

Fabrication of TiO2/Au nanorod arrays employing a positive sacrificial ZnO template and their electrochromic property

A novel method to fabricate large scale TiO₂/Au nanorod array using a positive sacrificial ZnO template has been developed. This method includes a two-step process, (1) preparation of ZnO/Au nanorod array by a simple low-temperature hydrothermal process, and (2) preparation of TiO₂/Au nanorod array by electrochemically induced sol-gel process. The TiO₂/Au nanorod array has showed a reversible electrochromism in lithium-ion-containing organic electrolyte. The coloration and bleaching throughout a visible range can be switched on and off within a few seconds.     

Analyses on the operating point dependence of the energy resolution with a Ti/Au TES microcalorimeter

We examined the performance of a single pixel Ti/Au transition-edge sensor (TES) calorimeter for incident X-ray energies of Al-K, Cr-K, and Fe-K, as a function of the TES resistance. We find that the energy resolution does not always degrade with increasing energy. The best energy resolution of 5.7±0.9 eV at 6.4 keV is obtained, which is possibly even better than the baseline width of 6.5±0.2 eV. Assuming that the noise level is determined by the noise spectrum NS(f;RR+dR(E)) considering the resistance change of dR(E), instead of NS(f;R) at the operating point, these results may be explained by the fact that the noise decreases at the higher TES resistance. The pulse variation appears to have a minimum at a certain resistance of R+dR(E)48 mΩ, and the best energy resolution for each line is obtained at such an operating point, respectively. The pulse variation could be enhanced when the fluctuation of the TES sensitivity is large at R+dR(E).     

The Noise and Energy Resolution of the Ti/Au Bilayer X-ray TES Calorimeter with an Au Absorber

We fabricated the TES microcalorimeter with TES(Ti/Au) and gold absorber, and obtained FWHM energy resolution of 4.8±0.3 eV at 5.9 keV. The baseline resolution, i.e. the resolution determined by noise, was 4.1±0.1 eV. From the noise spectra we found that the square of the baseline resolution could be approximately decomposed into contributions of three noise components. They are estimated to be (2.5 eV)² (the intrinsic noise), (1.5 eV)² (the readout noise), and (3.0 eV)² (so-called excess noise). There is additional broadening of (2.5 eV)² from the baseline resolution. The excess noise is the largest limiting factor of the energy resolution of the device.