新型惯性式直线超声压电电机的运动机理及实验研究

提出了一种新型惯性式直线超声压电电机.该电机利用压电晶体的逆压电效应和惯性位移原理,由定子的轴向变形,通过摩擦力的作用,以惯性位移的形式传递运动.它由两部分组成,定子由具有位移放大功能的压电复合换能器和轴组成,动子为一带有缺口和环形凹槽的环.分析了该电机的工作原理,并通过仿真和实验相结合的方法分析了两种激励方式对电机性能的影响.实验结果表明:样机采用方波驱动比采用锯齿波驱动的效果好;在采用方波驱动信号驱动时,样机的最大空载速度可达到11 mm/s,最大输出力达到0.5 N.     

尺蠖型压电直线驱动器的动态特性

分析了尺蠖型压电直线驱动器的结构原理,建立了驱动器系统动力学模型。对驱动器定子进行了模态分析,并对分析结果进行了评价。对设计开发的驱动器样机输出特性进行了试验测试,实验测得驱动器单步输出位移稳定可靠,100 V驱动电压下,单步输出位移为9.8 μm。对驱动器直线动子的速度、加速度特性进行了测试,依据速度、加速度信号进一步分析了驱动器的动态响应特性。实验结果表明,所开发的驱动器具有动态特性好、运动稳定等优点。     

双向作动大行程二自由度稳像机构

针对光学稳像系统的双向动态大行程的设计要求,本文设计了一种可伸缩双向作动的压电作动器,并基于此压电作动器设计了二自由度稳像机构。压电作动器由一个收缩式三角位移放大机构和一个伸张式三角位移放大机构组成。位移放大机构可为压电平台提供足够的行程,柔性铰链可使平台结构更加紧凑。接着,利用有限元分析软件ANSYS对平台结构进行静力学仿真,模拟了平台的位移和应力变化。最后对原理样机进行了实验分析,实验结果显示所设计压电平台在低电压和低频率下有足够大的行程和足够快的响应速度,作动器在120V电压下的输出位移在67μm左右,基本满足稳像系统的性能要求,故平台结构的设计方案是可行的。     

基于铌酸锂制作光弹调制器用压电驱动器

基于石英(SiO2)制作光弹调制器(PEM)的压电驱动器时,存在机电耦合系数小、需高压驱动且谐振频率随温度漂移严重等缺陷,故本文研究了PEM的优化设计方法。考虑铌酸锂(LiNbO3)特殊的晶体结构,从理论上推导了LiNbO3晶片作为压电驱动器的可行性,并确定其切型为zyw/35°切。基于有限元分析软件COMSOL4.3a仿真,确定了晶片体积和谐振频率,设计了LiNbO3压电驱动器。对设计出的压电驱动器进行了压电性能测试,并和SiO2压电驱动器进行了比较。将LiNbO3压电驱动器和硒化锌(ZnSe)光弹晶体组合成PEM,用671nm激光进行了光弹调制实验。实验结果表明:实现相同位移时,SiO2压电驱动器需要的驱动电压是LiNbO3压电驱动器的100多倍,且后者横向长度伸缩振动模式单一性和稳定性均优于前者。驱动电压为3.76V时,671nm的激光通过基于LiNbO3压电驱动器的PEM的调制光程差为3.7μm。得到的结果表明:基于LiNbO3压电驱动器的PEM易于驱动控制,调制性能优于基于SiO2驱动器的PEM。     

Dynamic responses of a precision positioning table impacted by a soft-mounted piezoelectric actuator

The piezoelectric actuator, lead zirconate titanate (PZT) actuator, has been used for precision positioning from micrometer down to nanometer scale. In this paper, a soft-mounted PZT actuator is designed with a low-stiffness spring element to achieve a high-accuracy and large-displacement characteristic in precision positioning motion. The motion of the sliding table, the contact force between the hammer and the sliding table, and the stick-slip frictional force caused by the grinded groove are investigated. The governing equations of the distributed and lumped parameter systems are formulated to obtain the dynamic responses, which agree well with the experimental results.     

