柔性透明导电薄膜及其制备技术

在柔性衬底上制作的器件具有重量轻、柔软等优点,所以柔性透明导电薄膜成为当前的研究热点.柔性衬底存在不耐高温的缺点,从而限制了柔性透明导电薄膜的性能.总结了近年来对柔性衬底材料处理的方法,并介绍了柔性透明导电ITO薄膜和ZAO薄膜,分析了它们的研究现状,同时讨论了柔性薄膜的制备方法,最后对柔性透明TCO领域未来的研究和应用工作进行了展望.     

柔性透明导电膜衬底材料的研究进展

综述了柔性透明导电膜材料的应用以及可用作柔性透明导电膜衬底材料的种类、存在的问题和可行的解决方法。介绍了柔性透明导电膜材料的优点、应用和国内外研究现状。重点介绍了可用作柔性透明导电膜衬底的聚合物材料—聚酰亚胺和聚酯,分析了各自的特点。通过分析柔性衬底存在的不足,寻求可行的解决方法,使柔性衬底可以更好地满足导电膜对衬底材料的要求,为柔性衬底材料的设计提供依据。     

ITO透明导电膜制备工艺研究

电子器件柔性化、超薄化对柔性ITO透明导电膜需求越来越为迫切,但是由于ITO薄膜本身性质局限和柔性衬底问题,使得ITO透明导电膜的光电性能极容易受到影响。以PET柔性基材制备ITO膜为例,从ITO透明导电膜膜系结构出发,研究就ITO透明导电膜的制备工艺,对提高ITO透明导电膜的光电性能进行简要的探讨。     

基于银纳米线的柔性透明导电薄膜的研究

为了提高透明导电膜的柔性和导电性,近年来银纳米线透明导电薄膜的制备受到越来越多的关注。银纳米线的合成方法主要为水热合成法、种子诱导法等。本文论述了银纳米线的制备技术及其优缺点,阐述当前银纳米线透明导电薄膜领域的最新研究成果,并对其市场应用及发展趋势进行了展望。     

透明导电薄膜材料的研究与发展趋势

本文简述了透明导电薄膜材料的发展现况和趋势,特别是对目前研究比较活跃的透明导电氧化物(TCO)及金属基复合多层透明导电膜的研究动态.材料设计原理及其应用进行了重点介绍,并就透明导电薄膜材料目前存在的问题及发展方向进行了分析讨论.     

透明导电氧化物薄膜材料及其制备技术研究进展

综述了透明导电氧化物(TCO)薄膜的结构、光电性能以及TCO薄膜制备技术的研究进展.ITO薄膜性能优异,是重要的平面显示器件用材料.掺铝ZnO薄膜价格低廉,是极具开发前景的ITO薄膜的替代材料.柔性衬底氧化物半导体透明导电薄膜的开发和应用将扩大TCO薄膜的应用领域.     

透明导电薄膜材料的研发态势

简述了透明导电薄膜材料的研究现状与发展趋势，特别是对目前研究比较活跃的透明导电氧化物(TCO)及金属基复合多层透明导电膜的研究动态，材料设计原理及其应用进行了重点介绍，并就透明导电薄膜材料目前存在的问题及发展方向进行了分析讨论。     

柔性衬底氧化物半导体透明导电膜的研究进展

回顾和评述了柔性衬底氧化物透明导电膜（包括锡掺杂的三氧化二铟ITO薄膜、铝掺杂的氧化锌AZO薄膜等）的研究进展情况。报道了在柔性衬底上制备的ITO膜、ZnO膜的光电性质对衬底种类、制备工芑及制备参数的依赖关系，给出了在此领域内应进一步进行的工作。     

有机-无机透明导电薄膜的研究进展

透明导电膜是一种重要的光电材料,应用广泛.以传统的无机氧化物和导电高分子材料制备的导电薄膜虽然电学性能优良,但综合性能不甚理想.通过有机-无机杂化的透明导电薄膜能够借助各组成材料特性的互补作用使复合材料具有出色的综合性能.介绍了透明导电薄膜的种类、用途和特性,综述了有机-无机杂化导电材料在块体材料和透明导电薄膜方面的应用,并展望了其发展前景.     

薄膜太阳电池用TCO薄膜制造技术及其特性研究

阐述了玻璃衬底、柔性衬底透明导电氧化物薄膜(Transparent conductive oxides-TCO)以及硅基薄膜太阳电池应用方面的最新研究成果。绒面结构可以提高薄膜太阳电池效率和稳定性并降低生产成本。磁控溅射技术和LP-MOCVD技术是制造绒面结构ZnO-TCO薄膜(例如"弹坑"状和"类金字塔"状表面)的主流生长技术;高迁移率TCO薄膜(IMO、IWO、ZnO∶Ga等)以及柔性衬底TCO薄膜是研究开发的重点。     

Solution-processed metal nanowire mesh transparent electrodes

Transparent conductive electrodes are important components of thin-film solar cells, light-emitting diodes, and many display technologies. Doped metal oxides are commonly used, but their optical transparency is limited for films with a low sheet resistance. Furthermore, they are prone to cracking when deposited on flexible substrates, are costly, and require a high-temperature step for the best performance. We demonstrate solution-processed transparent electrodes consisting of random meshes of metal nanowires that exhibit an optical transparency equivalent to or better than that of metal-oxide thin films for the same sheet resistance. Organic solar cells deposited on these electrodes show a performance equivalent to that of devices based on a conventional metal-oxide transparent electrode.     

