共查询到18条相似文献,搜索用时 62 毫秒
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应用光致发光 (PL )、电容 -电压 (C- V)、深能级瞬态谱 (DL TS)和光电导 (PC)技术系统研究 Al掺杂 Zn S1 - xTex 中与 Al有关的类 DX中心 .实验结果表明 ,Zn S1 - x Tex 中存在与 - 族半导体 DX中心相类似的性质 .获得与 Al有关的类 DX中心光离化能 Ei (~ 1.0 e V和 2 .0 e V)和发射势垒 Ee (0 .2 1e V和 0 .39e V) ,这表明 Zn S1 - x Tex大晶格弛豫的出现是由类 DX中心引起 相似文献
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利用分子束外延(MBE)技术,以5N的ZnCl2作为掺杂源,在半绝缘GaAs (001)衬底上异质外延生长ZnSe:Cl单晶薄膜.研究发现,掺入ZnCl2后,ZnSe外延层的结晶质量和表面形貌与本征ZnSe外延层相比变差,双晶X射线摇摆曲线(DCXRC)的ZnSe (004)衍射峰半峰宽(FWHM)从432 arcsec增大到529 arcsec,表面均方根粗糙度(RMS)从3.00 nm增大到3.70nm.当ZnCl2掺杂源炉的温度为170℃时,ZnSe样品的载流子浓度达到1.238×1019 cm-3,可以满足结型器件制作和隧道结材料设计的要求. 相似文献
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硅分子束外延中硼δ掺杂生长研究 总被引:3,自引:0,他引:3
利用硅分子束外延技术和B2O3掺杂源,成功地实现了硅中的硼δ掺杂,硼δ掺杂面密度NB可达3.4e14cm-2(1/2单层)以上,透射电镜所示宽度为1.5nm.我们首次用原位俄歇电子能谱(AES)对硼在Si(100)表面上的δ掺杂行为进行了初步的研究,发现在NB<3.4e14cm-2时,硼δ掺杂面密度与时间成正比,衬底温度650℃,掺杂源温度9000℃时,粘附速率为4.4e13cm-2/min;在NB>3.4e14cm-2时,粘附有饱和趋势,测量表明在硼δ掺杂面密度NB高达4.4e14c 相似文献
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用分子束外延技术(MBE)生长了以GaAs/AlAs超晶格替代AlxGa1-xAs所形成的P型半导体/超晶格分布布拉格反射镜(DBR).此分布布拉格反射镜的反射谱中心波长为850nm.由实验表明,19个周期的反射镜获得了高达99%以上的高反射率.与此同时,采取自行设计的二次钨丝掩膜质子注入法制成15μm×15μm的正方形电流注入区,以此测定P型反射镜的串联电阻,克服了湿化学腐蚀法中腐蚀深度不易控制及侧面同时被腐蚀的缺点,实验得出此P型反射镜的串联电阻仅为50Ω左右.在生长过程中,发现在只含一个铝源的分子束外延生长系统中,生长这种半导体/超晶格反射镜相对其他半导体/半导体反射镜要节省很多外延生长时间,因此较适合应用于多层结构的光电器件中. 相似文献
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分子束外延生长高应变单量子阱激光器 总被引:1,自引:1,他引:0
采用分子束外延方法研究了高应变 In Ga As/Ga As量子阱的生长技术 .将 In Ga As/Ga As量子阱的室温光致发光波长拓展至 116 0 nm,其光致发光峰半峰宽只有 2 2 me V.研制出 112 0 nm室温连续工作的 In Ga As/Ga As单量子阱激光器 .对于 10 0 μm条宽和 80 0 μm腔长的激光器 ,最大线性输出功率达到 2 0 0 m W,斜率效率达到 0 .84m W/m A,最低阈值电流密度为 45 0 A/cm2 ,特征温度达到 90 K. 相似文献
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半导体/超晶格分布布拉格反射镜(DBR)的分子束外延生长 总被引:2,自引:1,他引:2
用分子束外延技术 (MBE)生长了以 Ga As/Al As超晶格替代 Alx Ga1 - x As所形成的 P型半导体 /超晶格分布布拉格反射镜 (DBR) .此分布布拉格反射镜的反射谱中心波长为 85 0 nm.由实验表明 ,19个周期的反射镜获得了高达 99%以上的高反射率 .与此同时 ,采取自行设计的二次钨丝掩膜质子注入法制成 15 μm× 15 μm的正方形电流注入区 ,以此测定 P型反射镜的串联电阻 ,克服了湿化学腐蚀法中腐蚀深度不易控制及侧面同时被腐蚀的缺点 ,实验得出此 P型反射镜的串联电阻仅为 5 0 Ω 左右 .在生长过程中 ,发现在只含一个铝源的分子束外延生长系统中 ,生长这种半 相似文献
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Study of HgCdSe Material Grown by Molecular Beam Epitaxy 总被引:1,自引:0,他引:1
Much progress has been made in developing high-quality HgCdTe/Si for large-area focal-plane array (FPA) applications. However,
even with all the material advances made to date, there is no guarantee that this technology will be mature enough to meet
the stringent FPA specifications required for long-wavelength infrared (LWIR) systems. With this in mind, the Army Research
Laboratory (ARL) has begun investigating HgCdSe material for infrared (IR) applications. Analogous to HgCdTe, HgCdSe is a
tunable semiconductor that can detect any wavelength of IR radiation through control of the alloy composition. In addition,
several mature, large-area bulk III–V substrates are nearly lattice matched to HgCdSe, giving this system a possible advantage
over HgCdTe, for which no scalable, bulk substrate technology exists. We have initiated a study of the growth of HgCdSe using
molecular beam epitaxy (MBE). Growth temperature and material flux ratios were varied to ascertain the best growth conditions.
Smooth surface morphology has been achieved using a growth temperature much lower than that used for HgCdTe. Additionally,
zero void defects were nucleated at these lower temperatures. Preliminary data suggest a linear relationship between the Se/Cd
flux ratio used during growth and the cutoff wavelength as measured by Fourier-transform infrared (FTIR) spectroscopy. 相似文献
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Defects in HgTe and CdHgTe Grown by Molecular Beam Epitaxy 总被引:1,自引:0,他引:1
E. Selvig C.R. Tonheim T. Lorentzen K.O. Kongshaug T. Skauli R. Haakenaasen 《Journal of Electronic Materials》2008,37(9):1444-1452
The defect morphology in HgTe and CdHgTe was studied in (211)B-oriented layers grown in a 20°C temperature range around the
optimal growth temperature. The density of defects varies strongly with the growth temperature. In HgTe, the shape of the
microvoid defects is very sensitive to the growth temperature and can be used to determine the deviation from the optimal
growth temperature. Using thermodynamical modeling, the optimal growth temperature for CdHgTe can then be calculated. We describe
a mechanism for the formation of microvoids and needles which involves preferential surface diffusion of Te combined with
an impurity or defect on the substrate. Microvoids on (111)B-oriented partially twinned HgTe layers were also studied. The
microvoids in the twinned parts of the layer were found to be rotated 180 deg relative to the untwinned parts of the layer. 相似文献
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用射频分子束外延技术研制出了室温迁移率为1035cm2/(V·s),二维电子气浓度为1.0×1013cm-2,77K迁移率为2653cm2/(V·s),二维电子气浓度为9.6×1012cm-2的AlGaN/GaN高电子迁移率晶体管材料.用此材料研制的器件(栅长为1μm,栅宽为80μm,源-漏间距为4μm)的室温非本征跨导为186mS/mm,最大漏极饱和电流密度为925mA/mm,特征频率为18.8GHz. 相似文献