基于压电驱动的细胞微量注射装置的研究

提出了由压电驱动带动的注射微动平台和电机带动的细胞微载台来构成细胞药物微量注射的机械结构与控制系统。而且也提出了利用压电陶瓷的微位移特性构造了和目前的微量注射针完全不同的微量注射针结构与控制系统,这个压电微量注射针的驱动和注射动作全部由压电驱动器来完成;利用压电陶瓷的微位移和施加在压电陶瓷上的电压在微小位移情况下的线性关系实现了细胞注射系统的精确微定量注射。     

快速伺服刀架迟滞特性的Preisach建模

使用压电陶瓷作驱动元部件的快速伺服刀架是一种新的加工手段。本文介绍了基于Preisach模型的快速伺服刀架迟滞特性建模方法。作为快速伺服刀架的驱动元部件,压电陶瓷微位移器自身的迟滞、蠕变等非线性特性严重影响了快速伺服刀架的动态性能。为了精确建立快速伺服刀架的迟滞模型,给出了Preisach模型的数字表达方式,通过一系列实验测得的数据证明快速伺服刀架系统具有一致特性与擦除特性,满足Preisach模型的两个必要条件,最后在实验数据的基础上建立了基于Preisach模型的迟滞特性模型。实验表明,该迟滞模型可以很好地预测快速伺服刀架的迟滞位移曲线,其预测误差不超过0.65 μm。     

Experimental optimization of power-function-shaped drive pulse for stick-slip piezo actuators

Motion of a stick-slip piezo actuator is generally controlled by the parameters related to its mechanical design and characteristics of the driving pulses applied to piezoceramic shear plates. The goal of the proposed optimization method is to find the driving pulse parameters leading to the fastest and the most reliable actuator operation. In the paper the method is tested on a rotary stick-slip piezo actuating system utilized in an atomic force microscope.The optimization is based on the measurement of the actuator response to driving pulses of different shapes and repetition frequencies at various load forces. To provide it, a computer controlled testing system generating the driving pulses, and detecting and recording the corresponding angular motion response of the actuator by a position sensitive photo detector (PSPD) in real time has been developed. To better understand and interpret the experimental results, supportive methods based on a simple analytical model and numerical simulations were used as well.In this way the shapes of the single driving pulses and values of the load force providing the biggest actuator steps were determined. Generally, the maximal steps were achieved for such a combination of the pulse shapes and load forces providing high velocities at the end of the sticking mode of the actuator motion and, at the same time, lower decelerations during the slipping mode.As for the multiple driving pulses, the pulse shapes and values of repetition frequency ensuring the sticking mode of the actuator motion during the pulse rise time together with the maximum average angular rotor velocity were specified. In this way the effective and stable operation conditions of the actuator were provided.In principle, the presented method can be applied for the testing and optimization of any linear or angular stick-slip actuator.     

Resonator combined with a piezoelectric actuator for chemical analysis by force microscopy

A high frequency silicon resonator for dynamic scanning force microscopy is combined with an integrated piezoelectric actuation element for large displacements. A high resonance frequency is required for imaging on the nanometer scale, and a large displacement is needed for the chemical analysis of the material at the end of the probe. The small piezoelectric resonator is formed at the end of a long piezoelectric actuator using a silicon micromachining technology. The resonator can be oscillated at 96.4 kHz, and the actuator generates a maximum displacement of 15 microm at the end of the probe. The dynamic-mode scanning force microscopy capability, using the integrated piezoelectric resonator, is demonstrated on a 2 microm pitch Au grating.     

压电旋转驱动器制作及性能测试

提出了通过控制正压力来改变摩擦力的方案,进而研制了一种以压电叠堆为动力转换元件的新型压电旋转驱动器。采用两个驱动用压电叠堆对称布置的方式设计了该旋转驱动器结构,探讨了旋转驱动器运动机理,制作了压电旋转驱动器试验样机并对其进行了试验测试。试验结果表明,该驱动器输出步长线性度较好,当驱动电压为10 V、频率为2 Hz时,驱动器旋转步长为20 μrad。分析了驱动器输出稳定性,针对存在的问题提出通过施加控制系统来有效提高不同起始位置驱动器的运动稳定性。对试验结果进行误差分析,找出了产生误差的原因,为驱动器的进一步优化设计提供了参考。研究证明了该压电旋转驱动器设计方法的可行性,利用该方法可以制作出结构简单,体积小,适合在微驱动领域中应用的驱动器。     

杠杆式尺蠖压电直线驱动器

设计了一种基于尺蠖运动原理的压电直线驱动器,用于解决光学领域中的精密定位问题。该驱动器采用了对称杠杆式位移放大机构,在保证钳紧力的同时,可以获得较大的驱动位移。阐述了尺蠖式压电驱动器的工作原理,对杠杆式柔性放大机构的位移损失、压电陶瓷与柔性机构的耦合特性及箝位机构与中间驱动机构的刚度进行了分析。利用有限元软件Ansys对钳位机构和驱动机构的变形、应力、输出位移和固有频率等参数进行了仿真分析。最后,搭建了实验平台,测试了驱动器的各项性能。测试结果显示,该驱动器的行程为±25mm,钳紧力为17N,承载力为11N,最大和最小步距分别为55μm和60nm。当驱动电压为150V时,驱动器的最高驱动速度为1.259mm/s。得到的性能指标满足光学领域精密定位需要。     