Comparison of ZnO:Al,ITO and carbon nanotube transparent conductive layers in flexible solar cells applications

In the paper the mechanical, optical and electrical parameters of transparent conductive layers (TCLs) made of carbon nanotubes and metal conductive oxides are explored and compared. All investigated materials are deposited on transparent, flexible polymer foils used for solar cell applications. Obtained results are compared with available parameters of rigid transparent conductive oxides (TCOs) as well as literature reports about Indium–Tin Oxide (ITO) on flexible substrates. Presented paper is a report from the preliminary stage of a new flexible solar cell construction.     

Low-temperature synthesis of thin graphite sheets using plasma-assisted thermal chemical vapor deposition system

We report the low-temperature synthesis of thin graphite sheets using a hybrid chemical vapor deposition (HCVD) system that combines plasma and thermal CVD (TCVD). Electron beam deposited Ni films were used as catalytic substrates, and methane was used as a carbon feedstock. The quartz tube was into two regions: core plasma region for efficient dissociation of methane and a TCVD region for thermal synthesis, respectively. After the syntheses at different TCVD temperatures from 550 °C to 900 °C, as-grown films were transferred to transparent polymeric substrates to apply as flexible conductive electrodes. Finally, it was found that thin graphite sheets consisting of ~ 15 graphene layers were synthesized at 600 °C using the HCVD system and could be applicable as transparent conductive films.     

Highly conductive and transparent carbon nanotube composite thin films deposited on polyethylene terephthalate solution dipping

In this letter we present highly conductive and transparent thin films of single-walled carbon nanotubes (SWCNT) and conductive polymer composite deposited on polyethylene terephthalate film substrates by solution dipping. The initial results show that 66 Ω/? sheet resistance can be achieved with 80% transmission at the wavelength of 550 nm. This result is much superior to the performances of the pure SWCNT thin films deposited using the same technique. The improvement is attributed to the increase of effective electric conductive tube-tube junctions in the CNT network.     

Large scale, highly conductive and patterned transparent films of silver nanowires on arbitrary substrates and their application in touch screens

The application of silver nanowire films as transparent conductive electrodes has shown promising results recently. In this paper, we demonstrate the application of a simple spray coating technique to obtain large scale, highly uniform and conductive silver nanowire films on arbitrary substrates. We also integrated a polydimethylsiloxane (PDMS)-assisted contact transfer technique with spray coating, which allowed us to obtain large scale high quality patterned films of silver nanowires. The transparency and conductivity of the films was controlled by the volume of the dispersion used in spraying and the substrate area. We note that the optoelectrical property, σ(DC)/σ(Op), for various films fabricated was in the range 75-350, which is extremely high for transparent thin film compared to other candidate alternatives to doped metal oxide film. Using this method, we obtain silver nanowire films on a flexible polyethylene terephthalate (PET) substrate with a transparency of 85% and sheet resistance of 33 Ω/sq, which is comparable to that of tin-doped indium oxide (ITO) on flexible substrates. In-depth analysis of the film shows a high performance using another commonly used figure-of-merit, Φ(TE). Also, Ag nanowire film/PET shows good mechanical flexibility and the application of such a conductive silver nanowire film as an electrode in a touch panel has been demonstrated.     

利用脉冲直流磁控溅射制备ZnO:Al薄膜的研究

利用中频脉冲直流磁控溅射法制备了平面ZnO:Al(AZO)透明导电薄膜,研究了沉积压力、衬底温度和溅射功率对AZO薄膜光电性能、薄膜稳定性的影响.结果表明:在较低沉积压力、衬底温度及溅射功率下,可获得具有低电阻率、高透过率、高稳定性的AZO薄膜.     

还原氧化石墨烯基纳米银线透明导电薄膜研究进展

透明导电薄膜已广泛应用于印刷电子领域,传统的透明导电薄膜氧化铟锡（ITO）因其高脆性低柔韧性而不能满足高速发展的柔性电子行业;纳米银线（AgNWs）和石墨烯均具有良好光学性能、导电性能以及机械性能,使其能成为制备透明导电薄膜的理想材料。综述了近年来还原氧化石墨烯（rGO）基AgNWs透明导电薄膜的研究进展。介绍了柔性导电薄膜的关键参数及rGO/AgNWs透明导电薄膜的成膜工艺;归纳了影响rGO/AgNWs透明导电薄膜光电性能的主要因素和相关研究;阐述了rGO/AgNWs透明导电薄膜在印刷电子领域的应用现状,并展望了rGO/AgNWs透明导电薄膜的未来发展趋势。     

Optical and electrical properties of reactively d.c. magnetron-sputtered In2O3:Sn films

The deposition of transparent conductive indium oxide doped with tin is investigated. Characterization of the d.c. magnetron-sputtered films shows that it is possible to obtain transparent conductive films from an InSn alloy by sputtering in a reactive atmosphere. This deposition method in combination with an appropriate anneal results in a very low light absorption and a high electrical conductivity of the films. In this paper the two-step deposition technique and the electrical and optical properties of the deposited transparent and conductive layers are described.     

Comparative study on early stages of film growth for transparent conductive oxide films deposited by dc magnetron sputtering

Early stages of film growth were investigated on three different kinds of representative transparent conductive oxide films including tin doped indium oxide (ITO), indium zinc oxide (IZO) and gallium doped zinc oxide (GZO) films deposited on unheated alkali free glass substrates by dc magnetron sputtering. The variations in sheet resistance, film coverage and average surface roughness showed clearly that ITO and GZO films possessed Volmer-Weber growth mode. In contrast, the evolution of islands is not clearly observed for IZO film. The nucleation density of IZO film is considered to be much higher than that of ITO and GZO films.