尺蠖型压电驱动器的闭环控制研究

针对尺蠖型压电驱动器的输出特性,提出利用驱动电压与输出位移分段线性拟合曲线、逐步“搜索”驱动电压值,从而逼近目标位置的闭环控制方法,分析了控制方法的可行性。针对该方法,构建了闭环控制试验系统,对该方法进行了验证,试验结果表明：采用该方法可以实现对尺蠖型压电驱动器的闭环精确控制,相比于开环工作而言定位精度提高了14.4%,该方法具有控制精度较高、响应迅速等优点。     

用于光阑的旋转型驻波压电作动器

为了驱动光阑实现对光束的控制和调节,提出一种新型的旋转型驻波压电作动器。现有压电作动器中,性能稳定的多为单一振子复合模态工作方式,要求各工作模态频率差小,除了对加工精度要求高之外,由于工作磨损对各模态频率影响不同,工作模态的频率差增大,使作动器的性能和效率下降。针对这一问题和光阑的工作特点,研制了一种新型的旋转型压电作动器。该作动器利用两个相同结构杆形压电振子的同形模态,经摩擦驱动光阑活动环转动,达到调节光阑孔径的目的。原理样机实验表明:当预压力为8N时,在驱动电压为200V_(p-p)～400V_(p-p)范围内,作动器的旋转速度与电压成正比,最大的逆时针旋转速度为75.36rad/min,最大的顺时针运动速度为62.8rad/min;在驱动电压为400V_(p-p)下分辨率可以达到0.34mrad。该压电作动器满足了光阑光束控制的要求,具有结构简单、响应快速、调速平稳和精度高等优点。     

A novel driving principle by means of the parasitic motion of the microgripper and its preliminary application in the design of the linear actuator

This paper presents a novel driving principle by means of the parasitic motion of the microgripper. Actuators based on this principle can realize the large displacement range and high speed easily. Also the structure can be simple. A parasitic motion principle linear actuator mainly consisting of two piezoelectric stacks, two microgrippers and a mover was designed. Experimental results indicate that at a low driving frequency of 5 Hz, large velocity over 40 μm/s is obtained with the driving voltage of 100 V. Backward motion was observed and analyzed. Experimental results verify the feasibility of the new principle and it can be used to design new linear or rotary actuators.     

基于膜式液压放大的压电驱动器设计与试验

为解决叠堆式压电陶瓷输出位移微小的问题,结合液压放大的优点,提出了一种基于膜式液压放大的压电驱动器,并对关键部件--橡胶膜片进行有限元静力学、模态等分析。分析结果表明：橡胶膜片具有足够的安全强度和良好的工作频宽。在此基础上,研制其实物样机,搭建其测控平台,并进行了试验研究。开环试验结果表明：在0～100V电压控制下,所研制的压电驱动器输出位移范围为0～0.24mm,放大比约为5;闭环控制试验结果表明：采用分段PID的驱动器控制效果优于采用常规PID的控制效果,稳态误差约为±0.5μm。     

具有偏置结构的非对称惯性压电旋转驱动器

为改善惯性压电驱动器输出性能,提出了一种新型具有偏置结构的非对称惯性压电旋转驱动器。在非对称夹持的基础上,定义了一种偏置结构。为了解偏置结构对驱动器输出性能的影响,建立了机构的力学模型方程,推导并仿真分析了驱动器的动力学特性。设计、制作了试验样机,搭建了试验系统;进行了试验测试并与无偏置结构驱动器进行了性能对比。结果表明:偏置距离为15mm时,驱动器输出步距角速度最大。与无偏置结构驱动器相比,驱动电压为100V、23Hz时,驱动器输出最大角速度从3.48rad/s增加至5.39rad/s,增幅达54.88%,驱动器最大驱动力矩从2.41N·mm增加至3.62N·mm,增幅达50.2%;驱动电压为100V,4Hz时,驱动器稳定运行时的承载量达1 300g。理论与试验结果表明,提出的有偏置结构的驱动器具有输出步距角速度和驱动力矩更大的特点。     

基于非对称夹持的压电旋转驱动器设计

设计了一种新型非对称夹持压电旋转驱动器。通过对称性电信号激励粘贴在基板上的压电晶片,使基板自由端带动质量块非对称地往复摆动,进而产生非对称的惯性驱动力,实现压电旋转驱动器的定向运动。研制了非对称压电惯性旋转驱动器样机,搭建了驱动器的测试系统,对驱动器步长、摩擦力矩、载荷特性等进行了测试。结果表明,驱动器在电压为15V、频率为10Hz、夹持差为3mm时,步长分辨率为1.82μrad,摩擦力矩为2.475N·mm条件下的最大输出载荷为0.122N。     

菱形压电微位移放大机构的设计

为提高叠层压电陶瓷作动行程,并使之具有往复对称作动的特性,提出一种基于三角放大原理的菱形压电微位移放大机构。该机构以叠层压电陶瓷作为驱动元件,利用三角位移放大原理,在放大叠层压电陶瓷位移输出的同时,实现在平衡位置两侧的双向主动输出。提出了相应的驱动方法,实现了对该机构输出方向和大小的控制。分析了机构的工作原理,通过解析计算得到该机构的理论放大倍数为2.9,与所建立有限元模型通过仿真计算得到放大倍数2.5相近。制作了试验样机并进行了试验验证,结果显示:该机构在驱动电压为200V时最大输出位移为(32±16)μm,对叠层压电陶瓷位移输出的放大比例为2.4倍,与理论计算相近;频率响应试验表明信号频率对位移输出影响较小。提出的设计方案实现了位移放大和位移双向主动输出这两个预期目标。     

Design of Floating Mass Type Piezoelectric Actuator for Implantable Middle Ear Hearing Devices

To overcome some of the problems inherent in conventional hearing aids such as low gain at high frequencies due to acoustic feedback, discomfort in occlusion of the external ear canal and so on, implantable middle ear hearing devices (IMEHDs) have been developed over the past two decades. For such kinds of IMEHDS, this paper presents the design of a floating mass piezoelectric actuator using a PMN-30%PT stack as a new type of vibrator. The proposed piezoelectric actuator consists of only three components of a piezoelectric stack, a metal case and a clamp. For the purpose of aiding the design of this actuator, a coupling biomechanics model of human middle ear and the piezoelectric actuator was constructed. This model was built based on a complete set of computerized tomography section images of a healthy volunteer's left ear by reverse engineering technology. The validity of this model was confirmed by comparing the motion of the tympanic membrane and stapes footplate obtained by this model with published experimental measurements on human temporal bones. It is shown that the designed actuator can be implanted on the incus long process by a simple surgical operation, and the stapes footplate displacement by its excitation at 10.5 V root-mean-square(RMS) voltage was equivalent to that from acoustic stimulation at 100 dB sound pressure level(SPL), which is adequate stimulation to the nssicular chain. The corresponding power consumption is 0.04 mW per volt of excitation at 1 kHz, which is low enough for the transducer to be used in an implantable middle ear device.     

Vibration Control of a Composite Beam Using Self-sensing Semi-active Approach

Structural vibration control was an active research area for the past twenty years because of their potential applications in aerospace structures,civil structures,naval structures,etc.Semi-active vibration control methods based on piezoelectric actuators and synchronized switch damping on inductance(SSDI) techniques attract the attention of many researchers recently due to their advantages over passive and active methods.In the SSDI method,a switch shunt circuit is connected to the piezoelectric patch to shift the phase and amplify the magnitude of the voltage on the piezoelectric patch.The most important issue in SSDI method is to control the switching actions synchronously with the maximum vibration displacement or maximum strain.Hence,usually a displacement sensor is used to measure the vibration displacement or a collocated piezoelectric sensor is needed to measure the strain of the structure near the piezoelectric actuator.A self-sensing SSDI approach is proposed and applied to the vibration control of a composite beam,which avoids using a separate sensor.In the self-sensing technique,the same piezoelectric element functions as both a sensor and an actuator so that the total number of required piezoelectric elements can be reduced.One problem in the self-sensing actuator,which is the same as that in the traditional collocated piezoelectric sensors,is the noise generated in the sensor signal by the impact of voltage inversion,which may cause extra switching actions and deteriorate control performance.In order to prevent the shunt circuit from over-frequent on-and-off actions,a simple switch control algorithm is proposed.The results of control experiments show that the self-sensing SSDI approach combined with the improved switch control algorithm can effectively suppress over-frequent switching actions and gives good control performance by reducing the vibration amplitude by 45%,about 50% improvement from the traditional SSDI with a separate piezoelectric element and a classical switch.